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12 条记录 (耗时 0.023 秒)

    Distributed bragg reflector and method of fabrication
    2.
    发明申请
    Distributed bragg reflector and method of fabrication 失效
    分布式布拉格反射器和制造方法

    公开(公告)号：US20050219703A1

    公开(公告)日：2005-10-06

    申请号：US11122555

    申请日：2005-05-04

    申请人： Scott Corzine ,  Michael Tan ,  Chao Lin ,  Jintian Zhu ,  Michael Leary

    发明人： Scott Corzine ,  Michael Tan ,  Chao Lin ,  Jintian Zhu ,  Michael Leary

    IPC分类号： H01S5/183 ,  H01S5/00

    CPC分类号： H01S5/18341 ,  H01S5/18308 ,  H01S5/18363

    摘要： A distributed Bragg reflector and a method of fabricating the same incorporates a support for supporting the gaps against collapse. The method includes forming a plurality of alternating structure and sacrificial layers on a substrate. The structure and sacrificial layers are etched into at least one mesa protruding from the substrate. A support layer is formed on the at least one mesa leaving a portion of the structure and sacrificial layers exposed. At least a portion of at least one of the exposed sacrificial layers are etched from between the structure layers to form gaps between the structure layers.

    摘要翻译： 分布式布拉格反射器及其制造方法包括用于支撑间隙以防止塌陷的支撑件。 该方法包括在衬底上形成多个交替结构和牺牲层。 将结构和牺牲层刻蚀成从衬底突出的至少一个台面。 在至少一个台面上形成支撑层，留下结构的一部分和暴露的牺牲层。 暴露的牺牲层中的至少一个的至少一部分从结构层之间被蚀刻，以在结构层之间形成间隙。

    Vertical-cavity surface-emitting laser including a supported airgap distributed bragg reflector
    3.
    发明授权
    Vertical-cavity surface-emitting laser including a supported airgap distributed bragg reflector 有权
    垂直腔表面发射激光器包括支持的气隙分布式布拉格反射器

    公开(公告)号：US07573931B2

    公开(公告)日：2009-08-11

    申请号：US10042590

    申请日：2002-01-09

    申请人： Michael Renne Ty Tan ,  Chao Kun Lin ,  Scott W. Corzine ,  Jintian Zhu ,  Michael H. Leary

    发明人： Michael Renne Ty Tan ,  Chao Kun Lin ,  Scott W. Corzine ,  Jintian Zhu ,  Michael H. Leary

    IPC分类号： H01S3/08 ,  H01S5/343

    CPC分类号： H01S5/18341 ,  H01S5/18308 ,  H01S5/18363 ,  H01S5/2224 ,  H01S5/3095

    摘要： A vertical-cavity surface-emitting laser incorporating a supported air gap distributed Bragg reflector is disclosed. The supported air gap DBR includes a regrowth layer of material that provides mechanical support for the original material layers. The supported air gap DBR is fabricated by first growing alternating pairs of a first material and a sacrificial material over a suitable substrate. The layer pairs of the first material and sacrificial material are covered by a suitable dielectric material. The dielectric material is then selectively removed exposing regions of the first material and sacrificial material where selective regrowth of additional material is desired. The selective regrowth of the additional material provides mechanical support for the semiconductor material that remains after a selective etch removal of the sacrificial material.

    摘要翻译： 公开了一种结合有支撑气隙分布布拉格反射器的垂直腔表面发射激光器。 支撑气隙DBR包括为原始材料层提供机械支撑的再生长材料层。 支撑的气隙DBR是通过在合适的衬底上首先生长第一材料和牺牲材料的交替对来制造的。 第一材料和牺牲材料的层对被合适的介电材料覆盖。 然后选择性地去除介电材料暴露第一材料和牺牲材料的区域，其中期望附加材料的选择性再生长。 附加材料的选择性再生长为在牺牲材料的选择性蚀刻去除之后保留的半导体材料提供机械支撑。

    Distributed Bragg reflector and method of fabrication
    7.
    发明授权
    Distributed Bragg reflector and method of fabrication 失效
    分布式布拉格反射器和制造方法

    公开(公告)号：US06947217B2

    公开(公告)日：2005-09-20

    申请号：US10022757

    申请日：2001-12-14

    申请人： Scott W. Corzine ,  Michael Renne Ty Tan ,  Chao Kun Lin ,  Jintian Zhu ,  Michael H. Leary

    发明人： Scott W. Corzine ,  Michael Renne Ty Tan ,  Chao Kun Lin ,  Jintian Zhu ,  Michael H. Leary

    IPC分类号： H01S5/183 ,  G02B1/10

    CPC分类号： H01S5/18341 ,  H01S5/18308 ,  H01S5/18363

    摘要： A distributed Bragg reflector and a method of fabricating the same incorporates a support for supporting the gaps against collapse. The method includes forming a plurality of alternating structure and sacrificial layers on a substrate. The structure and sacrificial layers are etched into at least one mesa protruding from the substrate. A support layer is formed on the at least one mesa leaving a portion of the structure and sacrificial layers exposed. At least a portion of at least one of the exposed sacrificial layers are etched from between the structure layers to form gaps between the structure layers.

    摘要翻译： 分布式布拉格反射器及其制造方法包括用于支撑间隙以防止塌陷的支撑件。 该方法包括在衬底上形成多个交替结构和牺牲层。 将结构和牺牲层刻蚀成从衬底突出的至少一个台面。 在至少一个台面上形成支撑层，留下结构的一部分和暴露的牺牲层。 暴露的牺牲层中的至少一个的至少一部分从结构层之间被蚀刻，以在结构层之间形成间隙。

    SEMICONDUCTOR OPTICAL MODULATOR HAVING A QUANTUM WELL STRUCTURE FOR INCREASING EFFECTIVE PHOTOCURRENT GENERATING CAPABILITY
    10.
    发明申请
    SEMICONDUCTOR OPTICAL MODULATOR HAVING A QUANTUM WELL STRUCTURE FOR INCREASING EFFECTIVE PHOTOCURRENT GENERATING CAPABILITY 有权
    具有提高有效光电发生能力的量子阱结构的半导体光学调制器

    公开(公告)号：US20060269183A1

    公开(公告)日：2006-11-30

    申请号：US11141100

    申请日：2005-05-31

    申请人： David Bour ,  Jintian Zhu

    发明人： David Bour ,  Jintian Zhu

    IPC分类号： G02F1/035

    CPC分类号： B82Y20/00 ,  G02F1/01725 ,  G02F2001/0175 ,  G02F2001/01758

    摘要： An optical modulator comprises a first waveguide layer and a barrier layer, and a quantum well layer sandwiched between the first waveguide layer and the barrier layer, where the quantum well layer has a graded composition that varies the bandgap energy of the quantum well layer between a minimum bandgap energy and the bandgap energy of at least one of the first waveguide layer and the barrier layer.

    摘要翻译： 光调制器包括第一波导层和阻挡层，以及夹在第一波导层和阻挡层之间的量子阱层，其中量子阱层具有改变量子阱层的带隙能量的分级组成 最小带隙能量和第一波导层和阻挡层中的至少一个的带隙能量。