Electro-optical phase modulator
    9.
    发明授权

    公开(公告)号:US10795189B2

    公开(公告)日:2020-10-06

    申请号:US16247096

    申请日:2019-01-14

    Inventor: Stephane Monfray

    Abstract: An electro-optical phase modulator includes a waveguide made from a stack of strips. The stack includes a first strip made of a doped semiconductor material of a first conductivity type, a second strip made of a conductive material or of a doped semiconductor material of a second conductivity type, and a third strip made of a doped semiconductor material of the first conductivity type. The second strip is separated from the first strip by a first interface layer made of a dielectric material, and the third strip is separated from the second strip by a second interface layer made of a dielectric material.

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