Process for manufacturing thermal ink jet printheads having metal
substrates and printheads manufactured thereby
    3.
    发明授权
    Process for manufacturing thermal ink jet printheads having metal substrates and printheads manufactured thereby 失效
    制造具有金属基材和其制造原理的热喷枪喷嘴的方法

    公开(公告)号:US5194877A

    公开(公告)日:1993-03-16

    申请号:US705218

    申请日:1991-05-24

    IPC分类号: B41J2/05 B41J2/16

    摘要: A method of manufacturing a thermal ink jet printhead wherein a reusable mandrel consisting of either a metal pattern on an insulating or semiconductive substrate or an insulating pattern on a metal substrate or metal layer is used in the process of electroforming a plurality of metal substrates used for starting a batch fabrication process. Next, thin film layers of insulating, resistive, and conductive materials are formed on the surfaces of the metal substrates to thereby define heater resistors and lead-in conductors for the plurality of thermal ink jet printheads being formed. Then, a barrier layer such as Vacrel is photodefined on the surface of the thin film insulating, resistive, and conductive layers to thereby define a plurality of ink drop ejection chambers surrounding each of the previously formed heater resistors. Next, a plurality of orifice plates are secured, respectively, to the barrier layers in each of the printheads being formed. Finally, the plurality of metal substrates may be removed from the mandrel, such as by stripping away, without the requirement for substrate dicing, and an appropriate mask on the mandrel may be used to create an ink feed hole in each of the metal substrates. The metal substrates are further provided with a break tab line during the electroforming process which is aligned with break patterns in both the above thin film layers and orifice plates. In this manner, the individual thin film printheads may be easily broken away and separated one from another.

    Integral ink jet print head
    9.
    发明授权
    Integral ink jet print head 失效
    一体式喷墨打印头

    公开(公告)号:US5016024A

    公开(公告)日:1991-05-14

    申请号:US462670

    申请日:1990-01-09

    IPC分类号: B41J2/05 B41J2/16

    摘要: Disclosed is an integral ink jet print head having an improved design. An ink reservoir wall at the base of print head guides a flow of ink from a remote reservoir. Ink is drawn by capillary action past flow restrictors and an ink channel into an ink heating zone. The ink heating zone is a chamber residing below an integrated ink heating structure which has been fabricated, using processes including photolithography, directly on the underside of an orifice plate. An orifice is located to one side of the ink heating zone. The ink heating structure housing the ink heating zone is a combination of thin layers deposited directly on the orifice plate. The multilayered structure includes an insulating layer of silicon dioxide, a resistive layer of tantalum aluminum alloy, and a top conductive layer formed of gold. The invention provides a single integrated print head that combines the separate elements of the previous designs into one unit having many ink jets on one ink jet print head.

    Multi-layer thin film in a ballistic electron emitter
    10.
    发明申请
    Multi-layer thin film in a ballistic electron emitter 审中-公开
    弹道电子发射器中的多层薄膜

    公开(公告)号:US20060151777A1

    公开(公告)日:2006-07-13

    申请号:US11033768

    申请日:2005-01-12

    IPC分类号: H01L29/06

    CPC分类号: B82Y10/00 H01J1/312 H01J9/022

    摘要: An electron emitter that includes a metal film having a set of layers that are selected and arranged to adhere the metal film to a remainder of a structure of the electron emitter while avoiding electron loss in the metal film. A multiple layer metal film according to the present techniques enables a balance among adhesion properties, metal diffusion, and oxide properties that might otherwise hinder the performance of an electron emitter.

    摘要翻译: 一种电子发射器,其包括具有一组层的金属膜,所述层被选择并布置成将金属膜附着到电子发射体的其余部分,同时避免金属膜中的电子损失。 根据本技术的多层金属膜能够在粘合性能,金属扩散性以及可能阻碍电子发射体性能的氧化物性质之间取得平衡。