公开(公告)号：US5407530A

公开(公告)日：1995-04-18

申请号：US150405

申请日：1993-11-10

申请人： Shigemitsu Watanabe ,  Masaki Kasahara ,  Tadashi Ono ,  Akira Shiga ,  Tsukasa Yamada ,  Kiyohide Sakihama ,  Shin-ichi Sakaguchi ,  Masato Shimoyama

发明人： Shigemitsu Watanabe ,  Masaki Kasahara ,  Tadashi Ono ,  Akira Shiga ,  Tsukasa Yamada ,  Kiyohide Sakihama ,  Shin-ichi Sakaguchi ,  Masato Shimoyama

IPC分类号： C23F4/00 ,  G11B5/17 ,  G11B5/31 ,  H01L21/3205 ,  B44C1/22 ,  C03C15/00

CPC分类号： G11B5/313 ,  G11B5/17

摘要： An object of the invention is to provide a method of forming a fine conductive pattern. The method allows the fine conductive pattern whose thickness is relatively large to be formed easily, accurately, and surely. An insulating layer is formed on a substrate. A pattern resist is formed on the insulating layer. Then, the insulating layer is etched downward based on a profile of the pattern resist in a first etching step, and sidewalls of each of groove portions formed by the etching step of the insulating layer are etched sideways in a second etching step, so that overhang portions are defined at the lower edges of the pattern resist portions. Then, conductive film portions are formed by depositing a conductor on the pattern resist, and conductive films that are on the pattern resist are lifted off, so that a fine conductor pattern can be prepared.

摘要翻译： 本发明的目的是提供一种形成精细导电图案的方法。 该方法允许容易，精确和可靠地形成厚度相对较大的细导电图案。 在基板上形成绝缘层。 在绝缘层上形成图案抗蚀剂。 然后，在第一蚀刻步骤中，基于图案抗蚀剂的轮廓向下蚀刻绝缘层，并且通过绝缘层的蚀刻步骤形成的每个沟槽部分的侧壁在第二蚀刻步骤中被侧向蚀刻，使得突出部 部分限定在图案抗蚀部分的下边缘处。 然后，通过在图案抗蚀剂上沉积导体来形成导电膜部分，并且剥离在图案抗蚀剂上的导电膜，从而可以制备精细的导体图案。

公开(公告)号：US10481390B2

公开(公告)日：2019-11-19

申请号：US15699346

申请日：2017-09-08

申请人： Yuki Maruyama ,  Tsukasa Yamada

发明人： Yuki Maruyama ,  Tsukasa Yamada

IPC分类号： G02B26/08 ,  G02B26/10

摘要： An optical scanning device is provided. The optical scanning device includes a mirror having an optical reflection surface, a movable frame supporting the mirror, a pair of drive beams supporting the movable frame from both sides, a drive source, disposed on the drive beams, that causes the movable frame to be swung around a predetermined axis, a fixed frame supporting the drive beams. Each of the drive source includes a lower electrode formed on the drive beams, a piezoelectric thin film formed on the lower electrode, an upper electrode formed on the piezoelectric thin film, and a stress counter film, formed on the upper electrode or formed between the piezoelectric thin film and the upper electrode, that generates a compressive stress on the drive beams.

公开(公告)号：US08941906B2

公开(公告)日：2015-01-27

申请号：US13632342

申请日：2012-10-01

申请人： Toyoki Tanaka ,  Tsukasa Yamada ,  Takahiko Nishiyama

发明人： Toyoki Tanaka ,  Tsukasa Yamada ,  Takahiko Nishiyama

IPC分类号： G02B26/08

CPC分类号： G02B26/101 ,  G02B26/0858 ,  G02B26/105

摘要： An optical scanning device includes a mirror part including a mirror reflecting surface to reflect incident light, a pair of torsion bars configured to support the mirror part from both sides and configured to forma first axis around which to swing the mirror part by a torsional motion thereof so as to deflect the reflected light, and at least one stress alleviation area configured to alleviate a stress generated by the torsional motion of the torsion bars. The alleviation area is provided between an intersection of a second axis perpendicular to the first axis and passing through the center of the mirror reflecting surface and an edge of the mirror reflecting surface, and at least one of the torsion bars.

