公开(公告)号：US07211454B2

公开(公告)日：2007-05-01

申请号：US10894434

申请日：2004-07-20

申请人： Shunpei Yamazaki ,  Keitaro Imai ,  Shinji Maekawa ,  Makoto Furuno ,  Osamu Nakamura ,  Masakazu Murakami

发明人： Shunpei Yamazaki ,  Keitaro Imai ,  Shinji Maekawa ,  Makoto Furuno ,  Osamu Nakamura ,  Masakazu Murakami

IPC分类号： H01L21/00 ,  H01L21/84 ,  H01L21/44

CPC分类号： H01L51/56 ,  H01L27/3244

摘要： The present invention provides an active matrix substrate which can be fabricated at a lower cost and a light emitting device having a large display area fabricated by a vapor deposition system which makes a film with uniform thickness for a large substrate. According to the invention, an organic light-emitting device can be fabricated by performing vapor deposition toward a large substrate provided with a pixel portion (and a driver circuit) including an n-channel TFT having a amorphous silicon film, semi-amorphous semiconductor film or an organic semiconductor film as an active layer.

摘要翻译： 本发明提供了一种能够以较低成本制造的有源矩阵基板和具有由气相沉积系统制造的具有大的显示面积的发光器件，该气相沉积系统制造了具有均匀厚度的薄膜用于大基片。 根据本发明，可以通过向具有包括具有非晶硅膜，半非晶半导体膜的n沟道TFT的像素部分（和驱动电路）的大型衬底进行气相沉积来制造有机发光器件 或有机半导体膜作为活性层。

公开(公告)号：US20050053720A1

公开(公告)日：2005-03-10

申请号：US10894434

申请日：2004-07-20

申请人： Shunpei Yamazaki ,  Keitaro Imai ,  Shinji Maekawa ,  Makoto Furuno ,  Osamu Nakamura ,  Masakazu Murakami

发明人： Shunpei Yamazaki ,  Keitaro Imai ,  Shinji Maekawa ,  Makoto Furuno ,  Osamu Nakamura ,  Masakazu Murakami

IPC分类号： B05D5/06 ,  B05D5/12 ,  H01L27/32 ,  H01L51/40 ,  H01L51/56

CPC分类号： H01L51/56 ,  H01L27/3244

摘要： The present invention provides an active matrix substrate which can be fabricated at a lower cost and a light emitting device having a large display area fabricated by a vapor deposition system which makes a film with uniform thickness for a large substrate. According to the invention, an organic light-emitting device can be fabricated by performing vapor deposition toward a large substrate provided with a pixel portion (and a driver circuit) including an n-channel TFT having a amorphous silicon film, semi-amorphous semiconductor film or an organic semiconductor film as an active layer.

摘要翻译： 本发明提供了一种能够以较低成本制造的有源矩阵基板和具有由气相沉积系统制造的具有大的显示面积的发光器件，该气相沉积系统制造了具有均匀厚度的薄膜用于大基片。 根据本发明，可以通过向具有包括具有非晶硅膜，半非晶半导体膜的n沟道TFT的像素部分（和驱动电路）的大型衬底进行气相沉积来制造有机发光器件 或有机半导体膜作为活性层。

公开(公告)号：US08968822B2

公开(公告)日：2015-03-03

申请号：US12173265

申请日：2008-07-15

申请人： Shunpei Yamazaki ,  Masakazu Murakami ,  Satoshi Seo

发明人： Shunpei Yamazaki ,  Masakazu Murakami ,  Satoshi Seo

IPC分类号： B05D7/00 ,  H01L27/32 ,  H01L27/12 ,  H01L51/00 ,  H01L51/56

CPC分类号： H01L51/5203 ,  H01L27/12 ,  H01L27/322 ,  H01L27/3246 ,  H01L51/0003 ,  H01L51/0014 ,  H01L51/0037 ,  H01L51/0042 ,  H01L51/005 ,  H01L51/0059 ,  H01L51/5228 ,  H01L51/5262 ,  H01L51/56 ,  H01L2251/5315

摘要： Although an ink jet method known as a method of selectively forming a film of a high molecular species organic compound, can coat to divide an organic compound for emitting three kinds (R, G, B) of light in one step, film forming accuracy is poor, it is difficult to control the method and therefore, uniformity is not achieved and the constitution is liable to disperse. In contrast thereto, according to the invention, a film comprising a high molecular species material is formed over an entire face of a lower electrode connected to a thin film transistor by a coating method and thereafter, the film comprising the high molecular species material is etched by etching by plasma to thereby enable to selectively form a high molecular species material layer. Further, the organic compound layer is constituted by a material for carrying out luminescence of white color or luminescence of single color and combined with a color changing layer or a coloring layer to thereby realize full color formation.

