公开(公告)号：US5225683A

公开(公告)日：1993-07-06

申请号：US800587

申请日：1991-11-27

申请人： Seiichi Suzuki ,  Toru Kasai ,  Kimio Ohi

发明人： Seiichi Suzuki ,  Toru Kasai ,  Kimio Ohi

IPC分类号： G01Q30/02 ,  G01Q30/20 ,  H01J37/20

CPC分类号： H01J37/20

摘要： A side-entry specimen holder for use with a transmission electron microscope. The holder comprises a specimen-holding plate and an insertion rod. The holding plate is provided with a hole permitting passage of the electron beam produced inside the microscope. Either a specimen or a piece of mesh on which a specimen is placed is held inside the hole. An engaging hole is formed at one end of the holding plate. The insertion rod has a pin at its front end. The pin is engaged in the engaging hole to detachably hold the holding plate. Thus, the insertion rod is coupled to the holding plate.

摘要翻译： 用于透射电子显微镜的侧入口样品架。 保持器包括试样保持板和插入杆。 保持板设置有允许在显微镜内产生的电子束通过的孔。 将样品或其上放置样品的网片放在孔内。 在保持板的一端形成有卡合孔。 插入杆在其前端具有销。 销接合在接合孔中以可拆卸地保持保持板。 因此，插入杆联接到保持板。

公开(公告)号：US5001350A

公开(公告)日：1991-03-19

申请号：US568639

申请日：1990-08-16

申请人： Kimio Ohi ,  Tohru Kasai

发明人： Kimio Ohi ,  Tohru Kasai

IPC分类号： H01J37/16 ,  H01J37/20

CPC分类号： H01J37/20

摘要： An electron microscope equipped with a specimen positioning device for moving specimen holders within a place perpendicular to the optical axis of the electron beam between the upper and lower magnetic pole pieces of the objective lens and bringing the holders onto the optical axis. The microscope has a member extending through the side wall of the yoke of the objective lens, a preliminary chamber connected with the side wall of the yoke via a valve, and an exchange mechanism. The member can mount and dismount the specimen holders. The plural holders are placed in position within the chamber. The exchange mechanism can mount and dismount the specimen holder placed at a certain position within the chamber and can move this holder between the magnetic pole pieces of the objective lens from the chamber to the member or vice versa. Once the inside of the lens is evacuated to a high vacuum, a plurality of specimens can be observed successively.

摘要翻译： 一种电子显微镜，其具有用于在与物镜的上下磁极片之间垂直于电子束的光轴的位置移动试样保持器并将保持器保持在光轴上的试样定位装置。 显微镜具有延伸穿过物镜的轭的侧壁的构件，经由阀与轭的侧壁连接的预备室和交换机构。 会员可以安装和拆卸样品架。 多个保持器被放置在腔室内的适当位置。 交换机构可以安装和拆卸放置在室内某一位置的样品架，并且可以将该夹持器在物镜的磁极片从腔室移动到构件之间，反之亦然。 一旦透镜内部抽真空到高真空状态，就可以连续观察多个试样。

公开(公告)号：US4894538A

公开(公告)日：1990-01-16

申请号：US173066

申请日：1988-03-25

申请人： Masashi Iwatsuki ,  Kimio Ohi ,  Kazuma Suzuki ,  Kiyoshi Miyashita

发明人： Masashi Iwatsuki ,  Kimio Ohi ,  Kazuma Suzuki ,  Kiyoshi Miyashita

IPC分类号： G01B7/34 ,  G01N23/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q60/10 ,  H01J37/28 ,  H01L41/083 ,  H01L41/09

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q10/04 ,  H02N2/028 ,  H01J2237/2818 ,  Y10S977/872

摘要： A tip-scanning mechanism for use in a scanning tunneling microscope uses three drivers for driving a probe tip in three perpendicular directions. The drivers each consist of a piezoelectric element. In accordance with the invention, these three drivers are each shaped into a sheet, and the three sheets are stacked on top of each other. Two of the three drivers produce strains parallel to both faces of the drivers when a voltage is applied across the faces of each driver. Thus, rapid scans can be made without producing distortion.

