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1.发明授权Semiconductor integrated circuit device manufacturing method including chemical mechanical polishing, and detection and evaluation of microscratches caused thereby 失效半导体集成电路器件制造方法包括化学机械抛光，以及由此引起的微细纹的检测和评估公开(公告)号：US06468817B2
公开(公告)日：2002-10-22
申请号：US09934561
申请日：2001-08-23
IPC分类号： H01L2166
CPC分类号： H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： In the manufacturing method, micro scratches are detected without performing a breakdown inspection on wafers flowing through a mass production process. The method comprises: forming an insulating film on main surfaces of a plurality of first wafers which flow through a mass-production process; preparing a dummy wafer for monitoring, on which a silicon-oxide-based insulating film is formed; performing chemical mechanical polishing on the insulating films respectively formed on main surfaces of the plurality of first wafers and the dummy wafer; performing etching on the insulating film of the dummy wafer with use of a solution containing hydrofluoric acid, after the step of performing the chemical mechanical polishing; and measuring a number of scratches on the insulating film of the dummy wafer subjected to the etching.
摘要翻译： 在制造方法中，在对通过批量生产工艺流动的晶片进行击穿检测的情况下，检测到微小的划痕。 该方法包括：在流过批量生产过程的多个第一晶片的主表面上形成绝缘膜; 制备用于监测的伪晶片，其上形成氧化硅基绝缘膜; 对分别形成在多个第一晶片和虚设晶片的主表面上的绝缘膜执行化学机械抛光; 在进行化学机械抛光的步骤之后，使用含有氢氟酸的溶液在虚拟晶片的绝缘膜上进行蚀刻; 并测量经过蚀刻的虚设晶片的绝缘膜上的划痕数。
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2.发明授权公开(公告)号：US07900341B2
公开(公告)日：2011-03-08
申请号：US12361957
申请日：2009-01-29
申请人： Yoshiteru Katsumura
发明人： Yoshiteru Katsumura
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/3189 , G11B5/455 , G11B5/743 , G11B5/746 , G11B5/855 , G11B19/048 , Y10T29/49021 , Y10T29/49025 , Y10T29/49027 , Y10T29/4903 , Y10T29/49032
摘要： A high yield in a manufacture of an HDD having a high recording density and using a patterned medium by a trench-like or a dot-like pattern is realized. In this HDD manufacturing method, a magnetic field size (writing and reading) of a head in a head manufacturing process is measured in a head unit inspection process. According to the result of the measurement, the head is classified into a plurality of groups in a head classifying process. In a patterned medium manufacturing process, a plurality of types of the patterned media which are designed so as to correspond to the classified head groups are manufactured. In an HDD assembly process, the HDD is manufactured by combining the plurality of head groups and the plurality of patterned media following a predetermined rule.
摘要翻译： 实现了具有高记录密度的HDD的制造和通过沟槽状或点状图案使用图案化介质的高产率。 在该HDD制造方法中，在头单元检查处理中测量头制造过程中的头的磁场尺寸（书写和读取）。 根据测量结果，在头部分类处理中将头部分成多个组。 在图案化介质制造工艺中，制造被设计为对应于分类的头组的多种类型的图案化介质。 在HDD组装过程中，通过按照预定规则组合多个头组和多个图案化介质来制造HDD。
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3.发明申请Head stack assembly, manufacturing method thereof and multi-disc magnetic storage device 有权头堆组件及其制造方法和多盘磁存储装置公开(公告)号：US20090225476A1
公开(公告)日：2009-09-10
申请号：US12380491
申请日：2009-02-26
CPC分类号： G11B5/4813 , Y10T29/49028 , Y10T29/49036
摘要： Embodiments of the present invention provide a head stack assembly and a manufacturing method thereof in which manufacturing costs as a multi-disc magnetic device are reduced by increasing the yield and reducing inventory of magnetic heads which can be assembled to the head stack assembly. According to one embodiment, a head stack assembly and a manufacturing method thereof includes plural actuator arms to which magnetic heads are assembled through suspensions. The tolerance of the core width or the write element width of the magnetic heads assembled to inside actuator arms of the plural actuator arms is set to be narrower than the tolerance of the core width or the write element width of the magnetic heads assembled to the outside actuator arms.
