Abstract:
Embodiments of a substrate processing apparatus and substrate processing method are provided. Embodiments include a laser that directs a laser beam toward a substrate. Embodiments further include a chuck spaced apart in a first direction from the laser. Embodiments include a lower particle blocker disposed between the chuck and the laser. In some cases, the lower particle blocker includes a first particle blocker. In some cases, the first particle blocker includes a first slit that penetrates the first particle blocker in the first direction. In some cases, the first slit extends in a second direction perpendicular to the first direction.
Abstract:
A method for mitigating interference at a small base station in a hierarchical cell structure is provided. In the method, the small base station checks a sub-frame allocated to macro user equipment by using a downlink signal received from a macro base station when an interference candidate user equipment list is received. The interference candidate user equipment list contains information on the macro user equipment adjacent to a femto cell controlled by the small base station. Then the small base station allocates other sub-frame to femto user equipment located in the femto cell by avoiding the sub-frame allocated to the macro user equipment.
Abstract:
A semiconductor memory device with improved performance and reliability is provided. The semiconductor memory device includes a substrate having a cell region and a peripheral region, a cell region isolation layer that separates the cell region from the peripheral region, and a plurality of cell gate structures, each including a cell gate electrode that extends in a first direction. The cell region includes a plurality of active areas that extend in a second direction different from the first direction, and are between a respective cell element isolation layer and the cell region isolation layer. Each of the active areas includes a first portion and a second portion separated by the cell gate structure, the second portion of the active area is on both sides of a respective one of the first portion of the active area. The active areas includes a normal active area and a dummy active area.
Abstract:
A semiconductor device includes a substrate having an active region, and first to third transistors on the active region of the substrate, each of the first to third transistors including a dielectric layer on the substrate, a metal layer on the dielectric layer, a barrier layer between the dielectric layer and the metal layer, and a work function layer between the dielectric layer and the barrier layer, wherein the barrier layer of the third transistor is in contact with the dielectric layer of the third transistor, and wherein a threshold voltage of the second transistor is greater than a threshold voltage of the first transistor and less than a threshold voltage of the third transistor.
Abstract:
A method for mitigating interference at a small base station in a hierarchical cell structure is provided. In the method, the small base station checks a sub-frame allocated to macro user equipment by using a downlink signal received from a macro base station when an interference candidate user equipment list is received. The interference candidate user equipment list contains information on the macro user equipment adjacent to a femto cell controlled by the small base station. Then the small base station allocates other sub-frame to femto user equipment located in the femto cell by avoiding the sub-frame allocated to the macro user equipment.
Abstract:
Disclosed herein are an electronic apparatus and method. The electronic includes a photography lens, an eyeball recognition sensor, and a controller. The photography lens acquires an image signal from a subject. The eyeball recognition sensor senses movement of a user's eyeball. The controller recognizes opening and closing of the user's eyelid based on eyeball monitoring information transmitted from the eyeball recognition sensor, and performs a device driving control operation for a reference time period for which the user's eyelid is in a closed state.
Abstract:
A memory system includes a memory device, and a memory controller. The controller adjusts a delay of a data strobe clock, performs at least one of a read test and a write test on the memory device, detect at least one data bit, which reduces at least one margin of a setup margin and a hold margin, from among a plurality of data bits, and adjusts a delay of the at least one data bit to allow the at least one margin to increase.
Abstract:
An apparatus is provided for depositing a thin film. The apparatus includes a chamber, a susceptor disposed in the chamber and supporting a substrate, a reflection housing disposed outside the chamber, a light source unit disposed in the reflection housing and irradiating light to the susceptor, and a light controlling unit blocking at least a portion of an irradiation path of the light to control an irradiation area of the light on the susceptor. At least a portion of the light controlling unit is disposed in the reflection housing.
Abstract:
Provided are a radiographic imaging apparatus and a method of controlling the same. The radiographic imaging apparatus includes a radiographic source configured to emit radiographic rays in a discontinuous eigen energy spectrum, a radiographic detector configured to receive the radiographic rays, convert the received radiographic rays into electrical signals, and count the number of photons having energy that exceeds a threshold energy, and a controller configured to adjust the threshold energy by comparing an energy spectrum of the detected radiographic rays with the eigen energy spectrum of the emitted radiographic rays from the radiographic source.
Abstract:
A carriage to automatically load or unload an article. More specifically, a carriage comprising multiple fingers disposed in a pair of side frames and having a structure in which the respective adjacent fingers press each other, whereby an article is loaded or unloaded without needing to manually operate the fingers. The carriage comprises a pair of side frames formed to be disposed at both sides of the carriage in a direction along which an article is loaded into the carriage; and multiple fingers each comprising a bottom support part disposed at the bottom of the frames so as to support the loaded article, are rotatably pivoted on the pair of side frames, and generate rotational movement through pressing between the respective adjacent fingers.