公开(公告)号：US10672913B2

公开(公告)日：2020-06-02

申请号：US16024967

申请日：2018-07-02

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Shunpei Yamazaki ,  Hideomi Suzawa ,  Tetsuhiro Tanaka ,  Hirokazu Watanabe ,  Yuhei Sato ,  Yasumasa Yamane ,  Daisuke Matsubayashi

IPC: H01L29/786 ,  H01L29/45 ,  H01L29/66

Abstract: A semiconductor device having a reduced amount of oxygen vacancy in a channel formation region of an oxide semiconductor is provided. Further, a semiconductor device which includes an oxide semiconductor and has improved electric characteristics is provided. Furthermore, a methods for manufacturing the semiconductor device is provided. An oxide semiconductor film is formed; a conductive film is formed over the oxide semiconductor film at the same time as forming a low-resistance region between the oxide semiconductor film and the conductive film; the conductive film is processed to form a source electrode and a drain electrode; and oxygen is added to the low-resistance region between the source electrode and the drain electrode, so that a channel formation region having a higher resistance than the low-resistance region is formed and a first low-resistance region and a second low-resistance region between which the channel formation region is positioned are formed.

公开(公告)号：US11049974B2

公开(公告)日：2021-06-29

申请号：US16833918

申请日：2020-03-30

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Shunpei Yamazaki ,  Hideomi Suzawa ,  Tetsuhiro Tanaka ,  Hirokazu Watanabe ,  Yuhei Sato ,  Yasumasa Yamane ,  Daisuke Matsubayashi

IPC: H01L29/786 ,  H01L29/45 ,  H01L29/66

Abstract: A semiconductor device having a reduced amount of oxygen vacancy in a channel formation region of an oxide semiconductor is provided. Further, a semiconductor device which includes an oxide semiconductor and has improved electric characteristics is provided. Furthermore, a methods for manufacturing the semiconductor device is provided. An oxide semiconductor film is formed; a conductive film is formed over the oxide semiconductor film at the same time as forming a low-resistance region between the oxide semiconductor film and the conductive film; the conductive film is processed to form a source electrode and a drain electrode; and oxygen is added to the low-resistance region between the source electrode and the drain electrode, so that a channel formation region having a higher resistance than the low-resistance region is formed and a first low-resistance region and a second low-resistance region between which the channel formation region is positioned are formed.

公开(公告)号：US20130221345A1

公开(公告)日：2013-08-29

申请号：US13775408

申请日：2013-02-25

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Shinji Ohno ,  Hirokazu Watanabe ,  Naoto Kusumoto

IPC: H01L29/786 ,  H01L29/66

CPC classification number: H01L29/78693 ,  H01L21/425 ,  H01L29/247 ,  H01L29/66969 ,  H01L29/7869 ,  H01L29/78696

Abstract: A transistor excellent in electrical characteristics and a method for manufacturing the transistor are provided. The transistor includes an oxide semiconductor layer including a source region, a drain region, and a channel formation region over an insulating surface; a gate insulating film over the oxide semiconductor layer; a gate electrode overlapping with the channel formation region, over the gate insulating film; a source electrode in contact with the source region; and a drain electrode in contact with the drain region. The source region and the drain region include a portion having higher oxygen concentration than the channel formation region.

Abstract translation: 提供一种电特性优良的晶体管及其制造方法。 晶体管包括在绝缘表面上包括源极区，漏极区和沟道形成区的氧化物半导体层; 氧化物半导体层上的栅极绝缘膜; 与沟道形成区重叠的栅电极，在栅极绝缘膜上方; 源极与源极区域接触; 以及与漏极区域接触的漏电极。 源极区域和漏极区域包括具有比沟道形成区域更高的氧浓度的部分。

公开(公告)号：US12148835B2

公开(公告)日：2024-11-19

申请号：US18211652

申请日：2023-06-20

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Shunpei Yamazaki ,  Hideomi Suzawa ,  Tetsuhiro Tanaka ,  Hirokazu Watanabe ,  Yuhei Sato ,  Yasumasa Yamane ,  Daisuke Matsubayashi

IPC: H01L29/786 ,  H01L29/45 ,  H01L29/66

Abstract: A semiconductor device having a reduced amount of oxygen vacancy in a channel formation region of an oxide semiconductor is provided. Further, a semiconductor device which includes an oxide semiconductor and has improved electric characteristics is provided. Furthermore, a methods for manufacturing the semiconductor device is provided. An oxide semiconductor film is formed; a conductive film is formed over the oxide semiconductor film at the same time as forming a low-resistance region between the oxide semiconductor film and the conductive film; the conductive film is processed to form a source electrode and a drain electrode; and oxygen is added to the low-resistance region between the source electrode and the drain electrode, so that a channel formation region having a higher resistance than the low-resistance region is formed and a first low-resistance region and a second low-resistance region between which the channel formation region is positioned are formed.

公开(公告)号：US20140175435A1

公开(公告)日：2014-06-26

申请号：US14137476

申请日：2013-12-20

Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Inventor： Shunpei Yamazaki ,  Hideomi Suzawa ,  Tetsuhiro Tanaka ,  Hirokazu Watanabe ,  Yuhei Sato ,  Yasumasa Yamane ,  Daisuke Matsubayashi

IPC: H01L29/786

CPC classification number: H01L29/78618 ,  H01L29/45 ,  H01L29/66969 ,  H01L29/7869 ,  H01L29/78696

Abstract: A semiconductor device having a reduced amount of oxygen vacancy in a channel formation region of an oxide semiconductor is provided. Further, a semiconductor device which includes an oxide semiconductor and has improved electric characteristics is provided. Furthermore, a methods for manufacturing the semiconductor device is provided. An oxide semiconductor film is formed; a conductive film is formed over the oxide semiconductor film at the same time as forming a low-resistance region between the oxide semiconductor film and the conductive film; the conductive film is processed to form a source electrode and a drain electrode; and oxygen is added to the low-resistance region between the source electrode and the drain electrode, so that a channel formation region having a higher resistance than the low-resistance region is formed and a first low-resistance region and a second low-resistance region between which the channel formation region is positioned are formed.

