Shower head of combinatorial spatial atomic layer deposition apparatus

    公开(公告)号:US10815569B2

    公开(公告)日:2020-10-27

    申请号:US15014568

    申请日:2016-02-03

    摘要: A shower head of a combinatorial spatial atomic layer deposition (CS-ALD) apparatus may be provided. The shower head of the CS-ALD apparatus may include a plurality of shower blocks. Each of shower blocks may include a plurality of unit modules. Each of the shower blocks and each of the unit modules may be controlled independently from each other. Each of the plurality of unit modules may include a source gas injection nozzle, a purge gas injection nozzle, a reactant gas injection nozzle, and exhaust areas between the injection nozzles. The plurality of shower blocks may be separated from each other. Gas injection areas of the injection nozzles may be separated from the exhaust area.

    ANODE ACTIVE MATERIAL FOR LITHIUM SECONDARY BATTERY, COMPOSITION FOR ANODE INCLUDING SAME, AND LITHIUM SECONDARY BATTERY
    10.
    发明申请
    ANODE ACTIVE MATERIAL FOR LITHIUM SECONDARY BATTERY, COMPOSITION FOR ANODE INCLUDING SAME, AND LITHIUM SECONDARY BATTERY 审中-公开
    用于锂二次电池的阳极活性材料,包括它们的阳极的组合物和锂二次电池

    公开(公告)号:US20160190570A1

    公开(公告)日:2016-06-30

    申请号:US14904371

    申请日:2014-07-08

    摘要: Provided are an anode active material for a lithium secondary battery, and an anode composition and a lithium secondary battery including the anode active material. Silicon secondary particles, in which amorphous silicon primary particles and crystalline silicon primary particles are agglomerated, are used as an anode active material. The structural characteristics and internal pores of the silicon secondary particles act as a buffer for a volumetric change of particles, leading to a decrease in the volumetric expansion of an active material during charging and discharging. Accordingly, pulverization of silicon particles may be prevented, and ultimately, even when a charge and discharge cycle is repeatedly performed, the capacity is maintained, and thus, cycle lifespan characteristics are substantially improved.

    摘要翻译: 提供了一种用于锂二次电池的负极活性材料,以及包含阳极活性材料的阳极组合物和锂二次电池。 将非晶硅一次粒子和结晶硅一次粒子聚集的硅二次粒子用作负极活性物质。 硅二次粒子的结构特征和内部孔隙作为颗粒体积变化的缓冲液,导致在充放电期间活性物质的体积膨胀减小。 因此,可以防止硅粒子的粉碎,最终,即使在重复进行充放电循环的情况下,也能够维持容量,从而显着提高循环寿命。