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公开(公告)号：US20060060303A1
公开(公告)日：2006-03-23
申请号：US11236535
申请日：2005-09-28
Applicant: Steven Fink , Paul Moroz , Eric Strang , Andrej Mitrovic
Inventor： Steven Fink , Paul Moroz , Eric Strang , Andrej Mitrovic
IPC: B08B6/00 , H01L21/306 , C23C16/00
CPC classification number: H01J37/3244 , H01J2237/022
Abstract: A plasma processing system includes a chamber containing a plasma processing region and a chuck constructed and arranged to support a substrate within the chamber in the processing region. The plasma processing system further includes at least one gas injection passage in communication with the chamber and configured to facilitate removal of particles from the chamber by passing purge gas therethrough. In one embodiment, the plasma processing system can include an electrode configured to attract or repel particles in the chamber by electrostatic force when the electrode is biased with DC or RF power. A method of processing a substrate in a plasma processing system includes removing particles in a chamber of the plasma processing system by supplying purge gas through at least one gas injection passage in communication with the chamber.
Abstract translation: 等离子体处理系统包括容纳等离子体处理区域的腔室和构造和布置成在处理区域内的腔室内支撑衬底的卡盘。 等离子体处理系统还包括至少一个与室连通的气体注入通道，并且构造成便于通过吹扫气体从腔室中除去颗粒。 在一个实施例中，等离子体处理系统可以包括电极，其被配置为当电极用DC或RF功率偏置时通过静电力吸引或排斥腔室中的颗粒。 一种在等离子体处理系统中处理衬底的方法，包括通过与室连通的至少一个气体注入通道供应净化气体来去除等离子体处理系统的腔室中的颗粒。
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公开(公告)号：US20050098106A1
公开(公告)日：2005-05-12
申请号：US10705225
申请日：2003-11-12
Applicant: Steven Fink , Eric Strang , Michael Landis
Inventor： Steven Fink , Eric Strang , Michael Landis
CPC classification number: H01J37/32605 , H01J37/32009 , H01J37/3244
Abstract: An electrode plate, configured to be coupled to an electrode in a plasma processing system, comprises a plurality of gas injection holes configured to receive gas injection devices. The electrode plate comprises three or more mounting holes, wherein the electrode plate is configured to be coupled with an electrode in the plasma processing system by aligning and coupling the three or more mounting holes with three or more mounting screws attached to the electrode.
Abstract translation: 构造成耦合到等离子体处理系统中的电极的电极板包括被配置为接收气体注入装置的多个气体注入孔。 电极板包括三个或更多个安装孔，其中电极板被配置为通过将三个或更多个安装孔与附接到电极的三个或更多个安装螺钉对准并联接在等离子体处理系统中与电极耦合。
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公开(公告)号：US20050098265A1
公开(公告)日：2005-05-12
申请号：US10705224
申请日：2003-11-12
Applicant: Steven Fink , Eric Strang , Arthur Laflamme , Jay Wallace , Sandra Hyland
Inventor： Steven Fink , Eric Strang , Arthur Laflamme , Jay Wallace , Sandra Hyland
CPC classification number: H01J37/32633 , H01J37/32834 , H01L21/67069
Abstract: A baffle plate assembly, configured to be coupled to a substrate holder in a plasma processing system, comprises a baffle plate having one or more openings to permit the passage of gas there through, wherein the coupling of the baffle plate to the substrate holder facilitates auto-centering of the baffle plate in the plasma processing system. For example, a centering ring mounted in the substrate holder can comprise a centering feature configured to couple with a mating feature on the baffle plate. After initial assembly of the plasma processing system, the baffle plate can be replaced and centered within the plasma processing system without disassembly and re-assembly of the substrate holder.
Abstract translation: 构造成在等离子体处理系统中耦合到衬底保持器的挡板组件包括具有一个或多个开口以允许气体在其中通过的挡板，其中挡板与衬底保持器的联接有利于自动 - 等离子体处理系统中的挡板的重心。 例如，安装在基板保持器中的定心环可以包括配置成与挡板上的配合特征联接的定心特征。 在初始组装等离子体处理系统之后，挡板可以在等离子体处理系统内更换并居中，而不会拆卸和重新组装衬底支架。
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公开(公告)号：US20080092818A1
公开(公告)日：2008-04-24
申请号：US11961355
申请日：2007-12-20
Applicant: Steven Fink , Eric Strang
Inventor： Steven Fink , Eric Strang
CPC classification number: H01L21/67103 , Y10T279/23
Abstract: A thermally zoned substrate holder including a substantially cylindrical base having top and bottom surfaces configured to support a substrate. A plurality of temperature control elements are disposed within the base. An insulator thermally separates the temperature control elements. The insulator is made from an insulting material having a lower coefficient of thermal conductivity than the base (e.g., a gas- or vacuum-filled chamber).
