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公开(公告)号：US5984459A
公开(公告)日：1999-11-16
申请号：US144459
申请日：1998-09-01
CPC分类号： B41J2/14233 , B41J2002/14387 , B41J2002/14491 , B41J2202/11
摘要： An ink-jet printing head and an ink-jet printing apparatus using the same, the ink-jet head comprising a piezoelectric element, a vibrating plate constituting a part of a pressure generating chamber communicating with a nozzle aperture, a lower electrode, a piezoelectric layer, and an upper electrode, wherein said vibrating plate in an area opposite to the vicinity of at least one end in the longitudinal direction of a piezoelectric active part which is an area in which said piezoelectric layer substantially drives said vibrating plate is convex on the reverse side to said piezoelectric element.
摘要翻译： 喷墨打印头和使用其的喷墨打印装置，喷墨头包括压电元件，构成与喷嘴孔连通的压力产生室的一部分的振动板，下电极，压电 层和上电极，其中所述振动板在与所述压电层基本上驱动所述振动板的区域中的压电有源部分的纵向方向上的至少一端附近相反的区域中是凸起的 与所述压电元件相反。
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2.发明授权公开(公告)号：US06869170B2
公开(公告)日：2005-03-22
申请号：US09977197
申请日：2001-10-16
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1635 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： Provided is an ink-jet recording head that prevents a vibration plate thereof from damage attributed to drive of a piezoelectric element, and an ink-jet recording apparatus. There are provided within a region facing the pressure generating chamber, a piezoelectric active portion, and a piezoelectric non-active portions, the piezoelectric non-active portions being provided on both end portions of the piezoelectric active portion in a longitudinal direction thereof. An electrode wiring is drawn out of an upper electrode which is provided on one end portion in the longitudinal direction of the pressure generating chamber. There is also provided a protection layer on the other end portion in the longitudinal direction of the pressure generating chamber for protecting the vibration plate. Rigidity of the vibration plate is thereby increased.
摘要翻译： 提供了防止其振动板由于压电元件的驱动而引起的损坏的喷墨记录头和喷墨记录装置。 设置在面向压力发生室的区域，压电有源部分和压电非有效部分中，压电非有效部分沿其纵向方向设置在压电有源部分的两端部分上。 从设置在压力发生室的长度方向的一个端部的上部电极引出电极配线。 在压力发生室的长度方向的另一端部还设有用于保护振动板的保护层。 因此振动板的刚度增加。
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公开(公告)号：US06315400B1
公开(公告)日：2001-11-13
申请号：US09242964
申请日：1999-06-16
IPC分类号： B41J2045
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1646 , B41J2002/14387 , B41J2002/14419 , B41J2002/14491 , B41J2202/03 , B41J2202/11
摘要： The present invention relates to an ink-jet recording head and an ink-jet recording device wherein peeling, a crack etc. at the end of a piezoelectric active part can be prevented. In an ink-jet recording head provided with a diaphragm constituting a part of a pressure generating chamber communicating with a nozzle aperture and a piezoelectric element formed on the diaphragm and provided with the piezoelectric active part of the piezoelectric element in an area opposite to the pressure generating chamber, a vibration regulating part for partially regulating vibration at least in a part of the diaphragm in the vicinity of a boundary with the peripheral wall of the pressure generating chamber is provided.
摘要翻译： 本发明涉及喷墨记录头和喷墨记录装置，其中可以防止在压电有源部分的末端处剥离，裂纹等。 在设置有构成与喷嘴孔连通的压力发生室的一部分的膜片的喷墨记录头和形成在膜片上的压电元件，并且在与压力相反的区域中设置压电元件的压电有源部分 提供了一种用于在与压力发生室的周壁的边界附近至少在隔膜的一部分中部分调节振动的振动调节部件。
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公开(公告)号：US06764167B2
公开(公告)日：2004-07-20
申请号：US10446937
申请日：2003-05-29
IPC分类号： B41J2045
CPC分类号： B41J2/1629 , B41J2/161 , B41J2/1623 , B41J2/1631 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： Disclosed are an ink-jet recording head, in which nozzles can be arrayed in high density and a manufacturing cost thereof is reduced, and an ink-jet recording apparatus. In an ink-jet recording head, comprising: a pressure generating chamber (12) communicating with a nozzle orifice; and a piezoelectric element (300) having a lower electrode (60), a piezoelectric layer (70) and an upper electrode (80), the piezoelectric element (300) being provided in a region corresponding to the pressure generating chamber (12) with a vibration plate interposed therebetween, the piezoelectric element (300) includes a piezoelectric active portion (320) as a substantial drive portion and a piezoelectric non-active portion (330) having the piezoelectric layer (70) continuous from the piezoelectric active portion (320) but not being substantially driven, and a stress suppression layer (100) for suppressing stress due to drive of the piezoelectric element (300) is provided, straddling a boundary between the piezoelectric active portion (320) and the piezoelectric non-active portion (330).
