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1.发明授权Apparatus structure and scanning probe microscope including apparatus structure 有权仪器结构和扫描探针显微镜，包括装置结构公开(公告)号：US07945964B2
公开(公告)日：2011-05-17
申请号：US12415237
申请日：2009-03-31
申请人： Shigeru Wakiyama , Kenichi Akamatsu
发明人： Shigeru Wakiyama , Kenichi Akamatsu
IPC分类号： G12B21/08
CPC分类号： G01Q70/04
摘要： Provided are a structure of an apparatus for analysis, inspection, and measurement in which a support structure supporting a detection unit is resistant to disturbance, suppresses a reduction in resolution during large-sample measurement, and has high rigidity, and a probe microscope using the apparatus structure. The apparatus structure supporting the detection unit which is opposed to a sample which is located on a unit movable in at least one axis direction and is an object to be analyzed has an arch shape. In the apparatus structure having the arch shape and supporting the detection unit, a surface substantially perpendicular to a flat surface portion of a sample holder located immediately under the apparatus structure is formed. The detection unit is supported on the perpendicular surface. The arch-shaped apparatus structure is a curved structure consistent with a catenary curve.
摘要翻译： 提供一种用于分析，检查和测量的装置的结构，其中支撑检测单元的支撑结构抵抗干扰，抑制大样本测量期间的分辨率降低并且具有高刚性，并且使用探针显微镜 装置结构。 支撑检测单元的装置结构具有弓形状，该检测单元与位于能够沿至少一个轴向移动的单元上的样本相对的被检体的形状相对。 在具有拱形形状并支撑检测单元的装置结构中，形成基本上垂直于位于装置结构正下方的样品架的平坦表面部分的表面。 检测单元被支撑在垂直表面上。 拱形装置结构是与悬链线曲线一致的弯曲结构。
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2.发明申请APPARATUS STRUCTURE AND SCANNING PROBE MICROSCOPE INCLUDING APPARATUS STRUCTURE 有权装置结构和扫描探针显微镜，包括装置结构公开(公告)号：US20090255016A1
公开(公告)日：2009-10-08
申请号：US12415237
申请日：2009-03-31
申请人： Shigeru Wakiyama , Kenichi Akamatsu
发明人： Shigeru Wakiyama , Kenichi Akamatsu
IPC分类号： G12B21/08
CPC分类号： G01Q70/04
摘要： Provided are a structure of an apparatus for analysis, inspection, and measurement in which a support structure supporting a detection unit is resistant to disturbance, suppresses a reduction in resolution during large-sample measurement, and has high rigidity, and a probe microscope using the apparatus structure. The apparatus structure supporting the detection unit which is opposed to a sample which is located on a unit movable in at least one axis direction and is an object to be analyzed has an arch shape. In the apparatus structure having the arch shape and supporting the detection unit, a surface substantially perpendicular to a flat surface portion of a sample holder located immediately under the apparatus structure is formed. The detection unit is supported on the perpendicular surface. The arch-shaped apparatus structure is a curved structure consistent with a catenary curve.
摘要翻译： 提供一种用于分析，检查和测量的装置的结构，其中支撑检测单元的支撑结构抵抗干扰，抑制大样本测量期间的分辨率降低并且具有高刚性，并且使用探针显微镜 装置结构。 支撑检测单元的装置结构具有弓形状，该检测单元与位于能够沿至少一个轴向移动的单元上的样本相对的被检体的形状相对。 在具有拱形形状并支撑检测单元的装置结构中，形成基本上垂直于位于装置结构正下方的样品架的平坦表面部分的表面。 检测单元被支撑在垂直表面上。 拱形装置结构是与悬链线曲线一致的弯曲结构。
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3.发明申请PROBE ALIGNING METHOD FOR PROBE MICROSCOPE AND PROBE MICROSCOPE OPERATED BY THE SAME 有权用于探针显微镜和探针显微镜的探针校准方法公开(公告)号：US20100031402A1
公开(公告)日：2010-02-04
申请号：US12510794
申请日：2009-07-28
IPC分类号： G01N13/10
摘要： Provided is an aligning method capable of setting a sample observation unit such as an optical microscope to a probe microscope observation position at high precision. A sample having a known structure is used in advance. A surface of the sample and a shape of a cantilever provided with a probe are observed using the sample observation unit such as the optical microscope. A sample observation position and a probe position which are obtained using the sample observation unit are verified, and a relative positional relationship therebetween is recorded. Then, a first mark indicating a position of the cantilever and a second mark which is displayed in conjunction with the first mark and has the relative positional relationship with the first mark are produced to align the sample relative to the second mark.
