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    Measuring method and apparatus of thin film thickness
    1.
    发明申请
    Measuring method and apparatus of thin film thickness 审中-公开
    薄膜厚度的测量方法和装置

    公开(公告)号：US20050073323A1

    公开(公告)日：2005-04-07

    申请号：US10902132

    申请日：2004-07-30

    申请人： Ryuji Kohno ,  Tatsuya Nagata ,  Naoki Watase ,  Michihiro Watanabe

    发明人： Ryuji Kohno ,  Tatsuya Nagata ,  Naoki Watase ,  Michihiro Watanabe

    IPC分类号： G01B7/06 ,  G01R27/26 ,  H01L21/66

    CPC分类号： G01R27/2605

    摘要： In an apparatus for measuring thickness of a thin film, which is formed through a conductor, preventing the measurement from an error due to the curve or bend on a substrate surface or a moving surface of a stage, but without necessity of a large-scaled facility, an electric filed is applied between a probe 10 and a stage 8, so as to obtain an electrostatic capacitance of the substrate 3, an electrostatic capacitance of an insulating film, which is formed between the substrate 3, and an electrostatic capacitance defined starting from the substrate 3 to the thin film 4. The electrostatic capacitance between the substrate 3 and the thin film 4 is measured at plural numbers of places covering over the entire surface of the thin film 4. The probe 10 is so supported that the contact load “P” comes to be constant, by the probe 10 onto the thin film 4. A contact area of the probe 10 between the thin film 4 is calculated out through a predetermined equation, assuming the load “P” is constant. From respective electrostatic capacitances and the contact area measured, a distribution of thickness of the thin film 4 over the entire area thereof.

    摘要翻译： 在用于测量通过导体形成的薄膜厚度的装置中，防止测量由于基板表面或台的移动表面上的曲线或弯曲引起的误差，而不需要大尺寸 在探针10和载物台8之间施加电场，以获得基板3的静电电容，形成在基板3之间的绝缘膜的静电电容与开始定义的静电电容 从基板3到薄膜4.在覆盖在薄膜4的整个表面上的多个位置处测量基板3和薄膜4之间的静电电容。探针10被支撑为接触负载 假定负载“P”是恒定的，则通过探针10将薄膜4固定在薄膜4上的探针10的接触区域。 从相应的静电电容和测量的接触面积，薄膜4的整个面积的厚度分布。

    Probe structure
    2.
    发明授权
    Probe structure 失效
    探头结构

    公开(公告)号：US06977514B2

    公开(公告)日：2005-12-20

    申请号：US10625566

    申请日：2003-07-24

    申请人： Ryuji Kohno ,  Tatsuya Nagata ,  Hiroya Shimizu ,  Toshio Miyatake ,  Hideo Miura

    发明人： Ryuji Kohno ,  Tatsuya Nagata ,  Hiroya Shimizu ,  Toshio Miyatake ,  Hideo Miura

    IPC分类号： G01R1/073 ,  H01L21/66 ,  G01R31/28

    CPC分类号： G01R1/07378

    摘要： A probe structure is provided in which secondary electrodes of a main base material and probes are formed can be electrically connected to electrodes in a substrate side even when a lot of probes are formed in a large area, so that a lot of LSIs within a wafer can be tested in one lot in a wafer test process, and an efficiency of the test process can be improved. In the probe structure, an interposer constituted by a high rigid material is arranged between the main base material having the probes formed therein and the substrate side, and the secondary electrodes of the main base material having the probes formed therein are electrically connected to the electrodes in the substrate side via the interposer.

    摘要翻译： 提供了一种探针结构，其中形成主基材和探针的二次电极可以在基板侧电连接到基板侧的电极，即使在大面积上形成大量的探针，使得晶片内的大量LSI 可以在晶片测试过程中一次性测试，并且可以提高测试过程的效率。 在探针结构中，由具有高刚性材料的插入体配置在其中形成有探针的主基材和基板侧之间，并且其中形成有探针的主基材的二次电极电连接到电极 在基板侧经由插入件。

    Fuel cell having mechanism for pressurizing membrane electrode assembly and electronic device equipped with the same
    3.
    发明申请
    Fuel cell having mechanism for pressurizing membrane electrode assembly and electronic device equipped with the same 审中-公开
    具有用于加压膜电极组件的机构的燃料电池和配备有该电极组件的电子装置

