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公开(公告)号：US08748076B2
公开(公告)日：2014-06-10
申请号：US13345355
申请日：2012-01-06
CPC分类号： G03F7/0045 , G03F7/0046 , G03F7/0397 , G03F7/2041
摘要： There is disclosed a resist composition comprising at least: (A) a polymer containing one or more repeating units having a structure shown by the following general formula (1) and/or (2), an alkaline-solubility of the polymer being increased by an acid, (B) a photo acid generator generating, with responding to a high energy beam, a sulfonic acid shown by the following general formula (3), and (C) an onium sulfonate shown by the following general formula (4). There can be a resist composition showing not only excellent LWR and pattern profile but also extremely good performance in pattern-fall resistance, and to provide a patterning process using the same.
摘要翻译： 公开了一种抗蚀剂组合物，其至少包含：（A）含有一个或多个具有下列通式（1）和/或（2）所示结构的重复单元的聚合物，该聚合物的碱溶性通过 一种酸，（B）一种光酸反应器，其响应于高能束，产生由以下通式（3）表示的磺酸，和（C）由以下通式（4）表示的磺酸盐。 可以存在不仅具有优异的LWR和图案轮廓的抗蚀剂组合物，而且还具有极好的抗倒伏性能，并且提供使用其的图案化工艺。
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公开(公告)号：US20120135357A1
公开(公告)日：2012-05-31
申请号：US13303283
申请日：2011-11-23
申请人： Tomohiro KOBAYASHI , Takayuki Nagasawa , Ryosuke Taniguchi , Youichi Ohsawa , Kenji Funatsu , Seiichiro Tachibana
发明人： Tomohiro KOBAYASHI , Takayuki Nagasawa , Ryosuke Taniguchi , Youichi Ohsawa , Kenji Funatsu , Seiichiro Tachibana
IPC分类号： G03F7/20 , C08F214/18
CPC分类号： G03F7/2041 , C08K5/375 , C08K5/42 , C08L41/00 , G03F7/0045 , G03F7/0046 , G03F7/0397
摘要： A positive resist composition comprising a polymer comprising recurring units of a specific structure adapted to generate an acid upon exposure to high-energy radiation, recurring units of a lactone ring-containing structure, and acid labile units, all the recurring units being free of hydroxyl, can form a fine size pattern having a rectangular profile and improved collapse resistance.
摘要翻译： 一种正性抗蚀剂组合物，其包含聚合物，其包含适于在暴露于高能量辐射时产生酸的特定结构的重复单元，含内酯环结构的重复单元和酸不稳定单元，所有重复单元不含羟基 可以形成具有矩形轮廓和改进的抗倒塌性的精细尺寸图案。
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3.发明授权Acoustic wave transmission system and method for transmitting an acoustic wave to a drilling metal tubular member 失效用于将声波传输到钻井金属管状构件的声波传输系统和方法公开(公告)号：US06272916B1
公开(公告)日：2001-08-14
申请号：US09415258
申请日：1999-10-12
IPC分类号： H04H900
CPC分类号： E21B47/16
摘要： An acoustic wave transmission system comprises an acoustic wave generating metal tubular member for converting information about the bottom of a borehole, which is obtained by a bottom hole sensor, into an acoustic wave. The acoustic wave generating metal tubular member includes a acoustic wave generating mechanism having at least a magnetostrictive oscillator which is mounted in a recess formed in an outer wall of the acoustic wave generating metal tubular member, and on which a compressive load is imposed by means of a pre-load mechanism using a vise. The magnetostrictive oscillator is constructed of a stack of thin plates each made of a metal magnetostrictive material having a property of increasing its dimensions when magnetized, the thin plates being bonded together by a heat-resistant adhesive. The magnetostrictive oscillator can thus have a buckling strength large enough to resist the compressive load imposed thereon by the pre-load mechanism and a stress due to a strain caused in itself. The acoustic wave generating metal tubular member further includes an excitation current supplier for supplying either a rectangular, sinusoidal, or triangular alternating excitation current modulated with the information about the bottom of the borehole and having a frequency that is half the carrier frequency of the acoustic wave, or a series of excitation pulses modulated with the information about the bottom of the borehole and having a pulse repetition rate that is equal to the carrier frequency of the acoustic wave, to an excitation winding wound around the magnetostrictive oscillator.
