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1.发明申请公开(公告)号：US20200092659A1
公开(公告)日：2020-03-19
申请号：US16693003
申请日：2019-11-22
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Matteo PERLETTI , Federico VERCESI , Silvia ADORNO , Giorgio ALLEGATO
Abstract: A method for manufacturing a filtering module comprising the steps of: forming a multilayer body comprising a filter layer of semiconductor material and having a thickness of less than 10 μm, a first structural layer coupled to a first side of the filter layer, and a second structural layer coupled to a second side, opposite to the first side, of the filter layer; forming a recess in the first structural layer, which extends throughout its thickness; removing selective portions, exposed through the recess, of the filter layer to form a plurality of openings, which extend throughout the thickness of the filter layer; and completely removing the second structural layer to connect fluidically the first and second sides of the filter layer, thus forming a filtering membrane designed to inhibit passage of contaminating particles.
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公开(公告)号：US20190327562A1
公开(公告)日：2019-10-24
申请号：US16389833
申请日：2019-04-19
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Fabrizio CERINI , Silvia ADORNO , Federico VERCESI
IPC: H04R17/02 , H01L41/113 , B81B3/00 , B81C1/00
Abstract: A piezoelectric MEMS transducer formed in a body of semiconductor material, which has a central axis and a peripheral area and comprises a plurality of beams, transverse to the central axis and having a first end, coupled to the peripheral area of the body, and a second end, facing the central axis; a membrane, transverse to the central axis and arranged underneath the plurality of beams; and a pillar, parallel to the central axis and rigid with the second end of the beams and to the membrane. The MEMS transducer further comprises a plurality of piezoelectric sensing elements arranged on the plurality of beams.
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公开(公告)号：US20240065106A1
公开(公告)日：2024-02-22
申请号：US18498737
申请日：2023-10-31
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Luca SEGHIZZI , Federico VERCESI , Claudia PEDRINI
CPC classification number: H10N30/50 , H10N30/03 , H10N30/09 , H10N30/306
Abstract: A transducer includes a supporting body and a suspended structure mechanically coupled to the supporting body. The suspended structure has a first and a second surface opposite to one another along an axis, and is configured to oscillate in an oscillation direction having at least one component parallel to the axis. A first piezoelectric transducer is disposed on the first surface of the suspended structure, and a second piezoelectric transducer is disposed on the second surface of the suspended structure.
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公开(公告)号：US20230324678A1
公开(公告)日：2023-10-12
申请号：US18206363
申请日：2023-06-06
Applicant: STMicroelectronics S.r.l.
Inventor： Giorgio ALLEGATO , Sonia COSTANTINI , Federico VERCESI , Roberto CARMINATI
CPC classification number: G02B26/105 , B81C1/00317 , G02B26/0833 , B81C2203/0109 , B81B2201/042 , B81C2203/019 , B81C1/00523
Abstract: A method of making a MEMS device including forming a mirror stack on a handle layer, applying a first bonding layer to the mirror stack, and disposing a substrate on the first bonding layer. The handle layer is removed and a second bonding layer is applied. A cap layer is disposed on the second bonding layer. The mirror stack is formed by disposing a silicon layer on the handle layer, disposing a first insulating layer on the silicon layer, etching portions of the first insulating layer, and depositing a first conductive layer on the first insulating layer. The formation also includes depositing a second insulating layer on the first conductive layer, a portion of the second insulating layer to expose a portion of the first conductive layer exposed, and forming a conductive pad on the exposed portion of the first conductive layer.
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公开(公告)号：US20200033591A1
公开(公告)日：2020-01-30
申请号：US16591854
申请日：2019-10-03
Applicant: STMicroelectronics S.r.l.
Inventor： Giorgio ALLEGATO , Sonia COSTANTINI , Federico VERCESI , Roberto CARMINATI
Abstract: A method for making a micro-electro mechanical (MEMS) device includes forming a MEMS mirror stack on a handle layer, and applying a first bonding layer to the MEMS mirror stack. The method continues with disposing a substrate on the first bonding layer such that the MEMS mirror stack is mechanically anchored to the substrate and so as to seal against ingress of environmental contaminants, removing the handle layer, and applying a second bonding layer to the MEMS mirror stack. A cap layer is disposed on the second bonding layer such that the cap layer is mechanically anchored to the MEMS mirror stack and so as to seal against ingress of environmental contaminants.
