公开(公告)号：US20230178394A1

公开(公告)日：2023-06-08

申请号：US18062830

申请日：2022-12-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Tatsuya ISHIMOTO ,  Naoyuki TAKADA ,  Takahiro TOKUMIYA ,  Masato KAJINAMI

IPC: H01L21/67

CPC classification number: H01L21/67132

Abstract: A chip peeling apparatus may include a peeling device. The peeling device may include a plurality of vacuum adsorption holes and a plurality of first air blow holes arranged around the plurality of vacuum adsorption holes. The peeling device may be configured to peel a chip off a tape when the peeling device is arranged below a region of the tape on which the chip is attached, vacuum pressure is applied through the plurality of vacuum adsorption holes to adsorb the peeling device to the region of the tape, and a first air blow is directed through the plurality of first air blow holes to the region of the tape.

公开(公告)号：US20160157741A1

公开(公告)日：2016-06-09

申请号：US14959111

申请日：2015-12-04

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Wen Xi CHEN ,  Takeshi NAGAHIRO ,  Yosuke AOYAGI ,  Naoyuki TAKADA ,  Takahiro TOKUMIYA

IPC: A61B5/024 ,  G01J1/02

CPC classification number: G01J1/0271 ,  A61B5/02427 ,  A61B5/6843 ,  G01J5/0025 ,  G01J5/0275 ,  G01J5/04 ,  G01J5/0896

Abstract: A photoelectric sensor retainer and a photoelectric pulse wave measuring apparatus including the same are provided. The photoelectric sensor retainer includes a sensor mounting unit on which a photoelectric sensor having a light-receiving surface is attachable and detachable, the light-receiving surface facing a measuring direction. The photoelectric sensor retainer further includes a pressing unit configured to press an upper surface of the sensor mounting unit in the measuring direction to apply pressure to the sensor mounting unit, and a pedestal including a seating plate configured to support the pressing unit, the seating plate having a principal plane perpendicular to a pressing direction of the pressing unit.

Abstract translation: 提供了一种光电传感器保持器和包括该光电传感器保持器的光电脉冲波测量装置。 光电传感器保持器包括：传感器安装单元，具有光接收表面的光电传感器在该传感器安装单元上可安装和拆卸，光接收表面面向测量方向。 光电传感器保持器还包括按压单元，该按压单元被配置为沿测量方向按压传感器安装单元的上表面以对传感器安装单元施加压力;以及基座，其包括配置成支撑按压单元的座板， 具有垂直于按压单元的按压方向的主平面。

公开(公告)号：US20250029863A1

公开(公告)日：2025-01-23

申请号：US18625030

申请日：2024-04-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Naoyuki TAKADA

IPC: H01L21/683 ,  H05B3/28

Abstract: An electrostatic chuck module operates at temperatures above the heat resistance temperature of a resin. The electrostatic chuck module includes: a base that includes a flow path for a coolant disposed below the base, a concave part disposed on the base, and a convex part disposed along an outer circumference of the base; an insulator disposed in the concave part of the base; a resistance heating element disposed on or within the insulator; a crack plate disposed on the insulator and the resistance heating element; and a ceramics plate disposed on the crack plate and that includes an electrode that adsorbs a target object with static electricity. The convex part of the base is bonded to the crack plate.

公开(公告)号：US20220223384A1

公开(公告)日：2022-07-14

申请号：US17570806

申请日：2022-01-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Naoyuki TAKADA ,  Noriaki IMAI ,  Takafumi NOGUCHI ,  Toshihiro IIZUKA ,  Yoshiaki MORIYA

IPC: H01J37/32 ,  H01L21/683

Abstract: An apparatus for manufacturing a semiconductor device may include a vacuum chamber, an electrostatic chuck (ESC), a cooler, an RF plate, a casing, a base plate and a gas supplier. The ESC may be arranged in the vacuum chamber. The cooler may be configured to cool the ESC. The RF plate may be arranged under the cooler. The casing may be configured to support the cooler. The base plate may be opposite to the RF plate to form an inner space together with the casing. The gas supplier may supply a gas having a low dew point to the inner space. Thus, a generation of the dew condensation at the very low temperature may be prevented so that a damage caused by a short, which may be generated by the dew condensation, may also be prevented.

公开(公告)号：US20220139755A1

公开(公告)日：2022-05-05

申请号：US17375263

申请日：2021-07-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Naoyuki TAKADA ,  Masato KAJINAMI ,  Tatsuya ISHIMOTO

IPC: H01L21/683

Abstract: A semiconductor manufacturing apparatus comprises an adsorption unit defining a plurality of pressing holes in the adsorption unit, the plurality of pressing holes configured to eject gas, and defining a plurality of suction holes in the adsorption unit, the plurality of suction holes configured to suction the gas and to handle a semiconductor chip through the gas. At least one of the suction holes is adjacent to at least one of an apex of the adsorption unit or an edge of the adsorption unit.

公开(公告)号：US20160113530A1

公开(公告)日：2016-04-28

申请号：US14921543

申请日：2015-10-23

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： TAKESHI NAGAHIRO ,  Takahiro TOKUMIYA ,  Naoyuki TAKADA ,  Yosuke AOYAGI

IPC: A61B5/021 ,  A61B5/00

CPC classification number: A61B5/02125 ,  A61B5/0075 ,  A61B5/0082 ,  A61B5/02416 ,  A61B5/02427 ,  A61B5/02438 ,  A61B5/681 ,  A61B5/6843 ,  A61B5/721

Abstract: A method and an apparatus for acquiring biological information, and a wrist watch-type terminal using the same, are provided. The apparatus includes a first detector configured to irradiate a living body with a first light of a first wavelength, and detect a second light that is reflected from the living body, and a second detector configured to irradiate the living body with a third light of a second wavelength, and detect a fourth light that is reflected from the living body. The apparatus further includes a processor configured to determine a pulse wave of the living body based on a subtraction value of subtracting a detection signal that is determined by irradiating the third light of the second wavelength from a detection signal that is determined by irradiating the first light of the first wavelength.

Abstract translation: 提供一种用于获取生物信息的方法和装置，以及使用该信息的手表型终端。 该装置包括：第一检测器，其被配置为用第一波长的第一光照射生物体，并检测从生物体反射的第二光;以及第二检测器，被配置为用第三光照射生物体， 第二波长，并且检测从生物体反射的第四光。 该装置还包括：处理器，被配置为基于通过从通过照射第一光确定的检测信号减去通过照射第二波长的第三光确定的检测信号的减法值来确定生物体的脉搏波 的第一波长。