公开(公告)号：US10979013B2

公开(公告)日：2021-04-13

申请号：US16978950

申请日：2019-05-05

Applicant: SHANDONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Da Chen ,  Hongfei Wang ,  Peng Wang ,  Xiaojun Zhang ,  Zhongli Li

IPC: H03H9/17 ,  H03H3/02 ,  H01L41/08 ,  H01L41/332 ,  H01L41/314 ,  H01L41/27

Abstract: Disclosed is a method of manufacturing a piezoelectric thin film resonator on a non-silicon substrate, including the following steps: depositing a copper thin film on a silicon wafer; coating photoresist on the copper thin film to perform photoetching so as to remove photoresist in an air gap region under the piezoelectric thin film resonator to be disposed; electroplating-depositing a copper layer, and removing photoresist to obtain a stepped peel sacrifice layer; coating polyimide and performing imidization by heat treatment, making a sandwich structure of the piezoelectric thin film resonator above the polyimide layer; performing etching for the polyimide layer in a region not covered by the piezoelectric thin film resonator by oxygen plasma; placing the obtained device into a copper corrosion solution to dissolve the copper around and under the piezoelectric thin film resonator, attaching a drum coated with polyvinyl alcohol glue onto the piezoelectric thin film resonator, releasing and peeling it from the silicon wafer and then transferring it to a desired non-silicon substrate; washing the drum with hot water to separate the drum from the piezoelectric thin film resonator so as to complete the manufacturing process.

公开(公告)号：US11899145B2

公开(公告)日：2024-02-13

申请号：US17296855

申请日：2020-11-04

Applicant: SHANDONG UNIVERSITY

Inventor： Shucai Li ,  Maoxin Su ,  Yiguo Xue ,  Peng Wang ,  Daohong Qiu ,  Yimin Liu

IPC: G01V1/04 ,  G01V1/18

CPC classification number: G01V1/04 ,  G01V1/18 ,  G01V2210/121 ,  G01V2210/1295 ,  G01V2210/1425

Abstract: A wave detector integrated device includes a support, protective shell and mode converter. The protective shell is installed on the support and rotates by the mode converter, and has a hollow cylindrical structure. A seismic source hammer is suspended at a protective shell central axis position. Electromagnetic accelerators are installed in a bus direction of the protective shell, and the seismic source hammer is connected with the electromagnetic accelerators. A drill bit type wireless transmission wave detector or standby flat bottom type wave detector is connected above the protective shell through a second telescopic rod having a driving device therein and driving the drill bit type wave detector to rotate. A power supply is installed inside the protective shell, and is connected with a current controller and circuit protection device. The current controller is respectively connected with the electromagnetic accelerators, drill bit type wave detector, driving device and mode converter.

公开(公告)号：US12287449B2

公开(公告)日：2025-04-29

申请号：US17779816

申请日：2021-06-16

Applicant: SHANDONG UNIVERSITY

Inventor： Shucai Li ,  Yiguo Xue ,  Maoxin Su ,  Chunjin Lin ,  Li Guan ,  Daohong Qiu ,  Zhiqiang Li ,  Yimin Liu ,  Peng Wang ,  Huimin Gong

IPC: G01V3/20 ,  G01V8/02

Abstract: A three-dimensional imaging method and system for surface comprehensive geophysical prospecting, the method includes: acquiring detection data of a plurality of two-dimensional profiles of a surface detection site; forming two-dimensional profile resistivity data by geophysical inversion of the detection data; performing three-dimensional coordinate conversion on the two-dimensional profile resistivity data to obtain resistivity data of a three-dimensional coordinate system; and converting the resistivity data of the three-dimensional coordinate system into a three-dimensional model by using a Kriging interpolation method.

公开(公告)号：US11960048B2

公开(公告)日：2024-04-16

申请号：US17431051

申请日：2020-11-17

Applicant: SHANDONG UNIVERSITY

Inventor： Maoxin Su ,  Shucai Li ,  Yimin Liu ,  Yiguo Xue ,  Li Guan ,  Peng Wang

IPC: G01V3/38 ,  G01N27/04

CPC classification number: G01V3/38 ,  G01N27/041 ,  G01V2210/6652

Abstract: A three-dimensional electrical resistivity tomography method and system belonging to the field of geological geophysical prospecting, the method including the steps of prospecting a region containing a geological anomaly with at least two prospecting modes respectively to acquire two-dimensional resistivity data of a corresponding detection plane; unifying coordinate systems of resistivity data points acquired in all prospecting modes, and extracting data points with the same coordinates; carrying out data fusion on extracted resistivity data at the same position by utilizing a principal component analysis method; and carrying out three-dimensional coordinate conversion on resistivity data acquired after fusion to form a three-dimensional model.

公开(公告)号：US11572307B1

公开(公告)日：2023-02-07

申请号：US17845175

申请日：2022-06-21

Applicant: SHANDONG UNIVERSITY ,  QINGDAO DANENG ENVIRONMENTAL PROTECTION EQUIPMENT CO., LTD. ,  QINGDAO HAITAI ENERGY SCIENCE AND TECHNOLOGY RESEARCH INSTITUTE

Inventor： Jingcai Chang ,  Yong Wang ,  Xiaojie Liang ,  Peng Wang ,  Shusheng Li ,  Chunyuan Ma ,  Yanhui Liu

IPC: C04B7/17 ,  C21C7/00 ,  C04B5/06 ,  C04B18/14

Abstract: The present invention belongs to the technical field of metallurgical solid waste resource utilization, and particularly relates to acidification and carbonization coupling modified steel slag as well as a preparation process and an application thereof. The process specifically includes the following steps of adopting acetic acid, tributyl phosphate, ethanolamine and a NaOH and Ca(OH)2 emulsion as reaction reinforcing agents, and modifying the steel slag together with CO2-rich lime kiln flue gas. The process for modifying the steel slag through acidification and carbonization coupling provided in the present invention has the advantages of simple reaction conditions and no need of high-pressure CO2, additionally, the carbonation reaction rate can be greatly increased, and f-CaO and f-MgO in the steel slag can be effectively eliminated.