摘要翻译： 提供了一种能够将诸如光学显微镜的样本观察单元以高精度设置在探针显微镜观察位置的对准方法。 预先使用具有已知结构的样品。 使用诸如光学显微镜的样品观察单元观察样品的表面和设置有探针的悬臂的形状。 验证使用样本观察单元获得的样本观察位置和探针位置，并记录它们之间的相对位置关系。 然后，产生指示悬臂的位置的第一标记和与第一标记一起显示并与第一标记具有相对位置关系的第二标记，以使样本相对于第二标记进行对准。
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公开(公告)号：US20050263700A1
公开(公告)日：2005-12-01
申请号：US11135076
申请日：2005-05-23
IPC分类号： B81C99/00 , B82B3/00 , B82Y15/00 , B82Y40/00 , G01N23/00 , G01Q60/10 , G01Q80/00 , G01Q90/00 , G03F1/08 , G03F1/68 , G03F1/72
摘要： Fine markers are formed by thrusting a probe, which is harder than material to be processed, the formed fine markers are observed in the course of processing, the drift amount is obtained from the change of the position of the center of gravity of the hole, and the processing is restarted in the processing area corrected by the obtained drift amount.
摘要翻译： 通过推出比待处理材料更难的探针来形成精细标记，在加工过程中观察形成的精细标记，漂移量由孔的重心位置的变化获得， 并且在通过所获得的漂移量校正的处理区域中重新开始处理。
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公开(公告)号：US06388249B2
公开(公告)日：2002-05-14
申请号：US09878869
申请日：2001-06-11
申请人： Shigeru Wakiyama , Naohiko Fujino
发明人： Shigeru Wakiyama , Naohiko Fujino
IPC分类号： H01J314
CPC分类号： G01Q30/02 , G01Q30/025
摘要： It is so adapted that a sample is mounted on three-dimensional stages through a sample holder and a beam light emitted from a beam light oscillator is applied to a sample surface through a polarizing element different from polarization of the beam light or directly. An image of a foreign-matter on the sample surface scattered by the beam light is displayed on a monitor through a polarizing element different from the beam light, through a CCD camera mounted on an optical microscope. As a method of bringing the beam light until it is applied to the sample surface, there are a method of using an optical fiber for the beam light and a method of using an optical part such as a mirror.
摘要翻译： 它被适配成使得样品通过样品保持器安装在三维级上，并且从束光振荡器发射的束光通过不同于束光的偏振或直接的偏振元件施加到样品表面。 通过光束光散射的样品表面上的异物的图像通过安装在光学显微镜上的CCD照相机通过不同于光束的偏振元件显示在监视器上。 作为使光束直到被施加到样品表面的方法，存在使用光束用于束光的方法以及使用诸如反射镜的光学部件的方法。
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公开(公告)号：US5453616A
公开(公告)日：1995-09-26
申请号：US324740
申请日：1994-10-18
申请人： Shigeru Wakiyama
发明人： Shigeru Wakiyama
摘要： By indirectly measuring the movement of a first scanner comprising a piezoelectric element which moves a specimen or a detecting part by providing a second scanner separate from the first scanner and disposing a displacement detecting sensor in the vicinity of the second scanner and causing the second scanner to move in a similar way as the first scanner, the error between the results after image processing and the actual shape, coming from the non-linearity between the impressed voltage and the amount of displacement of the piezoelectric element, is reduced.
