公开(公告)号：US20130222789A1

公开(公告)日：2013-08-29

申请号：US13879816

申请日：2011-11-14

申请人： Shigeru Matsui ,  Shuhei Yamamura ,  Hideyuki Akiyama ,  Yoshisada Ebata

发明人： Shigeru Matsui ,  Shuhei Yamamura ,  Hideyuki Akiyama ,  Yoshisada Ebata

IPC分类号： G01J3/42

CPC分类号： G01J3/42 ,  G01J3/0218 ,  G01J3/28 ,  G01J2003/2866 ,  G01N21/05 ,  G01N21/3151

摘要： In a spectrophotometer of the single-beam type, highly stable transmission and absorption spectra can be obtained with a high SNR while drifting is suppressed and for a long time even when the amount of light from the light source is varied over time. The spectrophotometer includes: a light source; a sample cell; a polychromator that generates a transmission spectrum of a sample in the sample cell by dispersing a portion of light from the light source that has passed through the sample into a plurality of spectral components; an image sensor that detects the transmission spectrum of the sample; a light source monitoring photodetector that detects a portion of the light from the light source that has not passed through the sample cell; and an operation unit that corrects the transmission spectrum of the sample by using an output signal from the light source monitoring photodetector.

摘要翻译： 在单光束型分光光度计中，即使当来自光源的光量随时间变化时，也可以以高信噪比获得漂移时的高稳定的透射和吸收光谱。 分光光度计包括：光源; 样品池; 多色分光器，其通过将来自已经通过所述样品的光源的一部分光分散到多个光谱分量中而在所述样品池中产生样品的透射光谱; 检测样品的透射光谱的图像传感器; 光源监测光电检测器，其检测未通过样品池的来自光源的光的一部分; 以及通过使用来自光源监视光电检测器的输出信号来校正样品的透射光谱的操作单元。

公开(公告)号：US20140092384A1

公开(公告)日：2014-04-03

申请号：US14118375

申请日：2012-05-17

申请人： Yoshisada Ebata ,  Shigeru Matsui ,  Norio Hasegawa ,  Kazuyuki Kakuta ,  Toshihiko Onozuka

发明人： Yoshisada Ebata ,  Shigeru Matsui ,  Norio Hasegawa ,  Kazuyuki Kakuta ,  Toshihiko Onozuka

IPC分类号： G02B5/18 ,  H01L21/26

CPC分类号： G02B5/1857 ,  G01J3/0262 ,  G01J3/18 ,  G01J3/42 ,  G02B5/18 ,  G02B5/1814 ,  G02B5/1861 ,  G03F1/50 ,  G03F1/54 ,  G03F7/0005 ,  H01L21/26

摘要： The present invention has been made in view of the above, and an object thereof is to provide a manufacturing technique capable of manufacturing a diffraction grating which is suitable for use in a spectrophotometer and has an apex angle of a convex portion of about 90° and can satisfy high diffraction efficiency and a low stray light amount. A method of manufacturing a diffraction grating, the method including: setting an exposure condition such that a sectional shape of a convex portion of a resist on a substrate, which has been formed by exposure, is an asymmetric triangle with respect to an opening portion shape of a mask having an opening portion with a periodic structure and an angle formed by a long side and a short side of the triangle is about 90°; and performing exposure.

摘要翻译： 发明内容本发明是鉴于上述问题而完成的，其目的在于提供一种制造技术，其能够制造适用于分光光度计的衍射光栅，并具有约90°的凸部的顶角和 可以满足高衍射效率和低杂散光量。 一种制造衍射光栅的方法，该方法包括：设置曝光条件，使得通过曝光形成的基板上的抗蚀剂的凸部的截面形状相对于开口部形状为不对称三角形 具有周期性结构的开口部分和由三角形的长边和短边形成的角度的面具为约90°; 并进行曝光。

公开(公告)号：US09390934B2

公开(公告)日：2016-07-12

申请号：US14350314

申请日：2012-09-13

申请人： Kazuyuki Kakuta ,  Toshihiko Onozuka ,  Shigeru Matsui ,  Yoshisada Ebata ,  Norio Hasegawa

发明人： Kazuyuki Kakuta ,  Toshihiko Onozuka ,  Shigeru Matsui ,  Yoshisada Ebata ,  Norio Hasegawa

