Pattern checking method and checking apparatus
    1.
    发明授权
    Pattern checking method and checking apparatus 失效
    模式检查方法和检查装置

    公开(公告)号:US06317512B1

    公开(公告)日:2001-11-13

    申请号:US08753011

    申请日:1996-11-19

    IPC分类号: G06K900

    摘要: A pattern checking method wherein an image of a certain position of one pattern is detected; the detected image is positioned with respect to an image of a position corresponding to the certain position, in a reference pattern image; and the positioned images are compared with each other, whereby a discrepant place among these positioned images is judged as a defect the positioning operations of the images of the detected patterns are controlled based upon either pattern information such as density of the images of the detected patterns, or information obtained from the positioning operations for images of other positions in the patterns. An image sensor unit for detecting images of patterns is constructed which has such a structure that a plurality of one-dimensional image sensors functioning as a pattern detector are arranged in a two-dimensional form, and an output of a certain one-dimensional image sensor for imaging a certain position of one pattern is delayed for a predetermined time period, and also both of an output of an one-dimensional image sensor adjoining the first-mentioned one-dimensional image sensor, which images the same position of the same pattern, and the delayed output of the certain one-dimensional image sensor are sequentially added to derive a summation output. The image sensor unit is inclined at a predetermined angle with respect to a plane perpendicular to the reflection light from the patterns, and the reflection light from the patterns is focused via a confocal focusing optical system onto this image sensor unit.

    摘要翻译: 一种图案检查方法,其中检测到一个图案的某个位置的图像; 检测图像相对于与特定位置对应的位置的图像在参考图案图像中定位; 并且定位的图像彼此进行比较,由此将这些定位的图像中的不一致的位置判断为检测图案的图像的定位操作的缺陷,基于诸如检测图案的图像的密度的图案信息 或者从图案中的其他位置的图像的定位操作获得的信息。 用于检测图案的图像的图像传感器单元被构造成具有以二维形式配置作为图案检测器的多个一维图像传感器的结构,以及某一个一维图像传感器的输出 对于一个图案的某个位置的成像被延迟预定的时间段,并且与相同图案的相同位置成像的第一个提到的一维图像传感器邻接的一维图像传感器的输出, 并且依次添加特定一维图像传感器的延迟输出以导出求和输出。 图像传感器单元相对于与图案的反射光垂直的平面以预定角度倾斜,并且来自图案的反射光经由共聚焦聚焦光学系统聚焦到该图像传感器单元上​​。

    Pattern checking method and checking apparatus
    2.
    发明授权
    Pattern checking method and checking apparatus 失效
    模式检查方法和检查装置

    公开(公告)号:US5649022A

    公开(公告)日:1997-07-15

    申请号:US888494

    申请日:1992-05-27

    IPC分类号: G06T7/00 G06K9/00

    摘要: A pattern checking method wherein an image of a certain position of one pattern is detected; the detected image is positioned with respect to an image of a position corresponding to the certain position, in a reference pattern image; and the positioned images are compared with each other, whereby a discrepant place among these positioned images is judged as a defect the positioning operations of the images of the detected patterns are controlled based upon either pattern information such as density of the images of the detected patterns, or information obtained from the positioning operations for images of other positions in the patterns. An image sensor unit for detecting images of patterns is constructed which has such a structure that a plurality of one-dimensional image sensors functioning as a pattern detector are arranged in a two-dimensional form, and an output of a certain one-dimensional image sensor for imaging a certain position of one pattern is delayed for a predetermined time period, and also both of an output of an one-dimensional image sensor adjoining the first-mentioned one-dimensional image sensor, which images the same position of the same pattern, and the delayed output of the certain one-dimensional image sensor are sequentially added to derive a summation output. The image sensor unit is inclined at a predetermined angle with respect to a plane perpendicular to the reflection light from the patterns, and the reflection light from the patterns is focused via a confocal focusing optical system onto this image sensor unit.

    摘要翻译: 一种图案检查方法,其中检测到一个图案的某个位置的图像; 检测图像相对于与特定位置对应的位置的图像在参考图案图像中定位; 并且定位的图像彼此进行比较,由此将这些定位的图像中的不一致的位置判断为检测图案的图像的定位操作的缺陷,基于诸如检测图案的图像的密度的图案信息 或者从图案中的其他位置的图像的定位操作获得的信息。 用于检测图案的图像的图像传感器单元被构造成具有以二维形式配置作为图案检测器的多个一维图像传感器的结构,以及某一个一维图像传感器的输出 对于一个图案的某个位置的成像被延迟预定的时间段,并且与相同图案的相同位置成像的第一个提到的一维图像传感器邻接的一维图像传感器的输出, 并且依次添加特定一维图像传感器的延迟输出以导出求和输出。 图像传感器单元相对于与图案的反射光垂直的平面以预定角度倾斜,并且来自图案的反射光经由共聚焦聚焦光学系统聚焦到该图像传感器单元上​​。

