公开(公告)号：US20180030617A1

公开(公告)日：2018-02-01

申请号：US15641746

申请日：2017-07-05

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sam-mook KANG ,  Jun-youn KIM ,  Young-jo TAK ,  Mi-hyun KIM ,  Young-soo PARK

IPC: C30B25/16 ,  C23C16/52 ,  C23C14/54 ,  C23C14/06 ,  C23C16/30 ,  C30B29/40 ,  C30B25/18 ,  C23C14/22

CPC classification number: C30B25/165 ,  C23C14/0617 ,  C23C14/221 ,  C23C14/54 ,  C23C16/01 ,  C23C16/0272 ,  C23C16/303 ,  C23C16/455 ,  C23C16/4585 ,  C23C16/52 ,  C30B25/12 ,  C30B25/14 ,  C30B25/183 ,  C30B29/406 ,  H01J37/00 ,  H01L21/02002 ,  H01L21/02381 ,  H01L21/0254 ,  H01L21/0262 ,  H01L21/68721 ,  H01L21/68735 ,  H01L21/7806

Abstract: An apparatus includes a deposition chamber housing that accommodates a growth substrate, a supply nozzle to supply a deposition gas for forming a target large-size substrate on the growth substrate into the deposition chamber housing, a susceptor to support the growth substrate and expose a rear surface of the growth substrate to an etch gas, and an inner liner connected to the susceptor. The inner liner is to isolate the etch gas from the deposition gas and guide the etch gas toward the rear surface of the growth substrate. The susceptor includes a center hole that exposes the rear surface of the growth substrate and a support protrusion supporting the growth substrate, the support protrusion protruding toward the center of the center hole from an inner sidewall of the susceptor defining the center hole.