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公开(公告)号：US07273773B2
公开(公告)日：2007-09-25
申请号：US11042518
申请日：2005-01-26
申请人： Shunpei Yamazaki , Osamu Nakamura , Shinji Maekawa , Gen Fujii , Toshiyuki Isa
发明人： Shunpei Yamazaki , Osamu Nakamura , Shinji Maekawa , Gen Fujii , Toshiyuki Isa
IPC分类号： H01L21/84
CPC分类号： H01L51/0022 , G09G3/3208 , G09G3/3225 , G09G2300/0842 , G09G2300/0861 , G09G2310/0251 , H01L27/1285 , H01L27/1292 , H01L27/3244 , H01L51/055 , H01L51/529
摘要： The invention provides a display device and a method for manufacturing thereof by increasing a material efficiently as well as simplifying steps. Also, the invention provides a technique for forming a pattern such as a wiring, that is used for forming a display device, to have a predetermined shape with an excellent controllability. The method for manufacturing a display device includes the steps of: forming a lyophobic region; selectively irradiating laser beam in the lyophobic region to form a lyophilic region; selectively discharging a composition, that contains a conductive material, in the lyophilic region to form a gate electrode layer; forming a gate insulating layer and a semiconductor layer over the gate electrode layer; discharging a composition containing a conductive material over the semiconductor layer to form a source electrode layer and a drain electrode layer; and forming a pixel electrode layer on the source or drain electrode layer.
摘要翻译： 本发明提供一种显示装置及其制造方法，其通过有效地增加材料以及简化步骤来制造。 此外，本发明提供了一种用于形成用于形成显示装置的布线等图案以具有优异的可控性的预定形状的技术。 制造显示装置的方法包括以下步骤：形成疏液区域; 选择性地将激光束照射在疏液区域以形成亲液性区域; 选择性地将含有导电材料的组合物在亲液区域中排出以形成栅极电极层; 在栅电极层上形成栅极绝缘层和半导体层; 在半导体层上排出含有导电材料的组合物，以形成源电极层和漏电极层; 以及在源极或漏极电极层上形成像素电极层。
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公开(公告)号：US08518760B2
公开(公告)日：2013-08-27
申请号：US13050117
申请日：2011-03-17
申请人： Shunpei Yamazaki , Osamu Nakamura , Shinji Maekawa , Gen Fujii , Toshiyuki Isa
发明人： Shunpei Yamazaki , Osamu Nakamura , Shinji Maekawa , Gen Fujii , Toshiyuki Isa
IPC分类号： H01L21/84
CPC分类号： H01L51/0022 , G09G3/3208 , G09G3/3225 , G09G2300/0842 , G09G2300/0861 , G09G2310/0251 , H01L27/1285 , H01L27/1292 , H01L27/3244 , H01L51/055 , H01L51/529
摘要： The invention provides a display device and a method for manufacturing thereof by increasing a material efficiently as well as simplifying steps. Also, the invention provides a technique for forming a pattern such as a wiring, that is used for forming a display device, to have a predetermined shape with an excellent controllability. The method for manufacturing a display device includes the steps of: forming a lyophobic region; selectively irradiating laser beam in the lyophobic region to form a lyophilic region; selectively discharging a composition, that contains a conductive material, in the lyophilic region to form a gate electrode layer; forming a gate insulating layer and a semiconductor layer over the gate electrode layer; discharging a composition containing a conductive material over the semiconductor layer to form a source electrode layer and a drain electrode layer; and forming a pixel electrode layer on the source or drain electrode layer.
