METHOD AND APPARATUS FOR SCANNING BIO CHIPS USING LIGHT AMPLICATION BY METAL NANO-PARTICLES
    1.
    发明申请
    METHOD AND APPARATUS FOR SCANNING BIO CHIPS USING LIGHT AMPLICATION BY METAL NANO-PARTICLES 审中-公开
    使用金属纳米颗粒的光放大扫描生物柴油的方法和装置

    公开(公告)号:US20090270275A1

    公开(公告)日:2009-10-29

    申请号:US12355590

    申请日:2009-01-16

    IPC分类号: C40B30/10 C40B60/12

    摘要: The present invention utilizes a principle in which, in a state in which metal nano-particles are attached to target probes and used as markers, and the metal nano-particles have a proper density according to a bio reaction between the target probes and fixed probes, when the metal nano-particles are irradiated with a laser beam having a proper intensity from the optical pick-up head, a higher optical energy is delivered to the phase change layer by an optical amplification effect caused by the metal nano-particles, thereby better inducing an amorphous-to-crystalline phase change.

    摘要翻译: 本发明利用金属纳米粒子附着于靶探针并用作标记物的状态,金属纳米粒子根据靶探针与固定探针之间的生物反应具有适当的密度的原理 当用来自光学拾取头的具有适当强度的激光束照射金属纳米颗粒时,通过由金属纳米颗粒引起的光放大效应将更高的光能量传递到相变层,由此 更好地诱导无定形至晶相的相变。

    Active piezoelectric energy harvester with embedded variable capacitance layer and method of manufacturing the same
    2.
    发明授权
    Active piezoelectric energy harvester with embedded variable capacitance layer and method of manufacturing the same 有权
    具有嵌入式可变电容层的有源压电能量收集器及其制造方法

    公开(公告)号:US08471439B2

    公开(公告)日:2013-06-25

    申请号:US12899499

    申请日:2010-10-06

    IPC分类号: H02N2/18

    摘要: Provided is an active piezoelectric energy harvester, which can control a direct current voltage applied to an embedded variable capacitance layer to precisely adjust a resonance frequency in real time, and thus achieve a simpler structure and a smaller size compared to a conventional one that adjusts the resonance frequency using a separate variable capacitor provided outside. Further, the active piezoelectric energy harvester can precisely adjust the resonance frequency even when the frequency of vibration varies over time as in a real natural vibration environment or when it is degraded to undergo a variation in its own resonance frequency, and thus can continuously maintain optimal energy conversion characteristics.

    摘要翻译: 提供了一种有源压电能量收集器,其可以控制施加到嵌入式可变电容层的直流电压,以实时精确地调节谐振频率,从而实现比传统调节器的常规电路更简单的结构和更小的尺寸 谐振频率使用外部提供的单独的可变电容器。 此外,即使在真实的自然振动环境中,随着时间的推移,振动频率随时间而变化,或者当其自身的谐振频率变差而发生变化时,有源压电能量收集器也可以精确地调节谐振频率,从而可以持续保持最佳 能量转换特性。

    MEMS electrochemical gas sensor
    3.
    发明授权
    MEMS electrochemical gas sensor 有权
    MEMS电化学气体传感器

    公开(公告)号:US09494543B2

    公开(公告)日:2016-11-15

    申请号:US13620546

    申请日:2012-09-14

    CPC分类号: G01N27/18 G01N33/004

    摘要: Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.

    摘要翻译: 公开了一种使用微机电系统(MEMS)的电化学气体传感器。 MEMS电化学气体传感器包括:其下部中心区域被预定厚度蚀刻的衬底; 形成在所述基板上的第一绝缘膜; 形成在第一绝缘膜上的发热电阻体; 形成在所述发热电阻体上的第二绝缘膜; 参考电极,其形成在所述第二绝缘膜的上中央区域中; 形成在参比电极上的固体电解质; 和形成在固体电解质上的检测电极。

    Microelectromechanical systems type semiconductor gas sensor using microheater having many holes and method for manufacturing the same
    6.
    发明授权
    Microelectromechanical systems type semiconductor gas sensor using microheater having many holes and method for manufacturing the same 有权
    微机电系统使用具有许多孔的微加热器的半导体气体传感器及其制造方法

    公开(公告)号:US08683847B2

    公开(公告)日:2014-04-01

    申请号:US13345772

    申请日:2012-01-09

    IPC分类号: H01L21/02 G01N7/04

    CPC分类号: G01N27/128 G01N27/123

    摘要: Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.

