公开(公告)号：US6076932A

公开(公告)日：2000-06-20

申请号：US934867

申请日：1997-09-22

申请人： Shinji Uchida ,  Tsuguhiro Korenaga ,  Hiroyasu Tsuji ,  Shougo Nasu ,  Norimoto Nouchi ,  Toshio Fukazawa ,  Toshihiro Kuriyama ,  Yuji Matsuda

发明人： Shinji Uchida ,  Tsuguhiro Korenaga ,  Hiroyasu Tsuji ,  Shougo Nasu ,  Norimoto Nouchi ,  Toshio Fukazawa ,  Toshihiro Kuriyama ,  Yuji Matsuda

IPC分类号： G02B5/22 ,  G02F1/1335 ,  G11B7/135 ,  G02B27/00

CPC分类号： G11B7/1356 ,  G02B5/22 ,  G02F1/133512 ,  G11B7/1362

摘要： This invention provides a light absorber which can be used for optical equipment like optical-disk equipment and a liquid crystal display. The light absorber has a layered structure including a light absorbing layer and a transparent layer. The light absorbing layer absorbs a reflected light from the inside of the absorber as well as incident light into the absorber while the transparent layer helps attenuate the reflected light by interference of light. One of the light absorbing layers which is thicker than others may work as a shading layer for the incident light.

摘要翻译： 本发明提供一种可用于诸如光盘设备和液晶显示器之类的光学设备的光吸收体。 光吸收体具有包括光吸收层和透明层的层状结构。 光吸收层吸收来自吸收体的内部的反射光以及入射到吸收体的入射光，同时透明层通过光的干涉来帮助衰减反射光。 比其他光吸收层更厚的一个可以作为入射光的遮光层。

公开(公告)号：US6005835A

公开(公告)日：1999-12-21

申请号：US968587

申请日：1997-11-13

申请人： Hiroyasu Tsuji ,  Toshio Fukazawa ,  Shogo Nasu ,  Norimoto Nochi ,  Shinji Uchida ,  Tsuguhiro Korenaga

发明人： Hiroyasu Tsuji ,  Toshio Fukazawa ,  Shogo Nasu ,  Norimoto Nochi ,  Shinji Uchida ,  Tsuguhiro Korenaga

IPC分类号： G02B5/18 ,  G02B27/28 ,  G11B7/135 ,  G11B7/1353 ,  G11B7/1356 ,  G11B7/1362 ,  G11B7/1374 ,  G11B7/00

CPC分类号： G11B7/1356 ,  G02B27/283 ,  G02B27/4238 ,  G02B5/1814

摘要： A prism and an optical pickup employing such prism includes a parallel prism having a polarization beam splitter film and a reflection film. The polarization beam splitter film is formed on an angled plane of a glass material having an approximate parallelogram cross-section, and consists of a multi-layer film of a composite film made of Si and SiO.sub.2-x (x

摘要翻译： 使用这种棱镜的棱镜和光学拾取器包括具有偏振分束膜和反射膜的平行棱镜。 偏振分束膜形成在具有近似平行四边形横截面的玻璃材料的倾斜平面上，并由由Si和SiO 2-x（x <0.5）构成的复合膜的多层膜和多层 的多个介电膜。 反射膜形成在与形成有偏振分束膜的倾斜平面大致平行的同一玻璃材料的倾斜平面上，由多层由金属Si和氧化物SiO 2的复合膜组成， 作为高折射膜的x（x <0.5）和作为相对低折射膜的多层多介质膜。

公开(公告)号：US5978346A

公开(公告)日：1999-11-02

申请号：US16527

申请日：1998-01-30

申请人： Sadao Mizuno ,  Tsuguhiro Korenaga ,  Shinji Uchida

发明人： Sadao Mizuno ,  Tsuguhiro Korenaga ,  Shinji Uchida

IPC分类号： G11B7/00 ,  G11B7/135 ,  G11B7/12

CPC分类号： G11B7/1395 ,  G11B7/1353 ,  G11B7/1356 ,  G11B7/1365 ,  G11B7/1374 ,  G11B7/1381 ,  G11B2007/0006 ,  G11B2007/13727

摘要： An optical head has a light source; luminous flux splitting means for splitting radiation luminous flux of linearly polarized light radiated from the light source into plural luminous fluxes without changing the luminous flux diameter substantially; a wavelength plate for polarizing at least one of the luminous fluxes split by the luminous flux splitting means into a nearly circularly polarized light as illumination luminous flux; an objective lens for converging the illumination luminous flux through the wavelength plate on an optical information medium and collecting the reflected light; and a photodetector for receiving the reflected luminous flux collected by the objective lens after passing through the wavelength plate and the luminous flux splitting means. The quantity of received light for maintaining the S/N ratio is sufficient for reproducing a high density optical disk and a conventional optical disk with a large birefringence.

