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18 条记录 (耗时 0.047 秒)

    Integrated substrate transfer module
    1.
    发明授权
    Integrated substrate transfer module 有权
    集成基板传输模块

    公开(公告)号：US07919972B2

    公开(公告)日：2011-04-05

    申请号：US12016834

    申请日：2008-01-18

    申请人： Shinichi Kurita ,  Emanuel Beer ,  Hung T. Nguyen ,  Benjamin Johnston ,  Fayez E. Abboud

    发明人： Shinichi Kurita ,  Emanuel Beer ,  Hung T. Nguyen ,  Benjamin Johnston ,  Fayez E. Abboud

    IPC分类号： G01R13/00 ,  G01R31/02

    CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

    摘要： A system and method for supporting and transferring a substrate relative to a plurality of testing columns are provided. The system includes a testing table adapted to support and move the substrate relative to the plurality of testing columns. The testing table may include an end effector disposed therein to transfer the substrate relative to an upper surface of the testing table. The method includes transferring the substrate to the testing table and moving the substrate relative to the plurality of testing columns. Signals indicative of electronic device performance are sensed to determine operability of the devices on the substrate.

    摘要翻译： 提供了一种用于相对于多个测试柱支撑和传送衬底的系统和方法。 该系统包括适于相对于多个测试柱支撑和移动衬底的测试台。 测试台可以包括设置在其中的端部执行器，以相对于测试台的上表面传送衬底。 该方法包括将衬底转移到测试台并相对于多个测试柱移动衬底。 感测指示电子设备性能的信号以确定衬底上的器件的可操作性。

    Electron beam test system with integrated substrate transfer module
    2.
    发明授权
    Electron beam test system with integrated substrate transfer module 有权
    具有集成衬底传输模块的电子束测试系统

    公开(公告)号：US06833717B1

    公开(公告)日：2004-12-21

    申请号：US10778982

    申请日：2004-02-12

    申请人： Shinichi Kurita ,  Emanuel Beer ,  Hung T. Nguyen ,  Benjamin Johnston

    发明人： Shinichi Kurita ,  Emanuel Beer ,  Hung T. Nguyen ,  Benjamin Johnston

    IPC分类号： G01R31305

    CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

    摘要： A method and integrated system for electron beam testing a substrate is provided. In one aspect, the integrated system includes a transfer chamber having a substrate table disposed therein. The substrate table is capable of moving a substrate within the testing chamber in both horizontal and vertical directions. The substrate table includes a first stage moveable in a first dimension, a second stage moveable in a second dimension, and a third stage moveable in a third dimension. Each stage moves independently in its respective dimension. The system also includes a load lock chamber disposed adjacent a first side of the testing chamber, and a prober storage assembly disposed beneath the testing chamber. A prober stack assembly is disposed adjacent a second side of the testing chamber and arranged to transfer one or more probers between the prober storage assembly and the testing chamber. Further, one or more electron beam testing devices are disposed on an upper surface of the testing chamber.

    摘要翻译： 提供了一种用于电子束测试衬底的方法和集成系统。 一方面，集成系统包括具有设置在其中的衬底台的传送室。 衬底台能够在水平和垂直方向上移动测试室内的衬底。 基板台包括可在第一维度上移动的第一阶段，可在第二维度中移动的第二阶段和可在第三维度上移动的第三阶段。 每个阶段在其各自的维度上独立地移动。 该系统还包括邻近测试室的第一侧设置的负载锁定室，以及设置在测试室下方的探测器存储组件。 探测器堆叠组件设置在测试室的第二侧附近，并布置成在探测器存储组件和测试室之间传送一个或多个探测器。 此外，一个或多个电子束测试装置设置在测试室的上表面上。

    Integrated substrate transfer module
    3.
    发明授权
    Integrated substrate transfer module 有权
    集成基板传输模块

    公开(公告)号：US07330021B2

    公开(公告)日：2008-02-12

    申请号：US11018236

    申请日：2004-12-21

    申请人： Shinichi Kurita ,  Emanuel Beer ,  Hung T. Nguyen ,  Benjamin Johnston ,  Fayez E. Abboud

    发明人： Shinichi Kurita ,  Emanuel Beer ,  Hung T. Nguyen ,  Benjamin Johnston ,  Fayez E. Abboud

    IPC分类号： G01R13/04

    CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

    摘要： A substrate table and method for supporting and transferring a substrate are provided. The substrate table includes a segmented stage having an upper surface for supporting a substrate, and an end effector. The end effector includes two or more spaced apart fingers and an upper surface for supporting a substrate. The end effector is at least partially disposed and moveable within the segmented stage such that the fingers of the end effector and the segmented stage interdigitate to occupy the same horizontal plane. The segmented stage is adapted to raise and lower about the end effector.

