Imprinting method and stamper
    1.
    发明授权
    Imprinting method and stamper 有权
    压印方法和压模

    公开(公告)号:US07833458B2

    公开(公告)日:2010-11-16

    申请号:US12413366

    申请日:2009-03-27

    IPC分类号: B28B7/10

    摘要: According to one embodiment, an imprinting method includes applying a resist to a substrate, imprinting a stamper on which protruded patterns are formed against the resist applied to the substrate, forcing a distal end of a peeling wedge into a part between the substrate and the stamper, and introducing a gas between the substrate and the stamper to peel off the stamper from the substrate, in which a gap between the substrate and the stamper is made larger than a thickness of the resist at a part into which the distal end of the peeling wedge is forced.

    摘要翻译: 根据一个实施例,压印方法包括将抗蚀剂施加到基板上,对施加到基板上的抗蚀剂印刷形成突出图案的压模,迫使剥离楔的远端进入基板和压模之间的部分 并且在衬底和压模之间引入气体以从衬底剥离压模,其中衬底和压模之间的间隙大于在剥离的远端处的抗蚀剂的厚度 楔被迫。

    RESIN IMPRINT STAMPER AND METHOD OF MANUFACTURING THE SAME
    2.
    发明申请
    RESIN IMPRINT STAMPER AND METHOD OF MANUFACTURING THE SAME 审中-公开
    树脂印花冲压件及其制造方法

    公开(公告)号:US20090246310A1

    公开(公告)日:2009-10-01

    申请号:US12413242

    申请日:2009-03-27

    IPC分类号: B29C33/42 B29C45/14

    摘要: According to one embodiment, a resin imprint stamper formed of a resin material in an annular shape having a through-hole in a central part thereof, including a pattern area formed on a part of a surface thereof in which a plurality of lands and grooves are circumferentially arranged with a track pitch of 100 nm or less, and the pattern height of at most 100 nm, wherein no protrusion and step having a height exceeding 10 μm from a top surface of the pattern area are present in a region less than 3 mm from an end of the pattern area toward an inner periphery thereof.

    摘要翻译: 根据一个实施例,一种树脂压印模具,其形成为环状的树脂材料,所述树脂材料在其中心部分具有通孔,所述树脂材料包括在其表面的一部分上形成的图案区域,其中多个焊盘和槽是 周向地布置有100nm或更小的轨道间距,并且图案高度至多为100nm,其中在图案区域的顶表面上没有高度超过10um的突起和台阶存在于小于3mm的区域 从图案区域的端部朝向其内周。

    STAMPER HOLDER, MOLDING DIE AND MOLDED SUBSTRATE FOR RECORDING MEDIUM
    3.
    发明申请
    STAMPER HOLDER, MOLDING DIE AND MOLDED SUBSTRATE FOR RECORDING MEDIUM 审中-公开
    冲压夹具,成型模具和用于记录介质的模塑基材

    公开(公告)号:US20090280285A1

    公开(公告)日:2009-11-12

    申请号:US12463270

    申请日:2009-05-08

    IPC分类号: G11B3/70

    摘要: According to one embodiment, there is provided a stamper holder which holds a disk-shape metal stamper for molding having a center hole with an inner diameter of 17.5 mm or less and formed with patterns of protrusions and recesses for a recording medium on a surface in a state that the stamper holder is fixed to a first die having a center hole, in which the stamper holder has an approximately cylindrical shape so as to be inserted into the center hole of the first die and comprises a flange provided at one end configured to hold an inner peripheral portion of the stamper surface near the center hole, and an outer diameter of the flange is 17.6 mm or less.

    摘要翻译: 根据一个实施例,提供了一种压模保持器,其保持具有内径为17.5mm或更小的中心孔的用于模制的盘形金属压模,并且在其表面上形成用于记录介质的突起和凹槽的图案 将压模保持器固定到具有中心孔的第一模具的状态,其中压模保持器具有大致圆筒形状以便插入到第一模具的中心孔中,并且包括设置在一端的凸缘, 在中心孔附近保持压模表面的内周部分,凸缘的外径为17.6mm以下。

    Magnetic recording medium manufacturing method
    4.
    发明授权
    Magnetic recording medium manufacturing method 有权
    磁记录介质制造方法

    公开(公告)号:US08173029B2

    公开(公告)日:2012-05-08

    申请号:US12725403

    申请日:2010-03-16

    IPC分类号: B44C1/22

    CPC分类号: G11B5/855 C08F220/18

    摘要: According to one embodiment, a cured first ultraviolet-curing resin material layer having a first three-dimensional pattern is formed on a first principal surface of a magnetic recording medium having a central hole. A cured second ultraviolet-curing resin material layer having a second three-dimensional pattern is formed on a second principal surface opposite to the first principal surface of the magnetic recording.

    摘要翻译: 根据一个实施方案,在具有中心孔的磁记录介质的第一主表面上形成具有第一三维图案的固化的第一紫外线固化树脂材料层。 在与磁记录的第一主表面相对的第二主表面上形成具有第二三维图案的固化的第二紫外线固化树脂材料层。

    RESIN STAMPER MOLDING DIE AND METHOD FOR MANUFACTURING RESIN STAMPER USING THE SAME
    8.
    发明申请
    RESIN STAMPER MOLDING DIE AND METHOD FOR MANUFACTURING RESIN STAMPER USING THE SAME 审中-公开
    树脂冲压模具及其制造方法

    公开(公告)号:US20100213642A1

    公开(公告)日:2010-08-26

    申请号:US12709331

    申请日:2010-02-19

    IPC分类号: B29C59/16 B29C45/14

    摘要: According to one embodiment, the present invention provides a resin stamper injection molding die including a fixed side template having a metal stamper mounting surface mirror-ground in a random direction, a metal stamper having a front surface with recesses and protrusions and a back surface mirror-ground in a random direction, and a moving side template. The metal stamper has a surface roughness of 0 to 50 nm. The metal stamper mounting surface has a surface roughness of 0 to 1.0 nm, and has a coefficient of static friction of at most 0.20 with respect to the second main surface of the metal stamper.

    摘要翻译: 根据一个实施例,本发明提供了一种树脂压模注塑成型模具,其包括具有随机方向镜面研磨的金属压模安装面的固定侧模板,具有凹部和突起的前表面的金属压模和背面反射镜 随机方向上的移动侧模板。 金属压模的表面粗糙度为0〜50nm。 金属压模安装表面具有0至1.0nm的表面粗糙度,并且相对于金属压模的第二主表面具有至多0.20的静摩擦系数。