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公开(公告)号：US6110540A
公开(公告)日：2000-08-29
申请号：US679288
申请日：1996-07-12
IPC分类号： C23C16/50 , C23C16/455 , C23C16/503 , C23C16/54 , H01J37/32 , H01L21/205 , H05H1/24
CPC分类号： H01J37/3244 , C23C16/455 , C23C16/503 , C23C16/545 , H01J37/32532 , H01J37/32559 , H01J2237/3321
摘要： A gas purged counter-electrode prevents the counter-electrode from being covered with dielectric material by flowing gas past a surface of a metal element. The gas purged counter-electrode produces a relatively high-density plasma which effectively acts as the counter-electrode for a coating system. The gas purged counter-electrodes can be used with PECVD or sputtering systems.
摘要翻译： 气体吹扫的对电极通过使气体流过金属元件的表面来防止对电极被电介质材料覆盖。 气体净化的对电极产生相对高密度的等离子体，其有效地用作涂覆系统的对电极。 气体吹扫的对电极可以与PECVD或溅射系统一起使用。
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公开(公告)号：US5627435A
公开(公告)日：1997-05-06
申请号：US601888
申请日：1996-02-15
IPC分类号： C23C16/50 , C23G5/00 , H01J37/32 , H01L21/302 , H01L21/3065 , H05H1/24 , H01P5/12
CPC分类号： H01J37/32009 , H01J37/32596 , H01J37/3266
摘要： An array of hollow cathodes can be made by mounting a housing connected to a source of plasma precursor gas and to a source of power in a vacuum chamber, said housing having a plurality of uniformly spaced openings in a wall thereof into which a plasma can be generated. A substrate to be treated is mounted parallel to and spaced a preselected distance from said openings. In operation, a plurality of plasma torches is created extending from the openings which can plasma etch and remove coatings on said substrate.
摘要翻译： 空心阴极阵列可以通过安装连接到等离子体前驱体气体源的壳体和真空室中的功率源来形成，所述壳体在其壁中具有多个均匀间隔的开口，等离子体可以 生成。 待处理的基板与所述开口平行并间隔预定距离安装。 在操作中，产生从开口延伸的多个等离子体炬，其可以等离子体蚀刻并去除所述衬底上的涂层。
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公开(公告)号：US20050148199A1
公开(公告)日：2005-07-07
申请号：US10749961
申请日：2003-12-31
申请人： Frank Jansen
发明人： Frank Jansen
IPC分类号： C23C16/44 , C23C16/455 , H01L21/02 , H01L21/205 , H01L21/31
CPC分类号： C23C16/45544 , C23C16/4412
摘要： A trap with a residence time at least equal to one complete cycle time of an atomic layer deposition (ALD) process traps the gaseous effluent from a reaction chamber and reaction products before the effluent can enter a backing pump. The trap may be connected directly to the reaction chamber or indirectly through a process pump. The trap is advantageously used in atomic layer deposition processes.
摘要翻译： 停留时间至少等于原子层沉积（ALD）过程的一个完整循环时间的陷阱捕集来自反应室和反应产物的气态流出物，然后流出物可以进入背衬泵。 捕集器可以直接连接到反应室或通过工艺泵间接连接。 陷阱有利地用于原子层沉积工艺。
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4.发明授权Method for producing a liquid mixture having a predetermined concentration of a specified component 有权具有规定浓度的特定成分的液体混合物的制造方法公开(公告)号：US06247838B1
公开(公告)日：2001-06-19
申请号：US09198686
申请日：1998-11-24
IPC分类号： B01F1502
CPC分类号： G05D11/138 , B01F3/0803 , B01F15/04 , G05D11/132 , Y10T137/034
摘要： A method and apparatus for producing a liquid mixture in which mixture components are mixed to produce a product stream having a predetermined concentration of a specified component. This mixing occurs within a fluidic network designed such that the components mix in inlet branches to form a first intermediate mixture having a lower concentration than that desired in the product stream. The specified component is metered into the intermediate product stream to produce a second intermediate product stream that is blended to produce a third intermediate product stream. The concentration of the specified component within the third intermediate product stream is measured and the metering pump is appropriately adjusted. The third intermediate product stream then passes through a recycle loop in which recycled product is mixed with an intermediate product stream to produce a liquid mixture stream that is divided into the recycle stream and a product stream.