公开(公告)号：US20120214263A1

公开(公告)日：2012-08-23

申请号：US13459122

申请日：2012-04-28

申请人： Shunpei Yamazaki ,  Hideaki Kuwabara ,  Masakazu Murakami

发明人： Shunpei Yamazaki ,  Hideaki Kuwabara ,  Masakazu Murakami

IPC分类号： H01L33/00

CPC分类号： H01L51/56 ,  C23C14/046 ,  C23C14/12 ,  C23C14/246 ,  C23C14/564 ,  H01L27/3244 ,  H01L33/44

摘要： The present invention provides a vapor deposition method and a vapor deposition system of film formation systems by which EL materials can be used more efficiently and EL materials having superior uniformity with high throughput rate are formed. According to the present invention, inside a film formation chamber, an evaporation source holder in a rectangular shape in which a plurality of containers sealing evaporation material is moved at a certain pitch to a substrate and the evaporation material is vapor deposited on the substrate. Further, a longitudinal direction of an evaporation source holder in a rectangular shape may be oblique to one side of a substrate, while the evaporation source holder is being moved. Furthermore, it is preferable that a movement direction of an evaporation source holder during vapor deposition be different from a scanning direction of a laser beam while a TFT is formed.

摘要翻译： 本发明提供一种可以更有效地使用EL材料的成膜系统的气相沉积方法和气相沉积系统，并且形成具有高生产率的均匀性优异的EL材料。 根据本发明，在成膜室内部，将密封蒸发材料的多个容器以一定间距移动到基板上的矩形状的蒸发源保持器和蒸发材料蒸镀在基板上。 此外，蒸发源保持器的纵向方向可以在基板的一侧倾斜，同时蒸发源保持器被移动。 此外，优选的是，蒸镀源夹持器在气相沉积期间的移动方向与形成TFT的激光束的扫描方向不同。

公开(公告)号：US20120175620A1

公开(公告)日：2012-07-12

申请号：US13420689

申请日：2012-03-15

申请人： Shunpei Yamazaki ,  Masakazu Murakami ,  Naomi Kawakami ,  Hisashi Ohtani

发明人： Shunpei Yamazaki ,  Masakazu Murakami ,  Naomi Kawakami ,  Hisashi Ohtani

IPC分类号： H01L51/52

CPC分类号： H01L27/3244 ,  H01L51/001 ,  H01L51/0037 ,  H01L51/5203 ,  H01L51/56 ,  H01L2251/5315

摘要： The inventors have anticipated that there is no problem in employing electron gun deposition as a method of forming a metallic layer on an EL layer of an active matrix light-emitting device because the TFT of the active matrix light-emitting device is disposed below the EL layer. However, since the TFT is extremely sensitive to ionized evaporated particles, the secondary electron, the reflecting electron, and so on generated by the electron gun, while little damage is observed on the EL layer, significant damage is found on the TFT when electron gun deposition is employed. The invention provides an active matrix light-emitting device having superior TFT characteristics (ON current, OFF to current, Vth, S-value, and so on), in which an organic compound layer and a metallic layer (cathode or anode) are formed by means of resistive heating having least influence to the TFT.

摘要翻译： 本发明人已经预期，在有源矩阵发光器件的EL层上作为形成金属层的方法而使用电子枪沉积是没有问题的，因为有源矩阵发光器件的TFT设置在EL 层。 然而，由于TFT对于电子枪产生的电离蒸发颗粒，二次电子，反射电子等非常敏感，而在EL层上观察到很小的损伤，因此当电子枪 使用沉积。 本发明提供一种具有优异的TFT特性（导通电流，截止电流，Vth，S值等）的有源矩阵发光器件，其中形成有机化合物层和金属层（阴极或阳极） 通过对TFT具有最小影响的电阻加热。

公开(公告)号：US20090074952A1

公开(公告)日：2009-03-19

申请号：US12272820

申请日：2008-11-18

申请人： Shunpei Yamazaki ,  Masakazu Murakami ,  Hisashi Ohtani

发明人： Shunpei Yamazaki ,  Masakazu Murakami ,  Hisashi Ohtani

IPC分类号： B05D5/12

CPC分类号： C23C14/12 ,  C23C14/24 ,  C23C14/505

摘要： An evaporation apparatus with high utilization efficiency for EL materials and excellent film uniformity is provided. The invention is an evaporation apparatus having a movable evaporation source and a substrate rotating unit, in which the space between an evaporation source holder and a workpiece (substrate) is narrowed to 30 cm or below, preferably 20 cm, more preferably 5 to 15 cm, to improve the utilization efficiency for EL materials. In evaporation, the evaporation source holder is moved in the X-direction or the Y-direction, and the workpiece (substrate) is rotated for deposition. Therefore, film uniformity is improved.

