公开(公告)号：USRE46389E1

公开(公告)日：2017-05-02

申请号：US14686984

申请日：2015-04-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Juwan Lim ,  Sungkweon Baek ,  Kwangmin Park ,  Seungjae Baik ,  Kihyun Hwang

IPC: H01L21/8247 ,  H01L21/28

CPC classification number: H01L21/28282 ,  H01L21/28273 ,  H01L27/11521 ,  H01L27/11524 ,  H01L27/11568

Abstract: A nonvolatile memory device and a method of forming the nonvolatile memory device, the method including forming a tunnel insulating layer on a substrate, wherein forming the tunnel insulating layer includes forming a multi-element insulating layer by a process including sequentially supplying a first element source, a second element source, and a third element source to the substrate, forming a charge storage layer on the tunnel insulating layer, forming a blocking insulating layer on the charge storage layer, and forming a control gate electrode on the blocking insulating layer.

公开(公告)号：US10208397B2

公开(公告)日：2019-02-19

申请号：US15204994

申请日：2016-07-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung-Min Ryu ,  Sang Min Lee ,  Hee Jong Jeong ,  Chaeho Kim ,  Ji Su Son ,  Jaebong Lee ,  Juwan Lim ,  Jungwoo Choi

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/458 ,  C23C16/50 ,  C30B25/08 ,  C30B25/10 ,  C30B25/12 ,  C30B25/14 ,  C30B25/16 ,  C30B29/06 ,  C30B29/10 ,  C23C16/48 ,  C23C16/52

Abstract: An apparatus is provided for depositing a thin film. The apparatus includes a chamber, a susceptor disposed in the chamber and supporting a substrate, a reflection housing disposed outside the chamber, a light source unit disposed in the reflection housing and irradiating light to the susceptor, and a light controlling unit blocking at least a portion of an irradiation path of the light to control an irradiation area of the light on the susceptor. At least a portion of the light controlling unit is disposed in the reflection housing.