摘要:
An ink-jet printing head and an ink-jet printing apparatus using the same, the ink-jet head comprising a piezoelectric element, a vibrating plate constituting a part of a pressure generating chamber communicating with a nozzle aperture, a lower electrode, a piezoelectric layer, and an upper electrode, wherein said vibrating plate in an area opposite to the vicinity of at least one end in the longitudinal direction of a piezoelectric active part which is an area in which said piezoelectric layer substantially drives said vibrating plate is convex on the reverse side to said piezoelectric element.
摘要:
An ink jet recording head is provided with a piezoelectric vibrator. The piezoelectric vibrator includes a diaphragm and a piezoelectric active part. The diaphragm includes a pressure generating chamber communicating with a nozzle aperture, at least the upper surface of which acts as a lower electrode. The piezoelectric active part includes a piezoelectric film formed on the surface of the diaphragm and an upper electrode formed on the surface of the piezoelectric film, formed in an area opposite to the pressure generating chamber. A cap member is bonded on one side of the piezoelectric film for sealing a space with a holder to the extent that the motion is secured. The piezoelectric active part is cut off from the outside of the head by sealing dry fluid in the space of the cap member.
摘要:
A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.
摘要:
A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.
摘要:
An ink-jet recording head includes a passage-forming substrate and a plurality of piezoelectric elements provided on one side of the passage-forming substrate via an vibration plate, the passage-forming substrate having a plurality of pressure generating chambers formed therein in such a manner as to communicate with corresponding nozzle orifices and as to be separated from one another by means of a plurality of compartment walls, the plurality of piezoelectric elements each including a lower electrode, a piezoelectric layer, and an upper electrode. The vibration plate undergoes tensile stress; the number n of the pressure generating chambers arranged per inch is more than 200 and is related to width w of the pressure generating chamber and thickness d of the compartment wall as represented by (w+d)=1 inch/n; and the thickness d of the compartment wall is more than 10 &mgr;m and is related to thickness h of the passage-forming substrate as represented by (d×3)≦h≦(d×6). Thus, the rigidity of the compartment walls is maintained.
摘要:
There is provided a liquid ejecting head in which a surface layer of a vibration plate at the side of a flow path formation substrate is formed by an insulating film made of zirconium oxide and a protection film made of a material which is resistant to liquid is provided on a surface of the flow path formation substrate so as to cover wall surfaces of liquid flow paths.
摘要:
A liquid-ejecting apparatus according to which targeted good characteristics can be obtained, and moreover the scope for material selection can be broadened is provided. The liquid-ejecting apparatus contracts a pressure chamber and thus ejects liquid through application of voltage to a piezoelectric body, and is such that the driving waveform applied to the piezoelectric body during the liquid ejecting operation comprises a high potential period (a2) in which a voltage exhibiting an electric field strength exceeding the coercive electric field of the piezoelectric body is applied, and a reverse potential period (a6) in which a voltage such that the potential becomes of the opposite polarity to the polarity in the high potential period or the potential becomes zero is applied.
摘要:
There are provided a liquid-jet head which can reliably prevent breakage of piezoelectric elements over a long period of time, and a method for manufacturing the liquid-jet head, as well as a liquid-jet apparatus. Further, there are provided a liquid-jet head which can effectively prevent a drop in the amount of displacement of a vibration plate caused through drive of a piezoelectric element, and a method for manufacturing the liquid-jet head, as well as a liquid-jet apparatus. A liquid-jet head includes a channel substrate 10 which has pressure generation chambers 12 formed therein and communicating nozzle orifices for discharging liquid droplets, and piezoelectric elements 300 each of which is composed of a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80 and which are disposed on one surface of the channel substrate 10 via a vibration plate, wherein at least pattern regions of the respective layers which constitute the piezoelectric elements 300 are covered with an insulating film 100 formed of an inorganic insulating material.
摘要:
To provide an ink jet recording head with a decreased initial deflection amount of a diaphragm and an ink jet recorder comprising the ink jet recording head. An ink jet recording head which has a flow passage formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings are defined and a piezoelectric element being placed on one side of the flow passage formation substrate 10 via a diaphragm and having at least a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80, characterized in that at least one of layers deposited together with the piezoelectric layer 70 is a compression film 50 having a compressive stress and the compression film 50 has at least a part in a thickness direction removed in at least a part of an area opposed to the pressure generation chamber, whereby the stress of the whole film is decreased.
摘要:
An ink jet recording head includes at least a row of nozzle aperture; a passage formed substrate having partitions forming at least a row of pressure generating chambers, each communicating the respective nozzle aperture; a diaphragm forming a part of the pressure generating chambers and at least an upper surface of which serves as a lower electrode; a piezoelectric vibrator including, a piezoelectric active part having a piezoelectric layer formed on the surface of the diaphragm, and an upper electrode formed on the surface of said piezoelectric layer and formed in an area opposite to said pressure generating chamber; and a backing member joined to the side of the piezoelectric layer and having partitioning walls forming a concave portion being space to extent that a movement of the piezoelectric active part is not prevented, and fixed to the passage formed substrate such that each partitioning wall is opposite to the partition of the passage formed substrate.