IPC分类号： G03F1/26 ,  H01L21/3065 ,  G03F1/30 ,  H01L21/308 ,  G03F1/00

CPC分类号： H01L21/3065 ,  G03F1/0046 ,  G03F1/26 ,  G03F1/28 ,  G03F1/30 ,  H01L21/3085

摘要： A technique of forming an asymmetric pattern by using a phase shift mask, and further, techniques of manufacturing a diffraction grating and a semiconductor device, capable of improving accuracy of a product and capable of shortening manufacturing time. In a method of manufacturing a diffraction grating by using a phase shift mask (in which a light shield part and a light transmission part are periodically arranged), light emitted from an illumination light source is transmitted through the phase shift mask, and a photoresist on a surface of a Si wafer is exposed by providing interference between zero diffraction order light and positive first diffraction order light which are generated by the transmission through this phase shift mask onto the surface of the Si wafer, and a diffraction grating which has a blazed cross-sectional shape is formed on the Si wafer.

摘要翻译： 通过使用相移掩模形成非对称图案的技术，以及制造衍射光栅和半导体器件的技术，能够提高产品的精度并能缩短制造时间。 在通过使用相移掩模（其中周期性地布置有遮光部分和透光部分）制造衍射光栅的方法中，从照明光源发射的光透射穿过相移掩模，并且光致抗蚀剂在 通过提供由通过该相移掩模的透射产生的零衍射级光和正的第一衍射级光之间的干涉而暴露于Si晶片的表面到Si晶片的表面上的衍射光栅和具有闪耀十字 在Si晶片上形成截面形状。

公开(公告)号：US20140302679A1

公开(公告)日：2014-10-09

申请号：US14350314

申请日：2012-09-13

申请人： Kazuyuki Kakuta ,  Toshihiko Onozuka ,  Shigeru Matsui ,  Yoshisada Ebata ,  Norio Hasegawa

发明人： Kazuyuki Kakuta ,  Toshihiko Onozuka ,  Shigeru Matsui ,  Yoshisada Ebata ,  Norio Hasegawa

IPC分类号： H01L21/3065 ,  G03F1/26 ,  H01L21/308

CPC分类号： H01L21/3065 ,  G03F1/0046 ,  G03F1/26 ,  G03F1/28 ,  G03F1/30 ,  H01L21/3085

摘要： A technique of forming an asymmetric pattern by using a phase shift mask, and further, techniques of manufacturing a diffraction grating and a semiconductor device, capable of improving accuracy of a product and capable of shortening manufacturing time. In a method of manufacturing a diffraction grating by using a phase shift mask (in which a light shield part and a light transmission part are periodically arranged), light emitted from an illumination light source is transmitted through the phase shift mask, and a photoresist on a surface of a Si wafer is exposed by providing interference between zero diffraction order light and positive first diffraction order light which are generated by the transmission through this phase shift mask onto the surface of the Si wafer, and a diffraction grating which has a blazed cross-sectional shape is formed on the Si wafer.

摘要翻译： 通过使用相移掩模形成非对称图案的技术，以及制造衍射光栅和半导体器件的技术，能够提高产品的精度并能缩短制造时间。 在通过使用相移掩模（其中周期性地布置有遮光部分和透光部分）制造衍射光栅的方法中，从照明光源发射的光透射穿过相移掩模，并且光致抗蚀剂在 通过提供由通过该相移掩模的透射产生的零衍射级光和正的第一衍射级光之间的干涉而暴露于Si晶片的表面到Si晶片的表面上的衍射光栅和具有闪耀十字 在Si晶片上形成截面形状。