    摘要翻译: 公开了使用具有许多孔的微加热器的MEMS型半导体气体传感器及其制造方法。 MEMS型半导体气体传感器包括:以预定厚度蚀刻中心区域的基板; 第二膜,形成在所述基板的中心区域的上部并具有许多孔; 形成在第二膜上并具有许多孔的发热电阻器; 形成在包括所述发热电阻器并具有许多孔的所述第二膜上的第一膜; 形成在第一膜上并具有许多孔的感测电极; 以及感测材料,形成在感测电极上。

    MEMS ELECTROCHEMICAL GAS SENSOR
    7.
    发明申请
    MEMS ELECTROCHEMICAL GAS SENSOR 有权
    MEMS电化学气体传感器

    公开(公告)号:US20130075255A1

    公开(公告)日:2013-03-28

    申请号:US13620546

    申请日:2012-09-14

    IPC分类号: G01N27/407

    CPC分类号: G01N27/18 G01N33/004

    摘要: Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.

    摘要翻译: 公开了一种使用微机电系统(MEMS)的电化学气体传感器。 MEMS电化学气体传感器包括:其下部中心区域被预定厚度蚀刻的衬底; 形成在所述基板上的第一绝缘膜; 形成在第一绝缘膜上的发热电阻体; 形成在所述发热电阻体上的第二绝缘膜; 参考电极,其形成在所述第二绝缘膜的上中央区域中; 形成在参比电极上的固体电解质; 和形成在固体电解质上的检测电极。

    Method of fabricating nano-wire array
    8.
    发明授权
    Method of fabricating nano-wire array 失效
    制造纳米线阵列的方法

    公开(公告)号:US07846786B2

    公开(公告)日:2010-12-07

    申请号:US11927881

    申请日:2007-10-30

    摘要: Provided is a method of fabricating a nano-wire array, including the steps of: depositing a nano-wire solution, which contains nano-wires, on a substrate; forming a first etch region in a stripe shape on the substrate and then patterning the nano-wires; forming drain and source electrode lines parallel to each other with the patterned nano-wires interposed therebetween; forming a plurality of drain electrodes which have one end connected to the drain electrode line and contact at least one of the nano-wires, and forming a plurality of source electrodes, which have one end connected to the source electrode line and contact the nano-wires that contact the drain electrodes; forming a second etch region between pairs of the drain and source electrodes so as to prevent electrical contacts between the pairs of the drain and source electrodes; forming an insulating layer on the substrate; and forming a gate electrode between the drain and source electrodes contacting the nano-wires on the insulating layer. Accordingly, even in an unparallel structure of nano-wires to electrode lines, a large scale nano-wire array is practicable and applicable to an integrated circuit or display unit with nano-wire alignment difficulty, as well as to device applications using flexible substrates.

    摘要翻译: 提供一种制造纳米线阵列的方法,包括以下步骤:在衬底上沉积包含纳米线的纳米线溶液; 在衬底上形成带状的第一蚀刻区域,然后对纳米线进行构图; 形成彼此平行的漏极和源极电极线,其间插入图案化的纳米线; 形成多个漏电极,所述多个漏电极的一端连接到所述漏电极线并接触所述纳米线中的至少一个,并且形成多个源电极,所述多个源电极的一端连接到所述源电极线并接触所述纳米线, 接触漏电极的电线; 在所述漏极和源极电极之间形成第二蚀刻区域,以防止所述漏极和源极电极之间的电接触; 在所述基板上形成绝缘层; 以及在与绝缘层上的纳米线接触的漏极和源电极之间形成栅电极。 因此,即使在纳米线与电极线的不平行结构中,大规模的纳米线阵列也是可行的并且适用于具有纳米线对准困难的集成电路或显示单元以及使用柔性基板的器件应用。