摘要翻译： 提供了一种对于EL材料具有高利用效率和优异的膜均匀性的蒸发装置。 本发明是具有可移动蒸发源和基板旋转单元的蒸发装置，其中蒸发源保持器和工件（基板）之间的空间变窄到30cm或更小，优选为20cm，更优选为5至15cm ，以提高EL材料的利用效率。 在蒸发中，蒸发源保持器沿X方向或Y方向移动，并且工件（基板）旋转以进行沉积。 因此，膜均匀性得到改善。

公开(公告)号：US07265391B2

公开(公告)日：2007-09-04

申请号：US10918419

申请日：2004-08-16

申请人： Shunpei Yamazaki ,  Masaaki Hiroki ,  Masakazu Murakami ,  Hideaki Kuwabara

发明人： Shunpei Yamazaki ,  Masaaki Hiroki ,  Masakazu Murakami ,  Hideaki Kuwabara

IPC分类号： H01L33/00

CPC分类号： H01L27/3248 ,  H01L27/3211 ,  H01L27/3216 ,  H01L27/322 ,  H01L27/3246 ,  H01L27/3272 ,  H01L27/3276 ,  H01L27/3279 ,  H01L51/5212 ,  H01L51/5228 ,  H01L51/5253 ,  H01L2251/5315 ,  Y10S257/929

摘要： To provide a light emitting device high in reliability with a pixel portion having high definition with a large screen. According to a light emitting device of the present invention, on an insulator (24) provided between pixel electrodes, an auxiliary electrode (21) made of a metal film is formed, whereby a conductive layer (20) made of a transparent conductive film in contact with the auxiliary electrode can be made low in resistance and thin. Also, the auxiliary electrode (21) is used to achieve connection with an electrode on a lower layer, whereby the electrode can be led out with the transparent conductive film formed on an EL layer. Further, a protective film (32) made of a film containing hydrogen and a silicon nitride film which are laminated is formed, whereby high reliability can be achieved.

摘要翻译： 通过大屏幕提供具有高清晰度的像素部分的可靠性高的发光装置。 根据本发明的发光器件，在设置在像素电极之间的绝缘体（24）上形成由金属膜构成的辅助电极（21），由此形成由透明导电膜形成的导电层（20） 与辅助电极接触可以使电阻较小，薄。 此外，辅助电极（21）用于实现与下层电极的连接，由此可以用形成在EL层上的透明导电膜将电极引出。 此外，形成由层压的含有氢的膜和氮化硅膜构成的保护膜（32），由此可以实现高可靠性。

公开(公告)号：US20070114921A1

公开(公告)日：2007-05-24

申请号：US11623618

申请日：2007-01-16

申请人： Shunpei Yamazaki ,  Masaaki Hiroki ,  Masakazu Murakami ,  Hideaki Kuwabara

发明人： Shunpei Yamazaki ,  Masaaki Hiroki ,  Masakazu Murakami ,  Hideaki Kuwabara

IPC分类号： H01J61/52 ,  H01J1/62 ,  H01J7/24

CPC分类号： H01L27/3248 ,  H01L27/3211 ,  H01L27/3216 ,  H01L27/322 ,  H01L27/3246 ,  H01L27/3272 ,  H01L27/3276 ,  H01L27/3279 ,  H01L51/5212 ,  H01L51/5228 ,  H01L51/5253 ,  H01L2251/5315 ,  Y10S257/929

摘要： To provide a light emitting device high in reliability with a pixel portion having high definition with a large screen. According to a light emitting device of the present invention, on an insulator (24) provided between pixel electrodes, an auxiliary electrode (21) made of a metal film is formed, whereby a conductive layer (20) made of a transparent conductive film in contact with the auxiliary electrode can be made low in resistance and thin. Also, the auxiliary electrode (21) is used to achieve connection with an electrode on a lower layer, whereby the electrode can be led out with the transparent conductive film formed on an EL layer. Further, a protective film (32) made of a film containing hydrogen and a silicon nitride film which are laminated is formed, whereby high reliability can be achieved.