摘要翻译： 本发明提供一种显示装置及其制造方法，其通过有效地增加材料以及简化步骤来制造。 此外，本发明提供了一种用于形成用于形成显示装置的布线等图案以具有优异的可控性的预定形状的技术。 制造显示装置的方法包括以下步骤：形成疏液区域; 选择性地将激光束照射在疏液区域以形成亲液性区域; 选择性地将含有导电材料的组合物在亲液区域中排出以形成栅极电极层; 在栅电极层上形成栅极绝缘层和半导体层; 在半导体层上排出含有导电材料的组合物，以形成源电极层和漏电极层; 以及在源极或漏极电极层上形成像素电极层。
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公开(公告)号：US07939888B2
公开(公告)日：2011-05-10
申请号：US11857729
申请日：2007-09-19
申请人： Shunpei Yamazaki , Osamu Nakamura , Shinji Maekawa , Gen Fujii , Toshiyuki Isa
发明人： Shunpei Yamazaki , Osamu Nakamura , Shinji Maekawa , Gen Fujii , Toshiyuki Isa
IPC分类号： H01L27/01 , H01L27/12 , H01L31/0392
CPC分类号： H01L51/0022 , G09G3/3208 , G09G3/3225 , G09G2300/0842 , G09G2300/0861 , G09G2310/0251 , H01L27/1285 , H01L27/1292 , H01L27/3244 , H01L51/055 , H01L51/529
摘要： The invention provides a display device and a method for manufacturing thereof by increasing a material efficiently as well as simplifying steps. Also, the invention provides a technique for forming a pattern such as a wiring, that is used for forming a display device, to have a predetermined shape with an excellent controllability. The method for manufacturing a display device includes the steps of: forming a lyophobic region; selectively irradiating laser beam in the lyophobic region to form a lyophilic region; selectively discharging a composition, that contains a conductive material, in the lyophilic region to form a gate electrode layer; forming a gate insulating layer and a semiconductor layer over the gate electrode layer; discharging a composition containing a conductive material over the semiconductor layer to form a source electrode layer and a drain electrode layer; and forming a pixel electrode layer on the source or drain electrode layer.
摘要翻译： 本发明提供一种显示装置及其制造方法，其通过有效地增加材料以及简化步骤来制造。 此外，本发明提供了一种用于形成用于形成显示装置的布线等图案以具有优异的可控性的预定形状的技术。 制造显示装置的方法包括以下步骤：形成疏液区域; 选择性地将激光束照射在疏液区域以形成亲液性区域; 选择性地将含有导电材料的组合物在亲液区域中排出以形成栅极电极层; 在栅电极层上形成栅极绝缘层和半导体层; 在半导体层上排出含有导电材料的组合物，以形成源电极层和漏电极层; 以及在源极或漏极电极层上形成像素电极层。
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公开(公告)号：US20050163938A1
公开(公告)日：2005-07-28
申请号：US11042518
申请日：2005-01-26
申请人： Shunpei Yamazaki , Osamu Nakamura , Shinji Maekawa , Gen Fujii , Toshiyuki Isa
发明人： Shunpei Yamazaki , Osamu Nakamura , Shinji Maekawa , Gen Fujii , Toshiyuki Isa
IPC分类号： C25B11/00 , G09G3/20 , G09G3/32 , H01L21/77 , H01L27/32 , H01L51/52 , H05B33/08 , H05B33/10 , H05B33/22
CPC分类号： H01L51/0022 , G09G3/3208 , G09G3/3225 , G09G2300/0842 , G09G2300/0861 , G09G2310/0251 , H01L27/1285 , H01L27/1292 , H01L27/3244 , H01L51/055 , H01L51/529
摘要： The invention provides a display device and a method for manufacturing thereof by increasing a material efficiently as well as simplifying steps. Also, the invention provides a technique for forming a pattern such as a wiring, that is used for forming a display device, to have a predetermined shape with an excellent controllability. The method for manufacturing a display device includes the steps of: forming a lyophobic region; selectively irradiating laser beam in the lyophobic region to form a lyophilic region; selectively discharging a composition, that contains a conductive material, in the lyophilic region to form a gate electrode layer; forming a gate insulating layer and a semiconductor layer over the gate electrode layer; discharging a composition containing a conductive material over the semiconductor layer to form a source electrode layer and a drain electrode layer; and forming a pixel electrode layer on the source or drain electrode layer.
