-
公开(公告)号：US5838468A
公开(公告)日：1998-11-17
申请号：US631237
申请日：1996-04-12
申请人： Shoko Manako , Jun-ichi Fujita , Yukinori Ochiai , Shinji Matsui
发明人： Shoko Manako , Jun-ichi Fujita , Yukinori Ochiai , Shinji Matsui
CPC分类号： G03H5/00 , G03H2001/0094
摘要： The method for forming a fine pattern on a substrate disclosed includes a step of preparing a hologram having a pattern, a step of irradiating material waves (de Broglie waves) such as neutral beams, ion beams and electron beams on the hologram, and a step of imaging the pattern on the substrate with the material waves being interfered by passing through the hologram. The light source has a source that emits a beam having a coherent wave front. Since the fine patterns are formed by utilizing the interference of material waves, the minimum processing precision can be enhanced to the extent of the wavelength of the material wave.
摘要翻译： 在所公开的基板上形成精细图案的方法包括制备具有图案的全息图的步骤，在全息图上照射材料波（德布罗意波）如中性光束，离子束和电子束的步骤，以及步骤 在材料波被穿过全息图的干扰下对图案进行成像。 光源具有发射具有相干波前的光束的源。 由于通过利用材料波的干扰来形成精细图案，所以可以将最小的加工精度提高到材料波的波长的程度。
-
2.发明申请Method for forming ultra-high strength elastic diamond like carbon structure 审中-公开形成超高强度弹性金刚石如碳结构的方法公开(公告)号：US20050066882A1
公开(公告)日：2005-03-31
申请号：US10482178
申请日：2002-06-28
IPC分类号： C01B31/02 , B81C1/00 , C01B31/06 , C23C16/04 , C23C16/26 , C23C16/27 , C23C16/44 , C23C16/455 , C30B7/00 , C30B21/02 , C30B23/00 , C30B25/00 , C30B28/06 , C30B28/12 , C30B28/14
CPC分类号： C23C16/45517 , B81C1/00111 , C01B32/25 , C23C16/047 , C23C16/26 , C23C16/45591
摘要： A technique of forming an elastic DLC structure having ultra high strength by controlling an amount of focused ion beam current from 0.1 to 10 pA, and a growth rate in the range from 0.6 to 5 μm/min. and by using hydrocarbon gas such as phenanthrene (C14H10) and pyrene (C16H10), as source gas, in an apparatus having a gas nozzle for locally maintaining a higher partial gas pressure near the substrate and a structure for confining the gas on the substrate. In this manner, the elastic DLC having the ultra high strength can be obtained of which a hardness can be controlled in a relatively broader range.
摘要翻译： 通过控制聚焦离子束电流量为0.1〜10pA，生长速度为0.6〜5mum / min，形成具有超高强度的弹性DLC结构的技术。 并且通过使用诸如菲（C14H10）和芘（C16H10）的烃气体作为源气体，在具有用于在基板附近局部保持较高局部气体压力的气体喷嘴的装置和用于将气体限制在基板上的结构。 以这种方式，可以获得具有超高强度的弹性DLC，其可以在相对较宽的范围内控制硬度。
-
公开(公告)号：US20070041886A1
公开(公告)日：2007-02-22
申请号：US10595195
申请日：2004-09-22
IPC分类号： D01F9/12
CPC分类号： B82Y40/00 , B82Y10/00 , B82Y30/00 , C01B32/162 , H01L51/0048 , H01L51/0508
摘要： An amorphous carbon rod (13) is formed in contact with a catalyst fine particle (11). The fine particle (11) is liquefied by heat treatment, and moved along the amorphous carbon rod (13). The trail of the movement is converted to a carbon nanotube.
摘要翻译： 形成与催化剂微粒（11）接触的无定形碳棒（13）。 细颗粒（11）通过热处理液化，并沿非晶碳棒（13）移动。 运动的轨迹转换为碳纳米管。
-
公开(公告)号：US07767185B2
公开(公告)日：2010-08-03
申请号：US10595195
申请日：2004-09-22
IPC分类号： D01F9/12
CPC分类号： B82Y40/00 , B82Y10/00 , B82Y30/00 , C01B32/162 , H01L51/0048 , H01L51/0508
摘要： An amorphous carbon rod (13) is formed in contact with a catalyst fine particle (11). The fine particle (11) is liquefied by heat treatment, and moved along the amorphous carbon rod (13). The trail of the movement is converted to a carbon nanotube.