摘要翻译： 公开了一种喷墨记录头，其中喷嘴可以以高密度排列并且其制造成本降低，并且喷墨记录装置。 在喷墨记录头中，包括：与喷嘴孔连通的压力产生室（12）; 以及具有下电极（60），压电层（70）和上电极（80）的压电元件（300），所述压电元件（300）设置在与所述压力发生室（12）对应的区域中，所述压电元件 压电元件（300）包括作为实质驱动部分的压电有源部分（320）和压电非活性部分（330），其压电层（70）与压电有源部分（320）连续 ）而不是被大致驱动，并且设置用于抑制由于压电元件（300）的驱动引起的应力的应力抑制层（100），跨越压电有源部分（320）和压电非有效部分 330）。
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公开(公告)号：US08061813B2
公开(公告)日：2011-11-22
申请号：US11854359
申请日：2007-09-12
IPC分类号： B41J2/05
CPC分类号： B41J2/14233 , B41J2/045 , B41J2202/11
摘要： A liquid ejecting head that includes a fluid channel formation substrate and pressure generation units. The fluid channel formation substrate is made of a silicon single crystal substrate having a crystal face orientation of. The fluid channel formation substrate has a plurality of separate flow channels that include at least pressure generation chambers demarcated by partition walls, each of the pressure generation chambers being in communication with a nozzle opening that ejects liquid drops. The fluid channel formation substrate further has a communication portion that is in communication with each of the separate flow channels. The pressure generation units are provided so as to correspond to the pressure generation chambers and generate a pressure change in the pressure generation chambers so as to cause ejection of liquid drops.
摘要翻译： 一种液体喷射头，其包括流体通道形成基板和压力产生单元。 流体通道形成基板由具有晶面取向的硅单晶基板制成。 流体通道形成基板具有多个单独的流动通道，至少包括通过分隔壁划分的压力产生室，每个压力产生室与喷射液滴的喷嘴开口连通。 流体通道形成基板还具有与每个分离的流动通道连通的通信部分。 压力发生单元设置成对应于压力产生室，并且在压力产生室中产生压力变化，从而引起液滴喷射。
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公开(公告)号：US07789495B2
公开(公告)日：2010-09-07
申请号：US11831757
申请日：2007-07-31
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： A liquid ejection head including: a flow-channel forming substrate having a pressure generating chamber which communicates with a liquid supply channel which communicates with one end of the pressure generating chamber in terms of a first direction so as to have a first length for supplying liquid to the pressure generating chamber; and a pressure generating unit that causes the change in pressure in the pressure generating chamber, wherein the liquid supply channel is formed by narrowing the width of the pressure generating chamber in a second direction substantially perpendicular to the first direction so as to have a second length shorter than the first length, a stepped surface is formed between the side surface of the pressure generating chamber in the second direction and the side surface of the liquid supply channel in the second direction, and wherein a bridge is provided at a corner defined by the stepped surface, the side surface of the pressure generating chamber in the second direction on the stepped surface side, and one of the surfaces of the pressure generating chamber in a third direction which is orthogonal to the first direction and the second direction of the flow-channel forming substrate for bridging the corner.
摘要翻译： 一种液体喷射头，包括：流路形成基板，具有压力产生室，该压力产生室与液体供应通道连通，该液体供应通道在第一方向上与压力产生室的一端连通，以便具有用于供应液体的第一长度 到压力发生室; 以及压力发生单元，其导致压力发生室中的压力变化，其中通过使压力发生室的宽度在基本上垂直于第一方向的第二方向上变窄而形成液体供给通道，以具有第二长度 比第一长度短，在第二方向的压力发生室的侧面与第二方向的液体供给路径的侧面之间形成台阶面，并且在由 压力发生室的侧表面在阶梯表面侧的第二方向上，并且压力发生室的表面中的一个表面在与第一方向和第二方向垂直的第三方向上， 用于桥接拐角的通道形成衬底。
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公开(公告)号：US20050262691A1
公开(公告)日：2005-12-01
申请号：US11133469
申请日：2005-05-20
CPC分类号： B41J2/1623 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , Y10T29/42 , Y10T29/49128 , Y10T29/4913 , Y10T29/49147 , Y10T29/49151 , Y10T29/49401
摘要： A method of manufacturing a liquid jet head includes the steps of: forming a piezoelectric element on one plane of a passage-forming substrate with a vibration plate interposed therebetween, and removing the vibration plate in an area where a communicating portion is formed, thus forming a penetrated hole; forming a predetermined metal layer on the one plane of the passage-forming substrate on which the piezoelectric element is formed to seal the penetrated hole with the metal layer, and patterning the metal layer in an area corresponding to the piezoelectric element, thus forming a lead electrode; adhering a reservoir-forming plate, in which a reservoir portion is formed, to the one plane of the passage-forming substrate; wet-etching the passage-forming substrate from the other plane thereof until the vibration plate and the metal layer are exposed, thus forming a pressure generating chamber and the communicating portion; and removing the metal layer by etching to allow the reservoir portion and the communicating portion to communicate with each other.