    Method of fabricating electronic device using nanowires
    9.
    发明授权
    Method of fabricating electronic device using nanowires 有权
    使用纳米线制造电子器件的方法

    公开(公告)号:US07951698B2

    公开(公告)日:2011-05-31

    申请号:US11947139

    申请日:2007-11-29

    IPC分类号: H01L45/00 H01L21/00

    摘要: A method of fabricating an electronic device using nanowires, minimizing the number of E-beam processing steps and thus improving a yield, includes the steps of: forming electrodes on a substrate; depositing a plurality of nanowires on the substrate including the electrodes; capturing an image of the substrate including the nanowires and the electrodes; drawing virtual connection lines for connecting the nanowires with the electrodes on the image using an electrode pattern simulated through a computer program, after capturing the image; coating an E-beam photoresist on the substrate; removing the photoresist from regions corresponding to the virtual connection lines and the electrode pattern using E-beam lithography; depositing a metal layer on the substrate after removing the photoresist from the regions of the virtual connection lines; and removing remaining photoresist from the substrate using a lift-off process.

    摘要翻译: 使用纳米线制造电子器件的方法,使电子束处理步骤的数量最小化并因此提高产量,包括以下步骤:在衬底上形成电极; 在包括电极的基板上沉积多个纳米线; 捕获包括纳米线和电极的衬底的图像; 绘制虚拟连接线,用于在捕获图像之后,使用通过计算机程序模拟的电极图案将纳米线与图像上的电极连接; 在基板上涂覆电子束光致抗蚀剂; 使用电子束光刻从与虚拟连接线对应的区域和电极图案中去除光致抗蚀剂; 在从虚拟连接线的区域去除光致抗蚀剂之后,在基板上沉积金属层; 以及使用剥离工艺从衬底去除剩余的光致抗蚀剂。

    Optical microscope system for detecting nanowires using polarizer and fast fourier transform
    10.
    发明授权
    Optical microscope system for detecting nanowires using polarizer and fast fourier transform 失效
    用于使用偏振器和快速傅里叶变换检测纳米线的光学显微镜系统

    公开(公告)号:US07719760B2

    公开(公告)日:2010-05-18

    申请号:US11940379

    申请日:2007-11-15

    IPC分类号: G02B21/06

    摘要: Provided is an optical microscope system for detecting nanowires to allow for use of an existing optical microscope in fabricating an electronic device having the nanowires and including: a light source for emitting light to provide the light to a nanowire sample; a rotational polarizer provided on a path of the light emitted from the light source for polarizing the light; an optical microscope for detecting a nanowire image using light that is polarized by the rotational polarizer and incident on the nanowire sample; a CCD camera provided in a region of the optical microscope for photographing and storing the nanowire image detected by the optical microscope; and a data processor for performing Fast Fourier Transform (FFT) on the nanowire image stored in the CCD camera. Intensity of reflected light varies, due to optical anisotropy of the nanowires, along a polarizing orientation of light incident on the nanowires.

    摘要翻译: 提供了一种用于检测纳米线的光学显微镜系统,以允许使用现有的光学显微镜来制造具有纳米线的电子器件,并且包括:用于发射光以向纳米线样品提供光的光源; 设置在从光源发射的光的路径上以使光偏振的旋转偏振器; 光学显微镜,用于使用被旋转偏振器偏振并入射在纳米线样品上的光检测纳米线图像; 设置在光学显微镜的区域中的CCD照相机,用于拍摄和存储由光学显微镜检测的纳米线图像; 以及用于在存储在CCD照相机中的纳米线图像上执行快速傅里叶变换(FFT)的数据处理器。 反射光的强度由于纳米线的光学各向异性而沿着入射在纳米线上的光的偏振方向而变化。