摘要翻译： 光头具有光源; 光束分离装置，用于将从光源辐射的线偏振光的辐射光束分散成多个光束而不改变光通量; 波长板，用于将由光束分离装置分割的光束中的至少一个偏振成近似圆偏振光作为照明光束; 用于将通过波长板的照明光束会聚在光信息介质上并收集反射光的物镜; 以及光电检测器，用于接收通过波长板和光通量分离装置之后由物镜收集的反射光通量。 用于保持S / N比的接收光量足以再现高密度光盘和具有大双折射率的传统光盘。

公开(公告)号：US5863379A

公开(公告)日：1999-01-26

申请号：US275273

申请日：1994-07-15

申请人： Shinji Uchida ,  Tsuguhiro Korenaga ,  Hideo Kurokawa ,  Akito Sawada

发明人： Shinji Uchida ,  Tsuguhiro Korenaga ,  Hideo Kurokawa ,  Akito Sawada

IPC分类号： C23C14/54 ,  G01B11/06 ,  B32B31/00

CPC分类号： C23C14/547 ,  G01B11/0683 ,  Y10T156/10

摘要： A multilayer film forming apparatus including a film forming chamber, a substrate on which a multilayer film is formed, an optical thickness monitoring substrate which controls an optical thickness of each layer of a multilayer film, a monitor exchange system which exchanges the optical thickness monitoring substrate for each layer and a multilayer film monitoring substrate which is disposed under the optical thickness monitoring substrate to observe spectral characteristics of the multilayer film. The invention also includes a light source which irradiates light to the optical thickness monitoring substrate and to the multilayer film monitoring substrate, an optical lens which reshapes the light radiated from the light source, an optical window which lets the light into and out of the film forming chamber, a detector which detects the light quantity reflected from the optical thickness monitoring substrate and a spectral characteristics evaluation device which measures spectral characteristics of the light reflected from the multilayer film monitoring substrate. The multilayer film monitoring substrate is fixed to a holding jig to prevent itself from inclining more than ten minutes against the disposed state.

摘要翻译： 一种多层膜形成装置，包括：成膜室，形成有多层膜的基板;控制多层膜的各层的光学厚度的光学厚度监视基板;交换光学厚度监视基板的监视器交换系统 并且设置在光学厚度监视基板下方以观察多层膜的光谱特性的多层膜监视基板。 本发明还包括将光照射到光学厚度监测基板和多层膜监视基板的光源，重新形成从光源照射的光的光学透镜，使光入射到膜的光学窗口 检测从光学厚度监测基板反射的光量的检测器和测量从多层膜监测基板反射的光的光谱特性的光谱特性评价装置。 多层膜监视基板固定在保持夹具上，以防止自身相对于处置状态倾斜超过十分钟。

公开(公告)号：US5790503A

公开(公告)日：1998-08-04

申请号：US755405

申请日：1996-11-22

申请人： Sadao Mizuno ,  Tsuguhiro Korenaga ,  Shinji Uchida

发明人： Sadao Mizuno ,  Tsuguhiro Korenaga ,  Shinji Uchida

IPC分类号： G11B7/00 ,  G11B7/135

CPC分类号： G11B7/1395 ,  G11B7/1353 ,  G11B7/1356 ,  G11B7/1365 ,  G11B7/1374 ,  G11B7/1381 ,  G11B2007/0006 ,  G11B2007/13727

摘要： An optical head has a light source, luminous flux splitting means for splitting radiation luminous flux of linearly polarized light radiated from the light source into plural luminous fluxes, a wavelength plate for polarizing at least one of the luminous fluxes split by the luminous flux splitting means into a nearly circularly polarized light as illumination luminous flux, an objective lens for converging the illumination luminous flux on an optical information medium and collecting the reflected light, and a photo detector for receiving the reflected luminous flux, after passing through the wavelength plate and the luminous flux splitting means, wherein supposing a power efficiency when splitting the illumination luminous flux from the radiation luminous flux to be E1, a power efficiency when transmitting a polarized light component of the reflected luminous flux, the component being orthogonal to a direction of polarization of the illumination luminous flux, to the photo detector to be E2, and a power efficiency when transmitting a polarized light component of the reflected luminous flux, the component having substantially same direction as a direction of polarization of the illumination luminous flux, to the photo detector to be E3, the E2 is larger than the E1 and the E1.times.E3 is such amount that can be detected by the photo detector.