公开(公告)号：US5822059A

公开(公告)日：1998-10-13

申请号：US633234

申请日：1996-04-16

申请人： Hayato Tobe ,  Kazuo Moriya ,  Yoshisada Ebata ,  Yasushi Terui

发明人： Hayato Tobe ,  Kazuo Moriya ,  Yoshisada Ebata ,  Yasushi Terui

IPC分类号： G01N21/31 ,  G01N21/74 ,  G01J3/30

CPC分类号： G01N21/74

摘要： The invention intends to provide an atomic absorption spectrophotometer which can establish a uniform heat distribution during heating of a sample and can improve analysis accuracy and analyzing efficiency. For this purpose, a graphite tube type cuvette mounted in a graphite atomizer furnace for an atomic absorption spectrophotometer comprises a large-diameter portion for retaining a sample in place, a small-diameter portion connected to the large-diameter portion and having a smaller diameter than the large-diameter portion, and a step portion for demarcating between the large-diameter portion and the small-diameter portion. The graphite tube type cuvette is formed such that its cross-sectional area in a plane perpendicular to the direction of passage of an electric current supplied to the cuvette is the same in any of the large-diameter portion, the small-diameter portion and the step portion. The amount of resistance heat is thereby also the same in any portions.

摘要翻译： 本发明旨在提供一种原子吸收分光光度计，可在样品加热期间建立均匀的热分布，并可提高分析精度和分析效率。 为此，安装在用于原子吸收分光光度计的石墨雾化炉中的石墨管型比色皿包括用于将样品保持在适当位置的大直径部分，与大直径部分连接并具有较小直径的小直径部分 和大直径部分之间划分的台阶部分，以及用于在大直径部分和小直径部分之间划定的台阶部分。 石墨管型比色皿形成为使得其在垂直于供给到比色杯的电流的通过方向的平面中的横截面面积在大直径部分，小直径部分和 步骤部分。 因此，电阻热的量在任何部分也是相同的。

公开(公告)号：US4981357A

公开(公告)日：1991-01-01

申请号：US409763

申请日：1989-09-20

申请人： Sadao Minakawa ,  Yoshisada Ebata

发明人： Sadao Minakawa ,  Yoshisada Ebata

IPC分类号： G01J3/12 ,  G01J3/18 ,  G01J3/42

CPC分类号： G01J3/12 ,  G01J2003/1208 ,  G01J2003/1814 ,  G01J3/42

摘要： A spectrophotometer having functions of both of a double-monochromator and a single-monochromator including a light source, a first spectroscope having a first slit through which light from the light source passes and a first dispersion element for dispersing the light from the first slit, a second spectroscope having a second slit for receiving light dispersed from the first dispersion element for dispersing the light from the second slit, and a third slit for receiving the light dispersed from the second dispersion element. A sample compartment is provided for transmitting the light from the first dispersion element or from the third slit directly to a detector or through a sample to the detector. An optical unit is provided for changing transmitting light paths between a first light path for transmitting the light from the first dispersion element to the sample compartment through a fourth slit and a second light path for transmitting the light from the third slit to the sample compartment. A length of a light path from the first dispersion element to the second slit is equal to a length of a light path from the first dispersion element to the fourth slit.

摘要翻译： 一种分光光度计具有双色单色器和包括光源的单一单色仪的功能，第一分光镜具有通过该光源的光通过的第一狭缝和用于分散来自第一狭缝的光的第一色散元件， 第二分光镜，具有第二狭缝，用于接收从第一色散元件分散的光，用于分散来自第二狭缝的光;以及第三狭缝，用于接收从第二色散元件分散的光。 提供样品室，用于将来自第一色散元件的光或从第三狭缝的光直接传输到检测器或通过样品传输到检测器。 提供了一种光学单元，用于改变用于通过第四狭缝将来自第一色散元件的光透射到样品室的第一光路和用于将光从第三狭缝传输到样品室的第二光路的透射光路。 从第一色散元件到第二狭缝的光路长度等于从第一色散元件到第四狭缝的光路的长度。

公开(公告)号：US07050164B2

公开(公告)日：2006-05-23

申请号：US09943395

申请日：2001-08-30

申请人： Kouhei Kabuki ,  Yoshisada Ebata ,  Tadashi Suzuki ,  Atsushi Hiyama

发明人： Kouhei Kabuki ,  Yoshisada Ebata ,  Tadashi Suzuki ,  Atsushi Hiyama

IPC分类号： G01J3/427

CPC分类号： G01J3/28

摘要： In order to improve spectral measurement accuracy during high-speed wavelength shifting, the appropriate sensitivity of the detection system is maintained by, prior to measurement of a sample, measuring the voltage value, then storing this value into a table, and maintaining the voltage value to be applied to the photodetector, and during measurement of the sample, reading out the maintained voltage value and applying it to the photodetector.