摘要翻译： 一种光学扫描装置，包括：反射镜部分，其包括反射入射光的反射镜反射面;一对扭杆，其构造成从两侧支撑反射镜部分，并且构成为形成第一轴线，围绕所述第一轴线通过其扭转运动摆动反射镜部分 以便使反射光偏转，并且至少一个应力消除区域被配置成减轻由扭力杆的扭转运动产生的应力。 减轻区域设置在垂直于第一轴线的第二轴线的交叉点之间并且穿过反射镜反射面的中心和反射镜反射面的边缘以及至少一个扭杆。

公开(公告)号：US08884497B2

公开(公告)日：2014-11-11

申请号：US13257619

申请日：2010-04-15

申请人： Soumei Takahashi ,  Tsuyoshi Ishii ,  Tsukasa Yamada

发明人： Soumei Takahashi ,  Tsuyoshi Ishii ,  Tsukasa Yamada

IPC分类号： H01L41/047 ,  H01L41/09 ,  H01L41/318

CPC分类号： H01L41/0953 ,  H01L41/047 ,  H01L41/0475 ,  H01L41/29 ,  H01L41/318 ,  H01L41/332 ,  Y10T29/42

摘要： A piezoelectric actuator including first and second piezoelectric cantilevers is disclosed. Wirings are provided on an upper surface of a support body on which the first and second piezoelectric cantilevers are formed. The wirings are formed of patterned metal films.

摘要翻译： 公开了一种包括第一和第二压电悬臂的压电致动器。 布线设置在其上形成有第一和第二压电悬臂的支撑体的上表面上。 布线由图案化金属膜形成。

公开(公告)号：US08654426B2

公开(公告)日：2014-02-18

申请号：US13330767

申请日：2011-12-20

申请人： Tsukasa Yamada

发明人： Tsukasa Yamada

IPC分类号： G02B26/08

CPC分类号： G02B26/10 ,  G02B26/0858 ,  G02B26/101

摘要： An optical scanning device includes a mirror, a mirror supporting part to support the mirror on an upper surface, and a pair of torsion beams to support the mirror supporting part from both sides in an axis direction and to drive the mirror supporting part so as to swing the mirror supporting part around the axis by being twisted. The torsion beams include slits approximately parallel to the axis direction.

摘要翻译： 光学扫描装置包括：镜子，用于在上表面上支撑反射镜的反射镜支撑部;以及一对扭转梁，用于在轴向上从两侧支撑镜支撑部，并驱动镜支撑部，以便 通过扭转使镜子支撑部分绕轴旋转。 扭转梁包括大致平行于轴线方向的狭缝。

公开(公告)号：US08488225B2

公开(公告)日：2013-07-16

申请号：US13209754

申请日：2011-08-15

申请人： Tsukasa Yamada

发明人： Tsukasa Yamada

IPC分类号： G02B26/08

CPC分类号： G02B26/108 ,  G02B5/3083 ,  G02B26/105 ,  H04N9/3129

摘要： An optical scanning apparatus includes a laser source configured to irradiate a laser beam, a prism configured to reflect the laser beam irradiated from the laser source, a mirror configured to move the laser beam reflected from the prism by oscillating with respect to a predetermined axis and reflecting the laser beam reflected from the prism, the laser beam reflected from the prism being substantially perpendicular to a plane of the mirror in a case where the mirror is in a non-oscillating state, a waveplate positioned between the prism and the mirror and configured to polarize the laser beam reflected from the prism and the laser beam reflected from the mirror. The waveplate includes an end plane inclined with respect to the laser beam reflected from the prism to the mirror.

摘要翻译： 一种光学扫描装置，包括被配置为照射激光束的激光源，被配置为反射从激光源照射的激光束的棱镜，被配置为通过相对于预定轴线振荡来移动从棱镜反射的激光束的反射镜， 反射从棱镜反射的激光束，在反射镜处于非振荡状态的情况下，从棱镜反射的激光束基本上垂直于反射镜的平面，位于棱镜和反射镜之间的波片， 以使从棱镜反射的激光束和从反射镜反射的激光束偏振。 波片包括相对于从棱镜反射到反射镜的激光束倾斜的端面。

公开(公告)号：US20080257083A1

公开(公告)日：2008-10-23

申请号：US12148252

申请日：2008-04-17

申请人： Tsukasa Yamada ,  Toyoki Tanaka ,  Takahiko Nishiyama ,  Soumei Takahashi

发明人： Tsukasa Yamada ,  Toyoki Tanaka ,  Takahiko Nishiyama ,  Soumei Takahashi

IPC分类号： F16H27/02

CPC分类号： H02N2/025 ,  C22C19/03 ,  C22C27/04 ,  Y10T74/1526

摘要： A driving device includes an electro-mechanical transducer having first and second end portions opposite to each other in an expansion/contraction direction, a stationary member coupled to the first end portion of the electro-mechanical transducer, a vibration friction portion mounted to the second end portion of the electro-mechanical transducer, and a rod-shaped moving portion frictionally coupled to the vibration friction portion, whereby moving the moving portion in the expansion/contraction direction of the electro-mechanical transducer. The stationary member consists essentially of a base alloy which consists of, by weight, 88 to 97% tungsten, 2 to 11% nickel as a binder, and, as the balance, 0.1 to 2% at least one metal having an ionization tendency which is higher than that of tungsten. The stationary member has a surface without nickel plating.

