Abstract:
A substrate processing apparatus includes a chamber providing a space in which a substrate is processed, a first substrate support within the chamber and configured to support the substrate when the substrate is loaded into chamber, a second substrate support within the chamber and configured to support the substrate in a height greater than the height in which the first substrate supports the substrate, a first supply port through which a supercritical fluid is supplied to a first space under the substrate of a chamber space, a second supply port through which the supercritical fluid is supplied to a second space above the substrate of the chamber space, and an exhaust port through which the supercritical fluid is exhausted from the chamber.
Abstract:
A substrate processing apparatus includes a chamber providing a space in which a substrate is processed, a first substrate support within the chamber and configured to support the substrate when the substrate is loaded into chamber, a second substrate support within the chamber and configured to support the substrate in a height greater than the height in which the first substrate supports the substrate, a first supply port through which a supercritical fluid is supplied to a first space under the substrate of a chamber space, a second supply port through which the supercritical fluid is supplied to a second space above the substrate of the chamber space, and an exhaust port through which the supercritical fluid is exhausted from the chamber.
Abstract:
An electronic device and a method of the electronic device are provided. The electronic device includes a location measurement module configured to measure a location; a memory configured to store an application program; and a processor electrically connected to the location measurement module and the memory, wherein the memory stores instructions that, when executed, cause the processor to store location information obtained by the location measurement module in the memory, process a request from the application program to obtain location information, and, in response to the request to obtain location information, provide the stored location information to the application program based on at least part of the location information stored in the memory.
Abstract:
An operating method of an electronic device is provided. The method includes determining, by a first processor using at least one sensor, whether a state change occurs, if it is determined that there is the state change, determining, by the first processor, whether to transmit state information to a second processor, and determining, by the second processor, whether to measure a changed position at each of set periods using a position measuring module on the basis of whether the state information is received.
Abstract:
Disclosed are a method of managing geo-fences by an electronic device and an electronic device therefor. An operation of the electronic device may include: identifying a deletion of at least some geo-fences among a plurality of geo-fences stored in the electronic device or an addition of other geo-fences; identifying a number of remaining geo-fences among the plurality of geo-fences according to the deletion or the addition; and when the number of remaining geo-fences is larger than a number of geo-fences which can be allowed by hardware resources, grouping the remaining geo-fences as one or more geo-fence groups.
Abstract:
Provided is a system and method for transmitting a satellite state to a satellite receiver to determine use or non-use of a satellite signal in positioning estimation. A satellite navigation system includes at least one satellite, a satellite control center for controlling the at least one satellite, and a server. The server transmits satellite state information about the at least one satellite identified through the satellite control center to the satellite receiver. The satellite receiver restricts the use of the satellite signal for positioning estimation when the satellite state is identified as erroneous.