摘要翻译： 形成与催化剂微粒（11）接触的无定形碳棒（13）。 细颗粒（11）通过热处理液化，并沿非晶碳棒（13）移动。 运动的轨迹转换为碳纳米管。
-
公开(公告)号：US20050079120A1
公开(公告)日：2005-04-14
申请号：US10503660
申请日：2003-01-31
CPC分类号： B82Y30/00 , B82Y40/00 , C01B32/15 , C01P2004/16
摘要： The present invention provides a process for producing a nano-graphite structure having a desired two-dimensional or three-dimensional shape, which process possesses enough potential for ultra-fine processing to allow free selection of the size, shape, and position for the construction therefor; typically a process in which the nano-graphite structure 4 is produced by such a way where a nano-structure amorphous carbon structure 2 formed on a substrate 1 in advance in the shape of a desired ultra-fine steric configuration by a beam-excited reaction is equipped with catalyst metal atoms such as iron contained therein, and when subjecting the steric structure to a low-temperature heat treatment, the structure is converted into the graphite structure 3 through a catalytic thermal reaction by means of the catalyst metal atoms involved therein, while the shape of steric configuration thereof holds.
摘要翻译： 本发明提供一种具有所需二维或三维形状的纳米石墨结构的制造方法，该方法具有足够的超细加工潜力，可以自由选择结构的尺寸，形状和位置 为此; 通常是通过以下方式制造纳米石墨结构体4的方法：其中通过束激发反应，预先形成在所需的超细立方体形状的基板1上的纳米结构无定形碳结构2 配有催化剂金属原子如铁中所含的铁，并且当对空间结构进行低温热处理时，通过催化热反应借助于其中涉及的催化剂金属原子将结构转化为石墨结构3， 而其立体形状的形状成立。
-
公开(公告)号：US20110068266A1
公开(公告)日：2011-03-24
申请号：US12921991
申请日：2009-03-13
申请人： Jun-ichi Fujita
发明人： Jun-ichi Fujita
IPC分类号： G01N23/225
CPC分类号： G01N23/2251 , G01N23/2206 , H01J2237/244
摘要： A method which visualizes the distribution of a local electric field formed near a sample 2 is disclosed. A primary electron beam 1 which passes through the local electric field formed near the sample 2 is deflected by the local electric field, secondary electrons which are generated and emitted from a detection element provided downstream of an orbit of the deflected primary electron beam 1 are detected by a secondary electron detector 6, and an image formed based on the detected signal and a scanning electron beam image obtained by scanning the sample 2 are synthesized thus visualizing the distribution of the local electric field in multiple tones. Due to such an operation, it is possible to provide a method for visualizing the distribution of a local electric field in which the distribution of a local electric field can be obtained in multiple tone and in real time by performing image scanning one time using a usual electron beam scanning optical system.
摘要翻译： 公开了一种可视化样品2附近形成的局部电场分布的方法。 通过在样品2附近形成的局部电场的一次电子束1被局部电场偏转，检测从设置在偏转的一次电子束1的轨道下游的检测元件产生并发射的二次电子 通过二次电子检测器6，并且基于检测信号形成的图像和通过扫描样本2获得的扫描电子束图像被合成，从而可视化多个色调中的局部电场的分布。 由于这样的操作，可以提供一种用于使局部电场的分布可视化的方法，其中可以通过使用通常的方式执行图像扫描一次执行多次色调并且实时地获得局部电场的分布 电子束扫描光学系统。
-
7.发明授权Carbon nanostructure, capacitor, method for processing carbon nanostructure, and method for producing carbon nanostructure 有权碳纳米结构，电容器，碳纳米结构的加工方法和碳纳米结构的制造方法公开(公告)号：US09305711B2
公开(公告)日：2016-04-05
申请号：US14003332
申请日：2012-03-08
CPC分类号： H01G9/048 , B82Y30/00 , B82Y40/00 , B82Y99/00 , C01B32/168 , C01B32/176 , C01B2202/02 , C01B2202/22 , C01B2202/34 , C01B2202/36 , H01G11/36 , Y02E60/13
摘要： A carbon nanostructure's geometry and electrical characteristics can be controlled. A method for processing a carbon nanostructure according to the present invention includes the steps of: preparing a carbon nanostructure (e.g., a carbon nanotube) (a CNT preparation step); and exposing the carbon nanotube to an energy beam (e.g., an electron beam) while vibrating the carbon nanotube (an exposure step). This facilitates modifying the carbon nanotube in length and electrical characteristics.
