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    Electron microscope with an energy filter having hexapole correctors which are coupled with a projective system downstream of the energy filter
    4.
    发明授权
    Electron microscope with an energy filter having hexapole correctors which are coupled with a projective system downstream of the energy filter 有权
    具有能量过滤器的电子显微镜，其具有六极校正器，其与能量过滤器下游的投影系统耦合

    公开(公告)号：US06384412B1

    公开(公告)日：2002-05-07

    申请号：US09339822

    申请日：1999-06-25

    申请人： Dieter Krahl ,  Stephan Kujawa

    发明人： Dieter Krahl ,  Stephan Kujawa

    IPC分类号： H01J4946

    CPC分类号： H01J37/26 ,  H01J37/05 ,  H01J37/153 ,  H01J2237/057

    摘要： The invention is directed to an electron microscope having a magnetic energy filter. The energy filter has four deflection regions and seven hexapole correctors for correcting the aberrations of the energy filter. A projection system is mounted downstream of the filter. With the projection system, the achromatic image plane is selectively imaged onto the CCD camera for energy-filtered object imaging or the dispersion plane is imaged on a CCD camera for spectrum detection. For an object registration, the hexapoles are so excited that all geometric aberrations of the second order are corrected in the achromatic image plane and in the dispersion plane. For the spectrum imaging, the excitation of three hexapoles is so changed that the axial chromatic aberration of the filter is corrected while maintaining the correction of the spherical aberration in the achromatic image plane and while maintaining the correction of all geometric errors of the second order in the dispersion plane.

    摘要翻译： 本发明涉及具有磁能过滤器的电子显微镜。 能量滤波器具有四个偏转区域和七个六极校正器，用于校正能量滤波器的像差。 投影系统安装在过滤器的下游。 利用投影系统，将无彩色图像平面选择性地成像到用于能量过滤物体成像的CCD照相机上，或者将色散平面成像在CCD照相机上进行光谱检测。 对于物体配准，六极杆是如此激动，使得在无色图像平面和色散平面中校正二阶的所有几何像差。 对于光谱成像，三个六极的激发被改变，使得滤波器的轴向色差被校正，同时保持在无彩色图像平面中的球面像差的校正，同时保持对二阶的所有几何误差的校正 分散平面。