公开(公告)号：US20220208561A1

公开(公告)日：2022-06-30

申请号：US17377666

申请日：2021-07-16

申请人： Semes Co., Ltd.

发明人： Yonghee LEE ,  Sangmin LEE ,  Euisang LIM ,  Dohyeon YOON

IPC分类号： H01L21/67

摘要： An apparatus for processing a substrate may include a process chamber providing a processing space in which a predetermined process may be performed on the substrate, and a supporting device contacting the process chamber and supporting the process chamber. The supporting device may include a supporting chamber providing a supporting space for supporting components of the process chamber and a supply member supplying a fluid into the supporting space.

公开(公告)号：US20220013372A1

公开(公告)日：2022-01-13

申请号：US17370469

申请日：2021-07-08

申请人： SEMES CO., LTD.

发明人： Miso PARK ,  Yong Hee LEE ,  Dohyeon YOON

IPC分类号： H01L21/67 ,  B08B7/00 ,  B08B7/04 ,  H05B3/30 ,  F27B17/00 ,  F27D5/00 ,  H05B1/02

摘要： The inventive concept provides an apparatus for treating a substrate by using a supercritical fluid. In an embodiment, the apparatus may include a process chamber that provides a treatment space, and including a chamber heater that increases a temperature of an interior of the treatment space, a substrate support provided in the treatment space and that supports the substrate, and a substrate heating member that heats a lower surface of the substrate while contacting the lower surface of the substrate.

公开(公告)号：US20210130951A1

公开(公告)日：2021-05-06

申请号：US17086061

申请日：2020-10-30

申请人： SEMES CO., LTD.

发明人： Yong Hoon HONG ,  Dohyeon YOON ,  Heehwan KIM ,  Ji Young LEE ,  Young Su KIM

IPC分类号： C23C16/448 ,  C23C16/44 ,  C23C16/52 ,  C23C16/455

摘要： A chemical supply apparatus includes an evaporation unit disposed downstream of a chemical supply source to vaporize supplied chemical thereto, a filter unit disposed downstream of the evaporation unit, wherein the filter unit filters impurities in the vaporized chemical while the vaporized chemical passes through the filter unit, a liquefaction unit disposed downstream of the filter unit to liquefy the vaporized chemical, and a chemical storage tank disposed downstream of the liquefaction unit to store the liquefied chemical therein, wherein an electrode is disposed between the chemical supply source and the liquefaction unit, wherein the electrode electrically reacts with the chemical or particles in the chemical to change electrical properties of the chemical or the particles.

公开(公告)号：US20210013064A1

公开(公告)日：2021-01-14

申请号：US16925449

申请日：2020-07-10

申请人： SEMES CO., LTD.

发明人： Dohyeon YOON ,  Joo Jib PARK ,  Jin Se PARK

IPC分类号： H01L21/67 ,  H01L21/02 ,  B08B7/00

摘要： An apparatus for treating a substrate includes a light treatment chamber having an interior space, a support unit that supports the substrate in the interior space, and an irradiation unit that irradiates light to the substrate in the interior space to remove organic matter remaining on the substrate, in which the irradiation unit includes a first light source that irradiates first light to the substrate and a second light source that irradiates, to the substrate, second light having a different wavelength range from the first light.