摘要翻译： 通过大屏幕提供具有高清晰度的像素部分的可靠性高的发光装置。 根据本发明的发光器件，在设置在像素电极之间的绝缘体（24）上形成由金属膜构成的辅助电极（21），由此形成由透明导电膜形成的导电层（20） 与辅助电极接触可以使电阻较小，薄。 此外，辅助电极（21）用于实现与下层电极的连接，由此可以用形成在EL层上的透明导电膜将电极引出。 此外，形成由层压的含有氢的膜和氮化硅膜构成的保护膜（32），由此可以实现高可靠性。

公开(公告)号：US07190335B2

公开(公告)日：2007-03-13

申请号：US10395330

申请日：2003-03-25

申请人： Shunpei Yamazaki ,  Masakazu Murakami ,  Satoshi Seo

发明人： Shunpei Yamazaki ,  Masakazu Murakami ,  Satoshi Seo

IPC分类号： G09G3/30 ,  G09G3/10

CPC分类号： H01L27/3276 ,  H01L27/322 ,  H01L27/3246 ,  H01L51/5243 ,  H01L51/5246 ,  H01L51/525 ,  H01L51/5253 ,  H01L51/56

摘要： An ink jet method known as a method for selectively forming a layer made of a polymeric organic compound is advantageous in that a layer containing an organic compound can be separately colored for emitting light of three colors (R, G, B) at a time. However, this ink jet method is disadvantageous in its poor film formation accuracy, and therefore, it is difficult to control the formation of the film for obtaining the uniformity. As a result, the obtained film is likely to have unevenness. In the present invention, an layer containing an organic compound is formed on the entire surface of a lower electrode connected to a thin film transistor by application. After forming an upper electrode on the lower electrode, an layer containing an organic compound is etched in a self-aligned manner by plasma etching using the upper electrode as a mask so as to allow the selective formation of an layer containing an organic compound. Furthermore, for connection with the upper electrode, the electrical connection is achieved by using an adhesive containing a conductive particle or a paste. Furthermore, a material emitting white light or a material emitting monochromatic light is used as the layer containing an organic compound. The full-color display is achieved by combining the layer containing an organic compound with a color conversion layer or a colored layer.

摘要翻译： 作为选择性地形成由聚合有机化合物构成的层的方法的喷墨方法的优点在于，含有有机化合物的层可以分别着色，以一次发射三种颜色（R，G，B）的光。 然而，该喷墨法的成膜精度差，因此难以控制膜的形成以获得均匀性。 结果，得到的薄膜很可能具有不均匀性。 在本发明中，通过施加在与薄膜晶体管连接的下电极的整个表面上形成含有有机化合物的层。 在下电极上形成上电极之后，通过使用上电极作为掩模的等离子体蚀刻以自对准的方式蚀刻含有有机化合物的层，以允许选择性地形成含有有机化合物的层。 此外，为了与上部电极连接，通过使用含有导电粒子或糊料的粘合剂来实现电连接。 此外，使用发射白光的材料或发射单色光的材料作为含有机化合物的层。 通过将包含有机化合物的层与颜色转换层或着色层组合来实现全色显示。

公开(公告)号：US07180093B2

公开(公告)日：2007-02-20

申请号：US10697941

申请日：2003-10-31

申请人： Toru Takayama ,  Junya Maruyama ,  Yumiko Ohno ,  Masakazu Murakami ,  Toshiji Hamatani ,  Hideaki Kuwabara ,  Shunpei Yamazaki

发明人： Toru Takayama ,  Junya Maruyama ,  Yumiko Ohno ,  Masakazu Murakami ,  Toshiji Hamatani ,  Hideaki Kuwabara ,  Shunpei Yamazaki

IPC分类号： H01L29/04 ,  H01L29/15

CPC分类号： H01L27/3276 ,  H01L27/12 ,  H01L27/1214 ,  H01L27/124 ,  H01L27/1266 ,  H01L27/14634 ,  H01L27/14643 ,  H01L27/14683 ,  H01L27/3272 ,  H01L29/66757 ,  H01L29/78603 ,  H01L31/105 ,  H01L51/0024 ,  H01L51/003 ,  H01L51/5212 ,  H01L51/5253 ,  H01L2221/68368

摘要： The object is to provide a lightened semiconductor device and a manufacturing method thereof by pasting a layer to be peeled to various base materials. In the present invention, a layer to be peeled is formed on a substrate, then a seal substrate provided with an etching stopper film is pasted with a binding material on the layer to be peeled, followed by removing only the seal substrate by etching or polishing. The remaining etching stopper film is functioned as a blocking film. In addition, a magnet sheet may be pasted as a pasting member.

摘要翻译： 本发明的目的是通过将要剥离的层粘贴到各种基材上来提供照明的半导体器件及其制造方法。 在本发明中，在基板上形成被剥离层，然后将具有蚀刻阻挡膜的密封基板用粘合材料粘贴在被剥离层上，然后通过蚀刻或抛光仅去除密封基板 。 剩余的蚀刻阻挡膜用作阻挡膜。 此外，可以将磁片作为粘贴部件粘贴。