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公开(公告)号:US20150229108A1
公开(公告)日:2015-08-13
申请号:US14600506
申请日:2015-01-20
Applicant: Soraa Laser Diode, Inc.
Inventor: Dan Steigerwald , Melvin McLaurin , Eric Goutain , Alexander Sztein , Po Shan Hsu , Paul Rudy , James W. Raring
CPC classification number: H01S5/4087 , H01S5/005 , H01S5/0202 , H01S5/0203 , H01S5/0215 , H01S5/0216 , H01S5/0217 , H01S5/0218 , H01S5/0425 , H01S5/22 , H01S5/34333 , H01S5/4012 , H01S5/4031 , H01S5/4056 , H01S5/4093
Abstract: A method for manufacturing a multi-emitter laser diode device includes providing a substrate having a surface region and forming epitaxial material overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active layer region. The epitaxial material is patterned to form a plurality of dice, each of the dice corresponding to at least one laser device, characterized by a first pitch between a pair of dice, the first pitch being less than a design width. Each of the plurality of dice are transferred to a carrier wafer such that each pair of dice is configured with a second pitch between each pair of dice, the second pitch being larger than the first pitch.
Abstract translation: 一种用于制造多发射体激光二极管器件的方法,包括提供具有表面区域并形成覆盖在表面区域上的外延材料的衬底,所述外延材料包括n型覆层区域,活性区域包括至少一层有源层, n型包层区域和覆盖有源层区域的p型覆层区域。 外延材料被图案化以形成多个骰子,每个骰子对应于至少一个激光装置,其特征在于一对骰子之间的第一间距,第一间距小于设计宽度。 将多个骰子中的每一个转移到载体晶片,使得每对骰子在每对骰子之间配置有第二间距,第二间距大于第一间距。
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公开(公告)号:US20150229107A1
公开(公告)日:2015-08-13
申请号:US14312427
申请日:2014-06-23
Applicant: Soraa Laser Diode, Inc.
Inventor: Melvin McLaurin , Alexander Sztein , Po Shan Hsu , Eric Goutain , Dan Steigerwald , James W. Raring
CPC classification number: H01S5/4093 , H01L24/83 , H01L24/95 , H01L2224/16225 , H01L2224/48091 , H01L2224/48465 , H01L2924/16152 , H01S5/0203 , H01S5/0216 , H01S5/0217 , H01S5/0224 , H01S5/22 , H01S5/3013 , H01S5/32325 , H01S5/32341 , H01L2924/00014 , H01L2924/00
Abstract: A method for manufacturing a laser diode device includes providing a substrate having a surface region and forming epitaxial material overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active layer region. The epitaxial material is patterned to form a plurality of dice, each of the dice corresponding to at least one laser device, characterized by a first pitch between a pair of dice, the first pitch being less than a design width. Each of the plurality of dice are transferred to a carrier wafer such that each pair of dice is configured with a second pitch between each pair of dice, the second pitch being larger than the first pitch.
Abstract translation: 一种制造激光二极管器件的方法包括提供具有表面区域并形成覆盖在该表面区域上的外延材料的衬底,所述外延材料包括n型覆层区域,所述有源区域包括至少一个覆盖在n型上的有源层 包层区域和覆盖有源层区域的p型覆层区域。 外延材料被图案化以形成多个骰子,每个骰子对应于至少一个激光装置,其特征在于一对骰子之间的第一间距,第一间距小于设计宽度。 将多个骰子中的每一个转移到载体晶片,使得每对骰子在每对骰子之间配置有第二间距,第二间距大于第一间距。
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公开(公告)号:US10566767B2
公开(公告)日:2020-02-18
申请号:US15351326
申请日:2016-11-14
Applicant: Soraa Laser Diode, Inc.
Inventor: Dan Steigerwald , Melvin McLaurin , Eric Goutain , Alexander Sztein , Po Shan Hsu , Paul Rudy , James W. Raring
Abstract: A multi-emitter laser diode device includes a carrier chip singulated from a carrier wafer. The carrier chip has a length and a width, and the width defines a first pitch. The device also includes a plurality of epitaxial mesa dice regions transferred to the carrier chip from a substrate and attached to the carrier chip at a bond region. Each of the epitaxial mesa dice regions is arranged on the carrier chip in a substantially parallel configuration and positioned at a second pitch defining the distance between adjacent epitaxial mesa dice regions. Each of the plurality of epitaxial mesa dice regions includes epitaxial material, which includes an n-type cladding region, an active region having at least one active layer region, and a p-type cladding region. The device also includes one or more laser diode stripe regions, each of which has a pair of facets forming a cavity region.
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公开(公告)号:US10367334B2
公开(公告)日:2019-07-30
申请号:US15176076
申请日:2016-06-07
Applicant: Soraa Laser Diode, Inc.
