MICROREACTOR AND METHOD FOR LOADING A LIQUID
    3.
    发明申请
    MICROREACTOR AND METHOD FOR LOADING A LIQUID 审中-公开
    用于装载液体的微型反应器和方法

    公开(公告)号:US20140291152A1

    公开(公告)日:2014-10-02

    申请号:US14221033

    申请日:2014-03-20

    IPC分类号: B01L3/00 C12Q1/68

    摘要: A microreactor includes: a substrate (2; 102; 202) made of semiconductor material; a plurality of wells (5; 105; 205) separated by walls (6; 106; 206) in the substrate (2; 102; 202); a dielectric structure (7; 107; 207a, 207b) coating at least the top of the walls (6; 106; 206); a cap (3; 103; 203), bonded to the substrate (2; 102; 202) and defining a chamber (10; 110; 210) above the wells (5; 105; 205); and a biasing structure (2, 8, 13; 102, 108, 113; 202, 208a, 208b, 213), configured for setting up a voltage (VB) between the substrate (2; 102; 202) and the chamber (10; 110; 210).

    摘要翻译: 微反应器包括:由半导体材料制成的衬底(2; 102; 202) 在所述衬底(2; 102; 202)中被壁(6; 106; 206)隔开的多个孔(5; 105; 205); 涂覆至少所述壁(6; 106; 206)的顶部的电介质结构(7; 107; 207a,207b); 盖子(3; 103; 203),其结合到所述基底(2; 102; 202)并且在所述孔(5; 105; 205)上方限定腔室(10; 110; 210) 以及偏置结构(2,8,13; 102,108,113; 202,208a,208b,213),其被配置用于在所述基板(2; 102; 202)和所述腔室(10)之间建立电压(VB) ; 110; 210)。