摘要翻译： 光头具有光源，用于将从光源辐射的线偏振光的辐射光束分解成多个光束的光束分离装置，用于偏振由光束分离装置分割的至少一个光束的波长板 成为近似圆偏振光作为照明光束，用于将照明光束会聚在光信息介质上并收集反射光的物镜，以及用于接收反射光束的光检测器，在经过波长板和 光束分离装置，其中当将从所述辐射光通量分离所述照明光束时的功率效率设定为E1时，将所述反射光束的偏振光分量透射时的功率效率，所述偏振光分量正交于偏振方向 照明光通量，到光电检测器 为E2，当将具有与照明光束的偏振方向大致相同的方向的反射光束的偏振光分量发送到光电检测器时的功率效率为E2，E2大于 E1和E1xE3是可以由光电检测器检测到的量。

公开(公告)号：US5410411A

公开(公告)日：1995-04-25

申请号：US3807

申请日：1993-01-13

申请人： Shinji Uchida ,  Tsuguhiro Korenaga ,  Akito Sawada ,  Hideo Kurokawa

发明人： Shinji Uchida ,  Tsuguhiro Korenaga ,  Akito Sawada ,  Hideo Kurokawa

IPC分类号： C23C14/54 ,  G01B11/06 ,  H01J37/32 ,  G01B11/02

CPC分类号： H01J37/32935 ,  C23C14/547 ,  G01B11/0683 ,  H01J2237/30455 ,  H01J2237/3132

摘要： A method of and an apparatus for forming a multi-layer film, includes: a thickness control device for controlling an optical film thickness or a thickness of each of the layers of the multi-layer film; a multi-layer film monitoring substrate on which the multi-layer film is formed; a measurement device for measuring the optical characteristics of the multi-layer film formed on the multi-layer film monitoring substrate; and a processing device which processes the results obtained by the measurement device so as to feed the processed results back to the thickness control device.

摘要翻译： 一种用于形成多层膜的方法和装置，包括：用于控制多层膜的每个层的光学膜厚度或厚度的厚度控制装置; 形成有多层膜的多层膜监视基板; 用于测量形成在所述多层膜监视基板上的多层膜的光学特性的测量装置; 以及处理装置，其处理由测量装置获得的结果，以便将处理结果送回厚度控制装置。

公开(公告)号：US08945364B2

公开(公告)日：2015-02-03

申请号：US12926393

申请日：2010-11-15

申请人： Shinji Uchida

发明人： Shinji Uchida

IPC分类号： C25D11/04 ,  C25D11/16 ,  G11B5/855

CPC分类号： G11B5/74 ,  C25D11/04 ,  C25D11/16 ,  G11B5/743 ,  G11B5/746 ,  G11B5/82 ,  G11B5/84 ,  G11B5/855 ,  G11B7/2405 ,  G11B7/2407 ,  G11B20/1217 ,  G11B2020/1238

摘要： A patterned magnetic recording medium, accessible by a magnetic recording head, including a plurality of tracks, a width direction of each track and that of the magnetic recording head being of a skew angle. The patterned magnetic recording medium includes a plurality of magnetic dots, each corresponding to a recording bit, formed on a non-magnetic material. The plurality of magnetic dots are arranged in a plurality of arrays, each array corresponding to one of the tracks. Every N adjacent magnetic dots of the array define a polygon, one side thereof being parallel to the corresponding track, and another side thereof being parallel to a direction corresponding to the skew angle of the corresponding track.

