公开(公告)号：US20240363393A1

公开(公告)日：2024-10-31

申请号：US18768436

申请日：2024-07-10

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Lei-Chun Chou ,  Chih-Liang Chen ,  Jiann-Tyng Tzeng ,  Chih-Ming Lai ,  Ru-Gun Liu ,  Charles Chew-Yuen Young

IPC: H01L21/74 ,  H01L21/308 ,  H01L21/311 ,  H01L21/3115 ,  H01L21/762 ,  H01L23/535 ,  H01L29/66 ,  H01L29/78 ,  H10B10/00

CPC classification number: H01L21/743 ,  H01L23/535 ,  H01L29/66795 ,  H01L21/3081 ,  H01L21/3086 ,  H01L21/31111 ,  H01L21/31155 ,  H01L21/76224 ,  H01L29/785 ,  H10B10/12

Abstract: A semiconductor device includes a buried metal line disposed in a semiconductor substrate, a first dielectric material on a first sidewall of the buried metal line and a second dielectric material on a second sidewall of the buried metal line, a first multiple fins disposed proximate the first sidewall of the buried metal line, a second multiple fins disposed proximate the second sidewall of the buried metal line, a first metal gate structure over the first multiple fins and over the buried metal line, wherein the first metal gate structure extends through the first dielectric material to contact the buried metal line, and a second metal gate structure over the second multiple fins and over the buried metal line.

公开(公告)号：US11532751B2

公开(公告)日：2022-12-20

申请号：US17068444

申请日：2020-10-12

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chih-Liang Chen ,  Charles Chew-Yuen Young ,  Hui-Ting Yang ,  Jiann-Tyng Tzeng ,  Kam-Tou Sio ,  Shih-Wei Peng ,  Wei-Cheng Lin ,  Lei-Chun Chou

IPC: H01L29/78 ,  H01L21/768 ,  H01L21/8234 ,  H01L23/48 ,  H01L27/088 ,  H01L29/66 ,  H01L29/417 ,  H01L21/74 ,  H01L23/538 ,  H01L21/3213 ,  H01L23/528 ,  H01L23/535

Abstract: The present disclosure describes various non-planar semiconductor devices, such as fin field-effect transistors (finFETs) to provide an example, having one or more metal rail conductors and various methods for fabricating these non-planar semiconductor devices. In some situations, the one or more metal rail conductors can be electrically connected to gate, source, and/or drain regions of these various non-planar semiconductor devices. In these situations, the one or more metal rail conductors can be utilized to electrically connect the gate, the source, and/or the drain regions of various non-planar semiconductor devices to other gate, source, and/or drain regions of various non-planar semiconductor devices and/or other semiconductor devices. However, in other situations, the one or more metal rail conductors can be isolated from the gate, the source, and/or the drain regions these various non-planar semiconductor devices. This isolation prevents electrical connection between the one or more metal rail conductors and the gate, the source, and/or the drain regions these various non-planar semiconductor devices.

公开(公告)号：US11916077B2

公开(公告)日：2024-02-27

申请号：US17328534

申请日：2021-05-24

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chih-Liang Chen ,  Cheng-Chi Chuang ,  Chih-Ming Lai ,  Chia-Tien Wu ,  Charles Chew-Yuen Young ,  Hui-Ting Yang ,  Jiann-Tyng Tzeng ,  Ru-Gun Liu ,  Wei-Cheng Lin ,  Lei-Chun Chou ,  Wei-An Lai

IPC: H01L27/118 ,  H01L27/092 ,  H01L23/522 ,  H01L21/8238 ,  H01L27/02 ,  H01L23/528 ,  H01L23/532

CPC classification number: H01L27/11807 ,  H01L21/823821 ,  H01L21/823871 ,  H01L23/5226 ,  H01L27/0207 ,  H01L27/0924 ,  H01L23/5286 ,  H01L23/53209 ,  H01L23/53228 ,  H01L23/53242 ,  H01L2027/11875 ,  H01L2027/11881 ,  H01L2027/11888

Abstract: The present disclosure describes an apparatus with a local interconnect structure. The apparatus can include a first transistor, a second transistor, a first interconnect structure, a second interconnect structure, and a third interconnect structure. The local interconnect structure can be coupled to gate terminals of the first and second transistors and routed at a same interconnect level as reference metal lines coupled to ground and a power supply voltage. The first interconnect structure can be coupled to a source/drain terminal of the first transistor and routed above the local interconnect structure. The second interconnect structure can be coupled to a source/drain terminal of the second transistor and routed above the local interconnect structure. The third interconnect structure can be routed above the local interconnect structure and at a same interconnect level as the first and second interconnect structures.