    摘要翻译： 提供了用于支撑和转移衬底的衬底台和方法。 衬底台包括具有用于支撑衬底的上表面的分段段和端部执行器。 末端执行器包括两个或更多间隔开的指状物和用于支撑基底的上表面。 末端执行器至少部分地设置并在分段台内移动，使得末端执行器和分段台阶的指状物相互指向以占据相同的水平面。 分段段适于围绕末端执行器升高和降低。

    Configurable prober for TFT LCD array test
    5.
    发明申请
    Configurable prober for TFT LCD array test 有权
    可配置探针用于TFT LCD阵列测试

    公开(公告)号：US20050179452A1

    公开(公告)日：2005-08-18

    申请号：US10903216

    申请日：2004-07-30

    申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    IPC分类号： G01R31/302 ,  G01R31/26 ,  G01R31/305 ,  G02F1/13 ,  G09G3/00 ,  H01L21/687

    CPC分类号： G01R1/07364 ,  G01R31/2893 ,  G01R31/305 ,  G09G3/006

    摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.

    摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。 电引脚可以沿着探针杆的轴向长度移动，或者可以选择性地向下推动以接触衬底上的所选择的接触垫。

    Electron beam test system stage
    6.
    发明申请
    Electron beam test system stage 审中-公开
    电子束测试系统阶段

    公开(公告)号：US20060038554A1

    公开(公告)日：2006-02-23

    申请号：US11190320

    申请日：2005-07-27

    申请人： Shinichi Kurita ,  Emanuel Beer ,  Hung Nguyen ,  Benjamin Johnston ,  Fayez Abboud

    发明人： Shinichi Kurita ,  Emanuel Beer ,  Hung Nguyen ,  Benjamin Johnston ,  Fayez Abboud

    IPC分类号： G01R31/28

    CPC分类号： G01R31/305

    摘要： A method and integrated system for electron beam testing a substrate is provided. In one aspect, the integrated system includes an electron beam testing chamber having a substrate table disposed therein. The substrate table is capable of moving a substrate within the testing chamber in both horizontal and vertical directions. The system also includes a load lock chamber disposed adjacent a first side of the testing chamber, and a prober storage assembly disposed beneath the testing chamber. A prober transfer assembly is disposed adjacent a second side of the testing chamber and arranged to transfer one or more probers between the prober storage assembly and the testing chamber. Further, one or more electron beam testing devices are disposed on an upper surface of the testing chamber.

    摘要翻译： 提供了一种用于电子束测试衬底的方法和集成系统。 一方面，集成系统包括电子束测试室，其具有设置在其中的衬底台。 衬底台能够在水平和垂直方向上移动测试室内的衬底。 该系统还包括邻近测试室的第一侧设置的负载锁定室，以及设置在测试室下方的探测器存储组件。 探测器传送组件设置在测试室的第二侧附近，并布置成在探测器存储组件和测试室之间传送一个或多个探测器。 此外，一个或多个电子束测试装置设置在测试室的上表面上。

    Configurable prober for TFT LCD array testing
    8.
    发明申请
    Configurable prober for TFT LCD array testing 有权
    用于TFT LCD阵列测试的可配置探头

    公开(公告)号：US20050179451A1

    公开(公告)日：2005-08-18

    申请号：US10889695

    申请日：2004-07-12

    申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    IPC分类号： G01R31/302 ,  G01R31/26 ,  G01R31/305 ,  G02F1/13 ,  G09G3/00 ,  H01L21/687

    CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

    摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.

    摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。

    Integrated Substrate Transfer Module
    9.
    发明申请
    Integrated Substrate Transfer Module 有权
    集成基板传输模块

    公开(公告)号：US20080111577A1

    公开(公告)日：2008-05-15

    申请号：US12016834

    申请日：2008-01-18

    申请人： Shinichi Kurita ,  Emanuel Beer ,  Hung Nguyen ,  Benjamin Johnston ,  Fayez Abboud

    发明人： Shinichi Kurita ,  Emanuel Beer ,  Hung Nguyen ,  Benjamin Johnston ,  Fayez Abboud

    IPC分类号： G01R31/26

    CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

    摘要： A system and method for supporting and transferring a substrate relative to a plurality of testing columns are provided. The system includes a testing table adapted to support and move the substrate relative to the plurality of testing columns. The testing table may include an end effector disposed therein to transfer the substrate relative to an upper surface of the testing table. The method includes transferring the substrate to the testing table and moving the substrate relative to the plurality of testing columns. Signals indicative of electronic device performance are sensed to determine operability of the devices on the substrate.

    摘要翻译： 提供了一种用于相对于多个测试柱支撑和传送衬底的系统和方法。 该系统包括适于相对于多个测试柱支撑和移动衬底的测试台。 测试台可以包括设置在其中的端部执行器，以相对于测试台的上表面传送衬底。 该方法包括将衬底转移到测试台并相对于多个测试柱移动衬底。 感测指示电子设备性能的信号以确定衬底上的器件的可操作性。

    Configurable prober for TFT LCD array testing
    10.
    发明授权
    Configurable prober for TFT LCD array testing 有权
    用于TFT LCD阵列测试的可配置探头

    公开(公告)号：US07319335B2

    公开(公告)日：2008-01-15

    申请号：US10889695

    申请日：2004-07-12

    申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez (Frank) E. Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    IPC分类号： G01R31/305

    CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

    摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.

    摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。