摘要翻译： 用于扫描隧道显微镜的尖端扫描机构使用三个驱动器来驱动三个垂直方向的探针尖端。 驱动器由压电元件组成。 根据本发明，这三个驱动器各自成形为片材，并且三个片材堆叠在彼此的顶部。 当在每个驱动器的表面上施加电压时，三个驱动器中的两个产生平行于驱动器的两个面的应变。 因此，可以进行快速扫描而不产生失真。

公开(公告)号：US4874945A

公开(公告)日：1989-10-17

申请号：US260525

申请日：1988-10-21

申请人： Kimio Ohi

发明人： Kimio Ohi

IPC分类号： G01N23/00 ,  G01B7/34 ,  G01N37/00 ,  G01Q30/02 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q70/04 ,  H01J37/20 ,  H01J37/26

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q30/02 ,  H01J37/20 ,  H01J37/26 ,  Y10S977/861

摘要： An electron microscope equipped with a scanning tunneling microscope. The electron microscope comprises a holder, a scanning tunneling microscope scanner having a tip, and a shift mechanism. A sample is fixed inside the holder that is mounted between the upper pole piece and the lower pole piece of an objective lens. The shift mechanism moves the scanner in two directions parallel to the surface of the sample and in a direction vertical to the sample surface. The tip is poised above a desired portion of the sample by driving the shift mechanism while observing the tip and either a reflection electron microscope image or a transmission electron microscope image of the sample. Then, the scanner uses the tip to scan the sample surface to obtain a scanning tunneling microscope image.

摘要翻译： 装有扫描隧道显微镜的电子显微镜。 电子显微镜包括保持器，具有尖端的扫描隧道显微镜扫描器和移位机构。 将样品固定在安装在物镜的上极片和下极片之间的保持器内部。 换档机构使扫描仪在垂直于样品表面的方向上平行于样品表面的两个方向移动。 通过驱动移动机构同时观察尖端以及样品的反射电子显微镜图像或透射电子显微镜图像，将尖端放置在样品的期望部分上方。 然后，扫描仪使用尖端扫描样品表面以获得扫描隧道显微镜图像。

公开(公告)号：US4837444A

公开(公告)日：1989-06-06

申请号：US194983

申请日：1988-05-17

申请人： Kimio Ohi

发明人： Kimio Ohi

IPC分类号： H01J37/20

CPC分类号： H01J37/20

摘要： There is disclosed an electron microscope equipped with two specimen-positioning devices one of which includes a small specimen holder adapted for high-resolution observation. The other includes a large specimen holder adapted for special observation. The holders are interchangeably placed on the optical axis of the electron beam between upper and lower magnetic pole pieces.

摘要翻译： 公开了一种具有两个试样定位装置的电子显微镜，其中之一包括适用于高分辨率观察的小样本保持架。 另一个包括适用于特殊观察的大型样品架。 保持器可互换地放置在上磁极片和下磁极片之间的电子束的光轴上。

公开(公告)号：US4633085A

公开(公告)日：1986-12-30

申请号：US722778

申请日：1985-04-12

申请人： Takeshi Tomita ,  Yoshiyasu Harada ,  Kimio Ohi

发明人： Takeshi Tomita ,  Yoshiyasu Harada ,  Kimio Ohi

IPC分类号： H01J37/10 ,  H01J37/141 ,  H01J37/26 ,  H01J37/252

CPC分类号： H01J37/26 ,  H01J37/141

摘要： An electron microscope having plural stages of focusing lenses between an objective lens and an electron gun. The magnetic pole piece of the focusing lens of the final stage which is on the side of the objective lens takes a conic form which tapers toward the objective lens. The yoke of the objective lens on the side of the focusing lenses is centrally provided with a conic recess. This structure makes it possible to shorten the distance between the position of the magnetic field produced by an auxiliary lens and the front focal point defined by a front objective lens without introducing interference between the focusing lens of the final stage and the object lens proper. Thus, the observation of an electron micrograph covering a wide field of view facilitates accurate analysis of the physical properties of a designated microscopic region on a specimen.

摘要翻译： 一种具有在物镜和电子枪之间具有多级聚焦透镜的电子显微镜。 位于物镜侧的最后级的聚焦透镜的磁极片呈圆锥形，朝向物镜逐渐变细。 在聚焦透镜一侧的物镜的轭在中央设置有圆锥凹槽。 这种结构使得可以缩短由辅助透镜产生的磁场的位置与由前物镜限定的前焦点之间的距离，而不会引起最终级的聚焦透镜与物镜本体之间的干涉。 因此，观察覆盖宽视野的电子显微镜有助于准确分析样品上指定的微观区域的物理性质。