摘要翻译： 一种制造液体喷射头的方法包括以下步骤：在通道形成基板的一个平面上形成压电元件，其间插入有振动板，并且在形成连通部的区域中移除振动板，从而形成 穿孔; 在其上形成有压电元件的通道形成基板的一个平面上形成预定的金属层，以与金属层密封穿透的孔，并且在与压电元件相对应的区域中图案化金属层，从而形成引线 电极; 将其中形成有储存部的储存器形成板粘附到通道形成基板的一个平面; 从通道形成基板的另一面湿式蚀刻直到振动板和金属层露出，从而形成压力产生室和连通部分; 以及通过蚀刻去除所述金属层，以允许所述储存部分和所述连通部分彼此连通。
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公开(公告)号：US06402971B2
公开(公告)日：2002-06-11
申请号：US09238980
申请日：1999-01-28
IPC分类号： C23F100
CPC分类号： B41J2/1628 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1643 , B41J2/1645 , B41J2/1646 , B41J2002/14387 , Y10T29/42 , Y10T29/49155 , Y10T29/49401
摘要： The method for manufacturing an ink jet recording head includes forming an ink pool for supplying ink to a nozzle for jetting ink on a substrate. The method also includes forming, in sequence on the substrate, a diaphragm for pressurizing ink in the ink chamber, a piezoelectric thin film serving as a pressurization source for the diaphragm, and an electrode for the piezoelectric thin film. Patterning of both the piezoelectric thin film and the electrode is done at the same time.
摘要翻译： 喷墨记录头的制造方法包括：形成用于将油墨供给到用于在基板上喷墨的喷嘴的墨水池。 该方法还包括在基板上依次形成用于对油墨室中的油墨进行加压的隔膜，用作隔膜的加压源的压电薄膜和用于压电薄膜的电极。 同时进行压电薄膜和电极的图案化。
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公开(公告)号：US6097133A
公开(公告)日：2000-08-01
申请号：US716610
申请日：1996-09-19
申请人： Masato Shimada , Tetsushi Takahashi , Hiroyuki Kamei , Hong Qiu
发明人： Masato Shimada , Tetsushi Takahashi , Hiroyuki Kamei , Hong Qiu
IPC分类号： B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/08
CPC分类号： H01L41/318 , B41J2/14233 , C04B35/493 , C04B35/6264 , H01L41/0805 , H01L41/094 , H01L41/0973 , H01L41/1876 , H01L41/316 , B41J2002/14258 , C04B2235/3206 , C04B2235/3213 , C04B2235/3215 , C04B2235/3224 , C04B2235/3225 , C04B2235/3241 , C04B2235/3251 , C04B2235/3255 , C04B2235/3258 , C04B2235/3262 , C04B2235/3272 , C04B2235/3275 , C04B2235/3279 , C04B2235/3284 , C04B2235/3286 , C04B2235/3294 , C04B2235/3296 , C04B2235/441 , C04B2235/449 , C04B2235/656 , C04B2235/661 , C04B2235/76 , C04B2235/765 , C04B2235/768 , C04B2235/787 , C04B2235/80
摘要： The present invention provides a thin piezoelectric film having a high piezoelectric strain constant and a good adhesion with a lower electrode which can be produced without being cracked. The present invention also provides an ink jet recording head comprising this thin piezoelectric film as a vibrator. The thin piezoelectric film element of the present invention comprises a PZT film 14 made of a polycrystalline substance, and an upper electrode 16 and a lower electrode 12 arranged with the PZT film interposed therebetween. The grain boundary of the crystalline constituting the PZT film is present almost perpendicular to the surface of the electrode. Further, the orientation of the crystalline constituting the PZT film is controlled to a desired range.
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10.发明授权Ink jet recording head having reduced stress concentration near the boundaries of pressure generating chambers 失效喷墨记录头在压力发生室的边界附近具有降低的应力集中
公开(公告)号：US6089701A
公开(公告)日：2000-07-18
申请号：US835748
申请日：1997-04-10
CPC分类号： B41J2/1628 , B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2/1631 , B41J2/1646 , B41J2002/14387 , B41J2002/14491
摘要： An ink-jet recording head comprising: an elastic sheet providing pressure generating chambers; nozzle orifices, each communicating with the pressure generating chamber; piezoelectric vibrators formed on the elastic sheet, each of the piezoelectric vibrators having, a lower electrode formed on the elastic sheet, a piezoelectric layer formed on the lower electrode, and an upper electrode formed on the piezoelectric layer such that the upper electrode faces the respective pressure generating chamber, wherein the upper electrodes of the piezoelectric vibrators are positioned independently of each other; an electrical insulator layer having windows, wherein the electrical insulator layer covers the upper electrodes; and a conductor pattern connecting with the upper electrodes via the windows of the electrical insulator layer.
摘要翻译： 一种喷墨记录头，包括：提供压力产生室的弹性片; 喷嘴孔，每个喷嘴孔与压力发生室连通; 形成在弹性片上的压电振动器，每个压电振动器具有形成在弹性片上的下电极，形成在下电极上的压电层和形成在压电层上的上电极，使得上电极面对相应的 压力发生室，其中压电振动器的上电极彼此独立地定位; 具有窗口的电绝缘体层，其中所述电绝缘体层覆盖所述上电极; 以及通过电绝缘体层的窗口与上电极连接的导体图案。
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