公开(公告)号：US09846359B1

公开(公告)日：2017-12-19

申请号：US15392297

申请日：2016-12-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung Hwa Oh ,  Seung Yoon Lee ,  Jeong Jin Lee

IPC: H01L21/00 ,  H01L21/66 ,  G01R31/26 ,  G03F1/44 ,  G01B11/00 ,  H01L21/027 ,  G03F1/36 ,  G03F1/42

CPC classification number: G03F1/44 ,  G01B11/005 ,  G03F1/36 ,  G03F1/42 ,  G03F7/70633 ,  G03F7/70683 ,  H01L21/0273 ,  H01L22/12 ,  H01L22/20 ,  H01L22/30

Abstract: A method may include forming a first grating and a second grating, disposed in a region of vertical overlap of the first and second gratings on different levels, respectively, having substantially the same pitch, and inclined with respect to each other, such that a bias value between the first and second gratings is changed along a length direction of the first and second gratings, using a lithography process. A method may include emitting a beam to the first and second gratings; and obtaining trend information associated with a diffracted beam from an image pattern of a beam from the first and second gratings, using the emitted beam, in which the trend information may concern changes in the intensity of the diffracted beam according to the bias value. An overlay error in at least one grating may be determined based on the trend information and an intensity of a diffracted beam.

公开(公告)号：US10656747B2

公开(公告)日：2020-05-19

申请号：US15889948

申请日：2018-02-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung Jun Lee ,  Seung Ho Kang ,  Ki Won Kim ,  Jeong Jin Lee ,  Hye Lin Lee ,  Il Joo Chae ,  Jae Min Lee ,  Min Jung Kim

IPC: G06F3/041

Abstract: An electronic device is provided. The electronic device includes a touch input device, a touch control circuit configured to generate touch information about a touch input detected by the touch input device, at least one processor, and a memory. The memory stores instructions, when executed, causing the at least one processor to obtain touch information about a first touch input at least once from the touch control circuit after a first time when the first touch input begins to a second time when the first touch input is released, obtain at least one of an area of the first touch input or a pressure of the first touch input based on the obtained touch information, and execute a function corresponding to release of the first touch input if the at least one of the area of the first touch input or the pressure of the first touch input meets a specified condition.

公开(公告)号：US11799458B2

公开(公告)日：2023-10-24

申请号：US17693026

申请日：2022-03-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Young O Lee ,  Min Su Kim ,  Jeong Jin Lee ,  Won Hyun Choi

IPC: H03K3/012 ,  H03K3/037 ,  H03K3/017

CPC classification number: H03K3/0375 ,  H03K3/012 ,  H03K3/017

Abstract: A pulse-based flip flop circuit includes a pulse generator generating a pulse signal and an inverted pulse signal, a scan hold buffer holding a scan input signal for a delay time, and a latch circuit including an intermediate node receiving either a data signal or the scan input signal responsive to a scan enable signal, the pulse signal and the inverted pulse signal. The pulse generator circuit includes a direct path providing a clock signal as a direct path input to a NAND circuit; a delay path including a number of plural stages that delay the clock signal and provide a delayed clock signal as a delay path input to the NAND circuit that performs a NAND operation on the direct path and delay path inputs to generate the inverted pulse signal; and a feedback path providing the pulse signal to a first stage among the stages of the delay path.

公开(公告)号：US10795464B2

公开(公告)日：2020-10-06

申请号：US16334952

申请日：2017-09-21

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung Jun Lee ,  Jeong Jin Lee ,  Soo Hyun Seo ,  Bo Hwa Chung ,  Min Jung Kim

IPC: G06F3/0354 ,  G06F3/0485 ,  G06F3/0488 ,  G06F3/041

Abstract: An electronic device includes a display displaying an execution screen of an application, a touch pad receiving a user input associated with control of the execution screen, and a processor controlling scroll processing of the execution screen. The processor is configured to divide the touch pad into a plurality of virtual regions and to add a first threshold value of a minimum magnitude for determining that the continuous user input is a scroll control input of the execution screen to the second coordinates when the user input is continuous from first coordinates of a first virtual region to second coordinates of a second virtual region adjacent to the first virtual region at a specified speed or more.

公开(公告)号：US10119811B2

公开(公告)日：2018-11-06

申请号：US15448325

申请日：2017-03-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung Yoon Lee ,  Chan Hwang ,  Jeong Jin Lee

IPC: G01B11/14 ,  G01B11/27 ,  G01B11/00 ,  G03F9/00

Abstract: A method for measuring wafer alignment is provided. The method includes providing a plurality of first mark patterns extending in a first direction on a wafer, providing at least one second mark pattern on the first mark patterns such that it overlaps and intersects the first mark patterns, irradiating an optical signal onto the first mark patterns and the second mark pattern and obtaining coordinates of the second mark pattern by detecting signals from the second mark pattern.