摘要翻译： 本发明的实施例提供了一种磁头堆叠组件及其制造方法，其中通过提高产量并减少可组装到磁头组件组件的磁头的库存来减少作为多磁盘磁性装置的制造成本。 根据一个实施例，头部堆叠组件及其制造方法包括多个致动器臂，通过悬架将磁头组装到该致动臂上。 组装在多个致动器臂的内部致动器臂中的磁头的磁芯宽度或写入元件宽度的公差被设定为比组装在外部的磁头的磁芯宽度或写入元件宽度的公差更窄 执行器臂。
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4.发明申请SYSTEM, METHOD, AND APPARATUS FOR PERFORMING METROLOGY ON PATTERNED MEDIA DISKS WITH TEST PATTERN AREAS 有权用于测试图案区域对图形介质盘进行计量的系统，方法和装置公开(公告)号：US20100321813A1
公开(公告)日：2010-12-23
申请号：US12871156
申请日：2010-08-30
申请人： Yoshiteru Katsumura
发明人： Yoshiteru Katsumura
IPC分类号： G11B27/36
摘要： Techniques for performing metrology on magnetic media disk formations that are arranged in curvilinear patterns are disclosed. Small integrated test patterns having rectangular periodicity are integrated among the concentric circles of patterned media formations. The test patterns cover only very small areas of the disk so as to not significantly affect disk capacity. The periodicity of the test patterns allows their formations to be more readily measured by metrology technology than those having a curvilinear periodicity.
摘要翻译： 公开了以曲线图案布置的磁性介质盘形结构上的测量技术。 具有矩形周期性的小的集成测试图案被集成在图案化介质结构的同心圆之间。 测试模式仅覆盖磁盘的非常小的区域，以便不会显着影响磁盘容量。 测试图案的周期性允许通过计量技术比具有曲线周期性的测量图形更容易地测量它们的形成。
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5.发明申请SYSTEM, METHOD, AND APPARATUS FOR PERFORMING METROLOGY ON PATTERNED MEDIA DISKS WITH TEST PATTERN AREAS 有权用于测试图案区域对图形介质盘进行计量的系统，方法和装置公开(公告)号：US20090103201A1
公开(公告)日：2009-04-23
申请号：US11857074
申请日：2007-10-22
申请人： Yoshiteru Katsumura
发明人： Yoshiteru Katsumura
IPC分类号： G11B27/36
摘要： Techniques for performing metrology on magnetic media disk formations that are arranged in curvilinear patterns are disclosed. Small integrated test patterns having rectangular or hexagonal periodicity are integrated among the concentric circles of patterned media formations. The test patterns cover only very small areas of the disk so as to not significantly affect disk capacity. The periodicity of the test patterns allows their formations to be more readily measured by metrology technology than those having a curvilinear periodicity.
摘要翻译： 公开了以曲线图案布置的磁性介质盘形结构上的测量技术。 具有矩形或六边形周期性的小的集成测试图案集成在图案化介质结构的同心圆之间。 测试模式仅覆盖磁盘的非常小的区域，以便不会显着影响磁盘容量。 测试图案的周期性允许通过计量技术比具有曲线周期性的测量图形更容易地测量它们的形成。
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公开(公告)号：US20110072644A1
公开(公告)日：2011-03-31
申请号：US12635680
申请日：2009-12-10
CPC分类号： G11B5/59633 , G11B5/59638 , Y10T29/49027 , Y10T29/5313
摘要： A method for manufacturing a hard-disk drive (HDD). The method for manufacturing a HDD includes writing servo tracks, and writing servo tracks into the HDD using a calculated control target value of a calculated servo pattern overlap amount. Writing servo tracks includes a first, second, third and fourth operation. The first operation includes: producing a first control equation for obtaining a servo pattern overlap amount; and, converting a root-mean-square error (RMSE) into a probability distribution. The second operation includes calculating a second control target value that results in an increased product yield, from the RMSE probability distribution. The third operation includes producing a second control equation for obtaining a calculated servo pattern overlap amount, by assigning the second control target value into the first control equation. The fourth operation includes calculating the calculated control target value using the second control equation and the magnetic-recording-head characteristic value.
摘要翻译： 一种用于制造硬盘驱动器（HDD）的方法。 HDD的制造方法包括：使用计算出的计算出的伺服模式重叠量的控制目标值，写入伺服磁道，并将伺服磁道写入HDD。 写入伺服轨道包括第一，第二，第三和第四操作。 第一操作包括：产生用于获得伺服模式重叠量的第一控制方程; 并将均方根误差（RMSE）转换成概率分布。 第二操作包括从RMSE概率分布计算导致产品产量增加的第二控制目标值。 第三操作包括通过将第二控制目标值分配到第一控制方程中来产生用于获得计算的伺服模式重叠量的第二控制方程式。 第四操作包括使用第二控制方程和磁记录头特性值来计算计算出的控制目标值。
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7.发明授权System, method and apparatus for performing metrology on patterned media disks with test pattern areas 有权用于在具有测试图案区域的图案化媒体盘上执行度量的系统，方法和装置公开(公告)号：US07813075B2
公开(公告)日：2010-10-12
申请号：US11857074
申请日：2007-10-22
申请人： Yoshiteru Katsumura
发明人： Yoshiteru Katsumura
IPC分类号： G11B5/596
摘要： Techniques for performing metrology on magnetic media disk formations that are arranged in curvilinear patterns are disclosed. Small integrated test patterns having rectangular or hexagonal periodicity are integrated among the concentric circles of patterned media formations. The test patterns cover only very small areas of the disk so as to not significantly affect disk capacity. The periodicity of the test patterns allows their formations to be more readily measured by metrology technology than those having a curvilinear periodicity.