    公开(公告)号：US20060003219A1

    公开(公告)日：2006-01-05

    申请号：US11169775

    申请日：2005-06-30

    申请人： Ryuji Kohno ,  Tatsuya Nagata ,  Makoto Kitano

    发明人： Ryuji Kohno ,  Tatsuya Nagata ,  Makoto Kitano

    IPC分类号： H01M2/08 ,  H01M8/10 ,  H01M8/02

    CPC分类号： H01M8/04208 ,  H01M8/0247 ,  H01M8/04186 ,  H01M8/248

    摘要： It is an object of the present invention to provide a fuel cell having a pressurizing mechanism which can optimize pressure applied to a membrane electrode assembly (MEA) working as a power-generating element to realize high-efficiency power generation and an electronic device equipped with the same. The fuel cell 10A comprises the membrane electrode assembly module 20 which consumes the liquid fuel 40 to generate power, and the fuel chamber 30 for supplying the liquid fuel 40 which it holds inside to the membrane electrode assembly module 20 from the aperture 31, wherein it is provided with the pressurizing member 60 on the membrane electrode assembly module 20, clamping member 53 for fixing the pressurizing member 60 and fuel chamber 30, and elastic member for applying a pressure on the membrane electrode assembly module 20 in its thickness direction, to solve the problems.

    摘要翻译： 本发明的目的是提供一种具有加压机构的燃料电池，该加压机构能够优化施加于作为发电元件的膜电极组件（MEA）的压力，以实现高效发电，以及配备有 一样。 燃料电池10A包括消耗液体燃料40以产生动力的膜电极组件模块20，以及用于从孔31向液体燃料40供给到膜电极组件模块20内的液体燃料40的燃料室30，其中 在膜电极组件模块20上设置有加压构件60，用于固定加压构件60和燃料室30的夹紧构件53以及在膜电极组件模块20的厚度方向上施加压力的弹性构件， 解决问题。

    Fuel cell and electronic device equipped with the same
    4.
    发明申请
    Fuel cell and electronic device equipped with the same 审中-公开
    燃料电池和电子设备配备相同

    公开(公告)号：US20060003196A1

    公开(公告)日：2006-01-05

    申请号：US11171218

    申请日：2005-07-01

    申请人： Ryuji Kohno ,  Tatsuya Nagata ,  Makoto Kitano

    发明人： Ryuji Kohno ,  Tatsuya Nagata ,  Makoto Kitano

    IPC分类号： H01M8/00

    CPC分类号： H01M8/04201 ,  H01M8/04186 ,  H01M8/04208 ,  H01M8/1011 ,  Y02E60/523

    摘要： It is an object of the present invention to provide a fuel cell which can supply a liquid fuel, without changing its composition, to every corner of the membrane electrode assemblies arranged two- dimensionally over a wide area, to generate power at a high efficiency. The fuel cell 10A comprises the membrane electrode assembly modules 20 which consume the liquid fuel 40 to generate power, and the fuel chamber 30 which holds the liquid fuel 40 inside and has the principal plane on which the membrane electrode assembly modules 20 are arranged, wherein the fuel chamber 30 is provided with the fuel injection hole 33 inside, through which the liquid fuel 40 is supplied under pressure from the outside, and the fuel supply gear 42 inside, which is located to come close to the membrane electrode assembly modules 20, the fuel supply gear 42 being provided, on the surface, with the fine pores 43 through which the liquid fuel 40 can pass.

    摘要翻译： 本发明的一个目的是提供一种燃料电池，其可以在不改变其组成的情况下将液体燃料供应到在广泛区域上二维布置的膜电极组件的每个角部，以高效率发电。 燃料电池10A包括消耗液体燃料40以产生动力的膜电极组件模块20和将液体燃料40保持在内部并且具有其上布置有膜电极组件模块20的主平面的燃料室30， 其中燃料室30内设有燃料喷射孔33，液体燃料40通过该燃料喷射孔33从外部受到压力供给，燃料供给齿轮42位于靠近膜电极组件模块20的位置 燃料供给齿轮42在表面上设置有液体燃料40可以通过的细孔43。

    Probe structure
    6.
    发明授权
    Probe structure 失效
    探头结构

    公开(公告)号：US06614246B1

    公开(公告)日：2003-09-02

    申请号：US09648452

    申请日：2000-08-28

    申请人： Ryuji Kohno ,  Tatsuya Nagata ,  Hiroya Shimizu ,  Toshio Miyatake ,  Hideo Miura

    发明人： Ryuji Kohno ,  Tatsuya Nagata ,  Hiroya Shimizu ,  Toshio Miyatake ,  Hideo Miura

    IPC分类号： G01R1073

    CPC分类号： G01R1/07378

    摘要： The invention provides a probe structure in which secondary electrodes of a main base material in which probes are formed can be electrically connected to electrodes in a substrate side even when a lot of probes are formed in a large area, so that a lot of LSIs within a wafer can be tested in one lot in a wafer test process, whereby an efficiency of the test process can be improved. In the probe structure, an interposer constituted by a high rigid material is arranged between the main base material having the probes formed therein and the substrate side, and the secondary electrodes of the main base material having the probes formed therein are electrically connected to the electrodes in the substrate side via the interposer.