摘要翻译： 一种可由磁记录头访问的图案化磁记录介质，包括多个磁道，每个磁道的宽度方向和磁记录头的宽度方向为偏斜角。 图案化磁记录介质包括形成在非磁性材料上的多个磁点，每个磁点对应于记录位。 多个磁点排列成多个阵列，每个阵列对应于一个轨道。 阵列的每N个相邻的磁点限定一个多边形，其一侧平行于相应的轨道，另一侧平行于对应于相应轨道的倾斜角度的方向。

公开(公告)号：US08848276B2

公开(公告)日：2014-09-30

申请号：US13805432

申请日：2011-07-06

申请人： Shinji Uchida

发明人： Shinji Uchida

IPC分类号： G02F1/01 ,  G02B13/00 ,  G02B27/46 ,  G02B26/06

CPC分类号： G02B26/06 ,  G02B13/004 ,  G02B13/0075 ,  G02B27/46

摘要： An optical-path conversion device includes: a plate-shaped phase modulation mask in which a plurality of phase modulation parts are discretely formed for providing phase modulation to light passing through, and a first light-transmission part is formed for transmitting the light; and a plate-shaped light-shielding member in which a plurality of light-shielding parts are discretely formed for blocking the light, and a second light-transmission part is formed for transmitting the light, in which the phase modulation mask and the light-shielding member overlap each other at least in part, when viewed in an incident direction of the light, and at least one of the phase modulation mask and the light-shielding member is movable in an intersection direction which intersects with the incident direction.

摘要翻译： 光路转换装置包括：一个板状相位调制掩模，其中离散地形成多个相位调制部分，用于向通过的光提供相位调制，并且形成第一透光部分用于透射光; 以及其中分离地形成多个遮光部件以阻挡光的板状遮光部件，并且形成用于透射光的第二光透射部分，其中相位调制掩模和发光元件 屏蔽部件在从光的入射方向观察时至少部分地重叠，并且相位调制掩模和遮光部件中的至少一个能够在与入射方向相交的交叉方向上移动。

公开(公告)号：US20120326051A1

公开(公告)日：2012-12-27

申请号：US13516424

申请日：2011-06-09

申请人： Shinji Uchida

发明人： Shinji Uchida

IPC分类号： G21K5/00

CPC分类号： G03F7/70716 ,  G03F7/70858

摘要： The present invention provides an exposure apparatus which forms a pattern on a substrate, the apparatus including an electron optical system configured to guide a charged particle beam onto the substrate, a stage configured to hold the substrate, an electromagnetic actuator configured to drive the stage, a magnetic shield which is placed in the stage so as to surround the electromagnetic actuator, a measurement member configured to measure a position of the stage, a coil member configured to generate a magnetic field on a path of the charged particle beam between the electron optical system and the substrate, and a control member configured to control the coil member so as to reduce a fluctuation of the magnetic field on the path, the magnetic field on the path fluctuating while the stage being driven by the electromagnetic actuator, based on the position of the stage measured by the measurement member.

摘要翻译： 本发明提供了一种在基板上形成图案的曝光装置，该装置包括一个电子光学系统，该电子光学系统被配置为将带电粒子束引导到基板上，一个被配置为保持基板的台，配置成驱动该台的电磁致动器， 放置在舞台中以围绕电磁致动器的磁屏蔽，测量构件，被配置为测量舞台的位置;线圈构件，被配置为在电子光学器件之间的带电粒子束的路径上产生磁场 系统和基板，以及控制构件，其被配置为控制线圈构件，以便减少路径上的磁场的波动，基于位置，在由电磁致动器驱动的台阶的同时，路径上的磁场波动 由测量部件测量的阶段。

公开(公告)号：US08034413B2

公开(公告)日：2011-10-11

申请号：US12268083

申请日：2008-11-10

申请人： Shinji Uchida

发明人： Shinji Uchida

IPC分类号： B05D3/00 ,  G11B5/127

CPC分类号： G11B5/8404

摘要： A method for manufacturing discrete track media and patterned media is disclosed which enables a magnetic recording layer having excellent magnetic characteristics to be obtained without imparting damage to a crystal orientation control layer which is at the surface when forming the magnetic recording layer. The method for manufacturing magnetic recording media comprises a process of forming a soft magnetic layer on a substrate; a process of forming a first crystal orientation control layer on the soft magnetic layer; a process of providing a depression in at least a portion of the first crystal orientation control layer; a process of performing heat treatment of the first crystal orientation control layer; and a process of forming a magnetic recording layer on the first crystal orientation control layer.

摘要翻译： 公开了用于制造离散轨道介质和图案化介质的方法，其能够获得具有优异磁特性的磁记录层，而不会对形成磁记录层时在表面处的晶体取向控制层造成损害。 磁记录介质的制造方法包括：在基板上形成软磁性层的工序; 在所述软磁性层上形成第一晶体取向控制层的工序; 在所述第一晶体取向控制层的至少一部分中设置凹陷的工序; 进行第一晶体取向控制层的热处理的工序; 以及在第一晶体取向控制层上形成磁记录层的工艺。