公开(公告)号：US20220367240A1

公开(公告)日：2022-11-17

申请号：US17869142

申请日：2022-07-20

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Lei-Chun Chou ,  Chih-Liang Chen ,  Jiann-Tyng Tzeng ,  Chih-Ming Lai ,  Ru-Gun Liu ,  Charles Chew-Yuen Young

IPC: H01L21/74 ,  H01L29/66 ,  H01L23/535

Abstract: A semiconductor device includes a buried metal line disposed in a semiconductor substrate, a first dielectric material on a first sidewall of the buried metal line and a second dielectric material on a second sidewall of the buried metal line, a first multiple fins disposed proximate the first sidewall of the buried metal line, a second multiple fins disposed proximate the second sidewall of the buried metal line, a first metal gate structure over the first multiple fins and over the buried metal line, wherein the first metal gate structure extends through the first dielectric material to contact the buried metal line, and a second metal gate structure over the second multiple fins and over the buried metal line.

公开(公告)号：US11424154B2

公开(公告)日：2022-08-23

申请号：US17116443

申请日：2020-12-09

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Lei-Chun Chou ,  Chih-Liang Chen ,  Jiann-Tyng Tzeng ,  Chih-Ming Lai ,  Ru-Gun Liu ,  Charles Chew-Yuen Young

IPC: H01L21/74 ,  H01L29/66 ,  H01L23/535 ,  H01L21/762 ,  H01L21/3115 ,  H01L29/78 ,  H01L21/311 ,  H01L21/308 ,  H01L27/11

Abstract: A semiconductor device includes a buried metal line disposed in a semiconductor substrate, a first dielectric material on a first sidewall of the buried metal line and a second dielectric material on a second sidewall of the buried metal line, a first multiple fins disposed proximate the first sidewall of the buried metal line, a second multiple fins disposed proximate the second sidewall of the buried metal line, a first metal gate structure over the first multiple fins and over the buried metal line, wherein the first metal gate structure extends through the first dielectric material to contact the buried metal line, and a second metal gate structure over the second multiple fins and over the buried metal line.

公开(公告)号：US20210193504A1

公开(公告)日：2021-06-24

申请号：US17116443

申请日：2020-12-09

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Lei-Chun Chou ,  Chih-Liang Chen ,  Jiann-Tyng Tzeng ,  Chih-Ming Lai ,  Ru-Gun Liu ,  Charles Chew-Yuen Young

IPC: H01L21/74 ,  H01L29/66 ,  H01L23/535

Abstract: A semiconductor device includes a buried metal line disposed in a semiconductor substrate, a first dielectric material on a first sidewall of the buried metal line and a second dielectric material on a second sidewall of the buried metal line, a first multiple fins disposed proximate the first sidewall of the buried metal line, a second multiple fins disposed proximate the second sidewall of the buried metal line, a first metal gate structure over the first multiple fins and over the buried metal line, wherein the first metal gate structure extends through the first dielectric material to contact the buried metal line, and a second metal gate structure over the second multiple fins and over the buried metal line.

公开(公告)号：US11289384B2

公开(公告)日：2022-03-29

申请号：US17114347

申请日：2020-12-07

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Hung-Li Chiang ,  Chih-Liang Chen ,  Tzu-Chiang Chen ,  I-Sheng Chen ,  Lei-Chun Chou

IPC: H01L29/76 ,  H01L29/94 ,  H01L31/113 ,  H01L21/8238 ,  H01L29/06 ,  H01L29/78 ,  H01L27/092 ,  H01L29/66

Abstract: A method of manufacturing a semiconductor device includes forming a plurality of fin structures extending in a first direction over a semiconductor substrate. Each fin structure includes a first region proximate to the semiconductor substrate and a second region distal to the semiconductor substrate. An electrically conductive layer is formed between the first regions of a first adjacent pair of fin structures. A gate electrode structure is formed extending in a second direction substantially perpendicular to the first direction over the fin structure second region, and a metallization layer including at least one conductive line is formed over the gate electrode structure.