    摘要翻译： 本发明提供了一种探针结构，其中形成探针的主要基底材料的二次电极即使在大面积形成大量探针的情况下也可以与衬底侧的电极电连接，从而使大量的LSIs 可以在晶片测试过程中一次性地测试晶片，从而可以提高测试过程的效率。 在探针结构中，由具有高刚性材料的插入体配置在其中形成有探针的主基材和基板侧之间，并且其中形成有探针的主基材的二次电极电连接到电极 在基板侧经由插入件。

    Method for producing semiconductor device and apparatus usable therein
    7.
    发明授权
    Method for producing semiconductor device and apparatus usable therein 失效
    用于制造半导体器件的方法和可用于其中的装置

    公开(公告)号：US06465264B1

    公开(公告)日：2002-10-15

    申请号：US09654612

    申请日：2000-09-01

    申请人： Ryuji Kohno ,  Hiroya Shimizu ,  Masatoshi Kanamaru ,  Atsushi Hosogane ,  Toshio Miyatake ,  Hideo Miura ,  Tatsuya Nagata ,  Yoshishige Endo ,  Masaaki Namba ,  Yuji Wada

    发明人： Ryuji Kohno ,  Hiroya Shimizu ,  Masatoshi Kanamaru ,  Atsushi Hosogane ,  Toshio Miyatake ,  Hideo Miura ,  Tatsuya Nagata ,  Yoshishige Endo ,  Masaaki Namba ,  Yuji Wada

    IPC分类号： G01R3126

    CPC分类号： G01R1/0483 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A packaging device for holding thereon a plurality of semiconductor devices to be inspected on an inspection device including a probe to be electrically connected to an electrode of each of the semiconductor devices, comprises, holes for respectively receiving detachably therein the semiconductor devices to keep a positional relationship among the semiconductor devices and a positional relationship between the packaging device and each of the semiconductor devices constant with a spacing between the semiconductor devices, in a direction perpendicular to a thickness direction of the semiconductor devices, and electrically conductive members adapted to be connected respectively to the electrodes of the semiconductor devices, and extending to an exterior of the packaging device so that the probe is connected to each of the electrically conductive members.

    摘要翻译： 一种用于在其上保持要检查的多个待检查的半导体器件的封装装置，包括：电连接到每个半导体器件的电极的探针，包括：用于分别接收半导体器件中的可分离地接收的孔，以保持位置 半导体器件之间的关系以及在与半导体器件的厚度方向垂直的方向上半导体器件之间的间隔恒定的封装器件和每个半导体器件之间的位置关系以及适于分别连接的导电部件 并且延伸到包装装置的外部，使得探针连接到每个导电构件。

    Semiconductor testing equipment with probe formed on a cantilever of a substrate
    10.
    发明授权
    Semiconductor testing equipment with probe formed on a cantilever of a substrate 失效
    具有探针的半导体测试设备形成在基板的悬臂上

    公开(公告)号：US06507204B1

    公开(公告)日：2003-01-14

    申请号：US09522477

    申请日：2000-03-09

    申请人： Masatoshi Kanamaru ,  Yoshishige Endo ,  Atsushi Hosogane ,  Tatsuya Nagata ,  Ryuji Kohno ,  Hideyuki Aoki ,  Akihiko Ariga

    发明人： Masatoshi Kanamaru ,  Yoshishige Endo ,  Atsushi Hosogane ,  Tatsuya Nagata ,  Ryuji Kohno ,  Hideyuki Aoki ,  Akihiko Ariga

    IPC分类号： G01R3102

    CPC分类号： G01R1/06733 ,  G01R1/06727 ,  G01R1/06738 ,  G01R1/06761 ,  G01R1/06772 ,  G01R1/07342 ,  G01R3/00

    摘要： The conventional semiconductor element testing equipment is arranged to position each probe accurately and need a burdensome operation for fixing, and includes only a limited number of electrode pads and chips to be tested at a batch. An equipment for testing a semiconductor element is arranged to keep each of electrode pads formed on a semiconductor element to be tested in direct contact with each of probes formed on a first substrate composed of silicon, one of electric connecting substrates disposed in the equipment. On the first substrate, each probe is formed on a cantilever and a wire is routed from a tip of each probe along a tip of the cantilever to the electrode pad formed on an opposite surface to the probe forming surface through an insulating layer.

    摘要翻译： 常规的半导体元件测试设备被布置成准确地定位每个探针，并且需要用于固定的繁重的操作，并且仅包括有限数量的待批测试的电极焊盘和芯片。 布置了用于测试半导体元件的设备，以使每个形成在要测试的半导体元件上的电极焊盘与形成在由设置在设备中的电连接基板之一的硅构成的第一基板上形成的每个探针直接接触。 在第一基板上，每个探针形成在悬臂上，并且从每个探针的尖端沿着悬臂的尖端布线到通过绝缘层与探针形成表面相对的表面上形成的电极焊盘。