摘要翻译： 一种液体混合物的制造方法和装置，其中将混合物组分混合以产生具有预定浓度的特定组分的产物流。 该混合发生在流体网络中，设计成使得组分在入口分支中混合以形成具有比产物流中所需浓度低的浓度的第一中间体混合物。 将指定的组分计量加入到中间产物流中以产生混合以产生第三中间产物流的第二中间产物流。 测量第三中间产物流中指定组分的浓度，并适当调整计量泵。 然后第三中间产物流通过循环回路，其中再循环产物与中间产物流混合以产生分为循环流和产物流的液体混合物流。
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公开(公告)号：US5204210A
公开(公告)日：1993-04-20
申请号：US624031
申请日：1990-12-07
申请人： Frank Jansen , Mary A. Machonkin
发明人： Frank Jansen , Mary A. Machonkin
CPC分类号： C23C8/02 , C23C8/22 , G03F7/0047
摘要： A method of forming a patterned, poly-crystalline diamond film on a substrate is disclosed. First, a photoresist layer is applied to a substrate. A diamond powder layer is formed on the photoresist layer either through spray-coating, dip-coating, spin-coating using a diamond-powder suspension, and the like. The photoresist layer is exposed to electromagnetic radiation through a mask either before or after the diamond powder layer is applied. Then, the photoresist layer is developed, after which the substrate is heated causing the photoresist layer to carbonize. The substrate is exposed to a mixture of hydrogen-containing and carbon-containing gases which are decomposed in a processing apparatus. Hydrogen in this gas mixture etches away at the carbonized photoresist layer leaving behind the patterned diamond powder layer. Carbon in these carbon-containing gases combines with the diamond particles in the diamond powder layer to form diamond structures on the substrate.
摘要翻译： 公开了一种在衬底上形成图案化的多晶金刚石膜的方法。 首先，将光致抗蚀剂层施加到基板上。 通过喷涂，浸涂，使用金刚石粉末悬浮液的旋涂等形成在光致抗蚀剂层上的金刚石粉末层。 在施加金刚石粉末层之前或之后，光致抗蚀剂层通过掩模暴露于电磁辐射。 然后，光致抗蚀剂层被显影，然后加热基底使光致抗蚀剂层碳化。 基板暴露于在处理装置中分解的含氢气体和含碳气体的混合物。 该气体混合物中的氢气在碳化的光致抗蚀剂层处脱落，留下图案化的金刚石粉末层。 这些含碳气体中的碳与金刚石粉末层中的金刚石颗粒结合，以在基底上形成金刚石结构。
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公开(公告)号：US5063397A
公开(公告)日：1991-11-05
申请号：US528874
申请日：1990-05-25
申请人： Frank Jansen , Inan Chen
发明人： Frank Jansen , Inan Chen
CPC分类号： G03G15/754
摘要： A method and apparatus for developing an image wherein a distance between a charge receiving surface and a conductive surface is varied. During charging of the charge receiving surface, the receptor thickness is smaller than during the development step.
摘要翻译： 一种用于显影图像的方法和装置，其中电荷接收表面和导电表面之间的距离是变化的。 在电荷接收表面的充电期间，受体厚度小于显影步骤期间的受体厚度。
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7.发明授权Heterogeneous electrophotographic imaging members of amorphous silicon and silicon oxide 失效非晶硅和氧化硅的非均匀电子照相成像构件
公开(公告)号：US4613556A
公开(公告)日：1986-09-23
申请号：US662328
申请日：1984-10-18
CPC分类号： G03G5/082 , G03G5/0433 , G03G5/08221 , G03G5/08285 , G03G5/08292
摘要： Disclosed is an electrographic imaging member consisting essentially of a supporting substrate, a hydrogenated amorphous silicon photogenerating layer, and in contact therewith a charge transporting layer of plasma deposited silicon oxide containing at least 50 atomic percent of oxygen.