Inventor: Melvin McLaurin , Alexander Sztein , Po Shan Hsu , Eric Goutain , Dan Steigerwald , James W. Raring
Abstract: A method for manufacturing a laser diode device includes providing a substrate having a surface region and forming epitaxial material overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active layer region. The epitaxial material is patterned to form a plurality of dice, each of the dice corresponding to at least one laser device, characterized by a first pitch between a pair of dice, the first pitch being less than a design width. Each of the plurality of dice are transferred to a carrier wafer such that each pair of dice is configured with a second pitch between each pair of dice, the second pitch being larger than the first pitch.
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公开(公告)号:US11011889B2
公开(公告)日:2021-05-18
申请号:US16791652
申请日:2020-02-14
Applicant: Soraa Laser Diode, Inc.
Inventor: Dan Steigerwald , Melvin McLaurin , Eric Goutain , Alexander Sztein , Po Shan Hsu , Paul Rudy , James W. Raring
Abstract: A multi-emitter laser diode device includes a carrier chip singulated from a carrier wafer. The carrier chip has a length and a width, and the width defines a first pitch. The device also includes a plurality of epitaxial mesa dice regions transferred to the carrier chip from a substrate and attached to the carrier chip at a bond region. Each of the epitaxial mesa dice regions is arranged on the carrier chip in a substantially parallel configuration and positioned at a second pitch defining the distance between adjacent epitaxial mesa dice regions. Each of the plurality of epitaxial mesa dice regions includes epitaxial material, which includes an n-type cladding region, an active region having at least one active layer region, and a p-type cladding region. The device also includes one or more laser diode stripe regions, each of which has a pair of facets forming a cavity region.
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公开(公告)号:US20200274333A1
公开(公告)日:2020-08-27
申请号:US16791652
申请日:2020-02-14
Applicant: Soraa Laser Diode, Inc.
Inventor: Dan Steigerwald , Melvin McLaurin , Eric Goutain , Alexander Sztein , Po Shan Hsu , Paul Rudy , James W. Raring
Abstract: A multi-emitter laser diode device includes a carrier chip singulated from a carrier wafer. The carrier chip has a length and a width, and the width defines a first pitch. The device also includes a plurality of epitaxial mesa dice regions transferred to the carrier chip from a substrate and attached to the carrier chip at a bond region. Each of the epitaxial mesa dice regions is arranged on the carrier chip in a substantially parallel configuration and positioned at a second pitch defining the distance between adjacent epitaxial mesa dice regions. Each of the plurality of epitaxial mesa dice regions includes epitaxial material, which includes an n-type cladding region, an active region having at least one active layer region, and a p-type cladding region. The device also includes one or more laser diode stripe regions, each of which has a pair of facets forming a cavity region.
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公开(公告)号:US20170063047A1
公开(公告)日:2017-03-02
申请号:US15351326
申请日:2016-11-14
Applicant: Soraa Laser Diode, Inc.
Inventor: Dan Steigerwald , Melvin McLaurin , Eric Goutain , Alexander Sztein , Po Shan Hsu , Paul Rudy , James W. Raring
CPC classification number: H01S5/4087 , H01S5/005 , H01S5/0202 , H01S5/0203 , H01S5/0215 , H01S5/0216 , H01S5/0217 , H01S5/0218 , H01S5/0425 , H01S5/22 , H01S5/34333 , H01S5/4012 , H01S5/4031 , H01S5/4056 , H01S5/4093
Abstract: A multi-emitter laser diode device includes a carrier chip singulated from a carrier wafer. The carrier chip has a length and a width, and the width defines a first pitch. The device also includes a plurality of epitaxial mesa dice regions transferred to the carrier chip from a substrate and attached to the carrier chip at a bond region. Each of the epitaxial mesa dice regions is arranged on the carrier chip in a substantially parallel configuration and positioned at a second pitch defining the distance between adjacent epitaxial mesa dice regions. Each of the plurality of epitaxial mesa dice regions includes epitaxial material, which includes an n-type cladding region, an active region having at least one active layer region, and a p-type cladding region. The device also includes one or more laser diode stripe regions, each of which has a pair of facets forming a cavity region.
Abstract translation: 多发射体激光二极管器件包括从载体晶片分离的载体芯片。 载体芯片具有长度和宽度,宽度限定第一间距。 该器件还包括从衬底转移到载体芯片并在键合区附接到载体芯片的多个外延台面区域。 每个外延台面区域以基本上平行的构造布置在载体芯片上,并且以限定相邻外延台面区域之间的距离的第二间距定位。 多个外延台面区域中的每一个包括外延材料,其包括n型包层区域,具有至少一个有源层区域的有源区域和p型包层区域。 该器件还包括一个或多个激光二极管条纹区域,每个区域具有形成空腔区域的一对小面。
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公开(公告)号:US09520697B2
公开(公告)日:2016-12-13
申请号:US14600506
申请日:2015-01-20
Applicant: Soraa Laser Diode, Inc.