Abstract translation: 提供了在氧化物半导体的沟道形成区域中具有减少的氧空位量的半导体器件。 此外，提供了包括氧化物半导体并具有改善的电特性的半导体器件。 此外，提供了制造半导体器件的方法。 形成氧化物半导体膜; 在氧化物半导体膜和导电膜之间形成低电阻区域的同时，在氧化物半导体膜上形成导电膜; 处理导电膜以形成源电极和漏电极; 并且在源电极和漏极之间的低电阻区域添加氧，使得形成具有比低电阻区域更高的电阻的沟道形成区域，并且形成第一低电阻区域和第二低电阻 形成沟道形成区域所在的区域。

公开(公告)号：US11705522B2

公开(公告)日：2023-07-18

申请号：US17358295

申请日：2021-06-25

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Shunpei Yamazaki ,  Hideomi Suzawa ,  Tetsuhiro Tanaka ,  Hirokazu Watanabe ,  Yuhei Sato ,  Yasumasa Yamane ,  Daisuke Matsubayashi

IPC: H01L29/786 ,  H01L29/45 ,  H01L29/66

CPC classification number: H01L29/78618 ,  H01L29/45 ,  H01L29/66969 ,  H01L29/7869 ,  H01L29/78696

Abstract: A semiconductor device having a reduced amount of oxygen vacancy in a channel formation region of an oxide semiconductor is provided. Further, a semiconductor device which includes an oxide semiconductor and has improved electric characteristics is provided. Furthermore, a methods for manufacturing the semiconductor device is provided. An oxide semiconductor film is formed; a conductive film is formed over the oxide semiconductor film at the same time as forming a low-resistance region between the oxide semiconductor film and the conductive film; the conductive film is processed to form a source electrode and a drain electrode; and oxygen is added to the low-resistance region between the source electrode and the drain electrode, so that a channel formation region having a higher resistance than the low-resistance region is formed and a first low-resistance region and a second low-resistance region between which the channel formation region is positioned are formed.

公开(公告)号：US09391096B2

公开(公告)日：2016-07-12

申请号：US14154483

申请日：2014-01-14

Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Inventor： Shunpei Yamazaki ,  Daisuke Matsubayashi ,  Hideomi Suzawa ,  Tetsuhiro Tanaka ,  Hirokazu Watanabe

IPC: H01L29/10 ,  H01L27/12 ,  H01L29/49 ,  H01L29/66 ,  H01L29/786

CPC classification number: H01L27/1225 ,  H01L27/1222 ,  H01L29/4908 ,  H01L29/66969 ,  H01L29/78633 ,  H01L29/78648 ,  H01L29/7869 ,  H01L29/78696

Abstract: To provide a highly reliable semiconductor device. The semiconductor device includes a first oxide layer over an insulating film; an oxide semiconductor layer over the first oxide layer; a gate insulating film over the oxide semiconductor layer; and a gate electrode over the gate insulating film. The first oxide layer contains indium. The oxide semiconductor layer contains indium and includes a channel formation region. The distance from the interface to the channel formation region is 20 nm or more, preferably 30 nm or more, further preferably 40 nm or more, still further preferably 60 nm or more.

Abstract translation: 提供高度可靠的半导体器件。 半导体器件包括绝缘膜上的第一氧化物层; 在所述第一氧化物层上的氧化物半导体层; 氧化物半导体层上的栅极绝缘膜; 以及栅极绝缘膜上的栅电极。 第一氧化物层含有铟。 氧化物半导体层含有铟，并且包括沟道形成区域。 从界面到沟道形成区域的距离为20nm以上，优选为30nm以上，进一步优选为40nm以上，进一步优选为60nm以上。

公开(公告)号：US09040984B2

公开(公告)日：2015-05-26

申请号：US14077371

申请日：2013-11-12

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Hirokazu Watanabe ,  Shinji Ohno

IPC: H01L29/786 ,  H01L29/49

CPC classification number: H01L29/7869 ,  H01L29/4908

Abstract: To provide a semiconductor device which includes a gate insulating film with high withstand voltage and thus can have high reliability. The semiconductor device includes an oxide semiconductor film over an insulating surface; a pair of first conductive films over the oxide semiconductor film; a first insulating film, a second insulating film, and a third insulating film which are stacked in this order over the oxide semiconductor film and the pair of first conductive films; and a second conductive film overlapping with the oxide semiconductor film over the first to third insulating films. The first insulating film and the third insulating film contain silicon oxide, silicon nitride, silicon oxynitride, silicon nitride oxide, aluminum oxide, or aluminum oxynitride. The second insulating film contains gallium oxide, zirconium oxide, or hafnium oxide.

Abstract translation: 提供一种包括具有高耐压的栅极绝缘膜并因此可以具有高可靠性的半导体器件。 半导体器件包括绝缘表面上的氧化物半导体膜; 氧化物半导体膜上的一对第一导电膜; 第一绝缘膜，第二绝缘膜和第三绝缘膜，其依次层叠在氧化物半导体膜和一对第一导电膜上; 以及在所述第一至第三绝缘膜上与所述氧化物半导体膜重叠的第二导电膜。 第一绝缘膜和第三绝缘膜含有氧化硅，氮化硅，氮氧化硅，氮氧化硅，氧化铝或氮氧化铝。 第二绝缘膜包含氧化镓，氧化锆或氧化铪。