摘要翻译： 声波传输系统包括声波产生金属管状构件，用于将由井底传感器获得的钻孔底部的信息转换成声波。 声波产生金属管状构件包括具有至少一个磁致伸缩振荡器的声波产生机构，该磁致伸缩振荡器安装在形成在声波产生金属管状构件的外壁上的凹部中，并且借助于 使用虎钳的预加载机构。 磁致伸缩振荡器由薄板堆叠构成，每个薄板由金属磁致伸缩材料制成，具有在磁化时其尺寸增加的特性，薄板通过耐热粘合剂粘合在一起。 因此，磁致伸缩振荡器可以具有足够大的屈曲强度，以抵抗由预加载机构施加在其上的压缩载荷和由于其本身引起的应变引起的应力。 声波产生金属管状构件还包括激励电流供应器，用于提供被调制的关于钻孔底部的信息的矩形，正弦或三角交变激励电流，并且具有作为声波的载波频率的一半的频率 或者一系列激励脉冲调制到围绕磁致伸缩振荡器缠绕的激励绕组的关于钻孔底部的信息并且具有等于声波的载波频率的脉冲重复率的激励脉冲。
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公开(公告)号：US06202490B1
公开(公告)日：2001-03-20
申请号：US09562037
申请日：2000-05-01
IPC分类号： G01N2900
CPC分类号： G01B17/02 , G01B17/00 , G01N29/2412 , G01N29/40 , G01N29/42 , G01N29/46 , G01N2291/014 , G01N2291/02827 , G01N2291/02854 , G01N2291/0421 , G01N2291/102
摘要： A nondestructive testing apparatus is provided with a wave transmitter by a metal-based magnetostrictive vibrator, a magnetically excited current feeding device for feeding the magnetically excited current to the magnetostrictive vibrator, a wave receiver for detecting an acoustic elastic wave propagating through the measurement object, a filter for extracting a signal in a target frequency band to be measured, and an automatically amplifying rate controlling function-equipped amplifier for automatically controlling the amplifying rate so as to obtain a given magnitude amplitude regardless of the magnitude of the reflection wave or the transmission wave detected by the wave receiver, which constitute a feedback loop. The apparatus is further provided with a signal processor for processing the signal detected by the above-described wave receiver, and a display device for displaying the process result obtained by the signal waveform detected by the above-described wave receiver or the above-described signal processor.
摘要翻译： 非破坏性试验装置具有通过金属基磁致伸缩振动器的波发射器，用于将磁激励电流馈送到磁致伸缩振动器的磁激励电流馈送装置，用于检测通过测量对象传播的声弹性波的波接收器， 用于提取要测量的目标频带中的信号的滤波器以及用于自动控制放大率的自动放大率控制功能的放大器，以便获得给定幅度幅度，而不管反射波或传输的幅度如何 由波形接收器检测到的波形，构成反馈回路。 该装置还设置有用于处理由上述波接收器检测的信号的信号处理器，以及显示装置，用于显示由上述波形接收器检测到的信号波形获得的处理结果或上述信号 处理器。
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公开(公告)号：US07167579B2
公开(公告)日：2007-01-23
申请号：US10232180
申请日：2002-08-30
申请人： Ryosuke Taniguchi
发明人： Ryosuke Taniguchi
CPC分类号： G01N33/085 , A01K43/04 , A01K43/06 , A01K45/00 , A01K45/007
摘要： An accuracy of the sex determination which is visually inspected by human based on a reference drawing of an egg shape prepared for every parent chicken is insufficient and it takes much time to perform such a determination. Thus, the sex of the fertilized egg is determined by using parameters representing features developed on a surface shape of the above described fertilized egg which are quantified based on contour image data of the above described fertilized egg obtained by taking an image of the fertilized egg which is placed on a setting stand.