摘要翻译： 一种驱动装置，包括具有在膨胀/收缩方向上彼此相对的第一和第二端部的机电换能器，耦合到机电换能器的第一端部的固定部件，安装到第二端部的振动摩擦部分 机电换能器的端部，以及与振动摩擦部摩擦连接的杆状移动部，由此使机电换能器的伸缩方向移动移动部。 固定件基本上由基体合金组成，该基础合金由重量百分比为88％至97％的钨，2％至11％的镍作为粘合剂，而作为余量由0.1至2％的至少一种具有电离倾向的金属 高于钨。 固定件具有不镀镍的表面。

公开(公告)号：US20080196815A1

公开(公告)日：2008-08-21

申请号：US12070517

申请日：2008-02-19

申请人： Tsukasa Yamada ,  Toyoki Tanaka

发明人： Tsukasa Yamada ,  Toyoki Tanaka

IPC分类号： B29C65/52

CPC分类号： G02B7/102 ,  H01L41/313 ,  H02N2/025 ,  Y10T156/10 ,  Y10T156/1062

摘要： A laminated piezoelectric element includes plural internal electrodes which are laminated and has a dead area at outer regions thereof. The laminated piezoelectric element has first and second end surfaces in an expansion direction thereof. On bonding a first bonded surface of a piezoelectric element fixing portion to the first end surface, a bonding method includes forming a first adhesive accumulation in the first bonded surface, accumulating an adhesive agent to the first adhesive accumulation, and bonding the first end surface to the first bonded surface. On boding a vibration friction element to the second end surface, the bonding method includes forming, in a second bonded surface of the vibration friction element, a positioning guide hole for guiding the second end surface of the laminated piezoelectric element and a second adhesive accumulation, accumulating the adhesive agent in the second adhesive accumulation, and bonding the second end surface to the vibration friction portion.

摘要翻译： 叠层压电元件包括​​层叠的多个内部电极，并且在其外部区域具有死区。 叠层压电元件在其膨胀方向具有第一和第二端面。 在将压电元件固定部的第一接合面接合到第一端面的情况下，接合方法包括在第一接合面上形成第一粘合剂积累，在第一粘合剂聚集中积聚粘合剂，并将第一端面接合到 第一粘结面。 在将振动摩擦元件配置到第二端面时，接合方法包括在振动摩擦元件的第二接合面中形成用于引导层叠压电元件的第二端面的定位引导孔和第二粘合剂积累， 在所述第二粘合剂堆积中积聚所述粘合剂，并且将所述第二端面粘合到所述振动摩擦部。

公开(公告)号：US20060077783A1

公开(公告)日：2006-04-13

申请号：US11170180

申请日：2005-06-29

申请人： Tsuyoshi Ishii ,  Tsukasa Yamada ,  Soumei Takahashi ,  Akihiro Yoshizawa

发明人： Tsuyoshi Ishii ,  Tsukasa Yamada ,  Soumei Takahashi ,  Akihiro Yoshizawa

IPC分类号： G11B7/00

CPC分类号： G11B7/123 ,  G11B2007/0006

摘要： In a light-emission and reception module for use in an optical pickup, a polarization beam splitter transmits an outgoing laser beam from the laser-emitting element and reflects, as a reflected laser beam, a return laser beam reflected by the optical disc in a direction perpendicular to the outgoing laser beam. The laser-emitting element, the polarization beam splitter, and the photo-detecting element are mounted on the holder. The reflected laser beam is perpendicular to a reception surface of the photo-detecting element.

摘要翻译： 在用于光学拾取器的发光和接收模块中，偏振分束器传输来自激光发射元件的输出激光束，并将作为反射激光束的光束反射回到由光盘反射的返回激光束 垂直于输出激光束的方向。 激光发射元件，偏振分束器和光检测元件安装在支架上。 反射的激光束垂直于光检测元件的接收表面。

公开(公告)号：US06984730B2

公开(公告)日：2006-01-10

申请号：US10466357

申请日：2002-01-17

申请人： Tsukasa Yamada ,  Yasuo Mukunoki

发明人： Tsukasa Yamada ,  Yasuo Mukunoki

IPC分类号： C08B3/00 ,  C07H1/00

CPC分类号： G03C1/795 ,  C08B3/00 ,  C08B3/06 ,  C08L1/12 ,  G03C2001/7952

摘要： A cellulose acylate which is a polymer obtained by substituting cellulose with acyl groups in 2-, 3-, 6-positions. The total degree of acyl substitution in the 2- and 3-positions is regulated to from 1.70 to 1.90. The degree of 6-position acyl substitution is regulated to 0.88 or higher.

摘要翻译： 纤维素酰化物，其是通过用2-，3-，6-位的酰基取代纤维素获得的聚合物。 2-和3-位酰基取代的总程度调节至1.70至1.90。 6位酰基取代度调节至0.88以上。