公开(公告)号：US11955475B2

公开(公告)日：2024-04-09

申请号：US18148810

申请日：2022-12-30

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Woocheol Shin ,  Myunggil Kang ,  Minyi Kim ,  Sanghoon Lee

IPC: H01L21/00 ,  H01L21/8234 ,  H01L27/06

CPC classification number: H01L27/0629 ,  H01L21/823431 ,  H01L21/823481

Abstract: A resistor including a device isolation layer is described that includes a first active region and a second active region, a buried insulating layer, and an N well region. The N well region surrounds the first active region, the second active region, the device isolation layer and the buried insulating layer. A first doped region and a second doped region are disposed on the first active region and the second active region. The first doped region and the second doped region are in contact with the N well region and include n type impurities.

公开(公告)号：US20230411458A1

公开(公告)日：2023-12-21

申请号：US18239660

申请日：2023-08-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ilgyou Shin ,  Minyi Kim ,  Myung Gil Kang ,  Jinbum Kim ,  Seung Hun Lee ,  Keun Hwi Cho

IPC: H01L29/15 ,  H01L29/78 ,  H01L29/417 ,  H01L29/10

CPC classification number: H01L29/158 ,  H01L29/1033 ,  H01L29/41791 ,  H01L29/785

Abstract: A semiconductor device includes; a substrate including a first region and a second region, a first active pattern extending upward from the first region, a first superlattice pattern on the first active pattern, a first active fin centrally disposed on the first active pattern, a first gate electrode disposed on the first active fin, and first source/drain patterns disposed on opposing sides of the first active fin and on the first active pattern. The first superlattice pattern includes at least one first semiconductor layer and at least one first blocker-containing layer, and the first blocker-containing layer includes at least one of oxygen, carbon, fluorine and nitrogen.

公开(公告)号：US11574905B2

公开(公告)日：2023-02-07

申请号：US17371494

申请日：2021-07-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Woocheol Shin ,  Myunggil Kang ,  Minyi Kim ,  Sanghoon Lee

IPC: H01L21/00 ,  H01L27/06 ,  H01L21/8234

Abstract: A resistor including a device isolation layer is described that includes a first active region and a second active region, a buried insulating layer, and an N well region. The N well region surrounds the first active region, the second active region, the device isolation layer and the buried insulating layer. A first doped region and a second doped region are disposed on the first active region and the second active region. The first doped region and the second doped region are in contact with the N well region and include n type impurities.

公开(公告)号：US11362182B2

公开(公告)日：2022-06-14

申请号：US17088011

申请日：2020-11-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ilgyou Shin ,  Minyi Kim ,  Myung Gil Kang ,  Jinbum Kim ,  Seung Hun Lee ,  Keun Hwi Cho

IPC: H01L29/15 ,  H01L29/78 ,  H01L29/417 ,  H01L29/10

Abstract: A semiconductor device includes; a substrate including a first region and a second region, a first active pattern extending upward from the first region, a first superlattice pattern on the first active pattern, a first active fin centrally disposed on the first active pattern, a first gate electrode disposed on the first active fin, and first source/drain patterns disposed on opposing sides of the first active fin and on the first active pattern. The first superlattice pattern includes at least one first semiconductor layer and at least one first blocker-containing layer, and the first blocker-containing layer includes at least one of oxygen, carbon, fluorine and nitrogen.

公开(公告)号：US11990534B2

公开(公告)日：2024-05-21

申请号：US17886612

申请日：2022-08-12

Applicant: Samsung Electronics Co., Ltd.

Inventor： Myung Gil Kang ,  Dongwon Kim ,  Minyi Kim ,  Keun Hwi Cho

IPC: H01L29/732 ,  H01L21/8228 ,  H01L21/8238 ,  H01L29/06 ,  H01L29/66 ,  H01L29/735

CPC classification number: H01L29/732 ,  H01L21/82285 ,  H01L21/823821 ,  H01L29/063 ,  H01L29/0649 ,  H01L29/6656 ,  H01L29/735

Abstract: A semiconductor device including a well region in a substrate, an impurity region in the well region, a first active fin on the impurity region, a second active fin on the well region, and a connection pattern penetrating the second active fin and connected to the well region may be provided. The substrate and the impurity region include impurities having a first conductivity type. The well region includes impurities having a second conductivity type different from the first conductivity type. The first active fin includes a plurality of first semiconductor patterns that are spaced apart from each other in a direction perpendicular to a top surface of the substrate. The first semiconductor patterns and the impurity region include impurities having the first conductivity type.

