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1.发明申请SLURRY COMPOSITION FOR FORMING TUNGSTEN PATTERN AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME 审中-公开用于形成图案的浆料组合物和使用其制造半导体器件的方法公开(公告)号：US20080096385A1
公开(公告)日：2008-04-24
申请号：US11862443
申请日：2007-09-27
IPC分类号： H01L21/4763 , C09K13/00 , C09K13/02
CPC分类号： C09K3/1409 , C09G1/02 , C09K3/1463 , H01L21/31053 , H01L21/3212
摘要： A method for manufacturing a semiconductor device with a slurry composition for forming a tungsten pattern. The method comprises: forming a trench in an insulating film formed on a substrate; depositing a tungsten film over the insulating film including the trench; first polishing a tungsten film with a first slurry for polishing metal to expose the insulating film, the polishing selectivity ratio of the first slurry onto tungsten/insulating film being range from 30 to 100; and second polishing the insulating film and the tungsten film with a second slurry, the polishing selectivity ratio of the second slurry onto insulating film/tungsten being range from 3 to 500. The method reduces a thickness difference of tungsten patterns, thereby improving a production yield of semiconductor devices.
摘要翻译： 一种制造具有用于形成钨图案的浆料组合物的半导体器件的方法。 该方法包括：在形成在基板上的绝缘膜中形成沟槽; 在包括沟槽的绝缘膜上沉积钨膜; 首先用用于抛光金属的第一浆料抛光钨膜以暴露绝缘膜，第一浆料对钨/绝缘膜的抛光选择率为30至100; 并用第二浆料二次抛光绝缘膜和钨膜，第二浆料在绝缘膜/钨上的抛光选择比在3〜500的范围内。该方法减小了钨图案的厚度差异，从而提高了生产率 的半导体器件。
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公开(公告)号：US20070046317A1
公开(公告)日：2007-03-01
申请号：US11442140
申请日：2006-05-30
IPC分类号： G01R31/00
CPC分类号： G09G3/006 , G02F1/1303 , G02F1/1309 , G09G3/3406
摘要： A liquid crystal display (LCD) inspection apparatus for inspecting an LCD panel, includes a worktable to support an LCD panel seated on a front side of the worktable, probe units to be electrically connected to the LCD panel, a backlight unit to emit light toward the LCD panel, a first polarizing plate arranged in front of the LCD panel to polarize the light, and a second polarizing plate arranged between the LCD panel and the backlight unit to polarize the light, and a shutter unit to selectively shut off the light emitted from the backlight unit toward the LCD panel.
摘要翻译： 一种用于检查LCD面板的液晶显示器（LCD）检查装置，包括：工作台，用于支撑安置在工作台前侧的LCD面板，与LCD面板电连接的探针单元;背光单元，用于朝向 LCD面板，布置在LCD面板的前方以使光偏振的第一偏振片和布置在LCD面板和背光单元之间以使光偏振的第二偏振片，以及快门单元，用于选择性地切断发出的光 从背光单元朝向LCD面板。
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3.发明申请TFT array substrate for inspection and method for inspection using the same 有权用于检查的TFT阵列基板及使用其的检查方法公开(公告)号：US20070052896A1
公开(公告)日：2007-03-08
申请号：US11449783
申请日：2006-06-09
IPC分类号： G02F1/1343
CPC分类号： G02F1/136259 , G02F2203/69
摘要： A TFT substrate for inspection for shorts, includes a substrate defined by a display area and a non-display area outside the display area; a plurality of first and second lines formed in the display area on the substrate; pad lines formed to be extended from one side of each of the first lines to the non-display area; a plurality of signal inspection bars formed in the non-display area to cross the pad lines at one side of the pad lines; a shorting inspection bar spaced apart from the outermost signal inspection bar at a predetermined interval and substantially parallel with the signal inspection bar and connected to the pad lines; and a plurality of transparent electrode patterns partially overlapped with the pad lines and connected to one of the signal inspection bars.
