-
1.发明授权公开(公告)号：US07678599B2
公开(公告)日：2010-03-16
申请号：US11566590
申请日：2006-12-04
IPC分类号： H01L21/00
CPC分类号： H01H1/0036 , G01P1/023 , G01P15/06 , G01P15/0802 , G01P15/0891 , G01P15/18 , G01P2015/0814 , H01H35/146
摘要： A process for the fabrication of an inertial sensor with failure threshold includes the step of forming, on top of a substrate of a semiconductor wafer, a sample element embedded in a sacrificial region, the sample element configured to break under a preselected strain. The process further includes forming, on top of the sacrificial region, a body connected to the sample element and etching the sacrificial region so as to free the body and the sample element. The process may also include forming, on the substrate, additional sample elements connected to the body.
摘要翻译： 用于制造具有故障阈值的惯性传感器的方法包括在半导体晶片的衬底的顶部上形成嵌入在牺牲区域中的样品元件的步骤，所述样品元件构造成在预选应变下断裂。 该方法还包括在牺牲区域的顶部上形成连接到样品元件的主体并蚀刻牺牲区域以释放身体和样品元件。 该方法还可以包括在基底上形成连接到身体的附加样品元件。
-
公开(公告)号：US06858810B2
公开(公告)日：2005-02-22
申请号：US10650452
申请日：2003-08-27
CPC分类号： G01P1/127 , G01P15/06 , G01P15/0802 , G01P15/0891 , G01P15/18 , G01P2015/0814 , H01H1/0036 , H01H35/146
摘要： An inertial sensor with failure threshold includes a first body and a second body, which can move relative to one another and are constrained by a plurality of elastic elements, and a sample element connected between the first body and the second body and shaped so as to be subjected to a stress when the second body is outside of a relative resting position with respect to the first body. The sample element has at least one weakened region. The sensor may also include additional sample elements connected between the first and second bodies.
摘要翻译： 具有故障阈值的惯性传感器包括第一主体和第二主体，其可以相对于彼此移动并被多个弹性元件约束;以及样本元件，其连接在第一主体和第二主体之间，并且成形为 当第二主体相对于第一主体位于相对静止位置之外时受到应力。 样品元件具有至少一个弱化区域。 传感器还可以包括连接在第一和第二主体之间的附加样本元件。
-
3.发明申请公开(公告)号：US20070175865A1
公开(公告)日：2007-08-02
申请号：US11566590
申请日：2006-12-04
IPC分类号： C23F1/00
CPC分类号： H01H1/0036 , G01P1/023 , G01P15/06 , G01P15/0802 , G01P15/0891 , G01P15/18 , G01P2015/0814 , H01H35/146
摘要： A process for the fabrication of an inertial sensor with failure threshold includes the step of forming, on top of a substrate of a semiconductor wafer, a sample element embedded in a sacrificial region, the sample element configured to break under a preselected strain. The process further includes forming, on top of the sacrificial region, a body connected to the sample element and etching the sacrificial region so as to free the body and the sample element. The process may also include forming, on the substrate, additional sample elements connected to the body.
摘要翻译： 用于制造具有故障阈值的惯性传感器的方法包括在半导体晶片的衬底的顶部上形成嵌入在牺牲区域中的样品元件的步骤，所述样品元件构造成在预选应变下断裂。 该方法还包括在牺牲区域的顶部上形成连接到样品元件的主体并蚀刻牺牲区域以释放身体和样品元件。 该方法还可以包括在基底上形成连接到身体的附加样品元件。
-
公开(公告)号：US20120000287A1
公开(公告)日：2012-01-05
申请号：US13161345
申请日：2011-06-15
申请人： Attilio Frangi , Biagio De Masi , Barbara Simoni
发明人： Attilio Frangi , Biagio De Masi , Barbara Simoni
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/18
摘要： A micromechanical structure for a MEMS three-axis capacitive accelerometer is provided with: a substrate; a single inertial mass having a main extension in a plane and arranged suspended above the substrate; and a frame element, elastically coupled to the inertial mass by coupling elastic elements and to anchorages, which are fixed with respect to the substrate by anchorage elastic elements. The coupling elastic elements and the anchorage elastic elements are configured so as to enable a first inertial movement of the inertial mass in response to a first external acceleration acting in a direction lying in the plane and also a second inertial movement of the inertial mass in response to a second external acceleration acting in a direction transverse to the plane.