摘要翻译： 可以控制碳纳米结构的几何形状和电气特性。 根据本发明的用于处理碳纳米结构的方法包括以下步骤：制备碳纳米结构（例如碳纳米管）（CNT制备步骤）; 并在使碳纳米管振动的同时将碳纳米管暴露于能量束（例如电子束）（曝光步骤）。 这有助于碳纳米管的长度和电特性的改变。
-
8.发明申请Method for fixing metal particles and method for manufacturing substrate containing metal particles, method for manufacturing substrate containing carbon nanotube, and method for manufacturing substrate containing semiconductor-crystalline rod, employing thereof 失效用于固定金属颗粒的方法和用于制造含有金属颗粒的基材的方法，用于制造含有碳纳米管的基材的方法，以及用于制造含有半导体结晶棒的基材的方法公开(公告)号：US20070104892A1
公开(公告)日：2007-05-10
申请号：US10564750
申请日：2004-07-20
申请人： Masahiko Ishida , Hiroo Hongo , Jun-ichi Fujita
发明人： Masahiko Ishida , Hiroo Hongo , Jun-ichi Fujita
IPC分类号： H05H1/24
CPC分类号： H01L21/321 , B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/02 , C01B2202/06 , C01B2202/36 , G03F7/0047 , H01L21/76876 , H01L2221/1094
摘要： A metal fine particle is adhere to a predetermined location on a substrate. A resist film containing a metallic compound dispersed therein is formed on a substrate (101). A patterning of the resist film is conducted by a lithography. The substrate (101) having the patterned resist formed thereon is heated within an oxygen atmosphere to adhere a metal fine particle (106) to the surface of the substrate (101), while removing the resin in the patterned resist.
摘要翻译： 金属微粒附着在基板上的规定位置。 在基板（101）上形成含有分散在其中的金属化合物的抗蚀剂膜。 抗蚀剂膜的图案化通过光刻进行。 其中形成有图案化抗蚀剂的衬底（101）在氧气氛中被加热，以将金属微粒（106）粘附到衬底（101）的表面，同时去除图案化抗蚀剂中的树脂。
-
9.发明授权Carbon wire and nanostructure formed of carbon film and method of producing the same 失效由碳膜形成的碳丝和纳米结构及其制造方法公开(公告)号：US08668952B2
公开(公告)日：2014-03-11
申请号：US12920760
申请日：2009-05-08
申请人： Takeshi Hikata , Jun-ichi Fujita
发明人： Takeshi Hikata , Jun-ichi Fujita
IPC分类号： B05D5/12
CPC分类号： H01B13/0036 , B82Y10/00 , B82Y30/00 , B82Y40/00 , C01B32/16 , C01B2202/34 , C01B2202/36 , H01B1/04 , H01B1/24 , H01L51/0021 , H01L51/0048 , H01L51/102 , H01L51/444 , H01L51/5203 , Y10S977/89 , Y10S977/932
摘要： There are provided a carbon wire using CNT or a similar carbon filament having a sufficiently low electrical resistance value, and a wire assembly employing that carbon wire. A carbon wire includes an assembly portion and a graphite layer. The assembly portion is configured of a plurality of carbon filaments implemented as carbon nanotubes in contact with one another. The graphite layer is provided at an outer circumference of the assembly portion.
摘要翻译： 提供了使用CNT或具有足够低的电阻值的类似碳丝的碳丝和使用该碳丝的线组件。 碳线包括组装部分和石墨层。 组装部分由多个相互接触的碳纳米管构成。 石墨层设置在组装部分的外周。
-
10.发明授权公开(公告)号：US08330102B2
公开(公告)日：2012-12-11
申请号：US12921991
申请日：2009-03-13
申请人： Jun-ichi Fujita
发明人： Jun-ichi Fujita
IPC分类号： H01J37/26
CPC分类号： G01N23/2251 , G01N23/2206 , H01J2237/244
摘要： A method which visualizes the distribution of a local electric field formed near a sample 2 is disclosed. A primary electron beam 1 which passes through the local electric field formed near the sample 2 is deflected by the local electric field, secondary electrons which are generated and emitted from a detection element provided downstream of an orbit of the deflected primary electron beam 1 are detected by a secondary electron detector 6, and an image formed based on the detected signal and a scanning electron beam image obtained by scanning the sample 2 are synthesized thus visualizing the distribution of the local electric field in multiple tones. Due to such an operation, it is possible to provide a method for visualizing the distribution of a local electric field in which the distribution of a local electric field can be obtained in multiple tone and in real time by performing image scanning one time using a usual electron beam scanning optical system.
摘要翻译： 公开了一种可视化样品2附近形成的局部电场分布的方法。 通过在样品2附近形成的局部电场的一次电子束1被局部电场偏转，检测从设置在偏转的一次电子束1的轨道下游的检测元件产生并发射的二次电子 通过二次电子检测器6，并且基于检测信号形成的图像和通过扫描样本2获得的扫描电子束图像被合成，从而可视化多个色调中的局部电场的分布。 由于这样的操作，可以提供一种用于使局部电场的分布可视化的方法，其中可以通过使用通常的方式执行图像扫描一次执行多次色调并且实时地获得局部电场的分布 电子束扫描光学系统。
-
-
-
-
-
-
-
-
-
搜索结果
14 条记录 (耗时 0.023 秒)