摘要翻译： 用于检查短路的TFT基板包括由显示区域和显示区域外部的非显示区域限定的基板; 形成在所述基板上的所述显示区域中的多个第一和第二线; 衬垫线形成为从每个第一行的一侧延伸到非显示区域; 形成在所述非显示区域中的多个信号检查条，以跨越所述焊盘线的一侧的所述焊盘线; 一个与最外面的信号检查条隔开预定间隔并基本上与信号检查条平行并连接到焊盘线的短路检查条; 以及多个透明电极图案，其与所述焊盘线部分地重叠并且连接到所述信号检查条之一。
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公开(公告)号：US20070046321A1
公开(公告)日：2007-03-01
申请号：US11443663
申请日：2006-05-30
IPC分类号： G01R31/00
CPC分类号： G02F1/1309
摘要： A liquid crystal display (LCD) inspection apparatus and method are provided. The inspection apparatus and method are capable of automatically and accurately detecting defects of an LCD panel, and providing information of the automatically-detected defects of the LCD panel to the operator, thereby enabling the operator to easily recognize the defects.
摘要翻译： 提供了一种液晶显示（LCD）检查装置和方法。 检查装置和方法能够自动且准确地检测LCD面板的缺陷，并且向操作者提供LCD面板的自动检测的缺陷的信息，从而使操作者能够容易地识别缺陷。
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公开(公告)号：US20070046336A1
公开(公告)日：2007-03-01
申请号：US11479860
申请日：2006-06-29
IPC分类号： H03K19/00
CPC分类号： G02F1/1345 , G02F1/13458 , G02F2001/136254 , G09G3/006 , G09G3/3648 , G09G2300/0426
摘要： A thin film transistor array substrate comprises thin film transistors and pixel electrodes formed at respective pixels that are defined by gate lines and data lines that orthogonally intersect each other. The thin film transistor array substrate further comprises a plurality of gate pad units that group a plurality of gate pads extended from the gate lines, and a plurality of data pad units that groups a plurality of data pads extended from the data lines. The thin film transistor array substrate further includes a plurality of gate test terminals connected to the gate pad units and beside at least one side of the respective gate pad units, and a plurality of data test terminals connected to the data pad units and located beside at least one side of the respective data pad units.
摘要翻译： 薄膜晶体管阵列基板包括薄膜晶体管和形成在各个像素处的像素电极，栅极线和彼此正交相交的数据线限定。 薄膜晶体管阵列基板还包括对从栅极线延伸的多个栅极焊盘进行分组的多个栅极焊盘单元，以及对从数据线延伸的多个数据焊盘进行分组的多个数据焊盘单元。 所述薄膜晶体管阵列基板还包括多个栅极测试端子，所述多个栅极测试端子连接到所述栅极焊盘单元并且位于各个栅极焊盘单元的至少一侧旁边，以及多个数据测试端子，所述多个数据测试端子连接到所述数据焊盘单元并位于 相应数据垫单元的最少一侧。
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公开(公告)号：US20070046320A1
公开(公告)日：2007-03-01
申请号：US11443113
申请日：2006-05-31
IPC分类号： G01R31/00
CPC分类号： G09G3/006 , G02F1/1309 , G09G3/3666 , G09G2300/0426
摘要： An LCD test method and apparatus for reducing the number of channels of a probe unit is provided. An apparatus for testing a liquid crystal display including: a stage on which a liquid crystal panel is placed; a plurality of vertically divided blocks, wherein each of the vertically divided blocks include a plurality of adjacent data lines; a data probe unit that provides test pattern signals respectively to groups of at least two of the plurality of vertically divided blocks of the liquid crystal panel; a plurality of horizontally divided blocks, wherein each of the horizontally divided blocks include a plurality of adjacent gate lines; a gate probe unit that provides scanning signals respectively to the plurality of horizontally divided blocks of the liquid crystal panel; and a controller that provides test pattern signals to the data probe unit and provides scanning signals to the gate probe unit.