摘要翻译： 本发明提供一种显示装置及其制造方法，其通过有效地增加材料以及简化步骤来制造。 此外，本发明提供了一种用于形成用于形成显示装置的布线等图案以具有优异的可控性的预定形状的技术。 制造显示装置的方法包括以下步骤：形成疏液区域; 选择性地将激光束照射在疏液区域以形成亲液性区域; 选择性地将含有导电材料的组合物在亲液区域中排出以形成栅极电极层; 在栅电极层上形成栅极绝缘层和半导体层; 在半导体层上排出含有导电材料的组合物，以形成源电极层和漏电极层; 以及在源极或漏极电极层上形成像素电极层。
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5.发明申请公开(公告)号：US20070085938A1
公开(公告)日：2007-04-19
申请号：US10578001
申请日：2004-11-29
申请人： Shunpei Yamazaki , Hideaki Kuwabara , Shinji Maekawa , Gen Fujii , Toshiyuki Isa
发明人： Shunpei Yamazaki , Hideaki Kuwabara , Shinji Maekawa , Gen Fujii , Toshiyuki Isa
CPC分类号： H01L27/1292 , H01L27/12 , H01L27/124 , H01L27/3262
摘要： An object of the present invention is to provide a display device which can be manufactured with usability of a material improved and with a manufacturing step simplified and to provide a manufacturing technique thereof. One feature of a display device of the present invention is to comprise an insulating layer having an opening, a first conductive layer formed in the opening, and a second conductive layer formed over the insulating layer and the first conductive layer, wherein the first conductive layer is wider and thicker than the second conductive layer, and the second conductive layer is formed by spraying a droplet including a conductive material.
摘要翻译： 本发明的一个目的是提供一种显示装置，其能够改善材料的可用性并且简化制造步骤并提供其制造技术。 本发明的显示装置的一个特征是包括具有开口的绝缘层，形成在开口中的第一导电层和形成在绝缘层和第一导电层上的第二导电层，其中第一导电层 比第二导电层宽且厚，并且通过喷射包括导电材料的液滴形成第二导电层。
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6.发明授权公开(公告)号：US08742421B2
公开(公告)日：2014-06-03
申请号：US10578001
申请日：2004-11-29
申请人： Shunpei Yamazaki , Hideaki Kuwabara , Shinji Maekawa , Gen Fujii , Toshiyuki Isa
发明人： Shunpei Yamazaki , Hideaki Kuwabara , Shinji Maekawa , Gen Fujii , Toshiyuki Isa
IPC分类号： H01L27/14
CPC分类号： H01L27/1292 , H01L27/12 , H01L27/124 , H01L27/3262
摘要： An object of the present invention is to provide a display device which can be manufactured with usability of a material improved and with a manufacturing step simplified and to provide a manufacturing technique thereof. One feature of a display device of the present invention is to comprise an insulating layer having an opening, a first conductive layer formed in the opening, and a second conductive layer formed over the insulating layer and the first conductive layer, wherein the first conductive layer is wider and thicker than the second conductive layer, and the second conductive layer is formed by spraying a droplet including a conductive material.