公开(公告)号：US5801827A

公开(公告)日：1998-09-01

申请号：US851291

申请日：1997-05-05

申请人： Kazuo Moriya ,  Yasushi Terui ,  Hayato Tobe ,  Yoshisada Ebata ,  Hisashi Kimoto

发明人： Kazuo Moriya ,  Yasushi Terui ,  Hayato Tobe ,  Yoshisada Ebata ,  Hisashi Kimoto

IPC分类号： G01N21/31 ,  G01N21/72

CPC分类号： G01N21/72

摘要： In an analysis device, an auxiliary gas supplied from a compressor 1 is introduced from an auxiliary gas inlet 3 via a pipe 2 to a burner through a pressure regulator 5, a pressur meter 6, a pressure switch 7 and a connecting joint 8. On the other hand, a combustible gas supplied from a gas bomb 9 is introduced from a combustible gas inlet 11 via a pipe 10 to the burner through a first electromagnetic valve 12, a pressure regulator 13, a pressure meter 14, a needle valve 15, a second electromagnetic valve 16 and a connecting joint 17 and further via a tube. An auxiliary gas use block 4, on which auxiliary gas flow controlling elements such as the pressure regulator 5, the pressure meter 6 and the pressure switch 7 are secured, is provided independent and separated from a combustible gas use block 18, on which combustible gas flow controlling elements such as the first electromagnetic valve 12, the pressure regulator 13, the pressure meter 14, the needle valve 15 and the second electromagnetic valve 16 are secured. Whereby the analysis device using chemical combustion flame having an element safety is provided in which possible danger caused by such as the gas leakage and the gas mixing between the combustible gas passage and the auxiliary gas passage is further reduced.

摘要翻译： 在分析装置中，从压缩机1供给的辅助气体通过压力调节器5，压力计6，压力开关7以及连接接头8，从辅助气体入口3经管道2引入燃烧器。 另一方面，从燃气弹9供应的可燃气体经由管道10从可燃气体入口11通过第一电磁阀12，压力调节器13，压力计14，针阀15， 第二电磁阀16和连接接头17，并且还经由管。 辅助气体使用块4，其上固定有诸如压力调节器5，压力表6和压力开关7等辅助气体流量控制元件，与可燃气体使用块18独立地分离并且与可燃气体使用块18分离， 确保了诸如第一电磁阀12，压力调节器13，压力计14，针阀15和第二电磁阀16之类的流量控制元件。 由此，提供了使用具有元件安全性的化学燃烧火焰的分析装置，其中进一步降低了由可燃气体通道和辅助气体通道之间的气体泄漏和气体混合引起的可能的危险。

公开(公告)号：US5786887A

公开(公告)日：1998-07-28

申请号：US708484

申请日：1996-09-05

申请人： Yoshisada Ebata ,  Kazuo Moriya ,  Hisashi Kimoto ,  Hayato Tobe ,  Yasushi Terui

发明人： Yoshisada Ebata ,  Kazuo Moriya ,  Hisashi Kimoto ,  Hayato Tobe ,  Yasushi Terui

IPC分类号： G01N21/31 ,  G01N21/71 ,  B01N21/00

CPC分类号： G01N21/71 ,  G01N21/3103

摘要： A light beam emitted by a hollow cathode lamp is concentrated on a central portion of an electrothermal sample atomizing apparatus by a concave mirror. The light concentrated on the central portion of the electrothermal sample atomizing apparatus is further concentrated on a central portion of a flame produced in a burner type sample atomizing apparatus by a lens. The light traveled through the burner type sample atomizing apparatus is condensed by a concave mirror, reflected by a flat mirror, and concentrated on an entrance slit of a spectroscope. Light outgoing through an exit slit of the spectroscope is detected by a photodetector.

摘要翻译： 由中空阴极灯发射的光束通过凹面镜集中在电热样品雾化装置的中心部分上。 集中在电热式雾化装置的中心部分的光进一步集中在通过透镜在燃烧器型样品雾化装置中产生的火焰的中心部分上。 通过燃烧器型样品雾化装置行进的光由凹面镜冷凝，由平面镜反射，并集中在分光镜的入口狭缝上。 通过光电检测器检测出通过光谱仪的出口狭缝的光。