摘要翻译： 通过间接地测量第一扫描器的运动，所述第一扫描器包括通过提供与第一扫描器分离的第二扫描仪移动样本或检测部分的压电元件，并且在第二扫描仪附近设置位移检测传感器，并使第二扫描仪 以与第一扫描仪相似的方式移动，图像处理后的结果与实际形状之间的误差来自压电电压与压电元件的位移量之间的非线性。
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公开(公告)号：US07373806B2
公开(公告)日：2008-05-20
申请号：US10925049
申请日：2004-08-24
IPC分类号： G01B5/28
CPC分类号： G01Q10/065 , G01Q60/32
摘要： A scanning probe microscope has a probe tip for undergoing a scanning operation to scan a sample surface in X- and Y-directions parallel to the sample surface and for undergoing movement in a Z-direction vertical to the sample surface. A vibration unit vibrates the probe tip at a vibration frequency that resonates with of forcedly vibrates the probe tip. An observation unit collects observational data from the sample surface when the probe tip is in proximity or contact with the sample surface. A detection unit detects a variation in the state of vibration of the probe tip when the probe tip is in proximity or contact with the sample surface during a scanning operation. A control controls scanning of the probe tip in the X- and Y-directions and movement of the probe tip in the Z-direction, and controls scanning of the probe tip in a direction parallel to the sample surface after the observational data is collected from the sample surface and until the probe tip reached a next observation position in the X- and Y-direction. During a scanning operation, the control unit controls the probe tip to move in the Z-direction away from the sample surface only when the detection unit detects a variation in the state of vibration of the probe tip.
摘要翻译： 扫描探针显微镜具有用于进行扫描操作的探针尖端，以在与样品表面平行的X和Y方向上扫描样品表面，并且在垂直于样品表面的Z方向上进行移动。 振动单元以与谐振的振动频率振动探针尖端，强制地振动探针尖端。 当探头尖端接近或与样品表面接触时，观察单元从样品表面收集观察数据。 检测单元在扫描操作期间当探针尖端接近或接触样品表面时检测探针尖端的振动状态的变化。 控制器控制探针尖端沿X方向和Y方向的扫描以及探针尖端沿Z方向的移动，并且在从观察数据收集之后控制探针尖端在与样品表面平行的方向上的扫描 样品表面，直到探针尖端到达X和Y方向的下一个观察位置。 在扫描操作期间，只有当检测单元检测到探针尖端的振动状态的变化时，控制单元才控制探针尖端沿Z方向移动离开样品表面。
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8.发明申请公开(公告)号：US20050262685A1
公开(公告)日：2005-12-01
申请号：US11135075
申请日：2005-05-23
IPC分类号： G01B21/22 , B23Q17/00 , B82B3/00 , B82Y15/00 , B82Y35/00 , B82Y40/00 , G01B5/28 , G01Q60/24 , G01Q60/38 , G01Q80/00 , G03F1/08 , G03F1/68 , G03F1/72 , G03F7/00
CPC分类号： G01Q30/06 , G01Q40/00 , G01Q80/00 , G03F1/72 , G03F7/0002 , Y10T29/49004 , Y10T29/49771 , Y10T29/49822 , Y10T29/49824
摘要： An indentation is formed by thrusting a probe of a scanning probe microscope for processing, which has a vertical surface or a vertical ridge and is harder than sample material, into sample for measuring the indentation. A high-fidelity AFM observation is performed on the shape of the formed indentation with a thin probe with high aspect ratio, the direction of the vertical surface or the vertical ridge is inspected, and the angle error θ is stored. By rotating a sample stage by an angle corresponding to the measured mounting angle error θ of the probe, the mounting angle error of the probe is corrected in advance.
