摘要:
A nonlinear optical material comprising a nitroaniline derivative represented by the following chemical formula:A--CX.sub.2 --Rwherein A represents ##STR1## (Y represents at least one group selected from the group consisting of hydrogen, alkyl groups, deuterated alkyl groups and electron donor groups and Z represents hydrogen, deuterium, a methyl group or a deuterated methyl group), X represents hydrogen or deuterium, and R represents an alkoxy group, a deuterated alkoxy group or the same group as A.
摘要:
A non-linear optical material comprises a derivative of chalcone represented by the following general formulae (I) or (II) of: ##STR1## wherein R.sub.1 and R.sub.2 each represent a halogen atom, a hydroxyl group, an amino group, a dimethylamino group, a nitro group, a cyano group, a phenyl group, an acetyl group, an alkyl group having 1 to 18 carbon atoms or an alkyloxy group having 1 to 22 carbon atoms; n.sub.1 and n.sub.2 each represent an interger of from 0 to 21; and m.sub.1 and m.sub.2 each represent an integer of from 0 to 5.
摘要:
A non-linear optical article is constituted of a derivative of benzalacetophenone represented by the following general formula: ##STR1## wherein A and B each represent the same or different atom or group and stand for a hydrogen atom, an alkoxy group having 1 to 4 carbon atoms, a chlorine atom, a bromine atom, an amino group or a dialkylamino group having 1 to 2 carbon atoms.
摘要:
A reticle defect inspection apparatus that can carry out a defect inspection with high detection sensitivity are provided. The apparatus includes an optical system of transmitted illumination for irradiating one surface of a sample with a first inspection light, an optical system of reflected illumination for irradiating another surface of the sample with a second inspection light, and a detecting optical system that can simultaneously detect a transmitted light obtained by the first inspection light being passed through the sample and a reflected light obtained by the second inspection light being reflected by the sample. And the optical system of transmitted illumination includes a focusing lens driving mechanism for correcting a focal point shift of the transmitted light resulting from thickness of the sample.
摘要:
A mask-defect inspection apparatus including a plurality of illumination optical systems (2) for illuminating different areas (14a, 14b) on a mask (4) on which a pattern (6) is formed, an objective lens (OL) disposed to face the mask, and at least a pair of detection optical systems (15, 16) each having a detection sensor (17, 19) to form an image of the pattern and for receiving illumination light from each of the different areas through the objective lens, each of the detection optical systems having a mechanism (18a, 20a) for adjusting an angle of an aperture.
摘要:
An image forming apparatus for forming an image on a recording material includes a cartridge, a main assembly including a positioner positioning the cartridge and an urger urging the cartridge to the positioner, a mover supporting the cartridge and movable between a pulled out position outside of the main assembly and an inside position inside the main assembly, and a gripper mounted to the mover and movable between a reference position and an outward position located outwardly with respect to the pull out direction of the mover. When the mover is at the inside position, the cartridge is positioned to the positioner by the urger to be placed in a positioning state when the gripper is at the reference position and the positioning state of the cartridge is released by moving the gripper from the reference position to the outward position.
摘要:
A pattern inspection apparatus uses a die-to-database comparison method which compares detected pattern data obtained from an optical image of a pattern of a plate to be inspected with first reference pattern data obtained from designed pattern data in combination with a die-to-die comparison method which compares the detected pattern data with second reference pattern data obtained by detecting an area to be a basis for repetition. A computer detects presence of a plurality of repeated pattern areas from layout information contained in the designed pattern data, reads the arrangement, the number, the dimension and the repeated pitch of the repeated pattern areas, and automatically fetches an inspection area of the die-to-die comparison method.
摘要:
A controlled combustion synthesis apparatus comprises an ignition system, a pressure sensor for detecting internal pressure, a nitrogen supply, a gas pressure control valve for feeding nitrogen and exhausting reaction gas, means for detecting the internal temperature of the reaction container, a water cooled jacket, and a cooling plate. A temperature control system controls the temperature of the reaction container by controlling the flow of cooling water supplied to the jacket and the cooling plate in response to the detected temperature. By combustion synthesizing, while controlling the internal pressure and temperature, the apparatus can synthesize a silicon alloy including 30-70 wt. % silicon, 10-45 wt. % nitrogen, 1-40 wt. % aluminum, and 1-40 wt % oxygen.
摘要:
A pattern inspection apparatus comprises an illumination optics applying a first inspection light on a predetermined wavelength to a surface opposite to a pattern formed surface of the substrate, and a second inspection light whose wavelength is equal to the wavelength of the first inspection light to the pattern formed surface, a detector independently detecting a transmitted light from the substrate by irradiation of the first inspection light and a reflected light from the substrate by irradiation of the second inspection light, and a space separation mechanism provided in the vicinity of an optical focal plane toward the pattern formed surface, and spatially separates an irradiation area of the first and second inspection lights such that the transmitted and reflected lights from the substrate are imaged in two discrete areas separated on the optical focal plane.