公开(公告)号：US11881509B2

公开(公告)日：2024-01-23

申请号：US17396942

申请日：2021-08-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Junbeom Park ,  Sangmo Koo ,  Minyi Kim ,  Seokhyeon Yoon

IPC: H01L29/08 ,  H01L29/66 ,  H01L29/10

CPC classification number: H01L29/0847 ,  H01L29/1033 ,  H01L29/66553

Abstract: The semiconductor device may include an active pattern provided on a substrate and a source/drain pattern on the active pattern. The source/drain pattern may include a bottom surface in contact with a top surface of the active pattern. The semiconductor device may further include a channel pattern connected to the source/drain pattern, a gate electrode extended to cross the channel pattern, and a fence insulating layer extended from a side surface of the active pattern to a lower side surface of the source/drain pattern. A pair of middle insulating patterns may be at both sides of the bottom surface of the source/drain pattern and between the active pattern and the source/drain pattern in contact with an inner side surface of the fence insulating layer.

公开(公告)号：US11075197B2

公开(公告)日：2021-07-27

申请号：US16784788

申请日：2020-02-07

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Woocheol Shin ,  Myunggil Kang ,  Minyi Kim ,  Sanghoon Lee

IPC: H01L21/00 ,  H01L27/06 ,  H01L21/8234

Abstract: A resistor including a device isolation layer is described that includes a first active region and a second active region, a buried insulating layer, and an N well region. The N well region surrounds the first active region, the second active region, the device isolation layer and the buried insulating layer. A first doped region and a second doped region are disposed on the first active region and the second active region. The first doped region and the second doped region are in contact with the N well region and include n type impurities.

公开(公告)号：US20250120149A1

公开(公告)日：2025-04-10

申请号：US18949790

申请日：2024-11-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ilgyou Shin ,  Minyi Kim ,  Myung Gil Kang ,  Jinbum Kim ,  Seung Hun Lee ,  Keun Hwi Cho

IPC: H10D62/815 ,  H10D30/62 ,  H10D62/17

Abstract: A semiconductor device includes; a substrate including a first region and a second region, a first active pattern extending upward from the first region, a first superlattice pattern on the first active pattern, a first active fin centrally disposed on the first active pattern, a first gate electrode disposed on the first active fin, and first source/drain patterns disposed on opposing sides of the first active fin and on the first active pattern. The first superlattice pattern includes at least one first semiconductor layer and at least one first blocker-containing layer, and the first blocker-containing layer includes at least one of oxygen, carbon, fluorine and nitrogen.

公开(公告)号：US12166081B2

公开(公告)日：2024-12-10

申请号：US18239660

申请日：2023-08-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ilgyou Shin ,  Minyi Kim ,  Myung Gil Kang ,  Jinbum Kim ,  Seung Hun Lee ,  Keun Hwi Cho

IPC: H01L29/15 ,  H01L29/10 ,  H01L29/417 ,  H01L29/78

Abstract: A semiconductor device includes; a substrate including a first region and a second region, a first active pattern extending upward from the first region, a first superlattice pattern on the first active pattern, a first active fin centrally disposed on the first active pattern, a first gate electrode disposed on the first active fin, and first source/drain patterns disposed on opposing sides of the first active fin and on the first active pattern. The first superlattice pattern includes at least one first semiconductor layer and at least one first blocker-containing layer, and the first blocker-containing layer includes at least one of oxygen, carbon, fluorine and nitrogen.

公开(公告)号：US11777001B2

公开(公告)日：2023-10-03

申请号：US17742985

申请日：2022-05-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ilgyou Shin ,  Minyi Kim ,  Myung Gil Kang ,  Jinbum Kim ,  Seung Hun Lee ,  Keun Hwi Cho

IPC: H01L29/15 ,  H01L29/78 ,  H01L29/417 ,  H01L29/10

CPC classification number: H01L29/158 ,  H01L29/1033 ,  H01L29/41791 ,  H01L29/785

Abstract: A semiconductor device includes; a substrate including a first region and a second region, a first active pattern extending upward from the first region, a first superlattice pattern on the first active pattern, a first active fin centrally disposed on the first active pattern, a first gate electrode disposed on the first active fin, and first source/drain patterns disposed on opposing sides of the first active fin and on the first active pattern. The first superlattice pattern includes at least one first semiconductor layer and at least one first blocker-containing layer, and the first blocker-containing layer includes at least one of oxygen, carbon, fluorine and nitrogen.