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    Magnetic MEMS sensors
    3.
    发明授权
    Magnetic MEMS sensors 失效
    磁性MEMS传感器

    公开(公告)号：US07509748B2

    公开(公告)日：2009-03-31

    申请号：US11514793

    申请日：2006-09-01

    申请人： Song Xue ,  Patrick Ryan ,  Nurul Amin

    发明人： Song Xue ,  Patrick Ryan ,  Nurul Amin

    IPC分类号： G01C17/38

    CPC分类号： G01C17/28

    摘要： The disclosure relates to micro-electromechanical systems (MEMS) and magnetic MEMS sensors. The sensors include a substrate having a surface, a first magnetic field detector positioned on the surface, a second magnetic field detector positioned on the surface proximate to the first magnetic field detector, and a third magnetic field detector positioned on the surface proximate to the first and second magnetic field detectors. Each of the first, second and third magnetic field detector is capable of detecting external magnetic fields that are mutually orthogonal along three directions. In certain embodiments, the magnetic MEMS sensors may be useful as electronic compasses. The disclosure also relates to fabricating a magnetic MEMS device, such as an electronic compass, from or on a single wafer, which includes multiple MEMS sensors.

    摘要翻译： 本公开涉及微机电系统（MEMS）和磁MEMS传感器。 传感器包括具有表面的基板，位于表面上的第一磁场检测器，位于靠近第一磁场检测器的表面上的第二磁场检测器，以及位于靠近第一磁场检测器的表面上的第三磁场检测器 和第二磁场检测器。 第一，第二和第三磁场检测器中的每一个能够检测沿着三个方向相互正交的外部磁场。 在某些实施例中，磁性MEMS传感器可用作电子罗盘。 本公开还涉及从包括多个MEMS传感器的单个晶片上或之上制造诸如电子罗盘的磁MEMS装置。

    Magnetic MEMS device
    4.
    发明申请
    Magnetic MEMS device 审中-公开
    磁性MEMS器件

    公开(公告)号：US20070209437A1

    公开(公告)日：2007-09-13

    申请号：US11348930

    申请日：2006-04-07

    申请人： Song Xue ,  Nurul Amin ,  Patrick Ryan ,  John Wright ,  Jeffery Berkowitz ,  Insik Jin

    发明人： Song Xue ,  Nurul Amin ,  Patrick Ryan ,  John Wright ,  Jeffery Berkowitz ,  Insik Jin

    IPC分类号： B81B7/02 ,  G01P15/105 ,  G01B7/00 ,  H01L27/22 ,  H01L43/00

    CPC分类号： B81B3/0032 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01C19/56 ,  G01C19/5663 ,  G01D5/145 ,  G01L9/007 ,  G01P15/0802 ,  G01P15/0885 ,  G01P15/105 ,  G01P15/11 ,  G01P15/18 ,  G01P2015/0828 ,  G01P2015/084 ,  H01L29/84

    摘要： The present invention relates to magnetic micro-electromechanical systems (MEMS) or magnetic MEMS devices, particularly electronic devices in which a member adjoins a base or substrate and extends from the substrate proximate to a magnetic field element having an altered output associated with movement of the member. The first magnetic field element is adapted to emit or detect a magnetic field and positioned proximate to the member, and the second magnetic field element adapted to emit or detect a magnetic field and positioned proximate to the base or substrate, such that movement of the member in a first direction by a non-magnetic force results in a variation of magnetic field strength associated with displacement of the sensor in a first direction. The invention also relates to methods for fabricating magnetic MEMS devices, transducers, sensors, and accelerometers.

    摘要翻译： 本发明涉及磁微机电系统（MEMS）或磁MEMS器件，特别是电子器件，其中元件邻接基底或衬底并且从衬底附近延伸到具有改变的输出的磁场元件，该变化的输出与 会员。 第一磁场元件适于发射或检测磁场并且定位成靠近构件，并且第二磁场元件适于发射或检测磁场并且定位成靠近基底或基底，使得该构件的移动 通过非磁力在第一方向上导致与传感器在第一方向上的位移相关联的磁场强度的变化。 本发明还涉及用于制造磁MEMS器件，换能器，传感器和加速度计的方法。

    Differential/dual CPP recording head
    5.
    发明申请
    Differential/dual CPP recording head 失效
    差分/双CPP记录头

    公开(公告)号：US20060002032A1

    公开(公告)日：2006-01-05

    申请号：US10880879

    申请日：2004-06-30

    申请人： Shaoping Li ,  Song Xue ,  Kaizhong Gao ,  Patrick Ryan

    发明人： Shaoping Li ,  Song Xue ,  Kaizhong Gao ,  Patrick Ryan

    IPC分类号： G11B5/33 ,  G11B5/127

    CPC分类号： G11B5/265 ,  G11B5/127 ,  G11B5/3954 ,  G11B5/3974

    摘要： A magnetic sensor for reading information from a magnetic medium. The magnetic sensor includes a bottom electrode and a first sensor disposed above the bottom electrode. The magnetic sensor also includes a middle electrode disposed above the first sensor, a second sensor disposed above the middle electrode and a top electrode disposed above the second sensor. The bottom electrode, the middle electrode and the top electrode are utilized to electrically connect the first sensor and the second sensor in parallel.