摘要翻译： 公开了一种基本上由支撑基底，氢化非晶硅光生代层组成并与其接触含有至少50原子％氧的等离子体沉积氧化硅的电荷输送层的电摄影成像部件。
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公开(公告)号：US07703597B2
公开(公告)日：2010-04-27
申请号：US12265744
申请日：2008-11-06
申请人： Frank Jansen
发明人： Frank Jansen
IPC分类号： B65G47/244
CPC分类号： B65G47/2445 , B65G21/2036
摘要： A device for the turning of flat articles, particularly blanks of folded boxes, includes conveying elements which define at least two conveying sections that are permeable to air and on which the articles are conveyed lying substantially flat, the conveying elements being mounted in a frame, a suction device arranged below the conveying element and to extend through the conveying section to increase the friction between the conveying elements and the articles, and a separate drive for each of the conveying elements of the respective conveying sections. The frame is mounted such that it can swivel about a pivot in the exit region of the frame relative to a machine frame.
摘要翻译： 用于转动扁平制品，特别是折叠箱的坯料的装置包括限定至少两个可渗透空气的输送部分的输送元件，并且物品被输送到基本上平坦的位置，输送元件安装在框架中， 设置在输送元件下方并且延伸穿过输送部分以增加输送元件和物品之间的摩擦的抽吸装置，以及用于各个输送部分的每个输送元件的单独驱动。 框架被安装成使得其可以围绕框架的出口区域中的枢轴相对于机架旋转。
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公开(公告)号：US20080124670A1
公开(公告)日：2008-05-29
申请号：US11605793
申请日：2006-11-29
申请人： Frank Jansen
发明人： Frank Jansen
CPC分类号： F23G7/063 , C23C16/4412 , F23G2204/204
摘要： An inductively heated trap for treating and removing compounds from an exhaust stream. More particularly, a method and apparatus for inductively heating a trap installed in the exhaust stream of a semiconductor process, wherein the trap decomposes exhaust gas compounds prior to entering a vacuum exhaust pump. The trap treats precursor compounds, such as metal organic and halide compounds, by thermally radicalizing the precursor vapors prior to entering the vacuum pump. The trap may be used in a variety of applications including atomic layer deposition, chemical vapor deposition and perfluorocarbon abatement.
摘要翻译： 用于从废气流中处理和除去化合物的感应加热阱。 更具体地，涉及一种用于感应加热安装在半导体工艺的排气流中的捕集阱的方法和装置，其中捕集阱在进入真空泵之前分解废气化合物。 捕集阱通过在进入真空泵之前热原子化前体蒸气来处理前体化合物，例如金属有机和卤化物。 捕集阱可用于各种应用，包括原子层沉积，化学气相沉积和全氟化碳消除。
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公开(公告)号：US20070041826A1
公开(公告)日：2007-02-22
申请号：US11204615
申请日：2005-08-16
申请人： Frank Jansen
发明人： Frank Jansen
IPC分类号： F01D1/36
CPC分类号： F04D19/042 , F04D27/0292
摘要： The present invention relates to turbomolecular vacuum pumps and an arrangement for reducing or eliminating an accumulated static charge in the rotor caused by an interaction of the rotor with either electrically charged or neutral particles in the pumped media. Electrical charge exchange between the rotor and the electrically grounded stator is effected through a wire or other means of electrical contact, or through charge emission devices such as a field emission tip. In either case, electrostatic charges in the rotor are reduced or eliminated.
摘要翻译： 本发明涉及涡轮分子真空泵和用于减少或消除转子与泵送介质中的带电荷或中性粒子的相互作用引起的转子中累积的静电荷的装置。 转子和电接地定子之间的电荷交换通过电线或其他电接触方式，或通过诸如场致发射尖端的电荷发射装置来实现。 在任一种情况下，转子中的静电电荷都被减少或消除。
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