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公开(公告)号：US07259830B2
公开(公告)日：2007-08-21
申请号：US11090856
申请日：2005-03-28
申请人： Shuichi Ishii , Hiromi Ishikawa , Yoji Okazaki
发明人： Shuichi Ishii , Hiromi Ishikawa , Yoji Okazaki
CPC分类号： G03B27/54 , G03F7/7005 , G03F7/70275 , G03F7/70291 , G03F7/70358
摘要： An image exposure device includes an exposure head for forming a desired pattern on a photosensitive material. The exposure head is equipped with a light source for emitting a great number of light beams, a spatial light modulator in which a great number of pixel portions are arranged for independently modulating the light beams emitted from the light source, a micro lens array in which a great number of micro lenses are arranged for individually converging the great number of light beams modulated by the pixel portions, and a total of two or more aperture arrays arranged in the stage before the micro lens array and/or the stage after the micro lens array. Each of the aperture arrays has a great number of apertures for individually restricting the light beams.
摘要翻译： 图像曝光装置包括用于在感光材料上形成所需图案的曝光头。 曝光头配备有用于发射大量光束的光源，空间光调制器，其中布置有大量像素部分，用于独立地调制从光源发射的光束;微透镜阵列，其中 多个微透镜被布置用于单独地会聚由像素部分调制的大量光束，并且总共有两个或更多个孔径阵列布置在微透镜阵列之前的阶段和/或微透镜之后的阶段 数组。 每个孔径阵列具有大量的用于单独限制光束的孔。
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公开(公告)号：US20050213068A1
公开(公告)日：2005-09-29
申请号：US11090856
申请日：2005-03-28
申请人： Shuichi Ishii , Hiromi Ishikawa , Yoji Okazaki
发明人： Shuichi Ishii , Hiromi Ishikawa , Yoji Okazaki
CPC分类号： G03B27/54 , G03F7/7005 , G03F7/70275 , G03F7/70291 , G03F7/70358
摘要： An image exposure device includes an exposure head for forming a desired pattern on a photosensitive material. The exposure head is equipped with a light source for emitting a great number of light beams, a spatial light modulator in which a great number of pixel portions are arranged for independently modulating the light beams emitted from the light source, a micro lens array in which a great number of micro lenses are arranged for individually converging the great number of light beams modulated by the pixel portions, and a total of two or more aperture arrays arranged in the stage before the micro lens array and/or the stage after the micro lens array. Each of the aperture arrays has a great number of apertures for individually restricting the light beams.
摘要翻译： 图像曝光装置包括用于在感光材料上形成所需图案的曝光头。 曝光头配备有用于发射大量光束的光源，空间光调制器，其中布置有大量像素部分，用于独立地调制从光源发射的光束;微透镜阵列，其中 多个微透镜被布置用于单独地会聚由像素部分调制的大量光束，并且总共有两个或更多个孔径阵列布置在微透镜阵列之前的阶段和/或微透镜之后的阶段 数组。 每个孔径阵列具有大量的用于单独限制光束的孔。
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公开(公告)号：US20090251676A1
公开(公告)日：2009-10-08
申请号：US11921406
申请日：2006-05-30
申请人： Kazuki Komori , Hiromi Ishikawa , Toshihiko Omori , Yoji Okazaki , Tomoyuki Baba
发明人： Kazuki Komori , Hiromi Ishikawa , Toshihiko Omori , Yoji Okazaki , Tomoyuki Baba
IPC分类号： G03B27/72
CPC分类号： G03F7/70291 , G03F7/70275
摘要： An exposure image is accurately projected. An exposure apparatus includes a light source for emitting exposure light, a DMD, which includes a plurality of two-dimensionally-arranged pixel portions, and a telecentric optical system for collimating principal rays of the exposure light. The telecentric optical system is positioned in an optical path of the exposure light that enters the DMD. The DMD performs, based on an image signal, spatial light modulation on exposure light, which has been emitted from the light source, and that has entered the plurality of pixel portions, for each of the plurality of pixel portions.
摘要翻译： 准确投影曝光图像。 曝光装置包括用于发射曝光光的光源，包括多个二维排列的像素部分的DMD和用于准直曝光光的主光线的远心光学系统。 远心光学系统位于进入DMD的曝光光的光路中。 DMD基于图像信号，对于多个像素部分中的每个像素部分，对从光源发射的并且已进入多个像素部分的曝光光进行空间光调制。
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公开(公告)号：US20090046262A1
公开(公告)日：2009-02-19
申请号：US11817466
申请日：2006-03-09
申请人： Yoji Okazaki , Hiromi Ishikawa
发明人： Yoji Okazaki , Hiromi Ishikawa
IPC分类号： G03B27/38
CPC分类号： G03F7/70791 , G03F7/70275 , G03F7/70291
摘要： An exposure apparatus includes a light source for emitting exposure light, a spatial light modulation means for performing spatial light modulation, based on an image signal, on the exposure light, an imaging means for forming an image on a photosensitive material with the exposure light on which spatial light modulation has been performed, and a focus adjustment means for adjusting focus by changing the optical path length of the modulated exposure light when an image is formed on the photosensitive material with the spatially modulated exposure light. The imaging means forms an image with the spatially modulated exposure light only by a substantially rectangular region of the imaging means including the central portion of the imaging means.