摘要翻译： 本发明的一个目的是提供一种显示装置，其能够改善材料的可用性并且简化制造步骤并提供其制造技术。 本发明的显示装置的一个特征是包括具有开口的绝缘层，形成在开口中的第一导电层和形成在绝缘层和第一导电层上的第二导电层，其中第一导电层 比第二导电层宽且厚，并且通过喷射包括导电材料的液滴形成第二导电层。
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公开(公告)号：US20060027804A1
公开(公告)日：2006-02-09
申请号：US11187988
申请日：2005-07-25
申请人： Shunpei Yamazaki , Hironobu Shoji , Shinji Maekawa , Osamu Nakamura , Tatsuya Honda , Gen Fujii , Yukie Suzuki , Ikuko Kawamata
发明人： Shunpei Yamazaki , Hironobu Shoji , Shinji Maekawa , Osamu Nakamura , Tatsuya Honda , Gen Fujii , Yukie Suzuki , Ikuko Kawamata
IPC分类号： H01L29/04
CPC分类号： H01L21/02667 , G02F1/1368 , G02F2202/104 , H01L21/2022 , H01L21/2026 , H01L27/124 , H01L27/1277 , H01L27/1292 , H01L27/3246 , H01L27/3248 , H01L27/3262 , H01L27/3276 , H01L51/56
摘要： A manufacturing method of a display device having TFTs capable of high-speed operation with few variations of threshold voltage is provided, in which materials are used with high efficiency and a small number of photomasks is required. The display device of the invention comprises a gate electrode layer and a pixel electrode layer formed over an insulating surface, a gate insulating layer formed over the gate electrode layer, a crystalline semiconductor layer formed over the gate insulating layer, a semiconductor layer having one conductivity type formed in contact with the crystalline semiconductor layer, a source electrode layer and a drain electrode layer formed in contact with the semiconductor layer having one conductivity type, an insulating later formed over the source electrode layer, the drain electrode layer, and the pixel electrode layer, a first opening formed in the insulating layer to reach the source electrode layer or the drain electrode layer, a second opening formed in the gate insulating layer and the insulating layer to reach the pixel electrode layer, and a wiring layer formed in the first opening and the second opening to electrically connect the source electrode layer or the drain electrode layer to the pixel electrode layer.
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公开(公告)号：US07564058B2
公开(公告)日：2009-07-21
申请号：US11187988
申请日：2005-07-25
申请人： Shunpei Yamazaki , Hironobu Shoji , Shinji Maekawa , Osamu Nakamura , Tatsuya Honda , Gen Fujii , Yukie Suzuki , Ikuko Kawamata
发明人： Shunpei Yamazaki , Hironobu Shoji , Shinji Maekawa , Osamu Nakamura , Tatsuya Honda , Gen Fujii , Yukie Suzuki , Ikuko Kawamata
IPC分类号： H01L27/14
CPC分类号： H01L21/02667 , G02F1/1368 , G02F2202/104 , H01L21/2022 , H01L21/2026 , H01L27/124 , H01L27/1277 , H01L27/1292 , H01L27/3246 , H01L27/3248 , H01L27/3262 , H01L27/3276 , H01L51/56
摘要： A manufacturing method of a display device having TFTs capable of high-speed operation with few variations of threshold voltage is provided, in which materials are used with high efficiency and a small number of photomasks is required. The display device of the invention comprises a gate electrode layer and a pixel electrode layer formed over an insulating surface, a gate insulating layer formed over the gate electrode layer, a crystalline semiconductor layer formed over the gate insulating layer, a semiconductor layer having one conductivity type formed in contact with the crystalline semiconductor layer, a source electrode layer and a drain electrode layer formed in contact with the semiconductor layer having one conductivity type, an insulating later formed over the source electrode layer, the drain electrode layer, and the pixel electrode layer, a first opening formed in the insulating layer to reach the source electrode layer or the drain electrode layer, a second opening formed in the gate insulating layer and the insulating layer to reach the pixel electrode layer, and a wiring layer formed in the first opening and the second opening to electrically connect the source electrode layer or the drain electrode layer to the pixel electrode layer.