摘要翻译： 提供了用于减少探针单元的通道数量的LCD测试方法和设备。 一种用于测试液晶显示器的装置，包括：放置液晶面板的阶段; 多个垂直分割块，其中每个垂直分割块包括多个相邻的数据线; 数据探测单元，分别向液晶面板的多个垂直分割块中的至少两个的组提供测试图形信号; 多个水平分割块，其中每个水平分割块包括多个相邻的栅极线; 栅极探针单元，其分别向液晶面板的多个水平分割块提供扫描信号; 以及控制器，其向所述数据探测单元提供测试图案信号，并向所述门探针单元提供扫描信号。
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公开(公告)号：US20070047239A1
公开(公告)日：2007-03-01
申请号：US11442219
申请日：2006-05-30
IPC分类号： F21V29/00
CPC分类号： F21V29/30 , F21V29/59 , F21Y2115/10 , G02F1/1309 , G02F1/133603 , G02F2001/133628 , H05K7/20972
摘要： A backlight unit for a test device of an LCD panel is disclosed. The backlight unit includes: a chamber enclosing a predetermined space, the chamber being provided with a plurality of through holes formed around the chamber perimeter to allow air flow between the interior and exterior of the chamber; a backlight provided in the chamber to emit a light to an LCD panel positioned in the chamber; and a plurality of circulating fans provided in the chamber to circulate air inside the chamber.
摘要翻译： 公开了一种用于LCD面板的测试装置的背光单元。 所述背光单元包括：包围预定空间的室，所述室设置有围绕所述室周边形成的多个通孔，以允许空气在所述室的内部和外部之间流动; 设置在所述室中以向位于所述室中的LCD面板发光的背光; 以及设置在所述室中的多个循环风扇，以使所述室内的空气循环。
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公开(公告)号：US20060050389A1
公开(公告)日：2006-03-09
申请号：US11032916
申请日：2005-01-11
IPC分类号： G02B5/30
CPC分类号： G02B5/3033 , G03F1/26 , G03F1/34 , G03F1/38
摘要： A polarizing reticle including a transparent substrate, a polarizing filter formed over the transparent substrate, and a mask pattern formed on the polarizing filter. The polarizing reticle can polarize illumination light incident thereto in a desired direction in a photolithography process.
摘要翻译： 包括透明基板的偏光掩模版，形成在透明基板上的偏光滤光器以及形成在偏振滤光器上的掩模图案。 偏光掩模版可以在光刻工艺中使在其中入射到其上的照明光在期望的方向偏振。
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公开(公告)号：US20070046319A1
公开(公告)日：2007-03-01
申请号：US11442746
申请日：2006-05-30
IPC分类号： G01R31/00
CPC分类号： G09G3/006
摘要： A liquid crystal display (LCD) inspection apparatus is provided which is capable of preventing detection of defects from being omitted or degraded due to formation of stains in a certain region of an LCD panel in an inspection of the LCD panel.
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公开(公告)号：US20070046318A1
公开(公告)日：2007-03-01
申请号：US11442144
申请日：2006-05-30
IPC分类号： G01R31/00
CPC分类号： G09G3/006 , G02F1/1303 , G02F1/1309 , G09G3/3406
摘要： The liquid crystal display (LCD) inspection apparatus for inspecting an LCD panel includes a worktable which supports the LCD panel to be seated on a front side of the worktable, probe units which are electrically connected to the LCD panel, a backlight unit which supplies light to the LCD panel, an imaging unit which photographs an image of the LCD panel supported by the worktable, a first polarizing plate which is arranged between the imaging unit and the LCD panel to polarize the light, a second polarizing plate which is arranged between the LCD panel and the backlight unit to polarize the light, an illumination unit which emits illumination light to surfaces of the LCD panel, and an image processor which receives the image photographed by the imaging unit, and extracts defect information from the received image.
摘要翻译： 用于检查LCD面板的液晶显示（LCD）检查装置包括：工作台，其支撑待置于工作台前侧的LCD面板，电连接到LCD面板的探针单元;提供光 向所述LCD面板照射由所述工作台支撑的所述LCD面板的图像的摄像单元，配置在所述摄像单元与所述LCD面板之间以使所述光偏振的第一偏振板，配置在所述第一偏振板之间的第二偏振板 LCD面板和背光单元以使光偏振，向LCD面板的表面发射照明光的照明单元和接收由成像单元拍摄的图像的图像处理器，并从接收到的图像中提取缺陷信息。
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