摘要翻译： 曝光装置包括：用于发射曝光的光源;空间光调制装置，用于在曝光光上基于图像信号进行空间光调制;成像装置，用于在曝光光在感光材料上形成图像; 已经执行了空间光调制的焦点调节装置，以及用于通过改变当利用空间调制的曝光光在感光材料上形成图像时调制的曝光光的光路长度来调整焦点的焦点调节装置。 成像装置仅通过包括成像装置的中心部分的成像装置的基本上矩形的区域形成具有空间调制曝光的图像。
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公开(公告)号：US07061517B2
公开(公告)日：2006-06-13
申请号：US11124058
申请日：2005-05-09
申请人： Hiromi Ishikawa , Yoji Okazaki , Kazuhiko Nagano
发明人： Hiromi Ishikawa , Yoji Okazaki , Kazuhiko Nagano
CPC分类号： G03F7/70291 , G02B26/0841 , G03F7/7005
摘要： In the present invention provides, in order to obtain a desired focal depth t in a range α of an acceptable increased amount of beam diameter, an exposure head is designed so that the ratio D/W of an output beam width D to a beam width W at the position where a DMD is placed satisfies the following relational formula. D W ≤ α × M 2 × t - K × λ a θ In the above formula, parameters are defined as follows. λ: the wavelength of laser light θ: the angle of beam outputted from an illumination light source that is derived by a numerical aperture (NA) of optical fiber according to the following formula θ=sin−1(NA) D: the width of beam outputted from the illumination light source W: the beam width at the position where the DMD is placed (at the irradiated surface) a: the size of one pixel on the DMD K: a coefficient determined by beam characteristics, K=1 M: the magnification of imaging optical system t: required focal depth α: acceptable increased amount of beam diameter
摘要翻译： 在本发明中，为了获得可接受的增加光束直径的α的范围内的所需焦点深度t，曝光头被设计成使得输出光束宽度D的比D / W与光束宽度 放置DMD的位置的W满足以下关系式。
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公开(公告)号：US20050281506A1
公开(公告)日：2005-12-22
申请号：US11195840
申请日：2005-08-03
CPC分类号： G02B6/4249 , G02B6/04 , G02B6/08 , G02B6/2551 , G02B6/4206 , G02B6/425 , H01S3/06708 , H01S3/06745
摘要： An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.
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7.发明申请Stereolithographic resin composition comprising photo-curable component, sol-gel resin and filler and stereolithographic method using the same 审中-公开包含可光固化成分，溶胶 - 凝胶树脂和填料的立体光学树脂组合物和使用其的立体光刻方法公开(公告)号：US20050186508A1
公开(公告)日：2005-08-25
申请号：US11116388
申请日：2005-04-28
申请人： Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hiromi Ishikawa
发明人： Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hiromi Ishikawa
CPC分类号： G03F7/033 , B29C64/129 , B29C64/165 , B29C70/58 , G03F7/0037
摘要： The invention provides a stereolithographic resin composition including a photo-curable component, a resin having a function of causing a reversible, quick sol-gel phase transition based on temperature change, and a filler, and a stereolithographic method using the resin composition.
摘要翻译： 本发明提供一种立体光刻树脂组合物，其包含光固化性组分，具有基于温度变化引起可逆快速溶胶 - 凝胶相变的功能的树脂和填料，以及使用该树脂组合物的立体光刻方法。
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公开(公告)号：US06928198B2
公开(公告)日：2005-08-09
申请号：US10443995
申请日：2003-05-23
申请人： Hiromi Ishikawa , Yoji Okazaki , Kazuhiko Nagano
发明人： Hiromi Ishikawa , Yoji Okazaki , Kazuhiko Nagano
CPC分类号： G03F7/70291 , G02B26/0841 , G03F7/7005
摘要： The present invention provides, in order to obtain a desired focal depth t in a range α of an acceptable increased amount of beam diameter, an exposure head is designed so that the ratio D/W of an output beam width D to a beam width W at the position where a digital micromirror device (DMD) is placed satisfies the following formula: D W ≤ α × M 2 × t - K × λ a θ .
摘要翻译： 本发明为了获得可接受的增加光束直径的α的范围内的期望的焦点深度t，设计了曝光头，使得输出光束宽度D的比D / W与光束宽度W 在数位微镜装置（DMD）的位置满足下列公式：
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公开(公告)号：US06894712B2
公开(公告)日：2005-05-17
申请号：US10409686
申请日：2003-04-09
IPC分类号： B23K26/06 , B29C67/00 , B41J2/447 , B41J2/465 , B41J2/47 , D06L3/04 , D06M10/00 , G02B26/08 , G03F7/20 , H04N1/12 , H04N1/191
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is decreased, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost. Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.
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10.发明授权
公开(公告)号：US6058126A
公开(公告)日：2000-05-02
申请号：US109053
申请日：1998-07-02
申请人： Hiromi Ishikawa , Yoji Okazaki , Hisashi Ohtsuka
发明人： Hiromi Ishikawa , Yoji Okazaki , Hisashi Ohtsuka
CPC分类号： H01S3/109 , H01S3/1312
摘要： In a laser-diode-pumped solid state laser, a solid laser crystal is pumped by a pumping laser beam emitted from a laser diode and a harmonic of light emitted from the pumped solid laser crystal is caused to make laser oscillation by a resonator structure containing therein a nonlinear optical crystal. The electric current to be poured into the laser diode is controlled so that the pumping laser beam emitted from the laser diode is kept at an output level at which the pumping laser beam cannot cause the harmonic of light emitted from the solid laser crystal to make laser oscillation though pumping the solid laser crystal.
摘要翻译： 在激光二极管泵浦的固态激光器中，通过从激光二极管发射的激光激光束泵浦固体激光晶体，并且通过包含以下方式的谐振器结构使得从泵浦固体激光晶体发射的光的谐波使激光振荡： 其中非线性光学晶体。 控制注入激光二极管的电流，使得从激光二极管发射的激光激光束保持在激光束不能引起从固体激光晶体发出的光的谐波产生激光的输出水平 振荡虽然泵浦固体激光晶体。
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