Inventor: Dan Steigerwald , Melvin McLaurin , Eric Goutain , Alexander Sztein , Po Shan Hsu , Paul Rudy , James W. Raring
CPC classification number: H01S5/4087 , H01S5/005 , H01S5/0202 , H01S5/0203 , H01S5/0215 , H01S5/0216 , H01S5/0217 , H01S5/0218 , H01S5/0425 , H01S5/22 , H01S5/34333 , H01S5/4012 , H01S5/4031 , H01S5/4056 , H01S5/4093
Abstract: A method for manufacturing a multi-emitter laser diode device includes providing a substrate having a surface region and forming epitaxial material overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active layer region. The epitaxial material is patterned to form a plurality of dice, each of the dice corresponding to at least one laser device, characterized by a first pitch between a pair of dice, the first pitch being less than a design width. Each of the plurality of dice are transferred to a carrier wafer such that each pair of dice is configured with a second pitch between each pair of dice, the second pitch being larger than the first pitch.
Abstract translation: 一种用于制造多发射体激光二极管器件的方法,包括提供具有表面区域并形成覆盖在表面区域上的外延材料的衬底,所述外延材料包括n型覆层区域,活性区域包括至少一层有源层, n型包层区域和覆盖有源层区域的p型覆层区域。 外延材料被图案化以形成多个骰子,每个骰子对应于至少一个激光装置,其特征在于一对骰子之间的第一间距,第一间距小于设计宽度。 将多个骰子中的每一个转移到载体晶片,使得每对骰子在每对骰子之间配置有第二间距,第二间距大于第一间距。
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公开(公告)号:US20160294162A1
公开(公告)日:2016-10-06
申请号:US15176076
申请日:2016-06-07
Applicant: Soraa Laser Diode, Inc.
Inventor: Melvin McLaurin , Alexander Sztein , Po Shan Hsu , Eric Goutain , Dan Steigerwald , James W. Raring
CPC classification number: H01S5/4093 , H01L24/83 , H01L24/95 , H01L2224/16225 , H01L2224/48091 , H01L2224/48465 , H01L2924/16152 , H01S5/0203 , H01S5/0216 , H01S5/0217 , H01S5/0224 , H01S5/22 , H01S5/3013 , H01S5/32325 , H01S5/32341 , H01L2924/00014 , H01L2924/00
Abstract: A method for manufacturing a laser diode device includes providing a substrate having a surface region and forming epitaxial material overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active layer region. The epitaxial material is patterned to form a plurality of dice, each of the dice corresponding to at least one laser device, characterized by a first pitch between a pair of dice, the first pitch being less than a design width. Each of the plurality of dice are transferred to a carrier wafer such that each pair of dice is configured with a second pitch between each pair of dice, the second pitch being larger than the first pitch.
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公开(公告)号:US09379525B2
公开(公告)日:2016-06-28
申请号:US14312427
申请日:2014-06-23
Applicant: Soraa Laser Diode, Inc.
Inventor: Melvin McLaurin , Alexander Sztein , Po Shan Hsu , Eric Goutain , Dan Steigerwald , James W. Raring
CPC classification number: H01S5/4093 , H01L24/83 , H01L24/95 , H01L2224/16225 , H01L2224/48091 , H01L2224/48465 , H01L2924/16152 , H01S5/0203 , H01S5/0216 , H01S5/0217 , H01S5/0224 , H01S5/22 , H01S5/3013 , H01S5/32325 , H01S5/32341 , H01L2924/00014 , H01L2924/00
Abstract: A method for manufacturing a laser diode device includes providing a substrate having a surface region and forming epitaxial material overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active layer region. The epitaxial material is patterned to form a plurality of dice, each of the dice corresponding to at least one laser device, characterized by a first pitch between a pair of dice, the first pitch being less than a design width. Each of the plurality of dice are transferred to a carrier wafer such that each pair of dice is configured with a second pitch between each pair of dice, the second pitch being larger than the first pitch.
Abstract translation: 一种制造激光二极管器件的方法包括提供具有表面区域并形成覆盖在该表面区域上的外延材料的衬底,所述外延材料包括n型覆层区域,所述有源区域包括至少一个覆盖在n型上的有源层 包层区域和覆盖有源层区域的p型覆层区域。 外延材料被图案化以形成多个骰子,每个骰子对应于至少一个激光装置,其特征在于一对骰子之间的第一间距,第一间距小于设计宽度。 将多个骰子中的每一个转移到载体晶片,使得每对骰子在每对骰子之间配置有第二间距,第二间距大于第一间距。
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