公开(公告)号：US11728160B2

公开(公告)日：2023-08-15

申请号：US17376403

申请日：2021-07-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Younsoo Kim ,  Haeryong Kim ,  Seungmin Ryu ,  Sunmin Moon ,  Jeonggyu Song ,  Changsu Woo ,  Kyooho Jung ,  Younjoung Cho

IPC: H01L21/02

CPC classification number: H01L21/02164 ,  H01L21/0228

Abstract: A method of forming an oxide film including two non-oxygen elements includes providing a first source material on a substrate, the first source material including a first central element, providing an electron donor compound to be bonded to the first source material, providing a second source material on the substrate after the providing of the electron donor compound, the second source material including a second central element, and providing an oxidant on the substrate.

公开(公告)号：US11466043B2

公开(公告)日：2022-10-11

申请号：US16881283

申请日：2020-05-22

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Soyoung Lee ,  Seungmin Ryu ,  Gyuhee Park ,  Jaesoon Lim ,  Younjoung Cho ,  Akio Saito ,  Wakana Fuse ,  Yutaro Aoki ,  Takanori Koide

IPC: C07F17/00 ,  C09D1/00 ,  C01B21/06 ,  H01L21/28 ,  H01L49/02 ,  H01L21/285

Abstract: A niobium compound and a method of forming a thin film using the niobium compound, the compound being represented by the following General formula I: wherein, in General formula I, R1, R4, R5, R6, R7, and R8 are each independently a hydrogen atom, a C1-C6 linear or branched alkyl group or a C3-C6 cyclic hydrocarbon group, at least one of R4, R5, R6, R7, and R8 being a C1-C6 linear or branched alkyl group, and R2 and R3 are each independently a hydrogen atom, a halogen atom, a C1-C6 linear or branched alkyl group, or a C3-C6 cyclic hydrocarbon group.

公开(公告)号：US11081338B2

公开(公告)日：2021-08-03

申请号：US16791189

申请日：2020-02-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Younsoo Kim ,  Haeryong Kim ,  Seungmin Ryu ,  Sunmin Moon ,  Jeonggyu Song ,  Changsu Woo ,  Kyooho Jung ,  Younjoung Cho

IPC: H01L21/02

Abstract: A method of forming an oxide film including two non-oxygen elements includes providing a first source material on a substrate, the first source material including a first central element, providing an electron donor compound to be bonded to the first source material, providing a second source material on the substrate after the providing of the electron donor compound, the second source material including a second central element, and providing an oxidant on the substrate.

公开(公告)号：US20240183702A1

公开(公告)日：2024-06-06

申请号：US18519696

申请日：2023-11-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seunghun Kim ,  Kyungho Kang ,  Seungmin Ryu ,  Donghoon Park ,  Minseok Seo ,  Jiho Uh ,  Seunglae Cho

IPC: G01F25/00 ,  G01F25/10

CPC classification number: G01F25/0084 ,  G01F25/10

Abstract: A method of calibrating a zero point of a mass flow control device includes closing a valve installed in a main flow path of the mass flow control device to block the main flow path and prevent a fluid from flowing in the main flow path, determining, based on a pressure value measured using a pressure meter installed in the main flow path, whether the fluid has stopped flowing, determining, based on a flowrate value measured by a flowrate sensor provided on a sensor flow path connected to the main flow path, whether the fluid is stable, calculating a zero point calibration value based on a temperature value of the fluid measured by a thermometer installed in the main flow path and the flowrate value measured by the flowrate sensor, and applying the zero point calibration value to a zero point of the flowrate sensor.

公开(公告)号：US20230360881A1

公开(公告)日：2023-11-09

申请号：US18139639

申请日：2023-04-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kwangyoung Jung ,  Youngmin Min ,  Jungan Kwon ,  Gillhoon Shin ,  Keechun Shim ,  Daeseong Ha ,  Kyoungsuk Kim ,  Seungmin Ryu ,  Hyunsuk Park ,  Jiho Uh ,  Hyunjoon Ohn ,  Hyeseon Lee

IPC: H01J37/32

CPC classification number: H01J37/32082 ,  H01J2237/334 ,  H01J2237/24585 ,  H01J2237/24564

Abstract: A radio frequency (RF) generator including a carbonization prevention system includes a casing on which an intake fan and an interlock are mounted, an alternating current (AC) power supply, a power supply, a power amplifier (PA), a coupler provided between the PA and the RF output connector, and a control board that controls an amount of DC power output to the PA according to the calculated values. The carbonization prevention system detects smoke generated in the casing, measures a temperature and a humidity in the casing, and generates and transmits a control signal to the control board and an operation control signal to the interlock according to a reading result.