    Method and apparatus for detecting patterns
    4.
    发明授权
    Method and apparatus for detecting patterns 失效
    用于检测图案的方法和装置

    公开(公告)号:US5153444A

    公开(公告)日:1992-10-06

    申请号:US641001

    申请日:1991-01-14

    IPC分类号: G01N21/956 G06T7/00

    摘要: A method and apparatus for detecting a defect in a circuit pattern by detecting a gray image signal from each of a plurality of circuit patterns as objects of inspection, which circuit patterns have been fabricated so as to be identical with one another, and detecting a defect as a difference of edge position between two circuit patterns by comparing the detected gray image signal of one circuit pattern with the detected gray image signal of another circuit pattern.

    摘要翻译: 通过检测作为检查对象的多个电路图案中的每一个的灰度图像信号来检测电路图案中的缺陷的方法和装置,其中已经制造出彼此相同的电路图案,并且检测缺陷 作为两个电路图案之间的边缘位置的差异,通过将检测到的一个电路图案的灰度图像信号与另一个电路图案的检测到的灰度图像信号进行比较。

    Method of and apparatus for checking geometry of multi-layer patterns
for IC structures
    5.
    发明授权
    Method of and apparatus for checking geometry of multi-layer patterns for IC structures 失效
    用于检查IC结构的多层图案几何的方法和装置

    公开(公告)号:US4791586A

    公开(公告)日:1988-12-13

    申请号:US812928

    申请日:1985-12-23

    IPC分类号: H01L21/66 G06T7/00 G06K9/00

    摘要: Method of and apparatus for checking the geometry of multi-layer patterns for IC structures having identical functions, each of the multi-layer patterns including layer patterns arranged in different level layers, wherein electrical image signals corresponding to any two of the multi-layer patterns and having more than two levels are registered with each other and then compared to determine unmatched and matched portions. The comparison of the registered electric image signals may be performed with respect to their amplitude or their gradients. The registration and comparison of two electric image signals may be repeated for all of the layer patterns with the matched portions being no longer subjected to the registration and comparison. A defect detection signal is produced from finally unmatched portions, if any, of the electric image signals having undergone the said registration and comparison.

    摘要翻译: 用于检查具有相同功能的IC结构的多层图案的几何形状的方法和装置,每个多层图案包括布置在不同层级中的层图案,其中对应于多层图案中的任何两个的电图像信号 并且具有两个以上的级别彼此登记,然后进行比较以确定不匹配和匹配的部分。 登记的电图像信号的比较可以相对于它们的振幅或梯度进行。 对于所有的层图案,可以对匹配的部分不再进行注册和比较来重复两个电图像信号的配准和比较。 如果有的话,经过所述登记和比较的电子图像信号的最终不匹配的部分产生缺陷检测信号。

    Automatic focusing method and apparatus utilizing contrasts of projected
pattern
    6.
    发明授权
    Automatic focusing method and apparatus utilizing contrasts of projected pattern 失效
    自动聚焦方法和利用投影图案对比的装置

    公开(公告)号:US4725722A

    公开(公告)日:1988-02-16

    申请号:US850682

    申请日:1986-04-11

    摘要: A method of auto-focusing suitable for fine patterns of LSIs and an apparatus therefor, particularly applied for checking the geometry of a circuit pattern of a semiconductor device formed on an LSI wafer. A stripe pattern is projected on a specified location on an object to be checked and contrast of an image of the stripe pattern is used for focusing. The specified location is imaged by an optical system and detected simultaneously by two detectors. A position at which contrast of an output signal of one detector coincides with that of the other detector is determined to be an in-focus position. Am image of a multi-layer pattern representative of the circuit pattern is focused on another detector disposed at the in-focus position and detected for checking. The output signal of the detector is divided by mean brightness of the stripe pattern image so as to be normalized. Since the two detectors produce their output signals simultaneously, the difference between the output signals is normalized to improve accuracies of computation.

    摘要翻译: 适用于LSI的精细图案的自动对焦的方法及其装置,特别适用于检查形成在LSI晶片上的半导体器件的电路图案的几何形状。 将条纹图案投影在要检查的对象上的指定位置,并且将条纹图案的图像的对比度用于聚焦。 指定位置由光学系统成像,并由两个检测器同时检测。 一个检测器的输出信号的对比度与另一个检测器的输出信号的对比度的位置被确定为对焦位置。 表示电路图案的多层图案的图像集中在设置在对焦位置的另一检测器,并被检测用于检查。 检测器的输出信号除以条纹图案图像的平均亮度,以便被归一化。 由于两个检测器同时产生其输出信号,所以输出信号之间的差异被归一化以提高计算精度。