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公开(公告)号：US20180269031A1
公开(公告)日：2018-09-20
申请号：US15926623
申请日：2018-03-20
IPC分类号： H01J37/26 , H01J37/20 , H01J37/244 , G01N23/20058
CPC分类号： H01J37/268 , G01N23/20058 , H01J37/20 , H01J37/244 , H01J37/28 , H01J37/2955 , H01J2237/1505 , H01J2237/1506 , H01J2237/1507 , H01J2237/1508 , H01J2237/2802
摘要： A scanning transmission electron microscope is adapted to acquire high quality precession electron diffraction (PED) patterns by means of separated scanning deflectors and precession deflectors. Magnetic or electrostatic deflectors may be used for scanning and for precession. This enables independent optimization of parameters for each deflection system to achieve a broad operating range simultaneously for both deflection systems.
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公开(公告)号：US10381193B2
公开(公告)日：2019-08-13
申请号：US15926501
申请日：2018-03-20
IPC分类号： H01J37/26 , H01J37/141 , H01J37/244 , G01N23/2251 , G01N23/20058 , H01J37/28
摘要： The object of the present invention provides a scanning transmission electron microscope with the ability to formed at least one diffraction pattern. The scanning electron microscope comprises an electron source, which is configured to provide primary electron beam, a condenser lens system, an objective electromagnetic system, a projection lens system and a detection system, in addition, the objective electromagnetic lens consists of an upper pole piece and a lower pole piece, wherein each pole piece comprises a pole piece face, which is a flat surface oriented towards a sample plane. A salient feature of the present invention is to form at least one diffraction pattern located in the distance from the lower pole piece face outside the pole piece gap, wherein the pole piece gap is the space between the upper pole piece face and the lower pole piece face.
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3.发明申请公开(公告)号：US20180269030A1
公开(公告)日：2018-09-20
申请号：US15926501
申请日：2018-03-20
IPC分类号： H01J37/26 , H01J37/141 , H01J37/244 , G01N23/20058 , G01N23/2251
CPC分类号： H01J37/268 , G01N23/20058 , G01N23/2251 , H01J37/1413 , H01J37/244 , H01J37/28 , H01J2237/0492 , H01J2237/141 , H01J2237/2445 , H01J2237/2802
摘要： The object of the present invention provides a scanning transmission electron microscope with the ability to formed at least one diffraction pattern. The scanning electron microscope comprises an electron source, which is configured to provide primary electron beam, a condenser lens system, an objective electromagnetic system, a projection lens system and a detection system, in addition, the objective electromagnetic lens consists of an upper pole piece and a lower pole piece, wherein each pole piece comprises a pole piece face, which is a flat surface oriented towards a sample plane. A salient feature of the present invention is to form at least one diffraction pattern located in the distance from the lower pole piece face outside the pole piece gap, wherein the pole piece gap is the space between the upper pole piece face and the lower pole piece face.
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