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Patent Agency Ranking
6.发明申请公开(公告)号：US20190219816A1
公开(公告)日：2019-07-18
申请号：US16248379
申请日：2019-01-15
Applicant: STMicroelectronics S.r.l.
Inventor： Lucas LAMAGNA , Stefano LOSA , Silvia ROSSINI , Federico VERCESI , Elena CIANCI , Graziella TALLARIDA , Claudia WIEMER
CPC classification number: G02B26/0841 , G02B1/14 , G02B1/18 , G02B5/0858 , G02B26/0833
Abstract: A micromechanical mirror structure includes a mirror element designed to reflect an incident light radiation and a protective structure arranged over the mirror element to provide mechanical protection for the mirror element and to increase the reflectivity of the mirror element with respect to the incident light radiation. The protective structure has a first protective layer and a second protective layer which are stacked on the mirror element. The second protective layer is arranged on the first protective layer and the first protective layer is arranged on the mirror element. The layers include a respective dielectric material and having respective refractive indexes that jointly increase the reflectivity of the mirror element in a range of wavelengths of interest.
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公开(公告)号：US20240014718A1
公开(公告)日：2024-01-11
申请号：US18345863
申请日：2023-06-30
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Luca SEGHIZZI , Federico VERCESI , Gianluca LONGONI
CPC classification number: H02K15/026 , H02K15/0068 , H02K2215/00
Abstract: A stator for an electric actuator or motor, including: a solid body; a ferromagnetic core region between the layers of semiconductor material, electrically insulated from the layers of semiconductor material; a plurality of conductive through vias through the solid body; a first plurality of conductive strips, which extend parallel to one another above the core; and a second plurality of conductive strips, which extend parallel to one another above the core and opposite to the first plurality of conductive strips; wherein the first plurality of conductive strips, the plurality of conductive through vias, and the second plurality of conductive strips form a winding or coil of the stator.
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公开(公告)号：US20210276044A1
公开(公告)日：2021-09-09
申请号：US17191475
申请日：2021-03-03
Applicant: STMicroelectronics S.r.l.
Inventor： Federico VERCESI , Alessandro DANEI , Giorgio ALLEGATO , Gabriele GATTERE , Roberto CAMPEDELLI
Abstract: A method for manufacturing a PMUT device including a piezoelectric element located at a membrane element is provided. The method includes receiving a silicon on insulator substrate having a first silicon layer, an oxide layer, and a second silicon layer. Portions of a first surface of the second silicon layer are exposed by removing exposed side portions of the first silicon layer and corresponding portions of the oxide layer, and a central portion including the remaining portions of the first silicon layer and of the oxide layer is defined. Anchor portions for the membrane element are formed at the exposed portions of the first surface of the second silicon layer. The piezoelectric element is formed above the central portion, and the membrane element is defined by selectively removing the second layer and removing the remaining portion of the oxide from under the remaining portion of the first silicon layer.
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公开(公告)号：US20210119105A1
公开(公告)日：2021-04-22
申请号：US17070548
申请日：2020-10-14
Applicant: STMicroelectronics S.r.l.
Inventor： Luca SEGHIZZI , Federico VERCESI , Claudia PEDRINI
IPC: H01L41/083 , H01L41/113 , H01L41/25 , H01L41/35
Abstract: A transducer includes a supporting body and a suspended structure mechanically coupled to the supporting body. The suspended structure has a first and a second surface opposite to one another along an axis, and is configured to oscillate in an oscillation direction having at least one component parallel to the axis. A first piezoelectric transducer is disposed on the first surface of the suspended structure, and a second piezoelectric transducer is disposed on the second surface of the suspended structure.
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公开(公告)号：US20200221234A1
公开(公告)日：2020-07-09
申请号：US16813477
申请日：2020-03-09
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Fabrizio CERINI , Silvia ADORNO , Federico VERCESI
IPC: H04R17/02 , B81B3/00 , B81C1/00 , H01L41/113
Abstract: A piezoelectric MEMS transducer formed in a body of semiconductor material, which has a central axis and a peripheral area and comprises a plurality of beams, transverse to the central axis and having a first end, coupled to the peripheral area of the body, and a second end, facing the central axis; a membrane, transverse to the central axis and arranged underneath the plurality of beams; and a pillar, parallel to the central axis and rigid with the second end of the beams and to the membrane. The MEMS transducer further comprises a plurality of piezoelectric sensing elements arranged on the plurality of beams.
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