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    Physical quantity detection vibrator element, physical quantity detection apparatus, electronic apparatus, and moving object
    2.
    发明授权
    Physical quantity detection vibrator element, physical quantity detection apparatus, electronic apparatus, and moving object 有权

    公开(公告)号：US10072928B2

    公开(公告)日：2018-09-11

    申请号：US15336404

    申请日：2016-10-27

    Applicant: Seiko Epson Corporation

    Inventor： Masahiro Ishii ,  Keiichi Yamaguchi ,  Takayuki Kikuchi

    IPC: G01C19/5614 ,  H01L41/113 ,  G01C19/56

    CPC classification number: G01C19/56 ,  G01C19/5614 ,  H01L41/1132

    Abstract: A vibrator element has a detection arm that performs a drive vibration in a Z-axis direction, and performs a detection vibration in an X-axis direction when an angular velocity is applied thereto The vibrator element also has first, second, third, and fourth electrode portions and first, second, third, and fourth ground electrode portions provided on a detection arm. Further, a signal generated between the first electrode portion and the first ground electrode portion and a signal generated between the second electrode portion and the second ground electrode portion are in opposite phase in a drive vibration and in phase in a detection vibration. Furthermore, a signal generated between the third electrode portion and the third ground electrode portion and a signal generated between the fourth electrode portion and the fourth ground electrode portion are in opposite phase in the drive vibration and in phase in the detection vibration.

    Physical Quantity Detection Vibrator Element, Physical Quantity Detection Apparatus, Electronic Apparatus, And Moving Object
    4.
    发明申请
    Physical Quantity Detection Vibrator Element, Physical Quantity Detection Apparatus, Electronic Apparatus, And Moving Object 审中-公开

    公开(公告)号：US20170122738A1

    公开(公告)日：2017-05-04

    申请号：US15336404

    申请日：2016-10-27

    Applicant: Seiko Epson Corporation

    Inventor： Masahiro Ishii ,  Keiichi Yamaguchi ,  Takayuki Kikuchi

    IPC: G01C19/56 ,  H01L41/113

    CPC classification number: G01C19/56 ,  G01C19/5614 ,  H01L41/1132

    Abstract: A vibrator element has a detection arm that performs a drive vibration in a Z-axis direction, and performs a detection vibration in an X-axis direction when an angular velocity is applied thereto The vibrator element also has first, second, third, and fourth electrode portions and first, second, third, and fourth ground electrode portions provided on a detection arm. Further, a signal generated between the first electrode portion and the first ground electrode portion and a signal generated between the second electrode portion and the second ground electrode portion are in opposite phase in a drive vibration and in phase in a detection vibration. Furthermore, a signal generated between the third electrode portion and the third ground electrode portion and a signal generated between the fourth electrode portion and the fourth ground electrode portion are in opposite phase in the drive vibration and in phase in the detection vibration.

    Vibrating element, angular velocity sensor, electronic apparatus, and moving object
    5.
    发明授权
    Vibrating element, angular velocity sensor, electronic apparatus, and moving object 有权
    振动元件，角速度传感器，电子设备和移动物体

    公开(公告)号：US09534895B2

    公开(公告)日：2017-01-03

    申请号：US14852796

    申请日：2015-09-14

    Applicant: Seiko Epson Corporation

    Inventor： Masahiro Ishii ,  Takayuki Kikuchi

    IPC: H03H9/25 ,  G01C19/5607 ,  H03H9/21

    CPC classification number: G01C19/5607 ,  H03H9/21

    Abstract: A vibrating element includes a vibration portion including a first main surface, a second main surface, a first side surface, and a second side surface, and extending in a first direction. The vibration portion includes a first groove formed in the first main surface and a second groove formed in the second main surface, and in a plan view seen from a direction perpendicular to the first main surface, the first groove and the second groove are provided to shift in opposite directions from each other, in a second direction.

    Abstract translation: 振动元件包括具有第一主表面，第二主表面，第一侧表面和第二侧表面并沿第一方向延伸的振动部分。 振动部分包括形成在第一主表面中的第一凹槽和形成在第二主表面中的第二凹槽，并且在从垂直于第一主表面的方向看平面图中，第一凹槽和第二凹槽设置成 沿相反方向在第二方向上移动。

    Electronic device, electronic apparatus, mobile unit, and method of manufacturing electronic device
    7.
    发明授权
    Electronic device, electronic apparatus, mobile unit, and method of manufacturing electronic device 有权
    电子设备，电子设备，移动单元以及电子设备的制造方法

    公开(公告)号：US09159905B2

    公开(公告)日：2015-10-13

    申请号：US13910495

    申请日：2013-06-05

    Applicant: Seiko Epson Corporation

    Inventor： Shinya Aoki ,  Takayuki Kikuchi

    IPC: H01L41/053 ,  H03H9/10 ,  H03H9/15 ,  H01L41/332 ,  G01C19/5628

    CPC classification number: H01L41/332 ,  G01C19/5621 ,  G01C19/5628 ,  Y10T29/49155

    Abstract: A vibrating element as an element on which a base part, a supporting part extending from the base part, and adjustment electrodes as mass adjustment parts are provided and a semiconductor substrate as a circuit element are provided, and the adjustment electrodes are placed in locations not overlapping with the semiconductor substrate in a plan view, the supporting part and the semiconductor substrate are connected, and thereby, the vibrating element is mounted on the semiconductor substrate.