Abstract translation: 一种热分区衬底保持器，其包括基本上圆柱形的基部，其具有构造成支撑衬底的顶表面和底表面。 多个温度控制元件设置在基座内。 绝缘体将温度控制元件热分离。 绝缘体由具有比基底（例如，气体或真空填充的室）更低的导热系数的绝缘材料制成。
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5.发明申请公开(公告)号：US20050235917A1
公开(公告)日：2005-10-27
申请号：US10514717
申请日：2003-05-29
Applicant: Jim Fordemwalt , Eric Strang , Steven Fink
Inventor： Jim Fordemwalt , Eric Strang , Steven Fink
IPC: H01L21/3065 , C23C16/00 , C23C16/44 , C23C16/52 , H01L21/00 , H01L21/205
CPC classification number: H01L21/67253 , C23C16/4407 , C23C16/52
Abstract: An apparatus for monitoring film deposition on a chamber wall in a process chamber. The apparatus includes a surface acoustic wave device provided on the chamber wall. The surface acoustic wave device is actuated to achieve a resonance frequency, and the resonance frequency produced is detected to determine whether a critical thickness of film on the wall of the chamber has been achieved, where an amount of decrease in the resonance frequency is proportional to a thickness of film on the chamber wall. The process chamber is cleaned when the resonance frequency detected falls within a first predetermined range.
Abstract translation: 一种用于监测处理室中的室壁上的膜沉积的装置。 该装置包括设置在室壁上的表面声波装置。 激励表面声波装置以实现谐振频率，并且检测所产生的谐振频率，以确定是否已经实现了室壁上的膜的临界厚度，其中谐振频率的减小量与 室壁上的膜厚度。 当检测到的共振频率落在第一预定范围内时，清洁处理室。
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Patent Agency Ranking
6.发明授权公开(公告)号：US08439757B2
公开(公告)日：2013-05-14
申请号：US13271660
申请日：2011-10-12
Applicant: James Russell Hornsby , Joseph L. McGowan , Michael C. Reynolds , Steven Fink , Robert W. Jeffway, Jr. , Steven R. Casino
Inventor： James Russell Hornsby , Joseph L. McGowan , Michael C. Reynolds , Steven Fink , Robert W. Jeffway, Jr. , Steven R. Casino
CPC classification number: A63H11/00 , A63H2200/00
Abstract: An entertainment device is configured to receive a limited range wireless signal from at least one other entertainment device when adjacently arranged in close physical proximity to at least one other entertainment device, and to responsively operate in a first mode or a second mode based on whether the other entertainment device is adjacent a first side or second side. In the first mode, the entertainment device initiates one or more wireless activation signals to control an audio/visual element of another entertainment device. In the second mode, the entertainment device receives wireless activation signals from another entertainment device to control activation of an audio/visual element of the receiving entertainment device. Each device is interchangeable between operation in the first mode of controlling at least one other entertainment device and the second mode of being controlled by another entertainment device based on position of one entertainment device relative to the other.
Abstract translation: 娱乐设备被配置为当相邻地布置成与至少一个其他娱乐设备紧密物理接近时，从至少一个其他娱乐设备接收有限范围的无线信号，并且基于是否响应于第一模式或第二模式来响应地操作 其他娱乐装置相邻于第一侧或第二侧。 在第一模式中，娱乐设备启动一个或多个无线激活信号以控制另一娱乐设备的音频/视频元素。 在第二模式中，娱乐装置从另一娱乐装置接收无线激活信号，以控制接收娱乐装置的音频/视频元素的激活。 每个设备可以在控制至少一个其他娱乐设备的第一模式中的操作和基于一个娱乐设备相对于另一娱乐设备的位置由另一个娱乐设备控制的第二模式之间进行互换。
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公开(公告)号：US08011994B2
公开(公告)日：2011-09-06
申请号：US12270027
申请日：2008-11-13
Applicant: Steven Fink , Neil Hamilton , Michael Hoeting , Yannick Poirier
Inventor： Steven Fink , Neil Hamilton , Michael Hoeting , Yannick Poirier
IPC: A63H17/267 , A63H18/00
CPC classification number: A63H18/028 , A63H18/026
Abstract: An aspect of the present invention provides a toy assembly system comprising a central compartment configured to house a plurality of toy bodies, each toy body having magnetic hubs arranged in an outer region of the body. The system can include outer compartments that house ferromagnetic outer components (e.g., ferromagnetic spheres) separate from the toy bodies and a release mechanism configured to release during a single operation a single toy body and a set of outer components, wherein the single toy body and the set of outer components self-assemble and automatically align. Another aspect provides a toy track system comprising a launch portion configured to magnetically retain the magnetic vehicle in a launch position, a release configured to release the vehicle from the launch position, and a track portion coupled to the launch portion and configured to guide the released vehicle along a predetermined path.
