Elastic-wave monitoring device and surface-acoustic-wave device

    公开(公告)号:US07054005B2

    公开(公告)日:2006-05-30

    申请号:US10406268

    申请日:2003-04-04

    IPC分类号: G01J4/00

    摘要: An elastic-wave monitoring device includes an optical system which is arranged so that a circularly polarized light from a light source is incident to a measured object and a light beam from the measured object passes through a polarizing filter to a photodetector. A detection unit detects periodic fluctuation components of an output signal of the photodetector. In the elastic-wave monitoring device, the polarizing filter is arranged to have a polarization transmission axis directed to one of directions of principal axes of an ellipse formed by intersections of an index ellipsoid of the measured object and a plane perpendicular to an incidence direction of the light beam and passing through an origin of the index ellipsoid.

    Surface-acoustic-wave device
    2.
    发明授权
    Surface-acoustic-wave device 失效
    表面声波装置

    公开(公告)号:US07362033B2

    公开(公告)日:2008-04-22

    申请号:US11365655

    申请日:2006-03-02

    IPC分类号: H01L41/08 H03H9/64

    摘要: A surface-acoustic-wave device includes a piezoelectric substrate and first and second comb-shaped electrodes each having a bus-bar portion parallel to a propagation direction of a surface acoustic wave in the substrate. Respective electrode fingers are periodically formed on the piezoelectric substrate and extend in directions perpendicular to the propagation direction, wherein the electrode fingers of the first comb-shaped electrode and the electrode fingers of the second comb-shaped electrode are separated away from the bus-bar portion of the opposing comb-shaped electrode. The respective electrode fingers being periodically arrayed in the propagation direction of the surface-acoustic-wave, and the electrode fingers of each comb-shaped electrode are inclined at root portions thereof outwardly right and left from the bus-bar portion of the corresponding comb-shaped electrode so that the inclined portions of the electrode fingers face a direction of a leaking surface-acoustic-wave perpendicularly.

    摘要翻译: 表面声波装置包括压电基板和每个具有平行于基板中的表面声波的传播方向的汇流条部分的第一和第二梳状电极。 相应的电极指周期性地形成在压电基片上并且在垂直于传播方向的方向上延伸,其中第一梳状电极的电极指和第二梳状电极的电极指分离离母线 相对的梳状电极的一部分。 各个电极指沿周向排列在表面声波的传播方向上,并且每个梳状电极的电极指从其相应梳状电极的汇流条部分向右和向左的根部分倾斜, 使得电极指的倾斜部分垂直面向泄漏的表面声波的方向。

    Surface-acoustic-wave device
    4.
    发明申请
    Surface-acoustic-wave device 审中-公开
    表面声波装置

    公开(公告)号:US20080189665A1

    公开(公告)日:2008-08-07

    申请号:US12073277

    申请日:2008-03-03

    IPC分类号: H01L41/22 G01R29/22

    摘要: A surface-acoustic-wave device comprises a piezoelectric substrate and first and second comb-shaped electrodes each having a bus-bar portion parallel to a propagation direction of a surface acoustic wave in the substrate. Respective electrode fingers are periodically formed on the piezoelectric substrate and extend in directions perpendicular to the propagation direction, wherein the electrode fingers of the first comb-shaped electrode and the electrode fingers of the second comb-shaped electrode are separated away from the bus-bar portion of the opposing comb-shaped electrode. The respective electrode fingers being periodically arrayed in the propagation direction of the surface-acoustic-wave, and the electrode fingers of each comb-shaped electrode are inclined at root portions thereof outwardly right and left from the bus-bar portion of the corresponding comb-shaped electrode so that the inclined portions of the electrode fingers face a direction of a leaking surface-acoustic-wave perpendicularly.

    摘要翻译: 表面声波装置包括压电基板和每个具有与基板中的表面声波的传播方向平行的汇流条部分的第一和第二梳状电极。 相应的电极指周期性地形成在压电基片上并且在垂直于传播方向的方向上延伸,其中第一梳状电极的电极指和第二梳状电极的电极指分离离母线 相对的梳状电极的一部分。 各个电极指沿周向排列在表面声波的传播方向上,并且每个梳状电极的电极指从其相应梳状电极的汇流条部分向右和向左的根部分倾斜, 使得电极指的倾斜部分垂直面向泄漏的表面声波的方向。

    Method of producing an acoustic wave device
    5.
    发明授权
    Method of producing an acoustic wave device 有权
    制造声波装置的方法

    公开(公告)号:US08720022B2

    公开(公告)日:2014-05-13

    申请号:US12647071

    申请日:2009-12-24

    IPC分类号: H03H3/013 H01L41/047

    摘要: A method of producing an acoustic wave device includes: forming an interdigital electrode on a piezoelectric substrate; forming a barrier film so as to cover the interdigital electrode; forming a medium on the barrier film; measuring a frequency characteristic of an acoustic wave excited by the interdigital electrode; and forming, in an excitation region, an adjustment region having a thickness different from other portions by patterning the barrier film or further providing an adjustment film. When forming the adjustment region, an area T of the adjusting area is adjusted in accordance with the measured frequency characteristic.