摘要翻译： 公开了以曲线图案布置的磁性介质盘形结构上的测量技术。 具有矩形或六边形周期性的小的集成测试图案集成在图案化介质结构的同心圆之间。 测试模式仅覆盖磁盘的非常小的区域，以便不会显着影响磁盘容量。 测试图案的周期性允许通过计量技术比具有曲线周期性的测量图形更容易地测量它们的形成。
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8.发明申请公开(公告)号：US20090217510A1
公开(公告)日：2009-09-03
申请号：US12361957
申请日：2009-01-29
申请人： Yoshiteru Katsumura
发明人： Yoshiteru Katsumura
IPC分类号： G11B5/127
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/3189 , G11B5/455 , G11B5/743 , G11B5/746 , G11B5/855 , G11B19/048 , Y10T29/49021 , Y10T29/49025 , Y10T29/49027 , Y10T29/4903 , Y10T29/49032
摘要： A high yield in a manufacture of an HDD having a high recording density and using a patterned medium by a trench-like or a dot-like pattern is realized. In this HDD manufacturing method, a magnetic field size (writing and reading) of a head in a head manufacturing process is measured in a head unit inspection process. According to the result of the measurement, the head is classified into a plurality of groups in a head classifying process. In a patterned medium manufacturing process, a plurality of types of the patterned media which are designed so as to correspond to the classified head groups are manufactured. In an HDD assembly process, the HDD is manufactured by combining the plurality of head groups and the plurality of patterned media following a predetermined rule.
摘要翻译： 实现了具有高记录密度的HDD的制造和通过沟槽状或点状图案使用图案化介质的高产率。 在该HDD制造方法中，在头单元检查处理中测量头制造过程中的头的磁场尺寸（书写和读取）。 根据测量结果，在头部分类处理中将头部分成多个组。 在图案化介质制造工艺中，制造被设计为对应于分类的头组的多种类型的图案化介质。 在HDD组装过程中，通过按照预定规则组合多个头组和多个图案化介质来制造HDD。
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9.发明授权Process of manufacturing semiconductor device including chemical-mechanical polishing 失效制造半导体器件的工艺包括化学机械抛光公开(公告)号：US07052995B2
公开(公告)日：2006-05-30
申请号：US10176666
申请日：2002-06-24
IPC分类号： H01L21/302
CPC分类号： H01L21/7684 , H01L21/31053 , H01L21/3212 , H01L21/76802 , H01L21/76804 , H01L21/76819
摘要： A buried film and a barrier film are polished together using a slurry in which the polishing rate on a substrate material (in particular, silicon oxide), that on a buried-film material (in particular, tungsten) and that on a barrier-film material (in particular, titanium oxide) are substantially equal to one another. This can materialize a buried structure free from any step or steps, at a high polishing rate.
摘要翻译： 将掩埋膜和阻挡膜使用其中衬底材料（特别是氧化硅）上的抛光速率，掩埋膜材料（特别是钨）上的抛光速率和阻挡膜上的抛光速率 材料（特别是氧化钛）基本上彼此相等。 这可以以高抛光速率实现没有任何步骤或步骤的掩埋结构。
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10.发明授权System, method, and apparatus for performing metrology on patterned media disks with test pattern areas 有权用于在具有测试图案区域的图案化介质盘上执行度量的系统，方法和装置公开(公告)号：US08379338B2
公开(公告)日：2013-02-19
申请号：US12871156
申请日：2010-08-30
申请人： Yoshiteru Katsumura
发明人： Yoshiteru Katsumura
IPC分类号： G11B27/36
摘要： Techniques for performing metrology on magnetic media disk formations that are arranged in curvilinear patterns are disclosed. Small integrated test patterns having rectangular periodicity are integrated among the concentric circles of patterned media formations. The test patterns cover only very small areas of the disk so as to not significantly affect disk capacity. The periodicity of the test patterns allows their formations to be more readily measured by metrology technology than those having a curvilinear periodicity.
摘要翻译： 公开了以曲线图案布置的磁性介质盘形结构上的测量技术。 具有矩形周期性的小的集成测试图案被集成在图案化介质结构的同心圆之间。 测试模式仅覆盖磁盘的非常小的区域，以便不会显着影响磁盘容量。 测试图案的周期性允许通过计量技术比具有曲线周期性的测量图形更容易地测量它们的形成。
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