摘要翻译： 用于MEMS三轴电容式加速度计的微机械结构设有：基板; 一个单一的惯性质量体，它在一个平面上具有一个主要的延伸部分，并悬置在衬底上; 以及框架元件，其通过联接弹性元件和锚固件而弹性地联接到惯性块，锚定件通过锚固弹性元件相对于基底固定。 联接弹性元件和锚固弹性元件构造成使得能够响应于沿着平面中的方向起作用的第一外部加速度以及惯性块的第二惯性运动来响应惯性质量的第一惯性运动 到横向于该平面的方向作用的第二外部加速度。
-
5.发明授权Microelectromechanical sensor with non-conductive sensing mass, and method of sensing through a microelectromechanical sensor 有权具有非导电感测质量的微机电传感器，以及通过微机电传感器检测的方法公开(公告)号：US09080871B2
公开(公告)日：2015-07-14
申请号：US13612583
申请日：2012-09-12
IPC分类号： G01C19/56 , G01P15/125 , G01C19/5762 , G01C19/5755
CPC分类号： G01C19/5762 , G01C19/5755 , G01P15/125
摘要： A microelectromechanical sensor includes: a supporting structure, having at least one first electrode and one second electrode, which form a capacitor; and a sensing mass made of non-conductive material, which is arranged so as to interact with an electric field associated to the capacitor and is movable with respect to the supporting structure according to a degree of freedom so that a relative position of the sensing mass with respect to the first electrode and to the second electrode is variable in response to external stresses. The sensing mass is made of a material selected in the group consisting of: intrinsic semiconductor materials, oxides of semiconductor materials, and nitrides of semiconductor materials.
摘要翻译： 微机电传感器包括：支撑结构，其具有形成电容器的至少一个第一电极和一个第二电极; 以及由非导电材料制成的传感块，其被布置成与与电容器相关联的电场相互作用并且可以根据自由度相对于支撑结构移动，使得感测质量块的相对位置 相对于第一电极和第二电极响应于外部应力而变化。 传感质量由选自本征半导体材料，半导体材料的氧化物和半导体材料的氮化物组成的组中选择的材料制成。
-
公开(公告)号：US08863575B2
公开(公告)日：2014-10-21
申请号：US13161345
申请日：2011-06-15
申请人： Attilio Frangi , Biagio De Masi , Barbara Simoni
发明人： Attilio Frangi , Biagio De Masi , Barbara Simoni
IPC分类号： G01P15/125 , G01P15/18
CPC分类号： G01P15/125 , G01P15/18
摘要： A micromechanical structure for a MEMS structure is provided with: a substrate; a single inertial mass having a main extension in a plane and arranged suspended above the substrate; and a frame element, elastically coupled to the inertial mass by coupling elastic elements and to anchorages, which are fixed with respect to the substrate by anchorage elastic elements. The coupling elastic elements and the anchorage elastic elements are configured so as to enable a first inertial movement of the inertial mass in response to a first external acceleration acting in a direction lying in the plane and also a second inertial movement of the inertial mass in response to a second external acceleration acting in a direction transverse to the plane.
摘要翻译： 用于MEMS结构的微机械结构设置有：基板; 一个单一的惯性质量体，它在一个平面上具有一个主要的延伸部分，并悬置在衬底上; 以及框架元件，其通过联接弹性元件和锚固件而弹性地联接到惯性块，锚定件通过锚固弹性元件相对于基底固定。 联接弹性元件和锚固弹性元件构造成使得能够响应于沿着平面中的方向起作用的第一外部加速度以及惯性块的第二惯性运动来响应惯性质量的第一惯性运动 到横向于该平面的方向作用的第二外部加速度。
-
7.发明申请MICROELECTROMECHANICAL SENSOR WITH NON-CONDUCTIVE SENSING MASS, AND METHOD OF SENSING THROUGH A MICROELECTROMECHANICAL SENSOR 有权具有非导电感测质量的微电子传感器和通过微电子传感器进行感测的方法公开(公告)号：US20130081466A1
公开(公告)日：2013-04-04
申请号：US13612583
申请日：2012-09-12
IPC分类号： G01C19/56
CPC分类号： G01C19/5762 , G01C19/5755 , G01P15/125
摘要： A microelectromechanical sensor includes: a supporting structure, having at least one first electrode and one second electrode, which form a capacitor; and a sensing mass made of non-conductive material, which is arranged so as to interact with an electric field associated to the capacitor and is movable with respect to the supporting structure according to a degree of freedom so that a relative position of the sensing mass with respect to the first electrode and to the second electrode is variable in response to external stresses. The sensing mass is made of a material selected in the group consisting of: intrinsic semiconductor materials, oxides of semiconductor materials, and nitrides of semiconductor materials.
摘要翻译： 微机电传感器包括：支撑结构，其具有形成电容器的至少一个第一电极和一个第二电极; 以及由非导电材料制成的传感块，其被布置成与与电容器相关联的电场相互作用并且可以根据自由度相对于支撑结构移动，使得感测质量块的相对位置 相对于第一电极和第二电极响应于外部应力而变化。 传感质量由选自本征半导体材料，半导体材料的氧化物和半导体材料的氮化物组成的组中选择的材料制成。
-
-
-
-
-
-
搜索结果
7 条记录 (耗时 0.045 秒)