    摘要翻译: 声波装置的制造方法包括:在压电基板上形成叉指电极; 形成阻挡膜以覆盖叉指电极; 在阻挡膜上形成介质; 测量由叉指电极激发的声波的频率特性; 以及通过对所述阻挡膜进行图案化或进一步提供调整膜,在激发区域中形成具有与其它部分不同的厚度的调节区域。 在形成调整区域时,根据测定的频率特性调整调整区域的面积T.

    Boundary acoustic wave device and communication equipment
    6.
    发明授权
    Boundary acoustic wave device and communication equipment 有权
    边界声波装置及通讯设备

    公开(公告)号:US08264299B2

    公开(公告)日:2012-09-11

    申请号:US12711965

    申请日:2010-02-24

    IPC分类号: H03H9/25 H03H9/145

    摘要: A boundary acoustic waves device includes a piezoelectric substrate having piezoelectricity, interdigitated electrodes formed on the piezoelectric substrate, a first medium formed on the piezoelectric substrate so as to cover the interdigitated electrode, and a second medium formed on the first medium. The interdigitated electrodes include a plurality of electrode fingers and bus bars that connect ends of the plurality of electrode fingers. A third medium is formed on the first medium. The second medium and the third medium are in contact with the first medium. The first medium, the second medium, and the third medium are formed of different materials. The first medium, the second medium, and the third medium are different in a ratio in length of a part with the third medium formed with respect to a length of a propagation path of boundary acoustic waves in a cross-section perpendicular to a longitudinal direction of the electrode fingers, in the longitudinal direction of the electrode fingers.

    摘要翻译: 声界面波装置包括具有压电性的压电基板,形成在压电基板上的叉指电极,形成在压电基板上以覆盖交叉指向电极的第一介质,以及形成在第一介质上的第二介质。 交叉电极包括连接多个电极指的端部的多个电极指和汇流条。 在第一介质上形成第三介质。 第二介质和第三介质与第一介质接触。 第一介质,第二介质和第三介质由不同的材料形成。 第一介质,第二介质和第三介质在与纵向方向垂直的截面中相对于边界声波的传播路径的长度形成的部分的长度的比例不同 的电极指的长度方向。

    Elastic boundary wave device
    7.
    发明授权
    Elastic boundary wave device 有权
    弹性边界波装置

    公开(公告)号:US07915786B2

    公开(公告)日:2011-03-29

    申请号:US12705565

    申请日:2010-02-12

    IPC分类号: H01L41/08

    摘要: An elastic boundary wave device of the present invention includes a plurality of elastic boundary wave elements. The elastic boundary wave elements each include a piezoelectric material layer, an electrode disposed over the piezoelectric material layer, a first dielectric layer formed over the piezoelectric material layer so as to cover the electrode, and a second dielectric layer formed over the first dielectric layer. An acoustic velocity of the second dielectric layers is faster than an acoustic velocity of the first dielectric layers, and the acoustic velocity of the second dielectric layer of at least one elastic boundary wave element from among the plurality of elastic boundary wave elements is different from the acoustic velocity of the second dielectric layer of another of the elastic boundary wave elements. This enables improving the degree of suppression in use as a filter in the elastic boundary wave device.

    摘要翻译: 本发明的弹性边界波装置包括多个弹性边界波元件。 弹性边界波元件各自包括压电材料层,设置在压电材料层上的电极,形成在压电材料层上以覆盖电极的第一电介质层,以及形成在第一介电层上的第二电介质层。 第二电介质层的声速比第一电介质层的声速更快,并且多个弹性边界波元件中的至少一个弹性边界波元件的第二电介质层的声速不同于 另一弹性边界波元件的第二电介质层的声速。 由此,能够提高弹性边界波装置中的滤波器的使用抑制度。

    Acoustic wave device and filter using the same
    9.
    发明授权
    Acoustic wave device and filter using the same 有权
    声波装置和滤波器使用相同

    公开(公告)号:US07688161B2

    公开(公告)日:2010-03-30

    申请号:US11976441

    申请日:2007-10-24

    IPC分类号: H03H9/64 H03H9/52 H03H9/25

    CPC分类号: H03H9/6483

    摘要: An acoustic wave device includes a piezoelectric substrate, a resonator having comb electrodes that are provided above the piezoelectric substrate and excite an acoustic wave, and a capacitor that is provided above the piezoelectric substrate and is connected in series or parallel with the resonator, the capacitor including electrodes that horizontally face each other above the piezoelectric substrate. The electrodes of the capacitor are further from the piezoelectric substrate than the comb electrodes of the resonator.

    摘要翻译: 声波装置包括压电基板,具有设置在压电基板上方的梳状电极并激发声波的谐振器,以及设置在压电基板上方并与谐振器串联或并联连接的电容器,电容器 包括在压电基板上水平面对的电极。 与谐振器的梳状电极相比,电容器的电极比压电基片更远。