摘要翻译： 基于为每只母鸡准备的蛋形的参考图，人的视觉检查的性别确定的准确性是不足够的，并且执行这样的确定需要很多时间。 因此，受精卵的性别通过使用表示在上述受精卵的表面形状上发育的特征的参数来确定，该参数是基于通过拍摄受精卵的图像而获得的上述受精卵的轮廓图像数据进行定量的 被放置在设置台上。
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公开(公告)号：US06804875B2
公开(公告)日：2004-10-19
申请号：US10411278
申请日：2003-04-11
IPC分类号： H02K1500
CPC分类号： G01V1/04 , B06B1/08 , G10K11/004 , Y10T29/49009 , Y10T29/4902 , Y10T29/49078 , Y10T29/4908
摘要： An elastic wave generator includes an excitation coil, a magnetostriction oscillator around which the excitation coil is wound and an oscillator support. The excitation coil is wound around the oscillator, which is made of laminated magnetostriction sheets having a positive strain characteristic, in which length varies directionally upon magnetic excitation. The oscillator support has a first support surface bearing against a first end surface of the magnetostriction oscillator, intersecting the direction along which the length of the magnetostriction oscillator changes and a second support surface shrink-fit against a second end surface of the magnetostriction oscillator, intersecting the direction along which the length of the magnetostriction oscillator changes. Thus, the changes in the length of the magnetostriction oscillator due to the magnetic excitation of the excitation coil appearing at the first and second end surfaces is directly supported by the first and second support surfaces. The magnetostriction oscillator is shrink-fit by cooling so it may be placed between the support surfaces while cooled.
摘要翻译： 弹性波发生器包括励磁线圈，缠绕有励磁线圈的磁致伸缩振荡器和振荡器支撑。 励磁线圈缠绕在振荡器周围，振荡器由具有正应变特性的层叠磁致伸缩片制成，其中长度在磁激发时定向变化。 振荡器支撑件具有抵靠磁致伸缩振荡器的第一端面的第一支撑表面，与磁致伸缩振荡器的长度变化的方向相交，第二支撑表面与磁致伸缩振荡器的第二端面收缩配合， 磁致伸缩振荡器的长度沿着其方向改变。 因此，出现在第一和第二端面处的励磁线圈的磁激励引起的磁致伸缩振荡器长度的变化由第一和第二支撑表面直接支撑。 磁致伸缩振荡器通过冷却进行收缩配合，从而可以将其放置在支撑表面之间同时冷却。
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公开(公告)号：US5675325A
公开(公告)日：1997-10-07
申请号：US546128
申请日：1995-10-20
摘要： An information transmitting apparatus using a tube includes a magnetostrictive vibrator to generate a first elastic wave depending upon underground information, a resonance tube body resonating with the elastic wave to generate a second elastic wave having a natural frequency, and a drill string to propagate the second elastic wave, thereby permitting a long transmission distance.
摘要翻译： 使用管的信息发送装置包括：磁致伸缩振动器，其根据地下信息产生第一弹性波，共振管体与弹性波共振，产生具有固有频率的第二弹性波;以及钻柱，以使第二弹性波传播 弹性波，从而允许长的传输距离。
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公开(公告)号：US08703384B2
公开(公告)日：2014-04-22
申请号：US13303302
申请日：2011-11-23
申请人： Tomohiro Kobayashi , Eiji Fukuda , Takayuki Nagasawa , Ryosuke Taniguchi , Youichi Ohsawa , Masayoshi Sagehashi , Yoshio Kawai
发明人： Tomohiro Kobayashi , Eiji Fukuda , Takayuki Nagasawa , Ryosuke Taniguchi , Youichi Ohsawa , Masayoshi Sagehashi , Yoshio Kawai
CPC分类号： G03F7/0045 , G03F7/0046 , G03F7/0397 , G03F7/11 , G03F7/2041
摘要： A positive resist composition comprising (A) a polymer comprising recurring units of a specific structure adapted to generate an acid in response to high-energy radiation and acid labile units, the polymer having an alkali solubility that increases under the action of an acid, and (B) a sulfonium salt of a specific structure exhibits a high resolution in forming fine size patterns, typically trench patterns and hole patterns. Lithographic properties of profile, DOF and roughness are improved.
