公开(公告)号：US10208397B2

公开(公告)日：2019-02-19

申请号：US15204994

申请日：2016-07-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung-Min Ryu ,  Sang Min Lee ,  Hee Jong Jeong ,  Chaeho Kim ,  Ji Su Son ,  Jaebong Lee ,  Juwan Lim ,  Jungwoo Choi

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/458 ,  C23C16/50 ,  C30B25/08 ,  C30B25/10 ,  C30B25/12 ,  C30B25/14 ,  C30B25/16 ,  C30B29/06 ,  C30B29/10 ,  C23C16/48 ,  C23C16/52

Abstract: An apparatus is provided for depositing a thin film. The apparatus includes a chamber, a susceptor disposed in the chamber and supporting a substrate, a reflection housing disposed outside the chamber, a light source unit disposed in the reflection housing and irradiating light to the susceptor, and a light controlling unit blocking at least a portion of an irradiation path of the light to control an irradiation area of the light on the susceptor. At least a portion of the light controlling unit is disposed in the reflection housing.

公开(公告)号：US11233494B2

公开(公告)日：2022-01-25

申请号：US16593376

申请日：2019-10-04

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyungjoon Kim ,  Je-Dong Lee ,  Younghoon Kwon ,  Myoungwoon Kim ,  Il-Woo Kim ,  Jiwoon Im ,  Jaewon Jung ,  Hee Jong Jeong

IPC: H03H7/01 ,  H01J37/32

Abstract: An electronic circuit includes a first filter and a second filter. The first filter passes a first frequency component of a first harmonic frequency generated by a first voltage source to form a potential difference in a chamber and a second frequency component of a second harmonic frequency higher than the first harmonic frequency. The second filter removes the first frequency component and the second frequency component received from the first filter. The second harmonic frequency is included in a first frequency band determined based on a capacitance of the second filter.