摘要翻译： 通过将具有垂直表面或垂直脊并且比样品材料更硬的扫描探针显微镜的探针推入用于测量凹陷的样品中来形成凹陷。 使用具有高纵横比的薄探针对垂直表面或垂直脊的方向进行形成的压痕的形状的高保真AFM观察，并且存储角度误差θ。 通过将样品台旋转与测量的测量的安装角度误差θ相对应的角度，预先校正探针的安装角度误差。
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公开(公告)号：US20050050947A1
公开(公告)日：2005-03-10
申请号：US10925049
申请日：2004-08-24
CPC分类号： G01Q10/065 , G01Q60/32
摘要： There are disclosed a scanning probe microscope and scanning method capable of reducing or avoiding damage due to collision between a probe tip and a sample, shortening the measuring time, improving the throughput and measuring accuracy, and collecting observational data such as topographic data about the sample surface without being affected by an adhesive water layer. The microscope has a vibration unit for vibrating the probe tip, an observation unit for collecting observational data when the tip is in proximity or contact with the sample surface, a detector for detecting a variation in the state of vibration of the tip when it is in proximity or contact with the sample surface, and a control unit for controlling movement of the tip in X- and Y-directions parallel to the sample surface and in a Z-direction vertical to the sample surface. After collecting the observational data, the control unit scans the tip in a direction parallel to the sample surface until a next observation position in the X- or Y-direction is reached. During the scanning, if a variation in the state of vibration of the tip is detected, the control unit moves the tip in the Z-direction away from the sample surface.
摘要翻译： 公开了一种扫描探针显微镜和扫描方法，其能够减少或避免由于探针尖端和样品之间的碰撞而引起的损伤，缩短测量时间，提高吞吐量和测量精度，并且收集观测数据，例如样品的地形数据 表面不受粘合剂水层的影响。 显微镜具有用于使探针尖端振动的振动单元，用于当尖端接近样品表面时收集观察数据的观察单元，用于检测尖端在其中处于振动状态时的变化的检测器 与样品表面接近或接触;以及控制单元，用于控制尖端在平行于样品表面的X和Y方向以及垂直于样品表面的Z方向上的移动。 在收集观察数据之后，控制单元沿与样品表面平行的方向扫描尖端，直到到达X或Y方向的下一个观察位置。 在扫描期间，如果检测到尖端的振动状态的变化，则控制单元将尖端沿Z方向移动离开样品表面。
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10.发明授权公开(公告)号：US06255127B1
公开(公告)日：2001-07-03
申请号：US09187938
申请日：1998-11-06
IPC分类号： H01L3126
CPC分类号： G01N21/94 , G01N21/9501 , G01N21/9503 , H01L22/12 , H01L22/20 , H01L2223/54453 , H01L2924/0002 , H01L2924/00
摘要： To enable observation, analysis and evaluation of minute foreign substances by adopting a method for enabling performance of linkage between equipment coordinates of a particle examination equipment and apparatus coordinates of an analyzing apparatus such as SEM which is not a particle examination equipment with a precision higher than that with which coordinate linkage is performed between conventional equipment and apparatus coordinates. An analyzing method for analyzing minute foreign substances comprises the steps of determining the position of a minute foreign substance on the surface of a sample in a particle examination equipment, transferring the sample to a coordinate stage of an analyzing apparatus and inputting the position of the minute foreign substance determined by the particle examination equipment to thereby analyze the contents of this minute foreign substance. It is characterized by linking the equipment coordinates adopted by the particle examination equipment with the apparatus coordinates adopted by the analyzing apparatus by use of the same coordinate system based on the configurations of the sample.
摘要翻译： 为了能够观察，分析和评估微小的异物，通过采用能够实现粒子检查设备的设备坐标与不是具有高于 在常规设备和设备坐标之间进行哪个坐标连接。 用于分析微小异物的分析方法包括以下步骤：在粒子检查设备中确定样品表面上的微小异物的位置，将样品转移到分析设备的坐标台并输入分钟的位置 外来物质由颗粒检测设备确定，从而分析该微量异物的含量。 其特征在于，基于样本的构造，通过使用相同的坐标系将粒子检查装置采用的设备坐标与分析装置采用的装置坐标相连接。
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