公开(公告)号：US09443979B2

公开(公告)日：2016-09-13

申请号：US14455036

申请日：2014-08-08

申请人： Sang-Jine Park ,  Bo-Un Yoon ,  Ha-Young Jeon ,  Byung-Kwon Cho ,  Jeong-Nam Han

发明人： Sang-Jine Park ,  Bo-Un Yoon ,  Ha-Young Jeon ,  Byung-Kwon Cho ,  Jeong-Nam Han

IPC分类号： H01L29/78 ,  H01L27/08 ,  H01L21/28 ,  H01L27/088 ,  H01L29/423 ,  H01L29/66 ,  H01L29/49

CPC分类号： H01L29/66545 ,  H01L21/28114 ,  H01L27/0886 ,  H01L29/42376 ,  H01L29/4958 ,  H01L29/4966 ,  H01L29/66795 ,  H01L29/7848 ,  H01L29/785 ,  H01L29/7851

摘要： A semiconductor device includes a gate spacer defining a trench. The trench includes a first part and a second part sequentially positioned on a substrate. An inner surface of the first part has a slope of an acute angle and an inner surface of the second part has a slope of a right angle or obtuse angle with respect to the substrate. A gate electrode fills at least a portion of the trench.

摘要翻译： 半导体器件包括限定沟槽的栅极间隔。 沟槽包括顺序地位于基板上的第一部分和第二部分。 第一部分的内表面具有锐角的斜面，并且第二部分的内表面具有相对于基底的直角或钝角的斜率。 栅电极填充沟槽的至少一部分。

公开(公告)号：US09755079B2

公开(公告)日：2017-09-05

申请号：US15000495

申请日：2016-01-19

申请人： Sang-Jine Park ,  Keun-Hee Bai ,  Kyoung-Hwan Yeo ,  Bo-Un Yoon ,  Kee-Sang Kwon ,  Do-Hyoung Kim ,  Ha-Young Jeon ,  Seung-Seok Ha

发明人： Sang-Jine Park ,  Keun-Hee Bai ,  Kyoung-Hwan Yeo ,  Bo-Un Yoon ,  Kee-Sang Kwon ,  Do-Hyoung Kim ,  Ha-Young Jeon ,  Seung-Seok Ha

IPC分类号： H01L27/088 ,  H01L29/78 ,  H01L29/49 ,  H01L29/423 ,  H01L29/06 ,  H01L27/092 ,  H01L27/12

CPC分类号： H01L29/785 ,  H01L27/0886 ,  H01L27/0924 ,  H01L27/1211 ,  H01L29/0657 ,  H01L29/4238 ,  H01L29/495 ,  H01L29/7848

摘要： Semiconductor devices are provided including a first active fin extending in a first direction and a second active fin spaced apart from the first active fin in a second direction perpendicular to the first direction, the second active fin extending in the first direction, the second active fin having a longer side shorter than a length of a longer side of the first active fin. A first dummy gate extends in the second direction overlapping a first end of each of the first and second active fins. A first metal gate extends in the second direction intersecting the first active fin and overlapping a second end of the second active fin. A first insulating gate extends in the second direction intersecting the first active fin. The first insulating gate extends into the first active fin.

公开(公告)号：US09704864B2

公开(公告)日：2017-07-11

申请号：US14746229

申请日：2015-06-22

申请人： Sang-Jine Park ,  Bo-Un Yoon ,  Ha-Young Jeon ,  Yeon-Jin Gil ,  Ji-Won Yun ,  Won-Sang Choi

发明人： Sang-Jine Park ,  Bo-Un Yoon ,  Ha-Young Jeon ,  Yeon-Jin Gil ,  Ji-Won Yun ,  Won-Sang Choi

IPC分类号： H01L21/70 ,  H01L27/092 ,  H01L29/78 ,  H01L27/088 ,  H01L29/165 ,  H01L21/8238

CPC分类号： H01L27/0924 ,  H01L21/76224 ,  H01L21/823807 ,  H01L21/823821 ,  H01L21/823878 ,  H01L27/0886 ,  H01L29/165 ,  H01L29/7846 ,  H01L29/7848 ,  H01L29/785

摘要： Semiconductor devices are provided. A semiconductor device includes a fin protruding from a substrate. Moreover, the semiconductor device includes first and second gate structures on the fin, and an isolation region between the first and second gate structures. The isolation region includes first and second portions having different respective widths. Related methods of forming semiconductor devices are also provided.

公开(公告)号：US20160043170A1

公开(公告)日：2016-02-11

申请号：US14746229

申请日：2015-06-22

申请人： Sang-Jine Park ,  Bo-Un Yoon ,  Ha-Young Jeon ,  Yeon-Jin Gil ,  Ji-Won Yun ,  Won-Sang Choi

发明人： Sang-Jine Park ,  Bo-Un Yoon ,  Ha-Young Jeon ,  Yeon-Jin Gil ,  Ji-Won Yun ,  Won-Sang Choi

IPC分类号： H01L29/06 ,  H01L27/092 ,  H01L29/78

CPC分类号： H01L27/0924 ,  H01L21/76224 ,  H01L21/823807 ,  H01L21/823821 ,  H01L21/823878 ,  H01L27/0886 ,  H01L29/165 ,  H01L29/7846 ,  H01L29/7848 ,  H01L29/785

摘要： Semiconductor devices are provided. A semiconductor device includes a fin protruding from a substrate. Moreover, the semiconductor device includes first and second gate structures on the fin, and an isolation region between the first and second gate structures. The isolation region includes first and second portions having different respective widths. Related methods of forming semiconductor devices are also provided.

摘要翻译： 提供半导体器件。 半导体器件包括从衬底突出的翅片。 此外，半导体器件包括翅片上的第一和第二栅极结构以及第一和第二栅极结构之间的隔离区域。 隔离区域包括具有不同相应宽度的第一和第二部分。 还提供了形成半导体器件的相关方法。