摘要翻译： 提供了具有能够以极小的阈值电压变化进行高速运行的TFT的显示装置的制造方法，其中以高效率使用材料并且需要少量的光掩模。 本发明的显示装置包括形成在绝缘表面上的栅极电极层和像素电极层，形成在栅极电极层上的栅极绝缘层，形成在栅极绝缘层上的结晶半导体层，具有一个导电性的半导体层 形成为与结晶半导体层接触的类型，源电极层和漏极电极层，形成为与具有一种导电类型的半导体层接触，在源极电极层，漏极电极层和像素电极之后形成绝缘体 在所述绝缘层中形成的第一开口到达所述源极电极层或所述漏极电极层，形成在所述栅极绝缘层和所述绝缘层中的第二开口到达所述像素电极层;以及布线层， 开口和第二开口以电连接源极电极层或漏极电极 呃到像素电极层。
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公开(公告)号：US07964452B2
公开(公告)日：2011-06-21
申请号：US12857809
申请日：2010-08-17
申请人： Shunpei Yamazaki , Shinji Maekawa , Gen Fujii , Hideaki Kuwabara
发明人： Shunpei Yamazaki , Shinji Maekawa , Gen Fujii , Hideaki Kuwabara
IPC分类号： H01L21/84
CPC分类号： G02F1/13458 , G02F1/136227 , G02F1/136286 , G02F2001/13415 , G02F2001/136295 , H01L27/1292
摘要： As a substrate gets larger, time of manufacture is increased due to the repetition of film formations and etchings; waste disposal costs of etchant and the like are increased; and material efficiency is significantly reduced. A base film for improving adhesion between a substrate and a material layer formed by a droplet discharge method is formed in the invention. Further, a manufacturing method of a liquid crystal display device according to the invention includes at least one step for forming the following patterns required for manufacturing a liquid crystal display device without using a photomask: a pattern of a material layer typified by a wiring (or an electrode) pattern, an insulating layer pattern; or a mask pattern for forming another pattern.
摘要翻译： 由于重复膜形成和蚀刻，衬底越来越大，制造时间增加; 蚀刻剂等的废物处理成本增加; 材料效率显着降低。 在本发明中形成了用于改善基板和通过液滴喷射方法形成的材料层之间的粘附性的基膜。 此外，根据本发明的液晶显示装置的制造方法包括至少一个步骤，用于形成在不使用光掩模的情况下制造液晶显示装置所需的以下图案：以布线为代表的材料层的图案（或 电极）图案，绝缘层图案; 或用于形成另一图案的掩模图案。
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公开(公告)号：US20110212558A1
公开(公告)日：2011-09-01
申请号：US13101766
申请日：2011-05-05
申请人： Shunpei YAMAZAKI , Shinji MAEKAWA , Gen Fujii , Hideaki KUWABARA
发明人： Shunpei YAMAZAKI , Shinji MAEKAWA , Gen Fujii , Hideaki KUWABARA
IPC分类号： H01L21/336
CPC分类号： G02F1/13458 , G02F1/136227 , G02F1/136286 , G02F2001/13415 , G02F2001/136295 , H01L27/1292
摘要： As a substrate gets larger, time of manufacture is increased due to the repetition of film formations and etchings; waste disposal costs of etchant and the like are increased; and material efficiency is significantly reduced. A base film for improving adhesion between a substrate and a material layer formed by a droplet discharge method is formed in the invention. Further, a manufacturing method of a liquid crystal display device according to the invention includes at least one step for forming the following patterns required for manufacturing a liquid crystal display device without using a photomask: a pattern of a material layer typified by a wiring (or an electrode) pattern, an insulating layer pattern; or a mask pattern for forming another pattern.
摘要翻译： 由于重复膜形成和蚀刻，衬底越来越大，制造时间增加; 蚀刻剂等的废物处理成本增加; 材料效率显着降低。 在本发明中形成了用于改善基板和通过液滴喷射方法形成的材料层之间的粘附性的基膜。 此外，根据本发明的液晶显示装置的制造方法包括至少一个步骤，用于形成在不使用光掩模的情况下制造液晶显示装置所需的以下图案：以布线为代表的材料层的图案（或 电极）图案，绝缘层图案; 或用于形成另一图案的掩模图案。
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