公开(公告)号：US10804402B2

公开(公告)日：2020-10-13

申请号：US16176074

申请日：2018-10-31

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chih-Liang Chen ,  Charles Chew-Yuen Young ,  Hui-Ting Yang ,  Jiann-Tyng Tzeng ,  Kam-Tou Sio ,  Shih-Wei Peng ,  Wei-Cheng Lin ,  Lei-Chun Chou

IPC: H01L27/088 ,  H01L29/78 ,  H01L23/528 ,  H01L29/66 ,  H01L23/535 ,  H01L21/768 ,  H01L21/8234 ,  H01L23/48 ,  H01L29/417

Abstract: The present disclosure describes various non-planar semiconductor devices, such as fin field-effect transistors (finFETs) to provide an example, having one or more metal rail conductors and various methods for fabricating these non-planar semiconductor devices. In some situations, the one or more metal rail conductors can be electrically connected to gate, source, and/or drain regions of these various non-planar semiconductor devices. In these situations, the one or more metal rail conductors can be utilized to electrically connect the gate, the source, and/or the drain regions of various non-planar semiconductor devices to other gate, source, and/or drain regions of various non-planar semiconductor devices and/or other semiconductor devices. However, in other situations, the one or more metal rail conductors can be isolated from the gate, the source, and/or the drain regions these various non-planar semiconductor devices. This isolation prevents electrical connection between the one or more metal rail conductors and the gate, the source, and/or the drain regions these various non-planar semiconductor devices.

公开(公告)号：US12113132B2

公开(公告)日：2024-10-08

申请号：US18053021

申请日：2022-11-07

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chih-Liang Chen ,  Chih-Ming Lai ,  Ching-Wei Tsai ,  Charles Chew-Yuen Young ,  Jiann-Tyng Tzeng ,  Kuo-Cheng Chiang ,  Ru-Gun Liu ,  Wei-Hao Wu ,  Yi-Hsiung Lin ,  Chia-Hao Chang ,  Lei-Chun Chou

IPC: H01L29/78 ,  H01L21/768 ,  H01L21/8234 ,  H01L23/48 ,  H01L23/485 ,  H01L23/50 ,  H01L23/528 ,  H01L23/535 ,  H01L27/088 ,  H01L29/417 ,  H01L29/66

CPC classification number: H01L29/7851 ,  H01L21/76871 ,  H01L21/823431 ,  H01L21/823475 ,  H01L23/481 ,  H01L23/528 ,  H01L23/5286 ,  H01L23/535 ,  H01L27/0886 ,  H01L29/66795 ,  H01L29/41791

Abstract: The present disclosure describes various non-planar semiconductor devices, such as fin field-effect transistors (finFETs) to provide an example, having one or more metal rail conductors and various methods for fabricating these non-planar semiconductor devices. In some situations, the one or more metal rail conductors can be electrically connected to gate, source, and/or drain regions of these various non-planar semiconductor devices. In these situations, the one or more metal rail conductors can be utilized to electrically connect the gate, the source, and/or the drain regions of various non-planar semiconductor devices to other gate, source, and/or drain regions of various non-planar semiconductor devices and/or other semiconductor devices. However, in other situations, the one or more metal rail conductors can be isolated from the gate, the source, and/or the drain regions these various non-planar semiconductor devices. This isolation prevents electrical connection between the one or more metal rail conductors and the gate, the source, and/or the drain regions these various non-planar semiconductor devices.

公开(公告)号：US11810811B2

公开(公告)日：2023-11-07

申请号：US17869142

申请日：2022-07-20

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Lei-Chun Chou ,  Chih-Liang Chen ,  Jiann-Tyng Tzeng ,  Chih-Ming Lai ,  Ru-Gun Liu ,  Charles Chew-Yuen Young

IPC: H01L29/66 ,  H01L21/74 ,  H01L23/535 ,  H01L21/308 ,  H01L21/311 ,  H01L21/3115 ,  H01L21/762 ,  H01L29/78 ,  H10B10/00

CPC classification number: H01L21/743 ,  H01L23/535 ,  H01L29/66795 ,  H01L21/3081 ,  H01L21/3086 ,  H01L21/31111 ,  H01L21/31155 ,  H01L21/76224 ,  H01L29/785 ,  H10B10/12

Abstract: A semiconductor device includes a buried metal line disposed in a semiconductor substrate, a first dielectric material on a first sidewall of the buried metal line and a second dielectric material on a second sidewall of the buried metal line, a first multiple fins disposed proximate the first sidewall of the buried metal line, a second multiple fins disposed proximate the second sidewall of the buried metal line, a first metal gate structure over the first multiple fins and over the buried metal line, wherein the first metal gate structure extends through the first dielectric material to contact the buried metal line, and a second metal gate structure over the second multiple fins and over the buried metal line.