    摘要翻译： 一种用于从磁性介质读取信息的磁传感器。 磁传感器包括底电极和设置在底电极上方的第一传感器。 磁传感器还包括设置在第一传感器上方的中间电极，设置在中间电极上方的第二传感器和设置在第二传感器上方的顶部电极。 底部电极，中间电极和顶部电极用于并联地电连接第一传感器和第二传感器。

    Differential/dual CPP recording head
    6.
    发明授权
    Differential/dual CPP recording head 失效
    差分/双CPP记录头

    公开(公告)号：US07436632B2

    公开(公告)日：2008-10-14

    申请号：US10880879

    申请日：2004-06-30

    申请人： Shaoping Li ,  Song Xue ,  Kaizhong Gao ,  Patrick Ryan

    发明人： Shaoping Li ,  Song Xue ,  Kaizhong Gao ,  Patrick Ryan

    IPC分类号： G11B5/39

    CPC分类号： G11B5/265 ,  G11B5/127 ,  G11B5/3954 ,  G11B5/3974

    摘要： A magnetic sensor for reading information from a magnetic medium. The magnetic sensor includes a bottom electrode and a first sensor disposed above the bottom electrode. The magnetic sensor also includes a middle electrode disposed above the first sensor, a second sensor disposed above the middle electrode and a top electrode disposed above the second sensor. The bottom electrode, the middle electrode and the top electrode are utilized to electrically connect the first sensor and the second sensor in parallel.

    摘要翻译： 一种用于从磁性介质读取信息的磁传感器。 磁传感器包括底电极和设置在底电极上方的第一传感器。 磁传感器还包括设置在第一传感器上方的中间电极，设置在中间电极上方的第二传感器和设置在第二传感器上方的顶部电极。 底部电极，中间电极和顶部电极用于并联地电连接第一传感器和第二传感器。

    Magnetic sensor that combines both CPP and CIP modes of operation
    7.
    发明授权
    Magnetic sensor that combines both CPP and CIP modes of operation 有权
    结合CPP和CIP操作模式的磁传感器

    公开(公告)号：US07359161B2

    公开(公告)日：2008-04-15

    申请号：US10880705

    申请日：2004-06-30

    申请人： Shaoping Li ,  Song Xue ,  Kaizhong Gao ,  Michael R. Montemorra ,  Patrick Ryan

    发明人： Shaoping Li ,  Song Xue ,  Kaizhong Gao ,  Michael R. Montemorra ,  Patrick Ryan

    IPC分类号： G11B5/39

    CPC分类号： G11B5/3903 ,  G11B2005/0005

    摘要： A magnetic sensor is provided. The magnetic sensor includes a magnetoresistive multi-layered portion that has a first resistance region and a second resistance region. At least two contacts are coupled to the magnetoresistive multi-layered portion. A sensing current flows from a first contact of the at least two contacts to a second contact of the at least two contacts via the first resistance region and the second resistance region of the magnetoresistive multi-layered portion. The first resistance region promotes a primary flow of the sensing current in a first direction substantially perpendicular to surface planes of the layers of the magnetoresistive multi-layered portion, and the second resistance region promotes the primary flow of the sensing current in a second direction substantially in parallel to surface planes of the layers of the magnetoresistive multi-layered portion.

    摘要翻译： 提供磁传感器。 磁传感器包括具有第一电阻区域和第二电阻区域的磁阻多层部分。 至少两个触点耦合到磁阻多层部分。 感测电流从至少两个触点的第一触点经由第一电阻区域和磁阻多层部分的第二电阻区域流过至少两个触点的第二触点。 所述第一阻抗区域促进所述感测电流在与所述磁阻多层部分的所述层的表面平行的第一方向上的主要流动，并且所述第二电阻区域基本上促进所述感测电流在第二方向上的初级流动 平行于磁阻多层部分的层的表面平面。

    Magnetic sensor that combines both CPP and CIP modes of operation
    8.
    发明申请
    Magnetic sensor that combines both CPP and CIP modes of operation 有权
    结合CPP和CIP操作模式的磁传感器

    公开(公告)号：US20060002034A1

    公开(公告)日：2006-01-05

    申请号：US10880705

    申请日：2004-06-30

    申请人： Shaoping Li ,  Song Xue ,  Kaizhong Gao ,  Michael Montemorra ,  Patrick Ryan

    发明人： Shaoping Li ,  Song Xue ,  Kaizhong Gao ,  Michael Montemorra ,  Patrick Ryan

    IPC分类号： G11B5/33 ,  G11B5/127

    CPC分类号： G11B5/3903 ,  G11B2005/0005

    摘要： A magnetic sensor is provided. The magnetic sensor includes a magnetoresistive multi-layered portion that has a first resistance region and a second resistance region. At least two contacts are coupled to the magnetoresistive multi-layered portion. A sensing current flows from a first contact of the at least two contacts to a second contact of the at least two contacts via the first resistance region and the second resistance region of the magnetoresistive multi-layered portion. The first resistance region promotes a primary flow of the sensing current in a first direction substantially perpendicular to surface planes of the layers of the magnetoresistive multi-layered portion, and the second resistance region promotes the primary flow of the sensing current in a second direction substantially in parallel to surface planes of the layers of the magnetoresistive multi-layered portion.

    摘要翻译： 提供磁传感器。 磁传感器包括具有第一电阻区域和第二电阻区域的磁阻多层部分。 至少两个触点耦合到磁阻多层部分。 感测电流从至少两个触点的第一触点经由第一电阻区域和磁阻多层部分的第二电阻区域流过至少两个触点的第二触点。 所述第一阻抗区域促进所述感测电流在与所述磁阻多层部分的所述层的表面平行的第一方向上的主要流动，并且所述第二电阻区域基本上促进所述感测电流在第二方向上的初级流动 平行于磁阻多层部分的层的表面平面。