摘要翻译： 一种正型抗蚀剂组合物，其包含（A）包含特定结构的重复单元的聚合物，所述重复单元适于响应于高能量辐射和酸不稳定单元产生酸，所述聚合物具有在酸的作用下增加的碱溶解度，以及 （B）特定结构的锍盐在形成精细尺寸图案（通常是沟槽图案和孔图案）中表现出高分辨率。 轮廓，DOF和粗糙度的光刻性能得到改善。
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公开(公告)号：US20120225386A1
公开(公告)日：2012-09-06
申请号：US13406684
申请日：2012-02-28
申请人： Takeru Watanabe , Tomohiro Kobayashi , Masayoshi Sagehashi , Takeshi Nagata , Youichi Ohsawa , Ryosuke Taniguchi
发明人： Takeru Watanabe , Tomohiro Kobayashi , Masayoshi Sagehashi , Takeshi Nagata , Youichi Ohsawa , Ryosuke Taniguchi
CPC分类号： G03F7/2041 , G03F7/0045 , G03F7/0046 , G03F7/0397 , G03F7/11
摘要： A chemically amplified resist composition is provided comprising (A) a specific tertiary amine compound, (B) a specific acid generator, (C) a base resin having an acidic functional group protected with an acid labile group, which is substantially insoluble in alkaline developer and turns soluble in alkaline developer upon deprotection of the acid labile group, and (D) an organic solvent. The resist composition has a high resolution, improved defect control in the immersion lithography, and good shelf stability.
摘要翻译： 提供一种化学放大抗蚀剂组合物，其包含（A）特定的叔胺化合物，（B）特定的酸发生剂，（C）具有由酸不稳定基团保护的酸性官能团的基础树脂，其基本上不溶于碱性显影剂 并且在酸不稳定基团脱保护时变为可溶于碱性显影剂，和（D）有机溶剂。 抗蚀剂组合物具有高分辨率，改善浸渍光刻中的缺陷控制，以及良好的储存稳定性。
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公开(公告)号：US08795942B2
公开(公告)日：2014-08-05
申请号：US12000284
申请日：2007-12-11
CPC分类号： G03F7/0397 , G03F7/0045
摘要： There is disclosed a resist composition that remarkably improves the resolution of photolithography using a high energy beam such as ArF excimer laser light as a light source, and exhibits excellent resistance to surface roughness and side lobe under use of a halftone phase shift mask; and a patterning process using the resist composition. The positive resist composition at least comprises (A) a resin component comprising a repeating unit represented by the following general formula (1); (B) a photoacid generator generating sulfonic acid represented by the following general formula (2) upon exposure to a high energy beam; and (C) an onium salt where a cation is sulfonium represented by the following general formula (3), or ammonium represented by the following general formula (4); and an anion is represented by any one of the following general formulae (5) to (7).
摘要翻译： 公开了一种抗蚀剂组合物，其使用诸如ArF准分子激光器的高能束作为光源显着地提高了光刻的分辨率，并且在使用半色调相移掩模的情况下表现出优异的抗表面粗糙度和侧凸的性能; 以及使用抗蚀剂组合物的图案化工艺。 正型抗蚀剂组合物至少包含（A）包含由以下通式（1）表示的重复单元的树脂组分; （B）在暴露于高能量束时产生由以下通式（2）表示的磺酸的光酸产生剂; 和（C）鎓盐，其中阳离子是由以下通式（3）表示的锍或由以下通式（4）表示的铵; 并且阴离子由以下通式（5）至（7）中的任一个表示。
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