Process of forming powder pattern using positive diazonium salt
photoresist
    4.
    发明授权
    Process of forming powder pattern using positive diazonium salt photoresist 失效
    使用正重氮盐光致抗蚀剂形成粉末图案的工艺

    公开(公告)号:US4537851A

    公开(公告)日:1985-08-27

    申请号:US531266

    申请日:1983-09-12

    CPC分类号: G03F7/28 G03F7/016

    摘要: A water-soluble, positive-working photoresist composition is disclosed which comprises water-soluble aromatic diazonium salt, water-soluble phenolic compound, and water-soluble polymeric compound. When the film of this composition is irradiated with a pattern of actinic ray and then brought into contact with an alkaline gas or solution, the coating of unexposed areas hardens to become water-insoluble. Preferably, when the film is brought into contact with a suspension of powder or dry powder after being hardened, a positive pattern of powder is obtained by the development with water.

    摘要翻译: 公开了一种水溶性正性光致抗蚀剂组合物,其包含水溶性芳族重氮盐,水溶性酚类化合物和水溶性聚合物。 当将该组合物的膜用光化射线图案照射,然后与碱性气体或溶液接触时,未曝光区域的涂层变硬,变得不溶于水。 优选地,当硬化后将膜与粉末或干粉末的悬浮液接触时,通过用水显影获得阳性图案的粉末。

    Photosensitive composition and pattern forming process using same
    7.
    发明授权
    Photosensitive composition and pattern forming process using same 失效
    光敏组合物和图案形成方法使用相同

    公开(公告)号:US4510226A

    公开(公告)日:1985-04-09

    申请号:US515191

    申请日:1983-07-19

    CPC分类号: H01J29/225 G03C1/52 G03F7/28

    摘要: A photosensitive composition becoming sticky upon exposure to light which comprises (a) a salt of a diazonium compound represented by the formula ##STR1## wherein R.sub.1 and R.sub.2 are independently --H, --CH.sub.3, --OCH.sub.3 or ##STR2## but R.sub.1 and R.sub.2 cannot be ##STR3## at the same time; and R.sub.3 and R.sub.4 are independently a straight-chain lower alkyl group, and (b) a salt of an aromatic diazonium compound having no --OH group directly bonding to a benzene ring, has an improved sensitivity because it contains the salt of the compound represented by the above formula. By using said photosensitive composition, there is provided a process for forming a pattern of powder coated layer excellent in light sensitivity.

    摘要翻译: 光敏组合物在暴露于光时变粘,其包含(a)由下式表示的重氮化合物的盐:其中R 1和R 2独立地为-H,-CH 3,-OCH 3或R 1,但R 1和R 2不能 同时成为; 并且R 3和R 4独立地为直链低级烷基,和(b)不具有与苯环直接键合的-OH基团的芳族重氮化合物的盐具有改善的灵敏度,因为它含有表示的化合物的盐 通过上述公式。 通过使用所述光敏组合物,提供了形成光敏性优异的粉末涂布层图案的方法。