    Abstract translation: 作为元件的振动元件，设置有从基座部分延伸的支撑部件和作为质量调节部件的调节电极的元件，并且设置作为电路元件的半导体基板，并且调节电极被放置在不 与半导体基板在平面图中重叠，支撑部分和半导体基板连接，从而将振动元件安装在半导体基板上。

    Vibrating reed, electronic device, and electronic apparatus
    8.
    发明授权
    Vibrating reed, electronic device, and electronic apparatus 有权
    振动簧片，电子设备和电子设备

    公开(公告)号：US09013093B2

    公开(公告)日：2015-04-21

    申请号：US13905581

    申请日：2013-05-30

    Applicant: Seiko Epson Corporation

    Inventor： Keiichi Yamaguchi ,  Seiji Osawa ,  Seiichiro Ogura ,  Takayuki Kikuchi

    IPC: H01L41/053 ,  G01C19/5607

    CPC classification number: H01L41/053 ,  G01C19/5607

    Abstract: A vibrating reed includes a vibrating body (a base portion, a vibrating arm, and a detection arm) and a support portion that supports the vibrating body via a plate-like coupling portion. In both principal surfaces of the coupling portion, grooves (a first groove and a second groove) are disposed. The first groove arranged in one of the principal surfaces of the coupling portion and the second groove arranged in the other principal surface are arranged at positions different from each other in plan view.

    Abstract translation: 振动片包括振动体（基部，振动臂和检测臂）以及经由板状连结部支撑振动体的支撑部。 在耦合部分的两个主表面中，设置有槽（第一槽和第二槽）。 布置在联接部分的主表面中的一个主表面上的第一凹槽和布置在另一个主表面中的第二凹槽布置在平面图中彼此不同的位置。

    Signal level conversion circuit, physical quantity detection device and electronic apparatus
    9.
    发明授权
    Signal level conversion circuit, physical quantity detection device and electronic apparatus 有权
    信号电平转换电路，物理量检测装置和电子设备

    公开(公告)号：US08829992B2

    公开(公告)日：2014-09-09

    申请号：US13955632

    申请日：2013-07-31

    Applicant: Seiko Epson Corporation

    Inventor： Yoshinao Yanagisawa ,  Takayuki Kikuchi

    IPC: H03F3/45 ,  H03F3/08 ,  H03F1/26

    CPC classification number: H03F3/45179 ,  H03F1/26 ,  H03F3/08 ,  H03F3/45475 ,  H03F2200/261 ,  H03F2200/408 ,  H03F2200/411 ,  H03F2203/45528 ,  H03F2203/45594

    Abstract: A signal level conversion circuit 1 includes a first differential amplifier circuit 10 and a second differential amplifier circuit 20. The first differential amplifier circuit 10 multiplies a potential difference between a first input signal and a second input signal by G1 thereby providing an output signal. The second differential amplifier circuit 20 multiplies a potential difference between the output signal of the first differential amplifier circuit 10 and the second input signal by G2 thereby providing an output, where the two gains satisfy the relation of G1×G2

    Abstract translation: 信号电平转换电路1包括第一差分放大器电路10和第二差分放大器电路20.第一差分放大器电路10将第一输入信号和第二输入信号之间的电位差乘以G1，从而提供输出信号。 第二差分放大器电路20将第一差分放大器电路10的输出信号和第二输入信号之间的电位差乘以G2，从而提供输出，其中两个增益满足G1×G2 <0和0 < （G1 + 1）×G2 <2。

    Angular velocity sensor, electronic apparatus, and vehicle
    10.
    发明授权
    Angular velocity sensor, electronic apparatus, and vehicle 有权

    公开(公告)号：US12188958B2

    公开(公告)日：2025-01-07

    申请号：US18494870

    申请日：2023-10-26

    Applicant: SEIKO EPSON CORPORATION

    Inventor： Kazuyuki Nagata ,  Takayuki Kikuchi

    IPC: G01P3/44 ,  G01C19/5649

    Abstract: An angular velocity sensor includes a substrate, a detector including a movable detection electrode and a fixed detection electrode opposed to the movable detection electrode, and a driver adapted to drive the detector. The movable detection electrode is supported by a first spring that is elongated parallel to a Y axis from a first turned-back part, and a second spring that is elongated parallel to the Y axis from a second turned-back part. The first and second springs are fixed at first and second anchors. The first turned-back part is closer to the second spring than the first anchor. The detector includes a first surface opposed to the first spring, and a second surface disposed closer to the first spring than the first surface.

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