Abstract translation: 本发明的一个方面提供一种玩具组合系统，其包括构造成容纳多个玩具体的中央室，每个玩具本体具有布置在身体的外部区域中的磁性轮毂。 系统可以包括容纳与玩具主体分开的铁磁外部部件（例如，铁磁球体）的外部隔室和被配置为在单个操作期间释放单个玩具主体和一组外部部件的释放机构，其中，单个玩具主体和 外部组件的组合自组装并自动对齐。 另一方面提供了一种玩具轨道系统，其包括被配置为将磁性车辆磁性地保持在发射位置的发射部分，被配置为将发射位置释放车辆的释放部以及耦合到发射部分的轨道部分， 车辆沿预定路径。
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公开(公告)号：US20060225654A1
公开(公告)日：2006-10-12
申请号：US11091775
申请日：2005-03-29
Applicant: Steven Fink
Inventor： Steven Fink
CPC classification number: H01L21/67069 , C04B30/02 , H01J37/32477 , C04B14/06 , C04B14/303 , C04B14/306 , C04B14/46 , C04B14/38
Abstract: The present invention provides a disposable component for a plasma processing system, wherein the component includes a non-refractory ceramic fiber, refractory ceramic fiber, alumina, alumina-silica, or zirconia, or any combination of two or more thereof in the form of a rigid material, flexible material, paper, cloth, felt, mat, screen, sheet, tape, blanket, fiber, woven fiber, or nonwoven fiber, or any combination of two or more thereof.
Abstract translation: 本发明提供了一种用于等离子体处理系统的一次性部件，其中所述部件包括非耐火陶瓷纤维，耐火陶瓷纤维，氧化铝，氧化铝 - 二氧化硅或氧化锆，或其两种或多种的任何组合，其形式为 刚性材料，柔性材料，纸，布，毡，垫，丝网，片，带，毯，纤维，编织纤维或非织造纤维，或其两种或多种的任意组合。
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9.发明申请公开(公告)号：US20050220568A1
公开(公告)日：2005-10-06
申请号：US10813067
申请日：2004-03-31
Applicant: Steven Fink
Inventor： Steven Fink
Abstract: A fastening component for fastening together a first component and a second component used in a plasma processing tool. The fastening component includes a first surface configured to be exposed to plasma processing performed in the plasma processing tool, and a second surface configured to contact the first component. Also included is a stem extending from the second surface and configured to at least partially protrude through the first component and the second component. The fastening component further includes a locking pin extending from at least one side of the stem and configured to contact the second component. The first surface, the second surface, the stem, and/or the locking pin are made of or coated with a material that is highly resistant to erosion resulting from plasma processing.
Abstract translation: 用于将第一部件和用于等离子体处理工具中的第二部件紧固在一起的紧固部件。 紧固部件包括构造成暴露于等离子体处理工具中执行的等离子体处理的第一表面和被配置为接触第一部件的第二表面。 还包括从第二表面延伸并构造成至少部分地突出穿过第一部件和第二部件的杆。 紧固部件还包括从杆的至少一侧延伸并构造成接触第二部件的锁定销。 第一表面，第二表面，杆和/或锁定销由对等离子体处理产生的侵蚀高度抵抗的材料制成或涂覆。
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10.发明申请Interactive Entertainment Devices Interchangeably Arrangable In Adjacent Manner 有权互动娱乐设备在相邻方式中可互换地交错公开(公告)号：US20120077597A1
公开(公告)日：2012-03-29
申请号：US13271660
申请日：2011-10-12
Applicant: James Russell Hornsby , Joseph L. McGowan , Michael C. Reynolds , Steven Fink , Robert W. Jeffway, JR. , Steven R. Casino
Inventor： James Russell Hornsby , Joseph L. McGowan , Michael C. Reynolds , Steven Fink , Robert W. Jeffway, JR. , Steven R. Casino
IPC: A63F9/24
CPC classification number: A63H11/00 , A63H2200/00
Abstract: An entertainment device is configured to receive a limited range wireless signal from at least one other entertainment device when adjacently arranged in close physical proximity to at least one other entertainment device, and to responsively operate in a first mode or a second mode based on whether the other entertainment device is adjacent a first side or second side. In the first mode, the entertainment device initiates one or more wireless activation signals to control an audio/visual element of another entertainment device. In the second mode, the entertainment device receives wireless activation signals from another entertainment device to control activation of an audio/visual element of the receiving entertainment device. Each device is interchangeable between operation in the first mode of controlling at least one other entertainment device and the second mode of being controlled by another entertainment device based on position of one entertainment device relative to the other.
Abstract translation: 娱乐设备被配置为当相邻地布置成与至少一个其他娱乐设备紧密物理接近时，从至少一个其他娱乐设备接收有限范围的无线信号，并且基于是否响应于第一模式或第二模式来响应地操作 其他娱乐装置相邻于第一侧或第二侧。 在第一模式中，娱乐设备启动一个或多个无线激活信号以控制另一娱乐设备的音频/视频元素。 在第二模式中，娱乐装置从另一娱乐装置接收无线激活信号，以控制接收娱乐装置的音频/视频元素的激活。 每个设备可以在控制至少一个其他娱乐设备的第一模式中的操作和基于一个娱乐设备相对于另一娱乐设备的位置由另一个娱乐设备控制的第二模式之间进行互换。
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